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Shimokawa Fusao

  • Faculty of Engineering and Design
  • Department of Engineering and Design
  • Nano-Micro Structure Device Integrated Reseach Center
  • Graduate School of Science for Creative Emergence
  • Division of Science for Creative Emergence
  • Professor
Last Updated :2025/04/24

Researcher Information

J-Global ID

Research Interests

  • NEMS   MEMS   

Research Areas

  • Nanotechnology/Materials / Nano/micro-systems
  • Nanotechnology/Materials / Nanomaterials

Academic & Professional Experience

  • 2002 - 2010  日本電信電話株式会社 NTTマイクロシステムインテグレ－ション研究所, 主幹研究員
  • 2001 - 2002  日本電信電話株式会社 NTT通信エネルギ－研究所, 主幹研究員
  • 1999 - 2001  日本電信電話株式会社 NTT情報流通基盤総合研究所 兼務, 主幹研究員
  • 1999  日本電信電話株式会社 NTT通信エネルギ－研究所, 主任研究員
  • 1996 - 1998  日本電信電話株式会社 NTT光エレクトロニクス研究所, 主任研究員
  • 1991 - 1996  日本電信電話株式会社 NTT境界領域研究所, 主任研究員
  • 1990 - 1991  日本電信電話株式会社 NTT電子応用研究所, 主任研究員
  • 1985 - 1990  日本電信電話株式会社 武蔵野電気通信研究所, 研究主任
  • 1983 - 1985  日本電信電話公社 武蔵野電気通信研究所
  • 1985  日本電信電話株式会社 武蔵野電気通信研究所

Education

  •        - 1983  Nagaoka University of Technology  工学研究科  電子機器工学専攻
  •        - 1981  Nagaoka University of Technology  Faculty of Engineering  電子機器工学課程
  •        - 1979  Nagano National College of Technology  電気工学科

Published Papers

Books etc

  • 2020版 薄膜作製応用ハンドブック
    (Contributor2編 薄膜の作製と加工 第6章 パタ－ン化技術 3節 エッチング 1項 ウエットエッチングとドライエッチング)株式会社 エヌ・ティ－・エス 2020/02 9784860436315 
    (学術図書) この本は,薄膜材料の特性と特徴(第1編),薄膜の作製と加工(第2編),薄膜・表面・界面の分析・評価(第3編),薄膜技術の応用と展望(第4編)から成り,薄膜形成の最新技術と応用分野に関して集大成されたハンドブックである.
  • 光デバイス精密加工ハンドブック 増補改訂版
    (Contributor第1章 除去加工 第5節 ドライエッチング(3) イオンビ－ムエッチング, 第1章 第5節 ドライエッチング(4) 中性ビ－ムエッチトング,第2章・第2節 スパッタ蒸着)オプトロニクス社 2003/07 4900474983 
    (学術図書) この図書は,光デバイスに関する最先端の加工技術について纏められたハンドブツクであり,加工基礎編とデバイス製作応用編から構成されている.
  • ナノエレクトロニクスを支える材料解析
    下川 房男 (Contributor第4章 第4節 イオンを用いたナノ加工)コロナ社 1996/11 4885521440 
    (学術図書) この図書は,4種類のプロ－ブ(電子線,放射線,イオンビ－ム,STM)に関して,最新の材料解析技術とナノ加工技術に関して,纏められている

Conference Activities & Talks

  • Laser-manipulated microtool with enzyme-functionalized surface for on site molecular processing  [Not invited]
    Akihito Masuda; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao
    21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017  2020 
    © 17CBMS-0001. We developed a novel laser-manipulated microtool for processing single biomolecules under an optical microscope. The laser-manipulated microtool has enzymes immobilized on its surface, which act as agents for molecular processing in a confined space. In this paper, we report on enzyme immobilization on the surface of microtool and demonstration of on-site DNA cutting. We fabricated microtools with SU-8 and evaluated several immobilization methods using FITC-labeled IgG. DNA cutting enzymes were immobilized, and the electrophoresis results suggest successful functionalization of tools. We manipulated the tool by optical tweezers and cut a DNA molecule under an optical microscope.
  • Structural Color Based Tactile Sensor for Flexible Endoscopic Surgery to Detect Grab State and Organs Hardness  [Not invited]
    Yusaku Maeda; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao
    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)  2020/01 
    © 2020 IEEE. Flexible endoscopic surgery has been developed as a minimally invasive surgery. The surgeon has been facing problems with insufficient information on grab state of forceps and organs hardness during the surgery. This paper reports a unique tactile sensor based on structural color changes to solve the problem. It can detect three-axis forces with very simple structure to provide structural color information. Since the force detection principle uses only the existing endoscope's camera to get hue (structural color) change on the device surface, additional signal transmission elements such as electrical wires, optical fibers, and battery are not required for the tactile sensor drive. The fabricated devices demonstrated wireless three-axis force sensing and hardness discrimination for the first time, and it makes it possible to apply tactile sensing to flexible endoscopic surgery.
  • Mems-Based 'Touch Feeling Scanner' for Quantitative Evaluation of Fingertip Sensation  [Not invited]
    Yoshihiro Nishida; Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Kazutami Arimoto; Hidekuni Takao
    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)  2020/01 
    © 2020 IEEE. This paper reports a very high-performance tactile sensor system (Touch Feeling Scanner) that can easily and precisely measure the fine surface textures of various kinds of samples. Since human's fingertip can discriminate surface texture below 100 μm range easily, it is considered that spatial resolution higher than 100 μm is required for the sensors to reproduce the sense of touch on our fingertips. Since such precise measurement usually requires precisely driven stage, there are limitations on the sample shape, the size, and the measurement location of the samples. In order to realize both high special resolution and high adaptability to many applications, MEMS high resolution tactile sensor that we had developed is integrated in the 'Touch Feeling Scanner' with novel measurement mechanics in this study. Attitude stabilization mechanism, crawler-type distance detector, and signal processing units for acquiring output signals from the tactile sensor are combined for precise measurement on samples. The completed system of touch feeling scanner showed significant performance reproducing the original performances of high-resolution tactile sensor evaluated with a motorized precise stage.
  • Highly Sensitive Silicon Slip Sensing Imager for Forceps Grippers Used under Low Friction Condition  [Not invited]
    K. Ando; T. Yamamoto; Y. Maeda; K. Terao; F. Shimokawa; M. Fujiwara; H. Takao
    Technical Digest - International Electron Devices Meeting, IEDM  2019/12 
    © 2019 IEEE. We are reporting the first silicon electron device for the realization of detection in slip of grasping by laparoscopic forceps under very low friction condition. Even under "zero-level" friction, slip of grasping object is detectable with the original algorithm inspired from our finger's sense of slip. At present, the surgeons of laparoscopic surgery or robotic surgery can able to get through monitor visual information only. It is one of the essential reasons why endoscopic surgeries requires much higher skills than conventional open surgery. Since organ surface is very slippery by blood and body fluid, very low friction around the organs is an essential issue especially in the case of laparoscopic surgery. Fabricated silicon slip sensing imager can visualize the grasping force distribution on the slippery organ surface, and the slippage of the organ is digitized by calculation of the center of load distribution. This is the first demonstration of slip detection at sub-mm spatial resolution under a very low friction condition on the tip of laparoscopic forceps, which is not only applicable to the medical treatment but also industrial robotics applications.
  • A highly sensitive MEMS silicon-hair device reproducing the function of hair follicle  [Not invited]
    Koki Hamamoto; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao
    Electronics and Communications in Japan  2019/10 
    © 2019 The Authors. Electronics and Communications in Japan published by Wiley Periodicals, Inc. This paper reports a highly sensitive MEMS silicon-hair device with novel functions of hair follicle. Human hairy skin has peculiar receptor called hair follicle. Therefore, a highly sensitive sensor reproducing the function of hair follicle is demanded in order to quantify peculiar sense in hairy skin such as wind, static electricity, and perception of the liquid surface. The developed device in this study has fine silicon-hair with 10 µm width and 5 mm length. Moreover, it detects two-axis force and one-axis moment applied to silicon-hair by piezoresistors. The MEMS silicon-hair device has realized resolutions of 5 µN axial force, 1 µN shear force, and 3nN·m moment. Also, the device in this study precisely acquired surface tension close to the physical property of water and ethanol water solution. In addition, the MEMS silicon-hair device was successful in detecting 0.1 µN electrostatic attraction. Resolutions of shear force and moment have been improved by 10-fold using the resonance-drive of silicon-hair.
  • Parylene-C Coating on High Resolution MEMS Tactile Sensor for Protection of Measurement Surface  [Not invited]
    Yuki Sakakihara; Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao
    Proceedings of IEEE Sensors  2019/10 
    © 2019 IEEE. In this paper, we report the effect of parylene-C coating on a high resolution 2-axis MEMS tactile sensor for protection of the contact surface of measured samples. Thin parylene-C layer was coated on overall device chip surface, and the improvement effect was evaluated to use it as a coating material suitable for protection of the measurement surface. The effect of parylene-C layer coating to mechanical characteristic of the tactile sensor was within 5%, even though 3μm-thick parylene-C is deposited on the suspension springs. Protection effect of the parylene-C layer was also evaluated with measured samples of color paint on a metal. As a result, the depth of scratches made by sensor sweeping motion was much reduced by 60%, and the sensitivity and the spatial resolution was almost not affected. Parylene-C is an effective material for coating of high resolution tactile sensor surface.
  • Microsensor Device for Simultaneously Measuring Moisture Nutrient Substance Dynamics in Plants  [Not invited]
    Kazuma Ishida; Hiroki Shikata; Kyohei Terao; Hidekuni Takao; Tsuyoshi Kobayashi; Ikuo Kataoka; Fusao Shimokawa
    Proceedings of IEEE Sensors  2019/10 
    © 2019 IEEE. To increase the productivity of crops, growth methods based on direct monitoring of physiological information in plants is required. In this study, we proposed a novel micro sensor device for simultaneously measuring moisture and nutrient substance dynamics in plant xylems. A nutrient substance dynamics sensor comprises an electrical conductivity (EC) sensor for measuring nutrient substance concentration and a resistance temperature detector (RTD) for temperature compensation of the EC value. To obtain a high-performance EC sensor, we fabricated a three-dimensional (3D) electrode on a needle-shaped Si probe based on micro-electromechanical system technology. We succeeded in fabricating an EC sensor equipped with a 3D electrode (cell constant of approximately 1200 m-1) and an RTD and demonstrated the feasibility of measuring the nutrient substance dynamics in plants.
  • New Phloem Sap Extraction and Storage Microdevice and Photosynthetic Products Analysis  [Not invited]
    Hiroki Shikata; Kazuma Ishida; Akihito Ono; Kyohei Terao; Hidekuni Takao; Tsuyoshi Kobayashi; Fusao Shimokawa
    Proceedings of IEEE Sensors  2019/10 
    © 2019 IEEE. In this study, in order to monitor plant biological information, we proposed a phloem sap extraction-storage device based on microelectromechanical systems technology and an extraction-collection module. The proposed phloem sap extraction-storage device has an electric conductivity microprobe sensor for distinguishing the location of phloem and xylem vascular bundles within the plant, as well as a phloem sap extraction structure on the same microprobe. A reservoir structure for storing phloem sap is connected to this microprobe. A prototype of this device-equipped module was fabricated. Furthermore, we confirmed the utility of the proposed device and module through liquid chromatographic component analysis of the main photosynthetic products (sucrose, glucose, and fructose), thus demonstrating the utility of the proposed module.
  • Simultaneous Measurement of Surface Texture and Elasticity Using Tactile Sensor with Differently Protruded Contactor Array  [Not invited]
    Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao
    2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII  2019/06 
    © 2019 IEEE. In this study, a novel design of array type tactile sensor with differently protruded contactors and a new detection principle were developed for simultaneous measurement of high-resolution surface texture and the elasticity (or softness) of the touching object. Six bi-axial detectors for micro surface roughness and local slip friction are integrated with different protrusion lengths of three levels from the chip edge of sensor. Since indentation depth of the three contactor pairs depends on softness of object, it is possible to calculate the elasticity of the object only by one-time sweeping using the relative relationship between indentation depth. Also, the principle of this sensor cancel out the effect of contact angle to the target surface. In the experiments, surface shape and slip friction of the samples having elasticity from 0.57 to 2.6MPa were successfully measured, and simultaneous measurement of their elasticities has been demonstrated for the first time.
  • A 0.1μM-Resoution Silicon Tactile Sensor with Precisely Designed Piezoresitve Sensing Structure  [Not invited]
    Tsubasa Nakashima; Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao
    2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII  2019/06 
    © 2019 IEEE. In this paper, a newly developed ultra-high resolution tactile sensor with a spatial resolution of 0.1μm and a force resolution of 60μN is reported for the first time. The ultrahigh resolution tactile sensor is required for quality control of finished metal surface and painted surface of automobiles that are not replaced by 'non-contact' optical measurements. A 0.1μm spatial resolution is realized by a needle-like contactor-tip precisely formed by deep-RIE. A 60μN force resolution is realized by partly narrowed silicon spring. Also, piezoresistors were arranged to maximize the stress sensitivity considering the crystal orientation dependency on piezoresistive effect. The fabricated new device in this study has realized 6 times higher performance in vertical displacement and 40 times higher performance in frictional force resolution than the tactile sensor device that we reported in 2018 [1]. Measured surface shape corresponded well to the actual surface shape in deep sub-micron region.
  • Highly Sensitive Detection of Fine Electrostatic Attraction by Resonance-Driven Silicon-Hair  [Not invited]
    Kohki Hamamoto; Yusaku Maeda; Kyohei Terao; Fusao Shimokawa; Fumikazu Oohira; Hidekuni Takao
    2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII  2019/06 
    © 2019 IEEE. This paper reports highly sensitive detection of fine electrostatic attraction using resonance-driven silicon-hair device. The device in this study is reproducing highly sensitive hair follicle to acquire peculiar sense in hairy skin of human. The device has a fine silicon-hair with 10 μm width and 5 mm length, and it independently detects 2-axis force and 1-axis moment applied to itself. The fine silicon-hair is vibrated at its resonant frequency by an external piezoelectric driver. Electrostatic attraction works to the fine silicon-hair, and the resonance frequency of vibration is affected and detected using the highly sensitive 1-axis moment detector. The 2-axis force detectors are used to monitor the operation condition of device. In the experiments, the minimum sensitivity of electrostatic attraction have reached to 0.1μN range. Resolution of force and moment detectors have been improved by tenfold using the resonance-drive of silicon-hair.
  • A Highly Sensitive Planer Silicon-Hair Device Reproducing the Function of Human Hair Follicle  [Not invited]
    Koki Hamamoto; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao
    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)  2019/01 
    © 2019 IEEE. This is the first report of a novel silicon-hair device with the function of highly sensitive hair follicle to realize peculiar sense in hairy skin of human. The target sensitivities of our device are 10\mu \mathrm{N} in force and 10nN·m in moment, since they are considered as the sensitivities of human hair follicle. A fine silicon-hair with 10\mu \mathrm{m}-width and 5mm-length is monolithically integrated, and 2-axis forces and 1-axis moment applied to the silicon-hair are detected independently by tri-axis sensing structure. The fabricated device was evaluated, and the minimum detectable input was 5\mu \mathrm{N} in axial force, 1\mu \mathrm{N} in shear force, and 3nN·m in moment. These sensitivities are advantageous to human's hair follicle, and it is very promising to apply the device to novel measurement applications. As the first application, surface tension of liquid was precisely acquired. Absolute value of surface tensions were successfully measured at small absolute error using the highly sensitive silicon-hair device.
  • A Monolithic Fingerprint-Like Tactile Sensor Array Realizaing High Resolution Imaging of Spatially Distributed Tactile Information  [Not invited]
    Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao
    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)  2019/01 
    © 2019 IEEE. In this study, a novel 'array type' monolithic fingerprint-like tactile sensor has been developed for acquiring high resolution images of tactile information of surface. Six high resolution tactile sensors are arrayed in line at a pitch of 500\mu \mathrm{m}, which is equivalent to typical pitch of human's fingerprint. Each tactile sensor can detect biaxial motion of contactor for detection of 'micro surface roughness' and 'local slip friction', even if it is a very soft material like clothes. As an important result obtained with the array of tactile sensors, 'non-linear deformation characteristic of soft fabrics' has been acquired successfully. Moreover, distributed tactile information on 'shape' and 'slip friction' has been 3D visualized on a soft cloth surface at a 100\mu \mathrm{m} spatial resolution for the first time.
  • Microscale sap dynamic sensor using heat pulse method  [Not invited]
    Naoki Hara; Yuki Hara; Hiroki Ishizuka; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa
    Proceedings of the 31th International Microprocesses and Nanotechnology Conference (MNC 2018)  2018/11
  • Development of single cell stimulation device for quantitative analysis of spare receptors  [Not invited]
    松井 祐樹; MuhammadThaqifIqbalBinMokhtar; 平野 勝也; 高尾 英邦; 下川 房男; 石塚 裕己; 寺尾 京平
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2018/10  Institute of Electrical Engineers of Japan
  • Discrimination of Touch Feeling in Submicron Region Realized by Ultra-High Resolution Tactile Sensor  [Not invited]
    中島 翼; 綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2018/10  Institute of Electrical Engineers of Japan
  • Development of molecular processing platform using DNA trapping device with tool-stock function  [Not invited]
    増田 晃士; 石塚 裕己; 高尾 英邦; 下川 房男; 寺尾 京平
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2018/10  Institute of Electrical Engineers of Japan
  • An Array-Type MEMS Fingerprint-like Tactile Sensor Realizing High Resolution Measurement of Spatially Distributing Tactile Information  [Not invited]
    綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2018/10  Institute of Electrical Engineers of Japan
  • THz Microcavity Made of Wire Grid Structure Containing Electrical Split Ring Resonator Metamaterials  [Not invited]
    Nguyen Thi Dieu Thanh; Kyosuke Okabe; Shota Inoue; Fusao Shimokawa; Shunsuke Nakanishi; Noriaki Tsurumachi
    International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz  2018/10 
    © 2018 IEEE. We proposed a THz microcavity structure containing metamaterial as a candidate for a novel THz active device. According to the FDTD simulation, splitting of the transmission peak due to the mode coupling was observed when the electric split ring resonator (eSRR) having the same resonance frequency was placed at the center of the microcavity made of the wire grid structure as the mirror.
  • Microscale xylem sap flow sensor facilitating the simultaneous measurement of flow velocity and direction  [Not invited]
    Yuki Hara; Naoki Hara; Hiroki Ishizuka; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa
    Proceedings of the EUROSENSORS 2018 conference (EUROSENSORS 2018)  2018/09
  • Measurement of Touch Feeling on Hair Surface Using High Resolution Two-Axis MEMS Tactile Sensor  [Not invited]
    Kota Nakamitsu; Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao
    Asia-Pacific Conference of Transducers and Micro-Nano Technology(APCOT2018)  2018/06
  • Extraction of “Real Friction Coefficient” Depending on Micro Surface Roughness Using High Resolution MEMS Tactile Sensor  [Not invited]
    Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao
    Asia-Pacific Conference of Transducers and Micro-Nano Technology(APCOT2018)  2018/06
  • Fabrication of Xylem Sap Flow Sensor Microneedles for Extending its Applications  [Not invited]
    T. Takahash; Y. Hara; A. Ono; H. Ishizuka; K. Terao; H. Takao; F. Shimokawa
    Proceedings of the 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2018)  2018/04
  • Spatial dissection of biosamples using Si blade array device  [Not invited]
    Taro Shiomi; Mamoru Hirafuji; Hiroki Ishiduka; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao
    22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018  2018 
    Copyright © (2018) by Chemical and Biological Microsystems Society. All rights reserved. We developed a Si-blade-array device that realizes space-resolved microdiessection of biosamples for the purpose of connecting omics analysis to spatial information. In this paper, we report fluorescent staining and cell sampling experiments for single cells compartmentalized by the Si-blade-array device. The fluorescent staining experiment shows the successful compartmentalization without leakage, allowing us to handle each compartment as an isolated reaction chamber. Taking this advantage, we sampled single cells in limited area on a culture dish while keeping their spatial information. Transcription analysis of the cells sampled by this technique was demonstrated by real-time PCR.
  • マイクロ流体デバイスによる敗血症に伴う腎微小環境変化の解析  [Not invited]
    田尾 祐一; 高尾 英邦; 下川 房男; 中野 大介; 寺尾 京平
    生命科学系学会合同年次大会  2017/12  生命科学系学会合同年次大会運営事務局
  • Optical driven microtool with enzyme-functionalized surface for direct molecular processing  [Not invited]
    増田 晃士; 高尾 英邦; 下川 房男; 寺尾 京平
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2017/10  Institute of Electrical Engineers of Japan
  • Investigation of Process Parameters for Control of Diameter and Alignment of Self-assembled DNA Nanowires  [Not invited]
    神谷 昌吾; 高尾 英邦; 下川 房男; 寺尾 京平
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2017/10  Institute of Electrical Engineers of Japan
  • A "Micro-Macro" Integrated Multiscale MEMS Tactile Sensor for Detection Ability of Surface Texture  [Not invited]
    綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2017/10  Institute of Electrical Engineers of Japan
  • Development of Si blade array device of through hole type for realizing organ analysis  [Not invited]
    塩見 太朗; 香川 大地; 高尾 英邦; 下川 房男; 寺尾 京平
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2017/10  Institute of Electrical Engineers of Japan
  • Development of a multi-electrode electrovibration tactile display with 1 mm resolution  [Not invited]
    H. Ishizuka; K. Suzuki; K. Terao; H. Takao; F. Shimokawa; H. Kajimoto
    2017 IEEE World Haptics Conference, WHC 2017  2017/07 
    © 2017 IEEE. In this study, we demonstrate the characteristics of an electrovibration tactile display with a 1 mm resolution. Electrovibration is one of the promising stimulus methods for mobile tactile devices because of its simplicity in terms of structure of the tactile display and principle. While several groups have developed electrovibration tactile displays, the resolution of the displays have not been discussed. Resolution is an important feature to emulate the surface textures of real objects that deform the skin with a 1 mm resolution. To achieve electrovibration stimulus with high resolution, we fabricated an electrovibration tactile display consisting of an array of electrodes with a width of 1 mm. We also evaluated the characteristics of the fabricated tactile display. We asked the test subjects if they could perceive the electrovibration stimulus. From the results, we determined that while the amplitude and the frequency of the applied sinusoidal voltage affected the size of the perceived stimulus, the area of the electrovibration did not affect this perception. We also found that the insulator of the tactile display was broken down. The proposed tactile display was able to present a spatial electrovibration stimulus and required optimization of the applied voltage.
  • Development of high resolution electrostatic tactile display  [Not invited]
    H. Ishizuka; K. Suzuki; K. Terao; H. Takao; F. Shimokawa
    2017 International Conference on Electronics Packaging, ICEP 2017  2017/06 
    © 2017 Japan Institute of Electronics Packaging. In this study, we demonstrate an electrovibration tactile display with an array of electrodes. Electovibration is a promising stimulus method for tactile feedback in mobile devices. The electrovibration tactile displays have been developed for the last several decades. However, these studies focused on application of the tactile display. The resolution of the tactile display, which is important for tactile sensation, is not investigated. In this study, we developed a electrovibration tactile display with high resolution. The tactile display consists of an array of electrodes with the width of 0.95 mm. The electrodes are arranged with the interval of 0.05 mm. The resulting resolution is 1 mm. We established the fabrication process of the tactile display and evaluated the fundamental characteristics. The results indicated that the perception was determined by the amplitude of the applied voltage. And also, the perception was not related to the contacting area and applied voltage. The proposed tactile display was able to present a spatial electrovibration stimulus and required optimization of the applied voltage.
  • Microscale phloem sap extraction sensor device for measuring biological information in plant branches  [Not invited]
    Akihito Ono; Akihito Yoneda; Yuichi Tao; Kyohei Terao; Hidekuni Takao; Ryuji Ichihashi; Tsuyoshi Kobayashi; Ikuo Kataoka; Fusao Shimokawa
    Proceedings of IEEE Sensors  2017/01  IEEE
     
    © 2016 IEEE. In this study, a microscale phloem sap extraction sensor device based on MEMS technology is proposed to artificially extract phloem sap and monitor biological information in plant branches. The device consists of electrical resistance sensors to distinguish the positions of vascular bundles (xylem/phloem) and hollow-structured cantilevers with reservoirs for fluid extraction. A prototype of the proposed sensor device was fabricated. Furthermore, the performance of the position-distinction sensor was evaluated, and the feasibility of the fluid-extraction structure was validated.
  • グラニエ式小型センサによる草本種茎内道管流測定  [Not invited]
    日本生態学会第64回全国大会  2017
  • Microscale phloem sap dynamics measurement sensor device for monitoring the transport of nutritive substances in plants  [Not invited]
    小野瑛人; 矢野裕也; 寺尾京平; 高尾英邦; 市橋隆自; 小林剛; 片岡郁雄; 下川房男(Akihito Ono; Yuya Yano; K. Terao; H. Takao; Riji Ichihashi; Tsuyoshi Kobayashi; Ikuo Kataoka; F. Shimokaw
    29th International Microprocesses and Nanotechnology Conference (MNC2016)  2016/11
  • A Two-Axis Tactile Sensor with High Sensitivity Aimed at Measurement of Micro Region Surface Texture  [Not invited]
    綿谷 一輝; 香西 亮吾; 寺尾 京平; 下川 房男; 高尾 英邦
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2016/10  Institute of Electrical Engineers of Japan
  • Realization of MEMS Static Electricity Sensor with High Sensitivity Using Vertical Mounting method of Large Electrode  [Not invited]
    飯間 敦矢; 岡 勇作; 寺尾 京平; 下川 房男; 高尾 英邦
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2016/10  Institute of Electrical Engineers of Japan
  • E-2-4 Development of Local Light Stimulation and Multi-point Measurement Device for Neural Network Analysis  [Not invited]
    UENO Hidetaka; KOMAI Shoji; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; KOTERA Hidetoshi; SUZUKI Takaaki
    Conference on Information, Intelligence and Precision Equipment : IIP  2016/03  The Japan Society of Mechanical Engineers
     
    In brain science and psychology, one of the most important purposes of recent studies about neural network, biological circuit in brain, is to establish a method of treatment for the central nervous system disease, such as Alzheimer. Neurons in a neural network is stimulated and controlled by visible lights by Optogenetics methods. In thie paper, we propose a microchip integrated micro electrodes, micro lenses, and pinholes. The proposed microchip is capable of stimulating a neural network with two focused lights which have different affection to the neuron, and measuring the electrical reaction of the neural network.
  • E-2-3 Development of a Compact Cell Trapping Device Integrated with Fluid Handling Components  [Not invited]
    Furuya Naoki; SHIMAGAMI Takuya; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; AKIMITSU Kazuya; SUZUKI Takaaki
    Conference on Information, Intelligence and Precision Equipment : IIP  2016/03  The Japan Society of Mechanical Engineers
     
    In recent years, the various studies of trapping and operating single cells by using a microfluidic have been proceeded. Many conventional methods requires a fluid operating unit outside the device. Therefore, it is difficult to carry the device during operation. In this study, We integrate a small cell trapping device with miniature peristaltic pumps and a chip made by multidirectional photolithography method. The cells on the highly portable device are easily stored in an incubator and observed under the microscope.
  • Micro-scale sap flow sensor fabricated using MEMS technology  [Not invited]
    Makoto Ochi; Yuya Yano; Kyouhei Terao; Takaaki Suzuki; Hidekuni Takao; Tsuyoshi Kobayashi; Ikuo Kataoka; Fusao Shimokawa
    Japanese Journal of Ecology  2016  Tohoku University
  • Si/polymer/glassチップを用いた神経細胞組織内局所光刺激デバイスの開発  [Not invited]
    上野秀貴; 駒井章治; 寺尾京平; 高尾英邦; 下川房男; 小寺秀俊; 鈴木孝明
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2015/10
  • 植物新梢末端の師管流計測を目指した超小型師管流センサ(2) -師管流の抽出・成分測定-  [Not invited]
    日本生態学会第62回全国大会  2015
  • 植物新梢末端の師管流計測を目指した超小型師管流センサ(1) -師管流の向き,師管流量の測定-  [Not invited]
    日本生態学会第62回全国大会  2015
  • MEMS技術を用いた超小型師管流センサ  [Not invited]
    第32回「センサ・マイクロマシンと応用システム」シンポジウム  2015
  • Dual-axis hybrid-MEMS mirror having Si and polymer hinges for large-area 2D raster scan  [Not invited]
    Hirofumi Yamashita; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Takaaki Suzuki
    International Conference on Optical MEMS and Nanophotonics  2014/10 
    © 2014 University of Strathclyde. In this study, we propose a dual-axis hybrid-MEMS mirror for large-area 2D raster scanner composed of fast and slow driving gimbals. For simple fabrication and high driving performance, an outer gimbal for slow and large scanning has polymer SU-8 hinges with low rigidity, and an inner gimbal for fast scanning has Si hinges with high rigidity. The outer gimbal deflected over ±14deg. at non-resonant frequency of 60Hz refresh rate, and the inner one ±1deg. at the resonant frequency 22.9kHz. The 2D raster scanning of the fabricated mirror was demonstrated.
  • 神経細胞ネットワーク解析のための局所光刺激デバイスの開発  [Not invited]
    上野秀貴; 駒井章治; 寺尾京平; 高尾英邦; 下川房男; 小寺秀俊; 鈴木孝明
    日本機械学会情報・知能・精密機器部門講演会講演論文集  2014/03
  • Microscale Phloem Flow Sensor Fabricated Using MEMS Technology For Measuring Biological Information of Plant Branches  [Not invited]
    矢野裕也; 越智誠; 寺尾京平; 鈴木孝明; 高尾英邦; 下川房男; 小林剛; 片岡郁雄
    NANOSciTech2014 & IC-NET2014  2014/03
  • Assist-free assembly technique of standing optical devices on soft spring actuator stages  [Not invited]
    Yusaku Oka; Ryosuke Shinozaki; Kyohei Terao; Takaaki Suzuki; Fusao Shimokawa; Fumikazu Oohira; Hidekuni Takao
    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)  2014  IEEE
     
    In this study, a new assembly technique of separately fabricated MEMS optical devices on fragile MEMS actuator stages has been developed to realize novel functional optical-MEMS devices. This technique realizes the 'assist-free' alignment and fixing of vertically mounted optical devices by combination of 'micro spring slider' and 'trapezoidal alignment slit'. Various kinds of optical devices can be precisely aligned and stably fixed even on movable actuator stages supported by soft spring suspensions. In the experiments, micro mirrors were attached on electrostatic linear actuators and rotational actuators using this assembly technique, and a small average value of relative-angle error around 4/100 ° was successfully obtained. © 2014 IEEE.
  • 電位計測アレイを集積化した細胞組織内局所光刺激デバイスの開発  [Not invited]
    上野秀貴; 駒井章治; 寺尾京平; 高尾英邦; 下川房男; 小寺秀俊; 鈴木孝明
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2014
  • MEMS技術を用いた超小型維管束（道管流・師管流）モニタリングセンサの研究  [Not invited]
    日本生態学会第61全国大会・企画集会  2014
  • ヒ－タ加熱方式を用いた超小型香り発生デバイスの性能評価  [Not invited]
    平成２６年度電気学会全国大会  2014
  • Micro Sap Flow Sensor Using MEMS Technology for Application to Biological Information Measurement of Plants  [Not invited]
    越智誠; 鈴木孝明; 高尾英邦; 下川房男; 小林剛; 片岡郁雄
    Third International Conference on Plant Vascular Biology  2013/07
  • A post-complementary metal oxide semiconductor formation process of high-adhesiveness su-8 structures for reliable fabrication of integrated microelectromechanical system sensors  [Not invited]
    Yusaku Maeda; Kyohei Terao; Takaaki Suzuki; Fusao Shimokawa; Hidekuni Takao
    Japanese Journal of Applied Physics  2013/06  JAPAN SOC APPLIED PHYSICS
     
    In this study, a post CMOS reliable formation process for high-aspect-ratio SU-8 structures on integrated circuits is newly proposed. Enhancement of SU-8 adhesiveness is realized by forming a thin SU-8 layer (called an adhesive layer) over the surface of the circuit before the SU-8 structures are formed. Improvement of adhesion of thick SU-8 structures is very important to guaranty the reliability of MEMS microsensors. The negative effect of the adhesive SU-8 layer on the mechanical properties of silicon movable structures has been estimated and discussed with simple analytical formulae. Also, the effect of the adhesive layer on the silicon substrate has been demonstrated with test structure patterns. On the basis of the developed technique, a tactile sensor device has been successfully fabricated as an example of the application of this technique. © 2013 The Japan Society of Applied Physics.
  • Patternable atmospheric-pressure plasma jets with gas discharge in microfluidic channel array  [Not invited]
    Hidetaka Yamasaki; Kyohei Terao; Takaaki Suzuki; Fusao Simokawa; Hidekuni Takao
    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)  2013 
    Application of "small area" plasma has become important for bio/medical applications. In this study, a novel device to create patternable atmospheric-pressure plasma-jet array is newly proposed, and the evaluation results of the fabricated devices are reported for the first time. The array device is fabricated by bonding a PDMS microchannel layer and a glass wafer. Discharge electrodes for plasma creation are fabricated by Au/Cr layers. Since the discharge starting voltages strongly depends on shapes and the gap of two electrodes, they were designed and selected based on the Paschen's law to lower their discharge starting voltages. Micro plasma jet array are created by multi-channel gas discharges individually in microfluidic channels on a chip, and a 2.54mm spatial resolution of plasma-jet was obtained in the first fabricated device. © 2013 IEEE.
  • Compact optical multi-gas sensors using micromachining technology [ I ] -Fabrication of high-precision micro-optical bench using ultra-thick film resin  [Not invited]
    Masahiro Ito; Tomoya Takeda; Takaaki Suzuki; Hidekuni Takao; Fumikazu Oohira; Fusao Shimokawa; Yasuyuki Tsutsui; Hiroki Hayashi; Takashi Konno; Ippei Asahi; Sachiyo Sugimoto; Hideki Ninomiya
    IEEJ Transactions on Sensors and Micromachines  2013 
    In order to realize the miniaturization of the optical gas sensors by the passive alignment of optical components, we proposed a micro-optical bench which consists of a guiding groove and a micro-mirror with an ultra-thick resin structure. We fabricated the micro-optical bench with an ultra-thick resin structure of 2 mm height and processing accuracy of within ±10 μm. By using this micro-optical bench, compact optical multi-gas sensors (size: 3 cm×3 cm) by the passive alignment through a guiding groove for a ball lens and a fiber ferrule were realized. © 2013 The Institute of Electrical Engineers of Japan.
  • Development of high accuracy spray coating method using multi-layer coat  [Not invited]
    Mikio Akamatsu; Kyohei Terao; Hidekuni Takao; Fusao Simokawa; Fumikazu Oohira; Takaaki Suzuki
    IEEJ Transactions on Sensors and Micromachines  2013 
    In this paper, we propose a high-accuracy spray coating method for obtaining the thick photoresist over 200μm. A multi-layered coating method with thin photoresist layers is applied in order to achieve a thick photoresist. We evaluated the waviness and the reproducibility of the thickness of the photoresist coated on a flat substrate. The multi-layered spray coating method with the edge cover achieves high accuracy thickness of the photoresist with covering wide-range of the target thickness. © 2013 The Institute of Electrical Engineers of Japan.
  • Development of a high-throughput DNA fiber analysis device using MEMS technology  [Not invited]
    Takaaki Suzuki; Kyohei Terao; Hiroyuki Suzuki; Yuki Nitta; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Daisuke Hiramaru; Hidetoshi Kotera
    IEEJ Transactions on Sensors and Micromachines  2013 
    In this study, we propose a simple observation method of the shape and molecular orientation of the chromosomes extracted from cells for a sample-to-analysis system in clinical diagnosis. The proposed technique is composed of total preparation technique such as cell immobilization, chromosomes extraction, stretching, suspension and analysis using a disposable microchip controlled by centrifugal force only. It is experimentally confirmed that the chip having two kinds of microstructures arranged concentrically on a chip immobilizes cells and stretches chromosomes extracted from the immobilized cells. © 2013 The Institute of Electrical Engineers of Japan.
  • Compact optical multi-gas sensors using micromachining technology [II]-characteristics of raman scattering gas sensor and ultraviolet absorption spectroscopy gas sensor  [Not invited]
    Ippei Asahi; Sachiyo Sugimoto; Hideki Ninomiya; Fusao Shimokawa; Hidekuni Takao; Fumikazu Oohira; Yasuyuki Tsutsui; Hiroki Hayashi; Takashi Konno
    IEEJ Transactions on Sensors and Micromachines  2013 
    Compact optical gas sensors based on the Raman effect and ultraviolet absorption spectroscopy were developed. These sensors are miniaturized and do not require alignment, because the mirrors and optics are fixed onto a precisely machined micro optical bench made by micromachining technology. The Raman type gas sensor consists of a small DPSS laser (wavelength 532 nm, pulse energy 200 μJ, pulse width 3 ns, repetition frequency 1 kHz), the sensor chip, and the detector, which are connected by optical fibers. The UV absorption type gas sensor is consists of a D2 lamp, the sensor chip and a compact spectrometer, which are connected by optical fibers. The measured signals showed good linearity along with the gas concentrations. The limit of detection using the Raman effect was 1% for hydrogen or 0.2% for methane, and the minimum limit of detection using ultraviolet absorption spectroscopy was 10 ppm for ammonia and sulfur dioxide for an optical path length of 20 mm.
  • Dual-axis polymer-MEMS mirror made of Photosensitive Nanocomposite  [Not invited]
    Junya Suzuki; Takuya Miura; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Takahiro Namazu; Fumikazu Oohira; Takaaki Suzuki
    International Conference on Optical MEMS and Nanophotonics  2013 
    We propose a simple fabrication method for a dual-axis polymer MEMS mirror made of negative photoresist SU-8 containing magnetic nanoparticles as a magnetically driven actuator. The proposed mirror is driven by magnetic attractive force using external magnetic field. So, it doesn't need complex wiring patterns and can simply fabricate by photolithography only. For evaluation of drive characteristics of the proposed mirror, we measured static deflection angle and frequency response of the fabricated mirror by using a laser position sensor. As a result, we obtained optical deflection angle ±15deg. and the second resonant frequency 29.2Hz of torsional oscillation. © 2013 IEEE.
  • Integration of angular rate sensor on large deflection polymer-MEMS mirror  [Not invited]
    Hirofumi Yamashita; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Takaaki Suzuki
    International Conference on Optical MEMS and Nanophotonics  2013 
    Repeatability of driving characteristics of a polymer-MEMS mirror are transitioned by an environment and time course change. In this study, we propose a method of motion sensing for the purpose of laser scan stable by the active control of a polymer-MEMS mirror. A proposed motion sensor is a coil-type sensor that induces the electric current by an electromagnetic induction and monolithically integrated on the mirror driving by the electromagnetic force. The fabricated mirror made of SU-8 polymer deflects over ±30deg. at low electric current. The measured current induced by the integrated sensor coil is clearly obtained by applying the lock-in detection for signal processing method, and it indicates that the feasibility of amplitude control of the polymer MEMS mirror. © 2013 IEEE.
  • Patternable Atmospheric-Pressure Plasma Jets with Gas Discharge in Microfluidic Channel Array  [Not invited]
    The 26th International Conference on Micro Electro Mechanical Systems (IEEE MEMS2013)  2013
  • 材料判別能にむけた複合センサを集積するメッシュ状シリコン触覚イメージセンサ  [Not invited]
    平成25年電気学会全国大会  2013
  • 可動MEMSデバイスへの光学素子垂直自動アライメント技術  [Not invited]
    平成25年電気学会全国大会  2013
  • Micro sap flowsensor using MEMS technology for application to biological information measurement of plants  [Not invited]
    Third International Conference on Plant Vascular Biology  2013
  • 細胞クラスター内における細胞間相互作用の解明に向けた単一細胞薬剤刺激デバイス  [Not invited]
    電気学会 センサ・マイクロマシン部門総合研究会 バイオ・マイクロシステム研究会  2013
  • マイクロ流体デバイスを用いた膵β細胞クラスター内における細胞間相互作用の計測  [Not invited]
    第３６回日本分子生物学会年会  2013
  • Self-Aligned Fabrication Process for Active Membrane Made of Photosensitive Nanocomposite  [Not invited]
    25th IEEE International Conference on Micro Electro Mechanical Systems [MEMS2012]  2012
  • 接触面から複数の触覚情報を取得する機能集積型皮膚感覚センサアレイの設計と製作  [Not invited]
    2012年春期 第59回応用物理学関係連合講演会  2012
  • 角度センシング機能を有する回転型静電MEMSミラーの設計と製作  [Not invited]
    平成24年 電気学会全国大会  2012
  • MEMS技術を用いた微細大気圧プラズマアレイデバイスの製作  [Not invited]
    平成24年 電気学会全国大会  2012
  • Improvement of Coating Uniformity for Thick Photoresist Using a Partial Spray Coat  [Not invited]
    7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems [NEMS2012]  2012
  • Cell Culture on MEMS Materials in Micro-Environment Limited by a Physical Condition  [Not invited]
    7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems [NEMS2012]  2012
  • Design and Fabrication of Electrostatically Driven In-Plane MEMS Rotational Mirror with Electrostatic Rotary Encoder  [Not invited]
    2012 International Conference on Optical MEMS & Nanophotonics  2012
  • Optically-Driven Microstructures for Manipulating Single DNA Molecule under Fluorescence Microscope  [Not invited]
    38th International Conference on Micro and Nano Engineering (MNE2012)  2012
  • Fast whole blood testing for detecting biomarkers by size-exclusion SPR sensing  [Not invited]
    The 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS2012)  2012
  • A Novel Integrated Tactile Image Sensor for Detection of Surface Friction and Hardness Using the Reference Plane Structure  [Not invited]
    IEEE Sensors2012 Conference  2012
  • A Post-CMOS Process of High Adhesion SU-8 Structure to Apply to Sensor Device  [Not invited]
    25th International Microprocesses and Nanotechnology Conference (MNC2012)  2012
  • 混合噴射機能を持つマルチジェット型ベンチュリ噴霧器と力覚・冷覚複合提示ディスプレイへの応用  [Not invited]
    第29回「センサ・マイクロマシンと応用システム」シンポジウム  2012
  • 微小流路内放電を用いるMEMS大気圧プラズマアレイデバイス  [Not invited]
    第29回「センサ・マイクロマシンと応用システム」シンポジウム  2012
  • 角度センシング機能を有する回転型MEMSミラーの設計・製作  [Not invited]
    第29回「センサ・マイクロマシンと応用システム」シンポジウム  2012
  • 基準面を用いて物体表面から摩擦力および硬さ情報を取得する機能集積型皮膚感覚センサアレイ  [Not invited]
    第29回「センサ・マイクロマシンと応用システム」シンポジウム  2012
  • Fabrication of micro sap flow sensors by using MEMS technology  [Not invited]
    第29回「センサ・マイクロマシンと応用システム」シンポジウム  2012
  • High-driven-type micro device ordor generator with MEMS actuator  [Not invited]
    第29回「センサ・マイクロマシンと応用システム」シンポジウム  2012
  • Compact optical multi-gas sensors using micromachning technology ［I］  [Not invited]
    第29回「センサ・マイクロマシンと応用システム」シンポジウム  2012
  • Compact optical multi-gas sensors using micromachning technology ［II］  [Not invited]
    第29回「センサ・マイクロマシンと応用システム」シンポジウム  2012
  • Crystalline Anisotropic Dry Etching for Single Crystal Silicon  [Not invited]
    The 24th IEEE International Conference on Micro Electro Mechanical Systems [MEMS2011]  2011
  • Micro Fluidic Circuit Design with “SPICE Simulation  [Not invited]
    The 24th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2011)  2011
  • Fabrication of a Magnetically-Driven Microstructure Made of Magnetic Nanoparticles/SU-8 Composite  [Not invited]
    6th International Conference on Microtechnologies in Medicine and Biology [MMB2011]  2011
  • A Venturi-type Micro Mist Generator fabricated by MEMS Technology and its Application to Local Surface Cooling of Target Objects  [Not invited]
    24th International Microprocesses and Nanotechnology Conference (MNC2011)  2011
  • ベンチュリ構造によるマイクロミスト生成機構と冷感集積化複合触覚提示デバイスへの応用  [Not invited]
    第25回センサ・マイクロマシンと応用システムシンポジウム  2011
  • CMOS 集積化に向けたMEMS デバイスのスケーリング効果  [Not invited]
    第25回センサ・マイクロマシンと応用システムシンポジウム  2011
  • Measurement of attractive force generated by magnetic photosensitive nanocomposite  [Not invited]
    JSME International Workshop on Micro/Nano-Engineering  2011
  • A partial coat for removal of edge bead from thick photoresist using a spray method  [Not invited]
    JSME International Workshop on Micro/Nano-Engineering  2011
  • FEM analysis of a polymer MEMS mirror using photosensitive nano composite  [Not invited]
    JSME International Workshop on Micro/Nano-Engineering  2011
  • Quantitative evaluation of cell proliferation in an integrated micro cell culture system  [Not invited]
    JSME International Workshop on Micro/Nano-Engineering  2011
  • New H-shape soft spring and its micro mirror application  [Not invited]
    The 23rd IEEE International Conference on Micro Electro Mechanical Systems [MEMS2010]  2010
  • Sensing Characteristics of Vertical Combo-Drive MEMS Mirror with Sensing Function for Phase-Shift Denices  [Not invited]
    The 27th Sensor Symposium on Sensors, micromachines and Applied Systems  2010
  • Crystalline Anisotropic Etching for Single Crystal Slicon Using Dry Etching  [Not invited]
    The 27th Sensor Symposium on Sensor, Micromachines and Applied Systems  2010
  • Fabrication of Low-Electrical-Interference MEMS Mirror Array Module for Wavelength-Selective Switches  [Not invited]
    The 27th Sensor symposium on Sensor. Micromachines and Applied Systems  2010
  • Effect of AC drive in control of MEMS mirror tilt angle  [Not invited]
    2009 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2009)  2009
  • MEMS-based 1×43 wavelength-selective switch with flat passband  [Not invited]
    35th European Conference on Optical Communication (ECOC 2009)  2009
  • 128×128 3D-MEMS optical switch module with simultaneous optical paths connection for optical cross-connect systems  [Not invited]
    International Conference on Photonics in Switching 2009 (PS 2009)  2009
  • Low-crosstalk wavelength-selective switch using MEMS mirror array integrated with a Z-shaped alignment mark  [Not invited]
    15th Microoptics Conference (MOC’09)  2009
  • 512×512 port 3D MEMS optical switch module with toroidal concave mirror  [Not invited]
    15th Microoptics Conference (MOC’09)  2009
  • High-aspect-ratio gold electrodes fabricated by thick-multilevel interconnection technology for electrical isolation of MEMS mirrors in wavelength-selective switches  [Not invited]
    The 22nd Annual Meeting of the IEEE Photonics Society  2009
  • Fast and highly stable peak optical search algorithm based on motion control of MEMS  [Not invited]
    Asian Symposium for Precision Engineering and Nanotechnology  2009

Works

  • 小型光学式マルチガスセンサの製品化研究
    2012 -2013
  • マイクロマシン技術を用いた小型光学マルチガスセンサの開発
    2010 -2011

MISC

  • iPS細胞胚様体の局所刺激を目指したマイクロデバイスの開発—Microfluidic Device for Differentiation Induction of iPS Cells-derived Embryoid Bodies with Local Chemical Stimulation
    楠 直人; 小長谷 周平; 西田 光徳; 佐藤 成弘; 高尾 英邦; 下川 房男; 寺尾 京平  電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines  142-  (12)  310  -315  2022/12
  • Development of 3D model of capillary microconstriction for analysis of cancer cell dynamics
    白神 吉洋; 高尾 英邦; 下川 房男; 寺尾 京平  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  37-  4p  2020/10
  • Development of optically-driven nanoneedles using SU-8 nanofabrication
    原田 雅彦; 高尾 英邦; 下川 房男; 寺尾 京平  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  37-  6p  2020/10
  • On site cell assembly in a microfluidic device using optically driven microtools with antibody-immobilized surface
    森 駿太郎; 高尾 英邦; 下川 房男; 寺尾 京平  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  37-  4p  2020/10
  • Development of Liquid/Particle-Resistant Packaging of High-Resolution MEMS Tactile Sensor for Medical Applications
    綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  37-  3p  2020/10
  • Acquisition of Local Tactile Information by Spot Contact Using A Highly Sensitive MEMS Silicon-Hair Device
    植村 周; 濱本 晃輝; 寺尾 京平; 下川 房男; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  37-  3p  2020/10
  • A MEMS Tactile Antenna with Integrated Inclination Sensor for Tilt-Angle Detection to the Target Surface
    岡 早秀; 寺尾 京平; 下川 房男; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  37-  5p  2020/10
  • Yoshihiro Nishida; Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Kazutami Arimoto; Hidekuni Takao  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)  2020-January-  984  -987  2020/01
  • Yusaku Maeda; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)  2020-January-  689  -692  2020/01
  • Laser-manipulated microtool with enzyme-functionalized surface for on site molecular processing
    Akihito Masuda; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao  21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017  433  -434  2020
  • K. Ando; T. Yamamoto; Y. Maeda; K. Terao; F. Shimokawa; M. Fujiwara; H. Takao  Technical Digest - International Electron Devices Meeting, IEDM  2019-December-  IEDM19-422  -IEDM19-425  2019/12
  • A curved Surface-Type MEMS Tactile Array Sensor Realizing Simultaneous Measurement of Micro-Roughness, Friction and Hardness
    綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  36-  4p  2019/11
  • Development of "The Touch Feeling Scanner" for Objective Evaluation of Fingertip Sensation
    西田 吉広; 中光 孝太; 綿谷 一輝; 寺尾 京平; 下川 房男; 有本 和民; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  36-  4p  2019/11
  • Development of microfluidic device for analysis of sepsis infected kidney microenvironment
    小山 哲哉; 中野 大介; 高尾 英邦; 下川 房男; 寺尾 京平  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  36-  4p  2019/11
  • Fablication and Evaluation of Nano Region Tactile Sensor with 60μN Frictional Force Sensitivity and 0.5μm Spatial Resolution
    中島 翼; 綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  36-  4p  2019/11
  • Development of Force Sensor Using Structural Color change for Wireless Detection of Grab State During Endoscope Operation
    前田 祐作; 寺尾 京平; 下川 房男; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  36-  3p  2019/11
  • Hiroki Shikata; Kazuma Ishida; Akihito Ono; Kyohei Terao; Hidekuni Takao; Tsuyoshi Kobayashi; Fusao Shimokawa  Proceedings of IEEE Sensors  2019-October-  2019/10
  • Kazuma Ishida; Hiroki Shikata; Kyohei Terao; Hidekuni Takao; Tsuyoshi Kobayashi; Ikuo Kataoka; Fusao Shimokawa  Proceedings of IEEE Sensors  2019-October-  2019/10
  • Yuki Sakakihara; Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao  Proceedings of IEEE Sensors  2019-October-  PAPER ID 1686  2019/10
  • Koki Hamamoto; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao  Electronics and Communications in Japan  102-  (10)  50  -56  2019/10
  • Kohki Hamamoto; Yusaku Maeda; Kyohei Terao; Fusao Shimokawa; Fumikazu Oohira; Hidekuni Takao  2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII  1874  -1877  2019/06
  • Tsubasa Nakashima; Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao  2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII  1807  -1810  2019/06
  • Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao  2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII  454  -457  2019/06
  • Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)  2019-January-  182  -185  2019/01
  • Koki Hamamoto; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)  2019-January-  198  -201  2019/01
  • Microscale sap dynamic sensor using heat pulse method
    Naoki Hara; Yuki Hara; Hiroki Ishizuka; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa  Proceedings of the 31th International Microprocesses and Nanotechnology Conference (MNC 2018)  16P-11  -85  2018/11  [Refereed]
  • An Array-Type MEMS Fingerprint-like Tactile Sensor Realizing High Resolution Measurement of Spatially Distributing Tactile Information
    綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  35-  3p  2018/10
  • Development of molecular processing platform using DNA trapping device with tool-stock function
    増田 晃士; 石塚 裕己; 高尾 英邦; 下川 房男; 寺尾 京平  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  35-  6p  2018/10
  • Discrimination of Touch Feeling in Submicron Region Realized by Ultra-High Resolution Tactile Sensor
    中島 翼; 綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  35-  4p  2018/10
  • Development of single cell stimulation device for quantitative analysis of spare receptors
    松井 祐樹; MuhammadThaqifIqbalBinMokhtar; 平野 勝也; 高尾 英邦; 下川 房男; 石塚 裕己; 寺尾 京平  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  35-  5p  2018/10
  • Nguyen Thi Dieu Thanh; Kyosuke Okabe; Shota Inoue; Fusao Shimokawa; Shunsuke Nakanishi; Noriaki Tsurumachi  International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz  2018-September-  2018/10
  • Microscale xylem sap flow sensor facilitating the simultaneous measurement of flow velocity and direction
    Yuki Hara; Naoki Hara; Hiroki Ishizuka; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa  Proceedings of the EUROSENSORS 2018 conference (EUROSENSORS 2018)  141  -ID7169  2018/09  [Refereed]
  • Extraction of “Real Friction Coefficient” Depending on Micro Surface Roughness Using High Resolution MEMS Tactile Sensor
    Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao  Asia-Pacific Conference of Transducers and Micro-Nano Technology(APCOT2018)  2pages  2018/06  [Refereed]
  • Measurement of Touch Feeling on Hair Surface Using High Resolution Two-Axis MEMS Tactile Sensor
    Kota Nakamitsu; Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao  Asia-Pacific Conference of Transducers and Micro-Nano Technology(APCOT2018)  2 pages  2018/06  [Refereed]
  • Fabrication of Xylem Sap Flow Sensor Microneedles for Extending its Applications
    T. Takahash; Y. Hara; A. Ono; H. Ishizuka; K. Terao; H. Takao; F. Shimokawa  Proceedings of the 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2018)  PS2  -235  2018/04  [Refereed]
  • 吸引吐出開口アレイを有する積層型マイクロ流体プローブの開発
    神谷昌吾; 石塚裕己; 高尾英邦; 下川房男; 寺尾京平  センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  35th-  2018
  • Spatial dissection of biosamples using Si blade array device
    Taro Shiomi; Mamoru Hirafuji; Hiroki Ishiduka; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao  22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018  3-  1335  -1338  2018
  • マイクロ流体デバイスによる敗血症に伴う腎微小環境変化の解析
    田尾 祐一; 高尾 英邦; 下川 房男; 中野 大介; 寺尾 京平  生命科学系学会合同年次大会  2017年度-  [1P  -0599]  2017/12
  • Development of Si blade array device of through hole type for realizing organ analysis
    塩見 太朗; 香川 大地; 高尾 英邦; 下川 房男; 寺尾 京平  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  34-  4p  2017/10
  • A "Micro-Macro" Integrated Multiscale MEMS Tactile Sensor for Detection Ability of Surface Texture
    綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  34-  1  -4  2017/10
  • Investigation of Process Parameters for Control of Diameter and Alignment of Self-assembled DNA Nanowires
    神谷 昌吾; 高尾 英邦; 下川 房男; 寺尾 京平  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  34-  5p  2017/10
  • Optical driven microtool with enzyme-functionalized surface for direct molecular processing
    増田 晃士; 高尾 英邦; 下川 房男; 寺尾 京平  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  34-  6p  2017/10
  • H. Ishizuka; K. Suzuki; K. Terao; H. Takao; F. Shimokawa; H. Kajimoto  2017 IEEE World Haptics Conference, WHC 2017  659  -664  2017/07
  • H. Ishizuka; K. Suzuki; K. Terao; H. Takao; F. Shimokawa  2017 International Conference on Electronics Packaging, ICEP 2017  484  -486  2017/06
  • Akihito Ono; Akihito Yoneda; Yuichi Tao; Kyohei Terao; Hidekuni Takao; Ryuji Ichihashi; Tsuyoshi Kobayashi; Ikuo Kataoka; Fusao Shimokawa  Proceedings of IEEE Sensors  4pages  2017/01
  • Microscale phloem sap dynamics measurement sensor device for monitoring the transport of nutritive substances in plants
    小野瑛人; 矢野裕也; 寺尾京平; 高尾英邦; 市橋隆自; 小林剛; 片岡郁雄; 下川房男(Akihito Ono; Yuya Yano; K. Terao; H. Takao; Riji Ichihashi; Tsuyoshi Kobayashi; Ikuo Kataoka; F. Shimokaw  29th International Microprocesses and Nanotechnology Conference (MNC2016)  2016/11  [Refereed]
  • Realization of MEMS Static Electricity Sensor with High Sensitivity Using Vertical Mounting method of Large Electrode
    飯間 敦矢; 岡 勇作; 寺尾 京平; 下川 房男; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  33-  1  -4  2016/10
  • A Two-Axis Tactile Sensor with High Sensitivity Aimed at Measurement of Micro Region Surface Texture
    綿谷 一輝; 香西 亮吾; 寺尾 京平; 下川 房男; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  33-  1  -4  2016/10
  • E-2-3 Development of a Compact Cell Trapping Device Integrated with Fluid Handling Components
    Furuya Naoki; SHIMAGAMI Takuya; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; AKIMITSU Kazuya; SUZUKI Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2016-  "E  -2-3-1"-"E-2-3-3"  2016/03
  • E-2-4 Development of Local Light Stimulation and Multi-point Measurement Device for Neural Network Analysis
    UENO Hidetaka; KOMAI Shoji; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; KOTERA Hidetoshi; SUZUKI Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2016-  "E  -2-4-1"-"E-2-4-4"  2016/03
  • Micro Cell Array Using Cell Surface Medication
    鈴木孝明; 鈴木孝明; 寺村裕治; 北濱若奈; 寺尾京平; 高尾英邦; 下川房男; 上野秀貴  電気学会バイオ・マイクロシステム研究会資料  BMS-16-  (1-8)  2016
  • Fabrication of Nano-Actuator for Modulating Surface Plasmon Resonance Wavelength Using Crystalline Anisotropic Plasma Etching
    香川 大地; 鏡原 照正; 下川 房男; 高尾 英邦; 寺尾 京平; 山口 堅三; 鈴木 孝明  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  32-  1  -4  2015/10
  • A new tactile evaluation method for quantification of touch sensation using an in-plane motion MEMS tactile sensor
    香西 亮吾; 寺尾 京平; 下川 房男; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  32-  1  -4  2015/10
  • Optimization of Applied Voltage in μEP Chip for Plant Cell
    古谷 尚輝; 島上 卓也; 下川 房男; 寺尾 京平; 高尾 英邦; 秋光 和也; 鈴木 孝明  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  32-  1  -4  2015/10
  • Molecular wiring with single giant DNA molecules using optically-driven microstructures
    犬飼 亮; 高尾 英邦; 下川 房男; 鈴木 孝明; 寺尾 京平  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  32-  1  -6  2015/10
  • Inert gas metal etching for reducing environmental load and its application
    濱 治慶; 藤原 哲嗣; 下川 房男; 小寺 秀俊; 迚野 泰一; 鈴木 孝明  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  32-  1  -4  2015/10
  • Kretschmann type SPR sensing assisted with electrokinetic effects
    近藤 翔平; 高尾 英邦; 下川 房男; 鈴木 孝明; 寺尾 京平  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  32-  1  -5  2015/10
  • 30am2-PN-24 Microfluidic control method using fin structures operated by frequency modulation
    KAWAI Hayao; YAMASHITA Hirohumi; TERAO Kyohei; TAKAO Hidekuni; YAMADA Kou; SHIMOKAWA Fusao; SUZUKI Takaaki  マイクロ・ナノ工学シンポジウム  2015-  (7)  "30am2  -PN-24-1"-"30am2-PN-24-2"  2015/10
  • 30pm1-A-4 Fabrication of DNA Fiber Analysis Chip Using Rotated/Inclined Photolithography and PDMS Molding Process
    KITANO Kodai; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  マイクロ・ナノ工学シンポジウム  2015-  (7)  "30pm1  -A-4-1"-"30pm1-A-4-2"  2015/10
  • Si/polymer/glassチップを用いた神経細胞組織内局所光刺激デバイスの開発
    上野秀貴; 駒井章治; 寺尾京平; 高尾英邦; 下川房男; 小寺秀俊; 鈴木孝明  センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  32nd-  ROMBUNNO.30AM2-PS-148  2015/10
  • MoP-25 DEVELOPMENT OF A LOCAL LIGHT STIMULATION DEVICE INTEGRATED WITH MICRO ELECTRODE ARRAY
    UENO Hidetaka; KOMAI Shoji; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; KOTERA Hidetoshi; SUZUKI Takaaki  Proceedings of ... JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE  2015-  "MoP  -25-1"-"MoP-25-3"  2015/06
  • 21am2-E7 Separation and detection of biosamples using SPR sensor chip integrated with microslit structures
    Terao Kyohei; Hiramatsu Shinichi; Shimizu Kazunori; Miyanishi Nobumitsu; Suzuki Takaaki; Takao Hidekuni; Shimokawa Fusao; Ohira Fumikazu  マイクロ・ナノ工学シンポジウム  2014-  (6)  "21am2  -E7-1"-"21am2-E7-2"  2014/10
  • Hirofumi Yamashita; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Takaaki Suzuki  International Conference on Optical MEMS and Nanophotonics  167  -168  2014/10
  • J2230202 Development of High Accuracy Spray Coating Method Using Low Viscosity Thick Film Photoresist
    FUJIWARA Kiyoshi; AKAMATSU Mikio; KOUDA Naoko; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; SUZUKI Takaaki  Mechanical Engineering Congress, Japan  2014-  "J2230202  -1"-"J2230202-4"  2014/09
  • E-2-5 Plasma Resistant Evaluation of Photoresist Treated by Vacuum UV Cure Process in ECR Plasma Etching
    HAMA Haruyosi; TERAO Kyohei; TAKAO Hidekuni; SIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2014-  "E  -2-5-1"-"E-2-5-3"  2014/03
  • E-1-2 Improvement of Cell Trapping Efficiency in Microfluidic Device Having Micro-Orifice Array
    ISHII Takahiro; NISHIZAKI Hayato; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2014-  "E  -1-2-1"-"E-1-2-2"  2014/03
  • E-1-3 Chromosome Stretching Characterization of High-Throughput DNA Fiber Analysis Device using centrifugal force
    KITANO Kodai; NITTA Yuki; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2014-  "E  -1-3-1"-"E-1-3-3"  2014/03
  • 神経細胞ネットワーク解析のための局所光刺激デバイスの開発
    上野秀貴; 駒井章治; 寺尾京平; 高尾英邦; 下川房男; 小寺秀俊; 鈴木孝明  日本機械学会情報・知能・精密機器部門講演会講演論文集  2014 (CD-ROM)-  ROMBUNNO.E-2-4  2014/03
  • Microscale Phloem Flow Sensor Fabricated Using MEMS Technology For Measuring Biological Information of Plant Branches
    矢野裕也; 越智誠; 寺尾京平; 鈴木孝明; 高尾英邦; 下川房男; 小林剛; 片岡郁雄  NANOSciTech2014 & IC-NET2014  2014/03  [Refereed]
  • 電位計測アレイを集積化した細胞組織内局所光刺激デバイスの開発
    上野秀貴; 駒井章治; 寺尾京平; 高尾英邦; 下川房男; 小寺秀俊; 鈴木孝明  センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  31st-  ROMBUNNO.21PM3-PS116  2014
  • Yusaku Oka; Ryosuke Shinozaki; Kyohei Terao; Takaaki Suzuki; Fusao Shimokawa; Fumikazu Oohira; Hidekuni Takao  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)  433  -436  2014
  • 5PM1-C-1 Measurement of Trapping Efficiency of a Cell Trapping Device Fabricated by Single-Mask Multidirectional Photolithography
    Nishizaki Hayato; Fukuda Taisuke; Terao Kyohei; Takao Hidekuni; Oohira Fumikazu; Suzuki Takaaki  マイクロ・ナノ工学シンポジウム  2013-  (5)  25  -26  2013/11
  • J161022 Reduction of misalignment for integrated microfluidic systems made of polydimethylsiloxane
    TAMAI Hidetaka; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Mechanical Engineering Congress, Japan  2013-  "J161022  -1"-"J161022-4"  2013/09
  • J161012 Improvement of Mask Etching Selectivity and its application using Vacuum UV Curing Method
    FUJIMURA Kimiya; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Mechanical Engineering Congress, Japan  2013-  "J161012  -1"-"J161012-4"  2013/09
  • J161021 Evaluation of a Polymer MEMS mirror integrated an angular rate sensor
    YAMASHITA Hirofumi; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Mechanical Engineering Congress, Japan  2013-  "J161021  -1"-"J161021-4"  2013/09
  • J161015 Evaluation of chromosome extension properties on microstructures of gene analysis chip
    NITTA Yuki; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Mechanical Engineering Congress, Japan  2013-  "J161015  -1"-"J161015-4"  2013/09
  • J161011 Finite element analysis for driving characteristics of a polymer-MEMS mirror driven attractive force
    SUZUKI Junya; MIURA Takuya; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; NAMAZU Takahiro; MORIKAKU Toshiyuki; OOHIRA Fumikazu; SUZUKI Takaaki  Mechanical Engineering Congress, Japan  2013-  "J161011  -1"-"J161011-4"  2013/09
  • Micro Sap Flow Sensor Using MEMS Technology for Application to Biological Information Measurement of Plants
    越智誠; 鈴木孝明; 高尾英邦; 下川房男; 小林剛; 片岡郁雄  Third International Conference on Plant Vascular Biology  2013/07  [Refereed]
  • Yusaku Maeda; Kyohei Terao; Takaaki Suzuki; Fusao Shimokawa; Hidekuni Takao  Japanese Journal of Applied Physics  52-  (6 PART 2)  pp. 06GL18-06GL18-5  2013/06  [Refereed]
  • E-1-1 Development of a magnetically-driven micropump with photosensitivity nanocomposit
    UEDA Yusaku; TERAO Kyohei; TAKAO Hidekuni; SIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2013-  28  -30  2013/03
  • E-1-2 Accuracy Evaluation of a Polydimethylsiloxane Replica in Soft Lithography
    TAMAI Hidetaka; TAKAO Hidekuni; OOHIRA Fumikazu; TERAO Kyohei; SIMOKAWA Fusao; SUZUKI Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2013-  31  -33  2013/03
  • E-2-4 Integration of an angular rate sensor on a polymer MEMS mirror
    YAMASHITA Hirofumi; TERAO Kyohei; TAKAO Hidekuni; SIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2013-  52  -54  2013/03
  • Hirofumi Yamashita; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Takaaki Suzuki  International Conference on Optical MEMS and Nanophotonics  69  -70  2013
  • Junya Suzuki; Takuya Miura; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Takahiro Namazu; Fumikazu Oohira; Takaaki Suzuki  International Conference on Optical MEMS and Nanophotonics  101  -102  2013
  • Takaaki Suzuki; Kyohei Terao; Hiroyuki Suzuki; Yuki Nitta; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Daisuke Hiramaru; Hidetoshi Kotera  IEEJ Transactions on Sensors and Micromachines  133-  (5)  3  -146  2013  [Refereed]
  • Mikio Akamatsu; Kyohei Terao; Hidekuni Takao; Fusao Simokawa; Fumikazu Oohira; Takaaki Suzuki  IEEJ Transactions on Sensors and Micromachines  133-  (5)  7  -176  2013  [Refereed]
  • Hidetaka Yamasaki; Kyohei Terao; Takaaki Suzuki; Fusao Simokawa; Hidekuni Takao  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)  205  -208  2013
  • A Post-CMOS Process of High Adhesion SU-8 Structure to Apply to Sensor Device
    前田祐作; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦; Y. Maeda; K. Terao; T. Suzuki; F. Shimokawa; H. Takao  25th International Microprocesses and Nanotechnology Conference (MNC2012)  2012/10  [Refereed]
  • J161045 A cell trap chip having mesh structures fabricated by single-mask inclined photolithography
    NISHIZAKI Hayato; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Mechanical Engineering Congress, Japan  2012-  "J161045  -1"-"J161045-4"  2012/09
  • J161023 Improvement of Si/Photoresist Mask Etching Selectivity using Vacuum UV Curing Method
    FUJIMURA Kimiya; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Mechanical Engineering Congress, Japan  2012-  "J161023  -1"-"J161023-4"  2012/09
  • Optically-Driven Microstructures for Manipulating Single DNA Molecule under Fluorescence Microscop
    MASUDA Chihiro; TERAO Kyohei; OANA Hidehiro; WASHIZU Masao; SUZUKI Takaaki; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu  Proceedings of 38th International Conference on Micro and Nano Engineering (MNE2012)  P409-355  2012/09  [Refereed]
  • M. Inoue; A. Okonogi; K. Terao; H. Takao; F. Shimokawa; F. Oohira; H. Kotera; T. Suzuki  MICRO & NANO LETTERS  7-  (8)  725  -728  2012/08  [Refereed]
  • M. Inoue; A. Okonogi; K. Terao; H. Takao; F. Shimokawa; F. Oohira; H. Kotera; T. Suzuki  Micro and Nano Letters  7-  (8)  725  -728  2012/08  [Refereed]
  • Fabrication of magnetic active membrane for micropump made of photosensitive nanocomposite
    NAKAHARA Tasuku; HOSOKAWA Yuuki; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; MIYAGAWA Hayato; NAMAZU Takahiro; KOTERA Hidetoshi; SUZUKI Takaaki  電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan  2012-  (8)  45  -48  2012/06
  • Evaluation for Work Area of Rotated/Inclined UV Lithography and its Application for Gene Analysis Chip
    NITTA Yuki; SUZUKI Hiroyuki; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan  2012-  (8)  41  -44  2012/06
  • A Magnetic-Driven Membrane Made of Photosensitive Nanocomposite without Alignment Process
    T. Nakahara; Y. Hosokawa; K. Terao; H. Takao; F. Shimokawa; F. Oohira; H. Miyagawa; T. Namazu; H. Kotera; T. Suzuki  Technical digest of 7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems [IEEE NEMS2012]  W1B-4  2012/03  [Refereed]
  • Improvement of Coating Uniformity for Thick Photoresist Using a Partial Spray Coat
    M. Akamatsu; K. Terao; H. Takao; F. Shimokawa; F. Oohira; T. Suzuki  Technical digest of 7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems [IEEE NEMS2012]  W3P-33  2012/03  [Refereed]
  • Development of a Universal Integrated Micro Cell Culture System
    Masatoshi Inoue; Atsuhito Okonogi; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Hidetoshi Kotera; Takaaki Suzuki  6TH IEEE INTERNATIONAL CONFERENCE ON NANO/MOLECULAR MEDICINE AND ENGINEERING (IEEE-NANOMED 2012)  2012
  • Fast whole blood testing for detecting biomarkers by size-exclusion SPR sensing
    Shin Ichi Hiramatsu; Kyohei Terao; Kazunori Shimizu; Nobumitsu Miyanishi; Takaaki Suzuki; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira  Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012  186  -188  2012
  • Tasuku Nakahara; Yuuki Hosokawa; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Takahiro Namazu; Hidetoshi Kotera; Takaaki Suzuki  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)  1181  -1184  2012
  • J. Suzuki; T. Nakahara; Y. Hosokawa; Y. Ueda; K. Terao; H. Takao; F. Shimokawa; F. Oohira; H. Miyagawa; H. Kotera; T. Suzuki  International Conference on Optical MEMS and Nanophotonics  204  -205  2012
  • Large area 3D microfabrication technique by multidirectional photolithography for a chromosome extension chip
    Yuki Nitta; Hiroyuki Suzuki; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Takaaki Suzuki  Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012  1822  -1824  2012
  • DNA fiber preparation technique on a chip for clinical diagnosis
    Takaaki Suzuki; Kyohei Terao; Hiroyuki Suzuki; Yuki Nitta; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Daisuke Hiramaru; Hidetoshi Kotera  Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012  272  -274  2012
  • Masatoshi Inoue; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Takaaki Suzuki; Atsuhito Okonogi; Hidetoshi Kotera  IEEE International Conference on Nano/Molecular Medicine and Engineering, NANOMED  70  -73  2012
  • Masataka Arai; Kyohei Terao; Takaaki Suzuki; Fusao Simokawa; Fumikazu Oohira; Hidekuni Takao  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)  148  -151  2012
  • R. Shinozaki; F. Oohira; K. Terao; T. Suzuki; F. Simokawa; H. Takao  International Conference on Optical MEMS and Nanophotonics  107  -108  2012
  • Yusaku Maeda; Kyohei Terao; Takaaki Suzuki; Fusao Shimokawa; Hidekuni Takao  Proceedings of IEEE Sensors  40  -43  2012
  • A Venturi-type Micro Mist Generator fabricated by MEMS Technology and its Application to Local Surface Cooling of Target Objects
    荒井將崇; 寺尾京平; 鈴木孝明; 下川房男; 大平文和; 高尾英邦; Masataka Arai; K. Terao; T. Suzuki; F. Shimokawa; F. Oohira; H. Takao  24th International Microprocesses and Nanotechnology Conference (MNC2011)  2011/10  [Refereed]
  • MP-48 In Situ Fabrication of Active Microfluidic Components Using Photoresist Containing Magnetic Nanoparticles
    Hosokawa Yuuki; Nakahara Tasuku; Terao Kyohei; Takao Hidekuni; Simokawa Fusao; Oohira Fumikazu; Suzuki Takaaki  マイクロ・ナノ工学シンポジウム  2011-  (3)  163  -164  2011/09
  • J161014 Proliferative capacity of biological cells in a microchannel
    INOUE Masatoshi; OKONOGI Atsuhito; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; Oohira Fumikazu; KOTERA Hidetoshi; SUZUKI Takaaki  Mechanical Engineering Congress, Japan  2011-  "J161014  -1"-"J161014-3"  2011/09
  • Fabrication of a Magnetically-Driven Microstructure Made of Magnetic Nanoparticles/SU-8 Composite
    Y. Hosokawa; T. Nakahara; K. Terao; H. Takao; F. Shimokawa; F. Oohira; T. Suzuki  Proceedings of the 6th International Conference on Microtechnologies in Medicine and Biology [MMB2011]  74-75  2011/05  [Refereed]
  • P-1-6 Fabrication of three-dimensional micro molds using single-mask multidirectional photolithography for micro-electroporation
    Fukuda Taisuke; Terao Kyouhei; Takao Hidekuni; Shimokawa Fusao; Oohira Fumikazu; Suzuki Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2011-  171  -174  2011/03
  • D-2-2 Thickness control of thick photoresist using spray coating
    AKAMATSU Mikio; TERAO Kyouhei; TAKAO Hidekuni; SIMOKAWA Fusao; OOHIRA Humikazu; SUZUKI Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2011-  30  -33  2011/03
  • P-1-8 Influence of microchannel width on a microdevice for single-cell manipulation
    TAKASAKI Shouiti; TERAO Kyouhei; TAKAO Hidekuni; SIMOKWA Fusao; OOHIRA Humikazu; SUZUKI Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2011-  181  -183  2011/03
  • P-1-4 Fabrication and evaluation of SPR chip with micro structures by imprint technology
    Moriwake Masayoshi; Watanabe Hideo; Shimizu Kazunori; Terao Kyohei; Suzuki Takaaki; Takao Hidekuni; Simokawa Fusao; Oohira Fumikazu  Conference on Information, Intelligence and Precision Equipment : IIP  2011-  161  -164  2011/03
  • Fusao Shimokawa  Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering  77-  (2)  162  -168  2011/02
  • T. Mishima; K. Terao; H. Takao; F. Shimokawa; F. Oohira; T. Suzuki  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)  221  -224  2011
  • H. Takao; M. Sugiura; M. Ishida; K. Terao; T. Suzuki; F. Shimokawa; F. Oohira  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)  1154  -1157  2011
  • Fusao Shimokawa  Japanese Journal of Applied Physics  49-  (11)  116001  2010/11  [Refereed]
  • Shingo Uchiyama; Makoto Sato; Mitsuo Usui; Tomomi Sakata; Fusao Shimokawa  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)  819  -822  2010
  • M. Mizukami; J. Yamaguchi; N. Nemoto; Y. Kawajiri; H. Hirata; S. Uchiyama; M. Makihara; T. Sakata; N. Shimoyama; H. Ishii; F. Shimokawa  2009 International Conference on Photonics in Switching, PS '09  2009
  • Mitsuo Usui; Shingo Uchiyama; Etsu Hashimoto; Koichi Hadama; Yuzo Ishii; Nobuaki Matsuura; Tomomi Sakata; Nobuhiro Shimoyama; Yasuhiro Sato; Hiromu Ishii; Tohru Matsuura; Fusao Shimokawa; Yuji Uenishi  2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009  158  -159  2009
  • Tomomi Sakata; Mitsuo Usui; Shingo Uchiyama; Nobuhiro Shimoyama; Junichi Kodate; Hiromu Ishii; Tohru Matsuura; Fusao Shimokawa; Yasuhiro Sato  Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS  579  -580  2009
  • Small-footprint thermocapillary optical switch combined with a heater array on a CMOS IC chip
    Makoto Sato; Mitsuhiro Makfflara; Fusao Shimokawa; Shinsuke Matsui  Conference on Optical Fiber Communication, Technical Digest Series  1-  612  -614  2004
  • Improvement of switching time in a thermocapillarity optical switch
    T. Sakata; H. Togo; M. Makihara; F. Shimokawa; K. Kaneko  Conference on Optical Fiber Communication, Technical Digest Series  54-  (3)  2001
  • Tomomi Sakata; Mitsuhiro Makihara; Hiroyoshi Togo; Fusao Shimokawa; Kazumasa Kaneko  Proceedings of SPIE - The International Society for Optical Engineering  4534-  55  -63  2001
  • Fusao Shimokawa; Makoto Sato; Mitsuhiro Makihara; Shuichiro Inagaki; Yasuhide Nishida  Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering  66-  (8)  1173  -1176  2000/08
  • Strictly non-blocking N×N thermo-capillarity optical matrix switch using silica-based waveguide
    Mitsuhiro Makihara; Fusao Shimokawa; Kazumasa Kaneko  Conference on Optical Fiber Communication, Technical Digest Series  1-  207  -209  2000
  • Micromechanical intersecting waveguide optical switch based on thermo-capillarity
    Makoto Sato; Fusao Shimokawa; Shuichiro Inagaki; Yasuhide Nishida  NTT R and D  48-  (1)  9  -14  1999
  • H. Togo; M. Sato; F. Shimokawa  Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)  418  -423  1999
  • Micro-mechanical optical switch
    Fusao Shimokawa; Makoto Sato; Shinji Nagaoka  NTT R and D  48-  (9)  665  -673  1999
  • Waveguide optical switch for 8:1 standby system of optical line terminals
    Makoto Sato; Fusao Shimokawa; Shuichiro Inagaki; Yasuhide Nishida  Conference on Optical Fiber Communication, Technical Digest Series  1998-January-  194  -195  1998
  • Self-latching waveguide optical switch based on thermo-capillarity
    Makoto Sato; Mitsuhiro Makihara; Fusao Shimokawa; Yasuhide Nishida  IEE Conference Publication  (448 /2)  73  -76  1997
  • Fast Silica Etching with High Density Plasma Etching System
    Shimokawa Fusao; Nishida Yasuhide  Proceedings of the IEICE General Conference  1996-  (1)  226  -226  1996/03
  • Optical waveguide switches using oil movement byinterfacial tension control
    Makihara Mitsuhiro; Simokawa Fusao; Hanaoka Yoriko; Nishida Yasuhide  Proceedings of the IEICE General Conference  1996-  (1)  309  -309  1996/03
  • Self-holding optical waveguide switch controlled by micromechanisms
    Mitsuhiro Makihara; Fusao Shimokawa; Yasuhide Nishida  Proceedings - Electronic Components and Technology Conference  418  -422  1995
  • Fabrication of fluorinated polyimide waveguides on copper-polyimide multilayer substrates for opto-electronic multichip modules
    Fusao Shimokawa; Shinji koike; Tohru Matsuura  Proceedings - Electronic Components and Technology Conference  705  -710  1993
  • Fusao Shimokawa  Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering  59-  (4)  555  -558  1993
  • Fast and extremely selective polyimide etching with a magnetically controlled reactive ion etching system
    Fusao Shimokawa; Akinori Furuya; Shinsuke Matsui  Proceedings. IEEE Micro Electro Mechanical Systems  192  -197  1991
  • FAST ATOM BOMBARDMENT SECONDARY NEUTRAL MASS SPECTROMETRY.
    Kazutoshi Nagai; Hiroki Kuwano; Fusao Shimokawa  Report of Research Center of Ion Beam Technology, Hosei University. Supplement  151  -154  1986

Awards & Honors

  • 2017 IEEE Transducers 2017 Outstanding Paper Award Finalist
  • 2016 IEEE SENSORS 2016 Best Student Paper Finalist
  • 2014 第70回電気学術振興賞 論文賞
     JPN
  • 2013 電気学会センサ・マイクロマシン部門 部門大会 第30回「センサ・マイクロマシンと応用システム」シンポジウム 優秀ポスター賞
     JPN
  • 2012 Finalist of CM HO Best Paper Award in Micro/Nano Fluidics
  • 2012 第29回「センサ・マイクロマシンと応用システム」シンポジウム 最優秀技術論文賞
     JPN
  • 2011 優秀ポスター賞
     JPN

Research Grants & Projects

  • A nanotechnology platform established in average science laboratories
    Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research
    Date (from‐to) : 2016/04 -2019/03 
    Author : Nagaoka Shiro; Shikama Tomokazu
     
    Device fabrication experience is important for gaining deep understanding of the science of device physics. A nanotechnology platform has been developed for use in average science laboratories that makes design, fabrication and evaluation possible. Simplified processes including diffusion of Phosphorous and Boron, surface oxidization of silicon substrate, and metal thin film fabrication using thermal assisted silver sintering under normal air environment, and a simplification of the photo lithography process were studied and demonstrated successful fabrication of p-n junctions, MOS and bipolar transistors. The feasibility of the platform as an educational resource was also studied and its effectiveness was confirmed. The results confirm that the platform can be used to establish a nanotechnology platform in average science laboratories as an educational program to cultivate scientific minds and guide students from basics to beyond state of the art technology and science.
  • Development of wavelength tuning type ultrafast THz switching by one-dimensional photonic crystal containing metamaterials
    Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research
    Date (from‐to) : 2015/04 -2018/03 
    Author : Tsurumachi Noriaki; Shimnokawa Fusao; Funahashi Masahiro
     
    In order to carry out research on tunable ultrafast THz switch by hybridization of metamaterial and one-dimensional photonic crystal, we studied the following element technologies. First, a THz metamaterials such as a cut wire or an electric split ring resonator was fabricated on a semiconductor substrate, and their optical properties were evaluated. Next, broadband high intensity THz wave generation from air was carried out by dichroic laser induced plasma method. Finally, we analyzed the resonance characteristics of Fabry - Perot microcavity using wire grid and found that mode splitting occurs when metamaterial is introduced into the cavity. As a result, a useful wavelength variable type THz switch becomes possible.
  • Micro-scale plant vascular sensor for monitoring of sap dynamics and nutrients dynamics in plant shoots
    Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research
    Date (from‐to) : 2015/04 -2018/03 
    Author : Shimokawa Fusao
     
    We newly proposed the microscale xylem-sap-dynamics (flow velocity) sensor that uses the measuring principle of the Granier method. We also fabricated micro-sensor chips for functional verification by using MEMS technology, and assembled them on a resin film for mounting on the epidermis of plants. Furthermore, we measured the sap dynamics by using a mimicked plant experimental setup and actual plant, and succeeded in measuring the flow velocity(0-500μm/s). We also proposed the microscale phloem-sap-dynamics (flow velocity and direction) sensor, and confirmed the possibility of sap dynamic measurement in the actual plant shoots. We demonstrated the feasibility of a novel nutrients dynamics sensor that can conveniently identify the phloem positions and extract pure photosynthates samples in agricultural situations.
  • Development of a novel 2D MEMS mirror combining different materials
    Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research
    Date (from‐to) : 2014/04 -2017/03 
    Author : Suzuki Takaaki; OOHIRA Fumikazu; SHIMOKAWA Fusao; NAMAZU Takahiro
     
    Raster scan type MEMS mirrors are expected to be applied to various fields. For the purpose of large deflection angle drive, miniaturization, low power consumption, and high impact resistance of the MEMS mirror, we proposed a novel MEMS mirror configuration combining heterogeneous materials of silicon / polymer on hinges. Specifically, we fabricated and evaluated two types of MEMS mirrors; 1) a Lorentz driven MEMS mirror with a hybrid configuration combining different materials, and 2) a MEMS mirror integrated with a magnetically induced electromotive force type sensor coil.
  • Development of intense THz light source using anisotropic metamaterial
    Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research
    Date (from‐to) : 2012/04 -2015/03 
    Author : TSURUMACHI Noriaki; FUSAO Shimokawa
     
    (1)We fabricated metamaterial structure on the semiconductor substrate in THz region by photolithography technique. For example, wire grid structure acts as THz polarizer. We confirmed this phenomena by THz time-domain spectroscopy. (2)We fabricated poled polymer for THz generation by corona-poling technique. We chemically synthesized dye molecules named as LEMKE. We observed THz generation using LEMKE poled polymer film by THz time-domain spectroscopy. (3) Although we could not fabricated THz anisotropic metamaterial, we fabricated hyperbolic metamaterial in visible region as metal-dielectric multilayer structure. We confirmed broadband Purcell effect by time-resolved fluorescence measurement using several dye molecule on the metamaterial substrate.
  • Micro scale sap flow sensor based on Granier sensor for measuring biological information of plant branches
    Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research
    Date (from‐to) : 2012/04 -2015/03 
    Author : SHIMOKAWA Fusao; TAKAO Hidekuni; KOBAYASHI Tsuyoshi
     
    We developed a micro sap flow sensor using the measuring principle of the Granier's method by applying MEMS technology. By using the micro fabrication techniques, we fabricated an integrated micro sap flow sensor consisting of micro probes, temperature sensor and thin-film micro heater on a Si substrate. The fabricated micro sensor was reduced to 1/10 the size of a conventional Granier sensor (diameter:φ2mm, length:20 mm). To investigate the use of the proposed sensor in measuring the actual sap flow amount of plants, an experimental system (to control the flow inside a tube) imitating a plant's stem was fabricated. As the result, we demonstrated the use of the sensor in obtaining sap flow amount data (0～150 μm/s), similar to the use of a conventional sensor. By using a fabricated micro sensor, a normal diurnal sap flow pattern was observed in model plant. Therefore, we successfully demonstrated the applicability of the proposed sensor to an actual plant.
  • Development of Crystalline Anisotropic Plasma Etching for Single Crystal Silicon
    Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research
    Date (from‐to) : 2011 -2012 
    Author : SUZUKI Takaaki; OOHIRA Fumikazu; SHIMOKAWA Fusao; TAKAO Hidekuni
     
    In this study, we propose a novel fabrication process for complicated three-dimensional silicon microstructures using the crystalline anisotropic plasma etching of the single crystal silicon with an ordinary RIE process under the normal temperature. The proposed process combined of the conventional isotropic, the conventional vertical anisotropic, and the crystalline anisotropic silicon plasma etchings achieves the complicated microstructures under all dry process with single RIE machine with single mask. To confirm the validity of the proposed process, we demonstrated to fabricate a cantilever and a micro needle for bio-application. In the case of the cantilever, the cantilever released from a substrate was fabricated at 1/5 processing time of the conventional process. It is possible that the complicated three-dimensional silicon microstructures are fabricated in single dry etching equipment.
  • ナノ/マイクロデバイスを用いたセンシング技術に関する研究
    科学研究費補助金
    Date (from‐to) : 2010

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