IEEJ Transactions on Sensors and Micromachines Institute of Electrical Engineers of Japan (IEE Japan) 144 (7) 164 - 169 1341-8939 2024/07
Compartmentalization Device of Microenvironment for Analyzing iPSCs DifferentiationDaiki Fukai; Taro Toyoda; Hidekuni Takao; Fusao Shimokawa; Kyohei TeraoIEEJ Transactions on Sensors and Micromachines...See More
IET Nanobiotechnology Institution of Engineering and Technology (IET) 1751-8741 2023/01
Optically driven microtools with an antibody‐immobilised surface for on‐site cell assemblyShuntaro Mori; Takumi Ito; Hidekuni Takao; Fusao Shimokawa; Kyohei TeraoIET Nanobiotechnology Institution of E...See More
The First Hand-Held Touch Feeling Measurement System Integrated with Force Sensing MechanismSatoshi Hisayasu; Takaya Ohishi; Yusaku Maeda; Kyohei Terao; Fusao Shimokawa; Hidekuni TakaoProceedings of I...See More
The First Hand-Held Touch Feeling Measurement System Integrated with Force Sensing Mechanism.Satoshi Hisayasu; Takaya Ohishi; Yusaku Maeda; Kyohei Terao; Fusao Shimokawa; Hidekuni TakaoSENSORS 1 - 4 2...See More
Electronics and Communications in Japan 106 (1) 1942-9533 2023
Microfluidic device for differentiation induction of iPS cells derived embryoid bodies with local chemical stimulationNaoto Kusunoki; Shuhei Konagaya; Mitsunori Nishida; Shigehiro Sato; Hidekuni Takao...See More
Electronics and Communications in Japan 105 (3) 1942-9533 2022/09
Pen-type pulse wave measurement system for detecting pathological changes in cardiac diseasesKosei Yamada; Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni TakaoElectronics and Communications ...See More
Koki Takahashi; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao
Microfluidics and Nanofluidics Springer Science and Business Media LLC 26 (2) 1613-4982 2022/02
On-demand formation of heterogeneous gel fibers using two-dimensional micronozzle arrayKoki Takahashi; Hidekuni Takao; Fusao Shimokawa; Kyohei TeraoMicrofluidics and Nanofluidics Springer Science and ...See More
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) IEEE 2022/01
Development of a Minimally Invasive High-Resolution Tactile Sensor For Acquiring Delicate Haptic Changes in HairMasahito Komatsubara; Tsubasa Nakashima; Kyohei Terao; Fusao Shimokawa; Yasunori Matsui;...See More
On-site processing of single chromosomal DNA molecules using optically driven microtools on a microfluidic workbench.Akihito Masuda; Hidekuni Takao; Fusao Shimokawa; Kyohei TeraoScientific reports 11 ...See More
Characterization of an Electrode-Type Tactile Display Using Electrical and Electrostatic Friction StimuliSeiya Komurasaki; Hiroyuki Kajimoto; Fusao Shimokawa; Hiroki IshizukaMICROMACHINES MDPI 12 (3) ...See More
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2021-January 693 - 696 1084-6999 2021/01
Mems-Based 'Multi-Tactile Scanner' with 100μm Spatial Resolution of HardnessYoshihiro Nishida; Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni TakaoProceedings of the IEEE International Confe...See More
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2021-January 139 - 142 1084-6999 2021/01
An Antenna-Shaped MEMS Tactile Sensor with Angle Detection CapabilityHayahide Oka; Kyohei Terao; Fusao Shimokawa; Hidekuni TakaoProceedings of the IEEE International Conference on Micro Electro Mechan...See More
MicroTAS 2021 - 25th International Conference on Miniaturized Systems for Chemistry and Life Sciences 625 - 626 2021
IN VITRO THREE-DIMENSIONAL MODEL OF CAPILLARY MICROCONSTRICTION FOR IMAGING CANCER CELL DYNAMICSYoshihiro Shiraga; Hidekuni Takao; Fusao Shimokawa; Kyohei TeraoMicroTAS 2021 - 25th International Confe...See More
IN VITRO THREE-DIMENSIONAL MODEL OF CAPILLARY MICROCONSTRICTION FOR IMAGING CANCER CELL DYNAMICS
MicroTAS 2021 - 25th International Conference on Miniaturized Systems for Chemistry and Life Sciences 625 - 626 2021
TWO-DIMENTIONAL MICROAPERTURE ARRAY FOR ON-DEMAND FORMATION OF HETEROGENEOUS GEL FIBERS
Koki Takahashi; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao
MicroTAS 2021 - 25th International Conference on Miniaturized Systems for Chemistry and Life Sciences 1245 - 1246 2021
TWO-DIMENTIONAL MICROAPERTURE ARRAY FOR ON-DEMAND FORMATION OF HETEROGENEOUS GEL FIBERSKoki Takahashi; Hidekuni Takao; Fusao Shimokawa; Kyohei TeraoMicroTAS 2021 - 25th International Conference on Min...See More
TWO-DIMENTIONAL MICROAPERTURE ARRAY FOR ON-DEMAND FORMATION OF HETEROGENEOUS GEL FIBERS
Koki Takahashi; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao
MicroTAS 2021 - 25th International Conference on Miniaturized Systems for Chemistry and Life Sciences 1245 - 1246 2021
Proceedings of IEEE Sensors 2021-October 1930-0395 2021
Single-Probe Heat-Pulse Microsensor for Water Transportation Measurement in Plant ShootsFumiya Ino; Wataru Kameda; Kyohei Terao; Hidekuni Takao; Fusao ShimokawaProceedings of IEEE Sensors 2021-October...See More
Observation of normal mode splitting in THz Fabry–Pérot microcavity made of wire grid structures containing cut wire metamaterialsDieuthanh Nguyenthi; Kyosuke Okabe; Fumi Toyoshima; Hiroyuki Suetake; ...See More
Capture and elongation of single chromosomal DNA molecules using optically driven microchopsticksRyo Inukai; Hidekuni Takao; Fusao Shimokawa; Kyohei TeraoBiomicrofluidics 14 (4) 1932-1058 2020/07 [Ref...See More
JOURNAL OF ROBOTICS AND MECHATRONICS FUJI TECHNOLOGY PRESS LTD 32 (2) 305 - 314 0915-3942 2020/04 [Refereed]
A MEMS Tactile Sensor with Fingerprint-Like Array of Contactors for High Resolution Visualization of Surface Distribution of Tactile InformationKazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni...See More
A MEMS Tactile Sensor with Fingerprint-Like Array of Contactors for High Resolution Visualization of Surface Distribution of Tactile Information
Observation of ultrastrong-coupling regime in the Fabry-Pérot microcavities made of metal mirrors containing Lemke dyeMakoto Suzuki; Kouichi Nishiyama; Nobutaka Kani; Xinping Yu; Keiji Uzumi; Masahiro...See More
Stainless microfluidic probe with 2d-array appertures
Shogo Kamiya; Koki Takahashi; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao
23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2019 1088 - 1089 2019
Stainless microfluidic probe with 2d-array apperturesShogo Kamiya; Koki Takahashi; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao23rd International Conference on Miniaturized Systems for Chemistry and ...See More
Stainless microfluidic probe with 2d-array appertures
Shogo Kamiya; Koki Takahashi; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao
23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2019 1088 - 1089 2019
Koki Hamamoto; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao
IEEJ Transactions on Sensors and Micromachines 139 (7) 180 - 185 1341-8939 2019 [Refereed]
A highly sensitive MEMS silicon-hair device reproducing the function of hair follicleKoki Hamamoto; Kyohei Terao; Fusao Shimokawa; Hidekuni TakaoIEEJ Transactions on Sensors and Micromachines 139 (7) ...See More
Electronics and Communications in Japan 101 (10) 45 - 50 1942-9533 2018/10 [Refereed]
Development of micro-inclined well array for trapping single cellsTakuya Tsukamoto; Naoki Furuya; Takuya Shimagami; Rui Sato; Fusao Shimokawa; Kazuya Akimitsu; Takaaki SuzukiElectronics and Communicat...See More
IEEJ Transactions on Sensors and Micromachines 138 (5) 208 - 213 1341-8939 2018 [Refereed]
Development of micro inclined well array for trapping single cellsTakuya Tsukamoto; Naoki Furuya; Takuya Shimagami; Rui Sato; Fusao Shimokawa; Kazuya Akimitsu; Takaaki SuzukiIEEJ Transactions on Senso...See More
IEEJ Transactions on Sensors and Micromachines 137 (5) 128 - 133 1341-8939 2017 [Refereed]
Development of microfluidic device for imaging paracrine communicationYuichi Tao; Kenta Fukuda; Hidekuni Takao; Fusao Shimokawa; Kyohei TeraoIEEJ Transactions on Sensors and Micromachines 137 (5) 128 ...See More
Japanese Journal of Applied Physics IOP PUBLISHING LTD 55 (6) 0021-4922 2016/06 [Refereed]
Development of a two-dimensional scanning micro-mirror utilizing magnetic polymer compositeJunya Suzuki; Yoshiyuki Onishi; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Hayato Miyaga...See More
Development of a local light stimulation device integrated with micro electrode arrayHidetaka Ueno; Shoji Komai; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Hidetoshi Kotera; Takaaki SuzukiMECHANIC...See More
Journal of the Japan Society of Applied Electromagnetics and Mechanics The Japan Society of Applied Electromagnetics and Mechanics 23 (2) 407 - 413 0919-4452 2015
Development of magnetically driven micro valve using SU-8/Fe compositeSUZUKI Junya; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI TakaakiJournal of the Japan Society of Applie...See More
Journal of the Japan Society of Applied Electromagnetics and Mechanics The Japan Society of Applied Electromagnetics and Mechanics 23 (2) 407 - 413 0919-4452 2015
Journal of the Japan Society of Applied Electromagnetics and Mechanics The Japan Society of Applied Electromagnetics and Mechanics 22 (2) 202 - 207 0919-4452 2014
Development of an electromagnetic micropump with photosensitive magnetic nanocompositeUeda Yusaku; Nakahara Tasuku; Terao Kyohei; Takao Hidekuni; Simokawa Fusao; Oohira Fumikazu; Kotera Hidetoshi; Suz...See More
Journal of the Japan Society of Applied Electromagnetics and Mechanics The Japan Society of Applied Electromagnetics and Mechanics 22 (2) 202 - 207 0919-4452 2014
IEEJ Transactions on Sensors and Micromachines The Institute of Electrical Engineers of Japan 133 (9) 260 - 266 1341-8939 2013/09 [Refereed]
Compact Optical Multi-gas Sensors using Micromachining Technology [II] : Characteristics of Ramman Scattering Gas Sensor and Ultraviolet Absorption Spectroscopy Gas SensorASAHI Ippei; SUGIMOTO Sachiyo...See More
IEEJ Transactions on Sensors and Micromachines The Institute of Electrical Engineers of Japan 133 (6) 237 - 242 1341-8939 2013/06 [Refereed]
Compact Optical Multi-gas Sensors using Micromachining Technology [I] : Fabrication of High-precision Micro-optical Bench using Ultra-thick Film ResinITO Masahiro; TAKEDA Tomoya; SUZUKI Takaaki; TAKAO...See More
Signal enhancement of protein binding by electrodeposited gold nanostructures for applications in Kretschmann-type SPR sensorsNoriko Nagase; Kyohei Terao; Nobumitsu Miyanishi; Kazunori Tamai; Noboru U...See More
IEEJ Transactions on Electrical and Electronic Engineering 6 (4) 384 - 389 1931-4973 2011/07 [Refereed]
Fabrication of a microelectromechanical system mirror array and its drive electrodes for low electrical interference in wavelength-selective switchesTomomi Sakata; Mitsuo Usui; Shingo Uchiyama; Nobuhi...See More
Journal of the Japan Society of Precision Engineering The Japan Society for Precision Engineering 73 (9) 967 - 970 0912-0289 2007/09
Gravure & interview: ULVAC, Inc.ISHIKAWA Michio; UCHIDA Taijiro; SHIMOKAWA FusaoJournal of the Japan Society of Precision Engineering The Japan Society for Precision Engineering 73 (9) 967 - 970 0912-...See More
High-speed Switching Operation in a Thermocapillarity Optical Switch for Application to Photonic NetworkFusao Shimokawa; Tomomi Sakata; Mitsuhiro Makihara; Yoshitada KatagiriNTT Technical Review 1 (7)...See More
High-speed Switching Operation in a Thermocapillarity Optical Switch for Application to Photonic Network
Improvement of switching time in a thermocapillarity optical switchT. Sakata; H. Togo; M. Makihara; F. Shimokawa; K. KanekoJournal of Lightwave Technology 19 (7) 1023 - 1027 0733-8724 2001/07 [Referee...See More
Micromechanical optical switches based on thermocapillary integrated in waveguide substrateMistuhiro Makihara; Makoto Sato; Fusao Shimokawa; Yasuhide NishidaJournal of Lightwave Technology 17 (1) 14 -...See More
Journal of Micromechanics and Microengineering 6 (3) 310 - 319 0960-1317 1996/09 [Refereed]
Fabrication of fluorinated polyimide microgrids using magnetically controlled reactive ion etching (MC-RIE) and their applications to an ion drag integrated micropumpAkinori Furuya; Fusao Shimokawa; T...See More
IEEE Transactions on Components Packaging and Manufacturing Technology Part B 19 (1) 124 - 129 1070-9894 1996/02 [Refereed]
New optical and electrical hybrid packaging techniques using optical waveguides for optoelectronic multichip modulesShinji Koike; Fusao Shimokawa; Tohru Matsuura; Hideyuki TakaharaIEEE Transactions on...See More
IEEE Transactions on Components Packaging and Manufacturing Technology Part B 18 (2) 241 - 244 1070-9894 1995/05 [Refereed]
Low-Loss Intersecting Grooved Waveguides with Low Δ for a Self-Holding Optical Matrix SwitchYoriko Hanaoka; Fusao Shimokawa; Yasuhide NishidaIEEE Transactions on Components Packaging and Manufacturing...See More
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 12 (5) 2739 - 2744 0734-2101 1994/09 [Refereed]
Low loss intersecting grooved waveguides with low Δ for self-holding optical matrix switch
Yoriko Hanaoka; Fusao Shimokawa; Yasuhide Nishida
Proceedings - Electronic Components and Technology Conference Publ by IEEE 621 - 624 0569-5503 1994
Low loss intersecting grooved waveguides with low Δ for self-holding optical matrix switchYoriko Hanaoka; Fusao Shimokawa; Yasuhide NishidaProceedings - Electronic Components and Technology Conference...See More
Low loss intersecting grooved waveguides with low Δ for self-holding optical matrix switch
Yoriko Hanaoka; Fusao Shimokawa; Yasuhide Nishida
Proceedings - Electronic Components and Technology Conference Publ by IEEE 621 - 624 0569-5503 1994
Journal of Micromechanics and Microengineering 4 (2) 67 - 73 0960-1317 1994 [Refereed]
Fluorinated polyimide fabrication by magnetically controlled reactive ion etching (MC RIE)A. Furuya; F. Shimokawa; T. Matsuura; R. SawadaJournal of Micromechanics and Microengineering 4 (2) 67 - 73 09...See More
Journal of Micromechanics and Microengineering 4 (2) 67 - 73 0960-1317 1994 [Refereed]
MICRO-GRID FABRICATION OF FLUORINATED POLYIMIDE BY USING MAGNETICALLY CONTROLLED REACTIVE ION ETCHING (MC-RIE)
A FURUYA; F SHIMOKAWA; T MATSUURA; R SAWADA
MICRO ELECTRO MECHANICAL SYSTEMS, PROCEEDINGS I E E E 59 - 64 1993 [Refereed]
MICRO-GRID FABRICATION OF FLUORINATED POLYIMIDE BY USING MAGNETICALLY CONTROLLED REACTIVE ION ETCHING (MC-RIE)A FURUYA; F SHIMOKAWA; T MATSUURA; R SAWADAMICRO ELECTRO MECHANICAL SYSTEMS, PROCEEDINGS I...See More
MICRO-GRID FABRICATION OF FLUORINATED POLYIMIDE BY USING MAGNETICALLY CONTROLLED REACTIVE ION ETCHING (MC-RIE)
A FURUYA; F SHIMOKAWA; T MATSUURA; R SAWADA
MICRO ELECTRO MECHANICAL SYSTEMS, PROCEEDINGS I E E E 59 - 64 1993 [Refereed]
Continuous-wave operation and mirror loss of a U-shaped GaAs/AlGaAs laser diode with two totally reflecting mirrorsFusao Shimokawa; Hidenao Tanaka; Renshi Sawada; Shigeji HaraApplied Physics Letters 5...See More
Laser-manipulated microtool with enzyme-functionalized surface for on site molecular processing [Not invited]Akihito Masuda; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao21st International Conference...See More
Laser-manipulated microtool with enzyme-functionalized surface for on site molecular processing [Not invited]
Structural Color Based Tactile Sensor for Flexible Endoscopic Surgery to Detect Grab State and Organs Hardness [Not invited]Yusaku Maeda; Kyohei Terao; Fusao Shimokawa; Hidekuni TakaoProceedings of t...See More
Structural Color Based Tactile Sensor for Flexible Endoscopic Surgery to Detect Grab State and Organs Hardness [Not invited]
Highly Sensitive Silicon Slip Sensing Imager for Forceps Grippers Used under Low Friction Condition [Not invited]K. Ando; T. Yamamoto; Y. Maeda; K. Terao; F. Shimokawa; M. Fujiwara; H. TakaoTechnical...See More
Highly Sensitive Silicon Slip Sensing Imager for Forceps Grippers Used under Low Friction Condition [Not invited]
K. Ando; T. Yamamoto; Y. Maeda; K. Terao; F. Shimokawa; M. Fujiwara; H. Takao
Technical Digest - International Electron Devices Meeting, IEDM 2019/12
A highly sensitive MEMS silicon-hair device reproducing the function of hair follicle [Not invited]Koki Hamamoto; Kyohei Terao; Fusao Shimokawa; Hidekuni TakaoElectronics and Communications in Japan ...See More
A highly sensitive MEMS silicon-hair device reproducing the function of hair follicle [Not invited]
Koki Hamamoto; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao
Parylene-C Coating on High Resolution MEMS Tactile Sensor for Protection of Measurement Surface [Not invited]Yuki Sakakihara; Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni TakaoProceedings...See More
Parylene-C Coating on High Resolution MEMS Tactile Sensor for Protection of Measurement Surface [Not invited]
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII 2019/06
Simultaneous Measurement of Surface Texture and Elasticity Using Tactile Sensor with Differently Protruded Contactor Array [Not invited]Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao2...See More
Simultaneous Measurement of Surface Texture and Elasticity Using Tactile Sensor with Differently Protruded Contactor Array [Not invited]
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII 2019/06
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII 2019/06
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII 2019/06
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII 2019/06
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII 2019/06
A Highly Sensitive Planer Silicon-Hair Device Reproducing the Function of Human Hair Follicle [Not invited]Koki Hamamoto; Kyohei Terao; Fusao Shimokawa; Hidekuni TakaoProceedings of the IEEE Internat...See More
A Highly Sensitive Planer Silicon-Hair Device Reproducing the Function of Human Hair Follicle [Not invited]
Koki Hamamoto; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2019/01
A Monolithic Fingerprint-Like Tactile Sensor Array Realizaing High Resolution Imaging of Spatially Distributed Tactile Information [Not invited]Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekun...See More
A Monolithic Fingerprint-Like Tactile Sensor Array Realizaing High Resolution Imaging of Spatially Distributed Tactile Information [Not invited]
Proceedings of the 31th International Microprocesses and Nanotechnology Conference (MNC 2018) 2018/11
Microscale sap dynamic sensor using heat pulse method [Not invited]Naoki Hara; Yuki Hara; Hiroki Ishizuka; Kyohei Terao; Hidekuni Takao; Fusao ShimokawaProceedings of the 31th International Microproc...See More
Microscale sap dynamic sensor using heat pulse method [Not invited]
「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 2018/10 Institute of Electrical Engineers of Japan
Development of single cell stimulation device for quantitative analysis of spare receptors [Not invited]松井 祐樹; MuhammadThaqifIqbalBinMokhtar; 平野 勝也; 高尾 英邦; 下川 房男; 石塚 裕己; 寺尾 京平「センサ・マイクロマシンと応用システム」シンポジ...See More
Development of single cell stimulation device for quantitative analysis of spare receptors [Not invited]
「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 2018/10 Institute of Electrical Engineers of Japan
Discrimination of Touch Feeling in Submicron Region Realized by Ultra-High Resolution Tactile Sensor [Not invited]
中島 翼; 綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦
「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 2018/10 Institute of Electrical Engineers of Japan
Discrimination of Touch Feeling in Submicron Region Realized by Ultra-High Resolution Tactile Sensor [Not invited]中島 翼; 綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] ...See More
Discrimination of Touch Feeling in Submicron Region Realized by Ultra-High Resolution Tactile Sensor [Not invited]
中島 翼; 綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦
「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 2018/10 Institute of Electrical Engineers of Japan
Development of molecular processing platform using DNA trapping device with tool-stock function [Not invited]
増田 晃士; 石塚 裕己; 高尾 英邦; 下川 房男; 寺尾 京平
「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 2018/10 Institute of Electrical Engineers of Japan
Development of molecular processing platform using DNA trapping device with tool-stock function [Not invited]増田 晃士; 石塚 裕己; 高尾 英邦; 下川 房男; 寺尾 京平「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 2018...See More
Development of molecular processing platform using DNA trapping device with tool-stock function [Not invited]
増田 晃士; 石塚 裕己; 高尾 英邦; 下川 房男; 寺尾 京平
「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 2018/10 Institute of Electrical Engineers of Japan
An Array-Type MEMS Fingerprint-like Tactile Sensor Realizing High Resolution Measurement of Spatially Distributing Tactile Information [Not invited]
綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦
「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 2018/10 Institute of Electrical Engineers of Japan
An Array-Type MEMS Fingerprint-like Tactile Sensor Realizing High Resolution Measurement of Spatially Distributing Tactile Information [Not invited]綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦「センサ・マイクロマシンと応用システム」シンポジウ...See More
An Array-Type MEMS Fingerprint-like Tactile Sensor Realizing High Resolution Measurement of Spatially Distributing Tactile Information [Not invited]
綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦
「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 2018/10 Institute of Electrical Engineers of Japan
THz Microcavity Made of Wire Grid Structure Containing Electrical Split Ring Resonator Metamaterials [Not invited]
Proceedings of the EUROSENSORS 2018 conference (EUROSENSORS 2018) 2018/09
Microscale xylem sap flow sensor facilitating the simultaneous measurement of flow velocity and direction [Not invited]Yuki Hara; Naoki Hara; Hiroki Ishizuka; Kyohei Terao; Hidekuni Takao; Fusao Shim...See More
Microscale xylem sap flow sensor facilitating the simultaneous measurement of flow velocity and direction [Not invited]
Asia-Pacific Conference of Transducers and Micro-Nano Technology(APCOT2018) 2018/06
Extraction of “Real Friction Coefficient” Depending on Micro Surface Roughness Using High Resolution MEMS Tactile Sensor [Not invited]Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni TakaoAsi...See More
Extraction of “Real Friction Coefficient” Depending on Micro Surface Roughness Using High Resolution MEMS Tactile Sensor [Not invited]
Asia-Pacific Conference of Transducers and Micro-Nano Technology(APCOT2018) 2018/06
Fabrication of Xylem Sap Flow Sensor Microneedles for Extending its Applications [Not invited]
T. Takahash; Y. Hara; A. Ono; H. Ishizuka; K. Terao; H. Takao; F. Shimokawa
Proceedings of the 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2018) 2018/04
Fabrication of Xylem Sap Flow Sensor Microneedles for Extending its Applications [Not invited]T. Takahash; Y. Hara; A. Ono; H. Ishizuka; K. Terao; H. Takao; F. ShimokawaProceedings of the 13th Annual...See More
Fabrication of Xylem Sap Flow Sensor Microneedles for Extending its Applications [Not invited]
T. Takahash; Y. Hara; A. Ono; H. Ishizuka; K. Terao; H. Takao; F. Shimokawa
Proceedings of the 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2018) 2018/04
Spatial dissection of biosamples using Si blade array device [Not invited]
Spatial dissection of biosamples using Si blade array device [Not invited]Taro Shiomi; Mamoru Hirafuji; Hiroki Ishiduka; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao22nd International Conference on ...See More
Spatial dissection of biosamples using Si blade array device [Not invited]
Optical driven microtool with enzyme-functionalized surface for direct molecular processing [Not invited]
増田 晃士; 高尾 英邦; 下川 房男; 寺尾 京平
「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 2017/10 Institute of Electrical Engineers of Japan
Optical driven microtool with enzyme-functionalized surface for direct molecular processing [Not invited]増田 晃士; 高尾 英邦; 下川 房男; 寺尾 京平「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 2017/10 Instit...See More
Optical driven microtool with enzyme-functionalized surface for direct molecular processing [Not invited]
増田 晃士; 高尾 英邦; 下川 房男; 寺尾 京平
「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 2017/10 Institute of Electrical Engineers of Japan
Investigation of Process Parameters for Control of Diameter and Alignment of Self-assembled DNA Nanowires [Not invited]
神谷 昌吾; 高尾 英邦; 下川 房男; 寺尾 京平
「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 2017/10 Institute of Electrical Engineers of Japan
Investigation of Process Parameters for Control of Diameter and Alignment of Self-assembled DNA Nanowires [Not invited]神谷 昌吾; 高尾 英邦; 下川 房男; 寺尾 京平「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 2...See More
Investigation of Process Parameters for Control of Diameter and Alignment of Self-assembled DNA Nanowires [Not invited]
神谷 昌吾; 高尾 英邦; 下川 房男; 寺尾 京平
「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 2017/10 Institute of Electrical Engineers of Japan
A "Micro-Macro" Integrated Multiscale MEMS Tactile Sensor for Detection Ability of Surface Texture [Not invited]
綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦
「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 2017/10 Institute of Electrical Engineers of Japan
A "Micro-Macro" Integrated Multiscale MEMS Tactile Sensor for Detection Ability of Surface Texture [Not invited]綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 2017/10 ...See More
A "Micro-Macro" Integrated Multiscale MEMS Tactile Sensor for Detection Ability of Surface Texture [Not invited]
綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦
「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 2017/10 Institute of Electrical Engineers of Japan
Development of Si blade array device of through hole type for realizing organ analysis [Not invited]
塩見 太朗; 香川 大地; 高尾 英邦; 下川 房男; 寺尾 京平
「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 2017/10 Institute of Electrical Engineers of Japan
Development of Si blade array device of through hole type for realizing organ analysis [Not invited]塩見 太朗; 香川 大地; 高尾 英邦; 下川 房男; 寺尾 京平「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 2017/10 Inst...See More
Development of Si blade array device of through hole type for realizing organ analysis [Not invited]
塩見 太朗; 香川 大地; 高尾 英邦; 下川 房男; 寺尾 京平
「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 2017/10 Institute of Electrical Engineers of Japan
Development of a multi-electrode electrovibration tactile display with 1 mm resolution [Not invited]
H. Ishizuka; K. Suzuki; K. Terao; H. Takao; F. Shimokawa; H. Kajimoto
2017 IEEE World Haptics Conference, WHC 2017 2017/07
Development of a multi-electrode electrovibration tactile display with 1 mm resolution [Not invited]H. Ishizuka; K. Suzuki; K. Terao; H. Takao; F. Shimokawa; H. Kajimoto2017 IEEE World Haptics Confer...See More
Development of a multi-electrode electrovibration tactile display with 1 mm resolution [Not invited]
H. Ishizuka; K. Suzuki; K. Terao; H. Takao; F. Shimokawa; H. Kajimoto
2017 IEEE World Haptics Conference, WHC 2017 2017/07
Development of high resolution electrostatic tactile display [Not invited]H. Ishizuka; K. Suzuki; K. Terao; H. Takao; F. Shimokawa2017 International Conference on Electronics Packaging, ICEP 2017 20...See More
Development of high resolution electrostatic tactile display [Not invited]
H. Ishizuka; K. Suzuki; K. Terao; H. Takao; F. Shimokawa
2017 International Conference on Electronics Packaging, ICEP 2017 2017/06
Microscale phloem sap dynamics measurement sensor device for monitoring the transport of nutritive substances in plants [Not invited]
小野瑛人; 矢野裕也; 寺尾京平; 高尾英邦; 市橋隆自; 小林剛; 片岡郁雄; 下川房男(Akihito Ono; Yuya Yano; K. Terao; H. Takao; Riji Ichihashi; Tsuyoshi Kobayashi; Ikuo Kataoka; F. Shimokaw
29th International Microprocesses and Nanotechnology Conference (MNC2016) 2016/11
Microscale phloem sap dynamics measurement sensor device for monitoring the transport of nutritive substances in plants [Not invited]小野瑛人; 矢野裕也; 寺尾京平; 高尾英邦; 市橋隆自; 小林剛; 片岡郁雄; 下川房男(Akihito Ono; Yuya Ya...See More
Microscale phloem sap dynamics measurement sensor device for monitoring the transport of nutritive substances in plants [Not invited]
小野瑛人; 矢野裕也; 寺尾京平; 高尾英邦; 市橋隆自; 小林剛; 片岡郁雄; 下川房男(Akihito Ono; Yuya Yano; K. Terao; H. Takao; Riji Ichihashi; Tsuyoshi Kobayashi; Ikuo Kataoka; F. Shimokaw
29th International Microprocesses and Nanotechnology Conference (MNC2016) 2016/11
A Two-Axis Tactile Sensor with High Sensitivity Aimed at Measurement of Micro Region Surface Texture [Not invited]
綿谷 一輝; 香西 亮吾; 寺尾 京平; 下川 房男; 高尾 英邦
「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 2016/10 Institute of Electrical Engineers of Japan
A Two-Axis Tactile Sensor with High Sensitivity Aimed at Measurement of Micro Region Surface Texture [Not invited]綿谷 一輝; 香西 亮吾; 寺尾 京平; 下川 房男; 高尾 英邦「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] ...See More
A Two-Axis Tactile Sensor with High Sensitivity Aimed at Measurement of Micro Region Surface Texture [Not invited]
綿谷 一輝; 香西 亮吾; 寺尾 京平; 下川 房男; 高尾 英邦
「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 2016/10 Institute of Electrical Engineers of Japan
Realization of MEMS Static Electricity Sensor with High Sensitivity Using Vertical Mounting method of Large Electrode [Not invited]
飯間 敦矢; 岡 勇作; 寺尾 京平; 下川 房男; 高尾 英邦
「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 2016/10 Institute of Electrical Engineers of Japan
Realization of MEMS Static Electricity Sensor with High Sensitivity Using Vertical Mounting method of Large Electrode [Not invited]飯間 敦矢; 岡 勇作; 寺尾 京平; 下川 房男; 高尾 英邦「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会セン...See More
Realization of MEMS Static Electricity Sensor with High Sensitivity Using Vertical Mounting method of Large Electrode [Not invited]
飯間 敦矢; 岡 勇作; 寺尾 京平; 下川 房男; 高尾 英邦
「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 2016/10 Institute of Electrical Engineers of Japan
E-2-4 Development of Local Light Stimulation and Multi-point Measurement Device for Neural Network Analysis [Not invited]
Conference on Information, Intelligence and Precision Equipment : IIP 2016/03 The Japan Society of Mechanical Engineers
In brain science and psychology, one of the most important purposes of recent studies about neural network, biological circuit in brain, is to establish a method of treatment for the central nervous system disease, such as Alzheimer. Neurons in a neural network is stimulated and controlled by visible lights by Optogenetics methods. In thie paper, we propose a microchip integrated micro electrodes, micro lenses, and pinholes. The proposed microchip is capable of stimulating a neural network with two focused lights which have different affection to the neuron, and measuring the electrical reaction of the neural network.
E-2-4 Development of Local Light Stimulation and Multi-point Measurement Device for Neural Network Analysis [Not invited]UENO Hidetaka; KOMAI Shoji; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; KOT...See More
E-2-4 Development of Local Light Stimulation and Multi-point Measurement Device for Neural Network Analysis [Not invited]
Conference on Information, Intelligence and Precision Equipment : IIP 2016/03 The Japan Society of Mechanical Engineers
In brain science and psychology, one of the most important purposes of recent studies about neural network, biological circuit in brain, is to establish a method of treatment for the central nervous system disease, such as Alzheimer. Neurons in a neural network is stimulated and controlled by visible lights by Optogenetics methods. In thie paper, we propose a microchip integrated micro electrodes, micro lenses, and pinholes. The proposed microchip is capable of stimulating a neural network with two focused lights which have different affection to the neuron, and measuring the electrical reaction of the neural network.
E-2-3 Development of a Compact Cell Trapping Device Integrated with Fluid Handling Components [Not invited]
Conference on Information, Intelligence and Precision Equipment : IIP 2016/03 The Japan Society of Mechanical Engineers
In recent years, the various studies of trapping and operating single cells by using a microfluidic have been proceeded. Many conventional methods requires a fluid operating unit outside the device. Therefore, it is difficult to carry the device during operation. In this study, We integrate a small cell trapping device with miniature peristaltic pumps and a chip made by multidirectional photolithography method. The cells on the highly portable device are easily stored in an incubator and observed under the microscope.
E-2-3 Development of a Compact Cell Trapping Device Integrated with Fluid Handling Components [Not invited]Furuya Naoki; SHIMAGAMI Takuya; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; AKIMITSU Kazu...See More
E-2-3 Development of a Compact Cell Trapping Device Integrated with Fluid Handling Components [Not invited]
Conference on Information, Intelligence and Precision Equipment : IIP 2016/03 The Japan Society of Mechanical Engineers
In recent years, the various studies of trapping and operating single cells by using a microfluidic have been proceeded. Many conventional methods requires a fluid operating unit outside the device. Therefore, it is difficult to carry the device during operation. In this study, We integrate a small cell trapping device with miniature peristaltic pumps and a chip made by multidirectional photolithography method. The cells on the highly portable device are easily stored in an incubator and observed under the microscope.
Micro-scale sap flow sensor fabricated using MEMS technology [Not invited]
Micro Sap Flow Sensor Using MEMS Technology for Application to Biological Information Measurement of Plants [Not invited]
越智誠; 鈴木孝明; 高尾英邦; 下川房男; 小林剛; 片岡郁雄
Third International Conference on Plant Vascular Biology 2013/07
Micro Sap Flow Sensor Using MEMS Technology for Application to Biological Information Measurement of Plants [Not invited]越智誠; 鈴木孝明; 高尾英邦; 下川房男; 小林剛; 片岡郁雄Third International Conference on Plant Vascul...See More
Micro Sap Flow Sensor Using MEMS Technology for Application to Biological Information Measurement of Plants [Not invited]
越智誠; 鈴木孝明; 高尾英邦; 下川房男; 小林剛; 片岡郁雄
Third International Conference on Plant Vascular Biology 2013/07
A post-complementary metal oxide semiconductor formation process of high-adhesiveness su-8 structures for reliable fabrication of integrated microelectromechanical system sensors [Not invited]
A post-complementary metal oxide semiconductor formation process of high-adhesiveness su-8 structures for reliable fabrication of integrated microelectromechanical system sensors [Not invited]Yusaku ...See More
A post-complementary metal oxide semiconductor formation process of high-adhesiveness su-8 structures for reliable fabrication of integrated microelectromechanical system sensors [Not invited]
Compact optical multi-gas sensors using micromachining technology [ I ] -Fabrication of high-precision micro-optical bench using ultra-thick film resin [Not invited]
Compact optical multi-gas sensors using micromachining technology [ I ] -Fabrication of high-precision micro-optical bench using ultra-thick film resin [Not invited]Masahiro Ito; Tomoya Takeda; Takaa...See More
Compact optical multi-gas sensors using micromachining technology [ I ] -Fabrication of high-precision micro-optical bench using ultra-thick film resin [Not invited]
Development of a high-throughput DNA fiber analysis device using MEMS technology [Not invited]Takaaki Suzuki; Kyohei Terao; Hiroyuki Suzuki; Yuki Nitta; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohi...See More
Development of a high-throughput DNA fiber analysis device using MEMS technology [Not invited]
Compact optical multi-gas sensors using micromachining technology [II]-characteristics of raman scattering gas sensor and ultraviolet absorption spectroscopy gas sensor [Not invited]
IEEJ Transactions on Sensors and Micromachines 2013
Compact optical gas sensors based on the Raman effect and ultraviolet absorption spectroscopy were developed. These sensors are miniaturized and do not require alignment, because the mirrors and optics are fixed onto a precisely machined micro optical bench made by micromachining technology. The Raman type gas sensor consists of a small DPSS laser (wavelength 532 nm, pulse energy 200 μJ, pulse width 3 ns, repetition frequency 1 kHz), the sensor chip, and the detector, which are connected by optical fibers. The UV absorption type gas sensor is consists of a D2 lamp, the sensor chip and a compact spectrometer, which are connected by optical fibers. The measured signals showed good linearity along with the gas concentrations. The limit of detection using the Raman effect was 1% for hydrogen or 0.2% for methane, and the minimum limit of detection using ultraviolet absorption spectroscopy was 10 ppm for ammonia and sulfur dioxide for an optical path length of 20 mm.
Compact optical multi-gas sensors using micromachining technology [II]-characteristics of raman scattering gas sensor and ultraviolet absorption spectroscopy gas sensor [Not invited]Ippei Asahi; Sach...See More
Compact optical multi-gas sensors using micromachining technology [II]-characteristics of raman scattering gas sensor and ultraviolet absorption spectroscopy gas sensor [Not invited]
IEEJ Transactions on Sensors and Micromachines 2013
Compact optical gas sensors based on the Raman effect and ultraviolet absorption spectroscopy were developed. These sensors are miniaturized and do not require alignment, because the mirrors and optics are fixed onto a precisely machined micro optical bench made by micromachining technology. The Raman type gas sensor consists of a small DPSS laser (wavelength 532 nm, pulse energy 200 μJ, pulse width 3 ns, repetition frequency 1 kHz), the sensor chip, and the detector, which are connected by optical fibers. The UV absorption type gas sensor is consists of a D2 lamp, the sensor chip and a compact spectrometer, which are connected by optical fibers. The measured signals showed good linearity along with the gas concentrations. The limit of detection using the Raman effect was 1% for hydrogen or 0.2% for methane, and the minimum limit of detection using ultraviolet absorption spectroscopy was 10 ppm for ammonia and sulfur dioxide for an optical path length of 20 mm.
Dual-axis polymer-MEMS mirror made of Photosensitive Nanocomposite [Not invited]
Improvement of Coating Uniformity for Thick Photoresist Using a Partial Spray Coat [Not invited]
7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems [NEMS2012] 2012
Improvement of Coating Uniformity for Thick Photoresist Using a Partial Spray Coat [Not invited]7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems [NEMS2012] 201...See More
Improvement of Coating Uniformity for Thick Photoresist Using a Partial Spray Coat [Not invited]
7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems [NEMS2012] 2012
Cell Culture on MEMS Materials in Micro-Environment Limited by a Physical Condition [Not invited]
7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems [NEMS2012] 2012
Cell Culture on MEMS Materials in Micro-Environment Limited by a Physical Condition [Not invited]7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems [NEMS2012] 20...See More
Cell Culture on MEMS Materials in Micro-Environment Limited by a Physical Condition [Not invited]
7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems [NEMS2012] 2012
Design and Fabrication of Electrostatically Driven In-Plane MEMS Rotational Mirror with Electrostatic Rotary Encoder [Not invited]
2012 International Conference on Optical MEMS & Nanophotonics 2012
Optically-Driven Microstructures for Manipulating Single DNA Molecule under Fluorescence Microscope [Not invited]
38th International Conference on Micro and Nano Engineering (MNE2012) 2012
Fast whole blood testing for detecting biomarkers by size-exclusion SPR sensing [Not invited]
The 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS2012) 2012
Fast whole blood testing for detecting biomarkers by size-exclusion SPR sensing [Not invited]The 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS2012) ...See More
Fast whole blood testing for detecting biomarkers by size-exclusion SPR sensing [Not invited]
The 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS2012) 2012
A Novel Integrated Tactile Image Sensor for Detection of Surface Friction and Hardness Using the Reference Plane Structure [Not invited]
IEEE Sensors2012 Conference 2012
A Post-CMOS Process of High Adhesion SU-8 Structure to Apply to Sensor Device [Not invited]
25th International Microprocesses and Nanotechnology Conference (MNC2012) 2012
Fabrication of micro sap flow sensors by using MEMS technology [Not invited]
第29回「センサ・マイクロマシンと応用システム」シンポジウム 2012
High-driven-type micro device ordor generator with MEMS actuator [Not invited]
第29回「センサ・マイクロマシンと応用システム」シンポジウム 2012
Compact optical multi-gas sensors using micromachning technology [I] [Not invited]
第29回「センサ・マイクロマシンと応用システム」シンポジウム 2012
Compact optical multi-gas sensors using micromachning technology [II] [Not invited]
第29回「センサ・マイクロマシンと応用システム」シンポジウム 2012
Crystalline Anisotropic Dry Etching for Single Crystal Silicon [Not invited]
The 24th IEEE International Conference on Micro Electro Mechanical Systems [MEMS2011] 2011
Micro Fluidic Circuit Design with “SPICE Simulation [Not invited]
The 24th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2011) 2011
Fabrication of a Magnetically-Driven Microstructure Made of Magnetic Nanoparticles/SU-8 Composite [Not invited]
6th International Conference on Microtechnologies in Medicine and Biology [MMB2011] 2011
Fabrication of a Magnetically-Driven Microstructure Made of Magnetic Nanoparticles/SU-8 Composite [Not invited]6th International Conference on Microtechnologies in Medicine and Biology [MMB2011] 201...See More
Fabrication of a Magnetically-Driven Microstructure Made of Magnetic Nanoparticles/SU-8 Composite [Not invited]
6th International Conference on Microtechnologies in Medicine and Biology [MMB2011] 2011
A Venturi-type Micro Mist Generator fabricated by MEMS Technology and its Application to Local Surface Cooling of Target Objects [Not invited]
24th International Microprocesses and Nanotechnology Conference (MNC2011) 2011
A Venturi-type Micro Mist Generator fabricated by MEMS Technology and its Application to Local Surface Cooling of Target Objects [Not invited]24th International Microprocesses and Nanotechnology Conf...See More
A Venturi-type Micro Mist Generator fabricated by MEMS Technology and its Application to Local Surface Cooling of Target Objects [Not invited]
24th International Microprocesses and Nanotechnology Conference (MNC2011) 2011
Measurement of attractive force generated by magnetic photosensitive nanocomposite [Not invited]
JSME International Workshop on Micro/Nano-Engineering 2011
A partial coat for removal of edge bead from thick photoresist using a spray method [Not invited]
JSME International Workshop on Micro/Nano-Engineering 2011
FEM analysis of a polymer MEMS mirror using photosensitive nano composite [Not invited]
JSME International Workshop on Micro/Nano-Engineering 2011
Quantitative evaluation of cell proliferation in an integrated micro cell culture system [Not invited]
JSME International Workshop on Micro/Nano-Engineering 2011
New H-shape soft spring and its micro mirror application [Not invited]
The 23rd IEEE International Conference on Micro Electro Mechanical Systems [MEMS2010] 2010
Sensing Characteristics of Vertical Combo-Drive MEMS Mirror with Sensing Function for Phase-Shift Denices [Not invited]
The 27th Sensor Symposium on Sensors, micromachines and Applied Systems 2010
Crystalline Anisotropic Etching for Single Crystal Slicon Using Dry Etching [Not invited]
The 27th Sensor Symposium on Sensor, Micromachines and Applied Systems 2010
Fabrication of Low-Electrical-Interference MEMS Mirror Array Module for Wavelength-Selective Switches [Not invited]
The 27th Sensor symposium on Sensor. Micromachines and Applied Systems 2010
Effect of AC drive in control of MEMS mirror tilt angle [Not invited]
2009 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2009) 2009
MEMS-based 1×43 wavelength-selective switch with flat passband [Not invited]
35th European Conference on Optical Communication (ECOC 2009) 2009
128×128 3D-MEMS optical switch module with simultaneous optical paths connection for optical cross-connect systems [Not invited]
International Conference on Photonics in Switching 2009 (PS 2009) 2009
Low-crosstalk wavelength-selective switch using MEMS mirror array integrated with a Z-shaped alignment mark [Not invited]
15th Microoptics Conference (MOC’09) 2009
512×512 port 3D MEMS optical switch module with toroidal concave mirror [Not invited]
15th Microoptics Conference (MOC’09) 2009
High-aspect-ratio gold electrodes fabricated by thick-multilevel interconnection technology for electrical isolation of MEMS mirrors in wavelength-selective switches [Not invited]
The 22nd Annual Meeting of the IEEE Photonics Society 2009
High-aspect-ratio gold electrodes fabricated by thick-multilevel interconnection technology for electrical isolation of MEMS mirrors in wavelength-selective switches [Not invited]The 22nd Annual Meet...See More
High-aspect-ratio gold electrodes fabricated by thick-multilevel interconnection technology for electrical isolation of MEMS mirrors in wavelength-selective switches [Not invited]
The 22nd Annual Meeting of the IEEE Photonics Society 2009
Fast and highly stable peak optical search algorithm based on motion control of MEMS [Not invited]
Asian Symposium for Precision Engineering and Nanotechnology 2009
Works
小型光学式マルチガスセンサの製品化研究
2012 -2013
マイクロマシン技術を用いた小型光学マルチガスセンサの開発
2010 -2011
MISC
iPS細胞胚様体の局所刺激を目指したマイクロデバイスの開発—Microfluidic Device for Differentiation Induction of iPS Cells-derived Embryoid Bodies with Local Chemical Stimulation
楠 直人; 小長谷 周平; 西田 光徳; 佐藤 成弘; 高尾 英邦; 下川 房男; 寺尾 京平 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines 142- (12) 310 -315 2022/12
iPS細胞胚様体の局所刺激を目指したマイクロデバイスの開発—Microfluidic Device for Differentiation Induction of iPS Cells-derived Embryoid Bodies with Local Chemical Stimulation楠 直人; 小長谷 周平; 西田 光徳; 佐藤 成弘; 高尾 英邦; 下川 房男; 寺尾 京平 電気学...See More
iPS細胞胚様体の局所刺激を目指したマイクロデバイスの開発—Microfluidic Device for Differentiation Induction of iPS Cells-derived Embryoid Bodies with Local Chemical Stimulation
楠 直人; 小長谷 周平; 西田 光徳; 佐藤 成弘; 高尾 英邦; 下川 房男; 寺尾 京平 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines 142- (12) 310 -315 2022/12
Development of 3D model of capillary microconstriction for analysis of cancer cell dynamics
On site cell assembly in a microfluidic device using optically driven microtools with antibody-immobilized surface森 駿太郎; 高尾 英邦; 下川 房男; 寺尾 京平 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 37- ...See More
On site cell assembly in a microfluidic device using optically driven microtools with antibody-immobilized surface
Development of Liquid/Particle-Resistant Packaging of High-Resolution MEMS Tactile Sensor for Medical Applications綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 37- ...See More
Development of Liquid/Particle-Resistant Packaging of High-Resolution MEMS Tactile Sensor for Medical Applications
Acquisition of Local Tactile Information by Spot Contact Using A Highly Sensitive MEMS Silicon-Hair Device植村 周; 濱本 晃輝; 寺尾 京平; 下川 房男; 高尾 英邦 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 37- 3p...See More
Acquisition of Local Tactile Information by Spot Contact Using A Highly Sensitive MEMS Silicon-Hair Device
Yusaku Maeda; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2020-January- 689 -692 2020/01
Structural Color Based Tactile Sensor for Flexible Endoscopic Surgery to Detect Grab State and Organs HardnessYusaku Maeda; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao Proceedings of the IEEE Inter...See More
Yusaku Maeda; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2020-January- 689 -692 2020/01
Laser-manipulated microtool with enzyme-functionalized surface for on site molecular processing
Akihito Masuda; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017 433 -434 2020
Laser-manipulated microtool with enzyme-functionalized surface for on site molecular processingAkihito Masuda; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao 21st International Conference on Miniaturi...See More
Laser-manipulated microtool with enzyme-functionalized surface for on site molecular processing
Akihito Masuda; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017 433 -434 2020
K. Ando; T. Yamamoto; Y. Maeda; K. Terao; F. Shimokawa; M. Fujiwara; H. Takao Technical Digest - International Electron Devices Meeting, IEDM 2019-December- IEDM19-422 -IEDM19-425 2019/12
Highly Sensitive Silicon Slip Sensing Imager for Forceps Grippers Used under Low Friction ConditionK. Ando; T. Yamamoto; Y. Maeda; K. Terao; F. Shimokawa; M. Fujiwara; H. Takao Technical Digest - Int...See More
K. Ando; T. Yamamoto; Y. Maeda; K. Terao; F. Shimokawa; M. Fujiwara; H. Takao Technical Digest - International Electron Devices Meeting, IEDM 2019-December- IEDM19-422 -IEDM19-425 2019/12
A curved Surface-Type MEMS Tactile Array Sensor Realizing Simultaneous Measurement of Micro-Roughness, Friction and Hardness
Fablication and Evaluation of Nano Region Tactile Sensor with 60μN Frictional Force Sensitivity and 0.5μm Spatial Resolution中島 翼; 綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロ...See More
Fablication and Evaluation of Nano Region Tactile Sensor with 60μN Frictional Force Sensitivity and 0.5μm Spatial Resolution
Development of Force Sensor Using Structural Color change for Wireless Detection of Grab State During Endoscope Operation前田 祐作; 寺尾 京平; 下川 房男; 高尾 英邦 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]...See More
Development of Force Sensor Using Structural Color change for Wireless Detection of Grab State During Endoscope Operation
Yuki Sakakihara; Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao Proceedings of IEEE Sensors 2019-October- PAPER ID 1686 2019/10
Parylene-C Coating on High Resolution MEMS Tactile Sensor for Protection of Measurement SurfaceYuki Sakakihara; Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao Proceedings of IEEE Sens...See More
Koki Hamamoto; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao Electronics and Communications in Japan 102- (10) 50 -56 2019/10
A highly sensitive MEMS silicon-hair device reproducing the function of hair follicleKoki Hamamoto; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao Electronics and Communications in Japan 102- (10) ...See More
Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2019-January- 182 -185 2019/01
A Monolithic Fingerprint-Like Tactile Sensor Array Realizaing High Resolution Imaging of Spatially Distributed Tactile InformationKazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao Procee...See More
Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2019-January- 182 -185 2019/01
Koki Hamamoto; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2019-January- 198 -201 2019/01
A Highly Sensitive Planer Silicon-Hair Device Reproducing the Function of Human Hair FollicleKoki Hamamoto; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao Proceedings of the IEEE International Confere...See More
Koki Hamamoto; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2019-January- 198 -201 2019/01
Microscale sap dynamic sensor using heat pulse method
Naoki Hara; Yuki Hara; Hiroki Ishizuka; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa Proceedings of the 31th International Microprocesses and Nanotechnology Conference (MNC 2018) 16P-11 -85 2018/11 [Refereed]
Microscale sap dynamic sensor using heat pulse methodNaoki Hara; Yuki Hara; Hiroki Ishizuka; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa Proceedings of the 31th International Microprocesses and Nan...See More
Microscale sap dynamic sensor using heat pulse method
Naoki Hara; Yuki Hara; Hiroki Ishizuka; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa Proceedings of the 31th International Microprocesses and Nanotechnology Conference (MNC 2018) 16P-11 -85 2018/11 [Refereed]
An Array-Type MEMS Fingerprint-like Tactile Sensor Realizing High Resolution Measurement of Spatially Distributing Tactile Information
Development of single cell stimulation device for quantitative analysis of spare receptors松井 祐樹; MuhammadThaqifIqbalBinMokhtar; 平野 勝也; 高尾 英邦; 下川 房男; 石塚 裕己; 寺尾 京平 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ...See More
Development of single cell stimulation device for quantitative analysis of spare receptors
Extraction of “Real Friction Coefficient” Depending on Micro Surface Roughness Using High Resolution MEMS Tactile Sensor
Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao Asia-Pacific Conference of Transducers and Micro-Nano Technology(APCOT2018) 2pages 2018/06 [Refereed]
Extraction of “Real Friction Coefficient” Depending on Micro Surface Roughness Using High Resolution MEMS Tactile SensorKazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao Asia-Pacific Con...See More
Extraction of “Real Friction Coefficient” Depending on Micro Surface Roughness Using High Resolution MEMS Tactile Sensor
Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao Asia-Pacific Conference of Transducers and Micro-Nano Technology(APCOT2018) 2pages 2018/06 [Refereed]
Measurement of Touch Feeling on Hair Surface Using High Resolution Two-Axis MEMS Tactile Sensor
Kota Nakamitsu; Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao Asia-Pacific Conference of Transducers and Micro-Nano Technology(APCOT2018) 2 pages 2018/06 [Refereed]
Measurement of Touch Feeling on Hair Surface Using High Resolution Two-Axis MEMS Tactile SensorKota Nakamitsu; Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao Asia-Pacific Conference o...See More
Measurement of Touch Feeling on Hair Surface Using High Resolution Two-Axis MEMS Tactile Sensor
Kota Nakamitsu; Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao Asia-Pacific Conference of Transducers and Micro-Nano Technology(APCOT2018) 2 pages 2018/06 [Refereed]
Fabrication of Xylem Sap Flow Sensor Microneedles for Extending its Applications
T. Takahash; Y. Hara; A. Ono; H. Ishizuka; K. Terao; H. Takao; F. Shimokawa Proceedings of the 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2018) PS2 -235 2018/04 [Refereed]
Fabrication of Xylem Sap Flow Sensor Microneedles for Extending its ApplicationsT. Takahash; Y. Hara; A. Ono; H. Ishizuka; K. Terao; H. Takao; F. Shimokawa Proceedings of the 13th Annual IEEE Interna...See More
Fabrication of Xylem Sap Flow Sensor Microneedles for Extending its Applications
T. Takahash; Y. Hara; A. Ono; H. Ishizuka; K. Terao; H. Takao; F. Shimokawa Proceedings of the 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2018) PS2 -235 2018/04 [Refereed]
Spatial dissection of biosamples using Si blade array device
Taro Shiomi; Mamoru Hirafuji; Hiroki Ishiduka; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018 3- 1335 -1338 2018
Spatial dissection of biosamples using Si blade array deviceTaro Shiomi; Mamoru Hirafuji; Hiroki Ishiduka; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao 22nd International Conference on Miniaturized ...See More
Spatial dissection of biosamples using Si blade array device
Taro Shiomi; Mamoru Hirafuji; Hiroki Ishiduka; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018 3- 1335 -1338 2018
Investigation of Process Parameters for Control of Diameter and Alignment of Self-assembled DNA Nanowires神谷 昌吾; 高尾 英邦; 下川 房男; 寺尾 京平 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 34- 5p 2017/...See More
Investigation of Process Parameters for Control of Diameter and Alignment of Self-assembled DNA Nanowires
H. Ishizuka; K. Suzuki; K. Terao; H. Takao; F. Shimokawa; H. Kajimoto 2017 IEEE World Haptics Conference, WHC 2017 659 -664 2017/07
Development of a multi-electrode electrovibration tactile display with 1 mm resolutionH. Ishizuka; K. Suzuki; K. Terao; H. Takao; F. Shimokawa; H. Kajimoto 2017 IEEE World Haptics Conference, WHC 201...See More
H. Ishizuka; K. Suzuki; K. Terao; H. Takao; F. Shimokawa 2017 International Conference on Electronics Packaging, ICEP 2017 484 -486 2017/06
Development of high resolution electrostatic tactile displayH. Ishizuka; K. Suzuki; K. Terao; H. Takao; F. Shimokawa 2017 International Conference on Electronics Packaging, ICEP 2017 484 -486 2017...See More
Microscale phloem sap dynamics measurement sensor device for monitoring the transport of nutritive substances in plants
小野瑛人; 矢野裕也; 寺尾京平; 高尾英邦; 市橋隆自; 小林剛; 片岡郁雄; 下川房男(Akihito Ono; Yuya Yano; K. Terao; H. Takao; Riji Ichihashi; Tsuyoshi Kobayashi; Ikuo Kataoka; F. Shimokaw 29th International Microprocesses and Nanotechnology Conference (MNC2016) 2016/11 [Refereed]
Microscale phloem sap dynamics measurement sensor device for monitoring the transport of nutritive substances in plants小野瑛人; 矢野裕也; 寺尾京平; 高尾英邦; 市橋隆自; 小林剛; 片岡郁雄; 下川房男(Akihito Ono; Yuya Yano; K. Terao; H...See More
Microscale phloem sap dynamics measurement sensor device for monitoring the transport of nutritive substances in plants
小野瑛人; 矢野裕也; 寺尾京平; 高尾英邦; 市橋隆自; 小林剛; 片岡郁雄; 下川房男(Akihito Ono; Yuya Yano; K. Terao; H. Takao; Riji Ichihashi; Tsuyoshi Kobayashi; Ikuo Kataoka; F. Shimokaw 29th International Microprocesses and Nanotechnology Conference (MNC2016) 2016/11 [Refereed]
Realization of MEMS Static Electricity Sensor with High Sensitivity Using Vertical Mounting method of Large Electrode
Realization of MEMS Static Electricity Sensor with High Sensitivity Using Vertical Mounting method of Large Electrode飯間 敦矢; 岡 勇作; 寺尾 京平; 下川 房男; 高尾 英邦 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [...See More
Realization of MEMS Static Electricity Sensor with High Sensitivity Using Vertical Mounting method of Large Electrode
A Two-Axis Tactile Sensor with High Sensitivity Aimed at Measurement of Micro Region Surface Texture綿谷 一輝; 香西 亮吾; 寺尾 京平; 下川 房男; 高尾 英邦 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 33- 1 -4 ...See More
A Two-Axis Tactile Sensor with High Sensitivity Aimed at Measurement of Micro Region Surface Texture
E-2-4 Development of Local Light Stimulation and Multi-point Measurement Device for Neural Network AnalysisUENO Hidetaka; KOMAI Shoji; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; KOTERA Hidetoshi; ...See More
E-2-4 Development of Local Light Stimulation and Multi-point Measurement Device for Neural Network Analysis
A new tactile evaluation method for quantification of touch sensation using an in-plane motion MEMS tactile sensor香西 亮吾; 寺尾 京平; 下川 房男; 高尾 英邦 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 32- ...See More
A new tactile evaluation method for quantification of touch sensation using an in-plane motion MEMS tactile sensor
30am2-PN-24 Microfluidic control method using fin structures operated by frequency modulationKAWAI Hayao; YAMASHITA Hirohumi; TERAO Kyohei; TAKAO Hidekuni; YAMADA Kou; SHIMOKAWA Fusao; SUZUKI Takaaki ...See More
30am2-PN-24 Microfluidic control method using fin structures operated by frequency modulation
MoP-25 DEVELOPMENT OF A LOCAL LIGHT STIMULATION DEVICE INTEGRATED WITH MICRO ELECTRODE ARRAY
UENO Hidetaka; KOMAI Shoji; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; KOTERA Hidetoshi; SUZUKI Takaaki Proceedings of ... JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE 2015- "MoP -25-1"-"MoP-25-3" 2015/06
MoP-25 DEVELOPMENT OF A LOCAL LIGHT STIMULATION DEVICE INTEGRATED WITH MICRO ELECTRODE ARRAYUENO Hidetaka; KOMAI Shoji; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; KOTERA Hidetoshi; SUZUKI Takaaki ...See More
MoP-25 DEVELOPMENT OF A LOCAL LIGHT STIMULATION DEVICE INTEGRATED WITH MICRO ELECTRODE ARRAY
UENO Hidetaka; KOMAI Shoji; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; KOTERA Hidetoshi; SUZUKI Takaaki Proceedings of ... JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE 2015- "MoP -25-1"-"MoP-25-3" 2015/06
21am2-E7 Separation and detection of biosamples using SPR sensor chip integrated with microslit structures
21am2-E7 Separation and detection of biosamples using SPR sensor chip integrated with microslit structuresTerao Kyohei; Hiramatsu Shinichi; Shimizu Kazunori; Miyanishi Nobumitsu; Suzuki Takaaki; Takao...See More
21am2-E7 Separation and detection of biosamples using SPR sensor chip integrated with microslit structures
J2230202 Development of High Accuracy Spray Coating Method Using Low Viscosity Thick Film PhotoresistFUJIWARA Kiyoshi; AKAMATSU Mikio; KOUDA Naoko; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; SUZUK...See More
J2230202 Development of High Accuracy Spray Coating Method Using Low Viscosity Thick Film Photoresist
5PM1-C-1 Measurement of Trapping Efficiency of a Cell Trapping Device Fabricated by Single-Mask Multidirectional PhotolithographyNishizaki Hayato; Fukuda Taisuke; Terao Kyohei; Takao Hidekuni; Oohira ...See More
5PM1-C-1 Measurement of Trapping Efficiency of a Cell Trapping Device Fabricated by Single-Mask Multidirectional Photolithography
J161022 Reduction of misalignment for integrated microfluidic systems made of polydimethylsiloxaneTAMAI Hidetaka; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki Mechan...See More
J161022 Reduction of misalignment for integrated microfluidic systems made of polydimethylsiloxane
Micro Sap Flow Sensor Using MEMS Technology for Application to Biological Information Measurement of Plants
越智誠; 鈴木孝明; 高尾英邦; 下川房男; 小林剛; 片岡郁雄 Third International Conference on Plant Vascular Biology 2013/07 [Refereed]
Micro Sap Flow Sensor Using MEMS Technology for Application to Biological Information Measurement of Plants越智誠; 鈴木孝明; 高尾英邦; 下川房男; 小林剛; 片岡郁雄 Third International Conference on Plant Vascular Biology 2...See More
Micro Sap Flow Sensor Using MEMS Technology for Application to Biological Information Measurement of Plants
越智誠; 鈴木孝明; 高尾英邦; 下川房男; 小林剛; 片岡郁雄 Third International Conference on Plant Vascular Biology 2013/07 [Refereed]
Yusaku Maeda; Kyohei Terao; Takaaki Suzuki; Fusao Shimokawa; Hidekuni Takao Japanese Journal of Applied Physics 52- (6 PART 2) pp. 06GL18-06GL18-5 2013/06 [Refereed]
A post-complementary metal oxide semiconductor formation process of high-adhesiveness su-8 structures for reliable fabrication of integrated microelectromechanical system sensorsYusaku Maeda; Kyohei T...See More
E-1-1 Development of a magnetically-driven micropump with photosensitivity nanocompositUEDA Yusaku; TERAO Kyohei; TAKAO Hidekuni; SIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki Conference on Informa...See More
E-1-1 Development of a magnetically-driven micropump with photosensitivity nanocomposit
E-1-2 Accuracy Evaluation of a Polydimethylsiloxane Replica in Soft LithographyTAMAI Hidetaka; TAKAO Hidekuni; OOHIRA Fumikazu; TERAO Kyohei; SIMOKAWA Fusao; SUZUKI Takaaki Conference on Information,...See More
E-1-2 Accuracy Evaluation of a Polydimethylsiloxane Replica in Soft Lithography
E-2-4 Integration of an angular rate sensor on a polymer MEMS mirrorYAMASHITA Hirofumi; TERAO Kyohei; TAKAO Hidekuni; SIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki Conference on Information, Intell...See More
E-2-4 Integration of an angular rate sensor on a polymer MEMS mirror
Hirofumi Yamashita; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Takaaki Suzuki International Conference on Optical MEMS and Nanophotonics 69 -70 2013
Integration of angular rate sensor on large deflection polymer-MEMS mirrorHirofumi Yamashita; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Takaaki Suzuki International Conference o...See More
Development of a high-throughput DNA fiber analysis device using MEMS technologyTakaaki Suzuki; Kyohei Terao; Hiroyuki Suzuki; Yuki Nitta; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Daisuke Hir...See More
Development of high accuracy spray coating method using multi-layer coatMikio Akamatsu; Kyohei Terao; Hidekuni Takao; Fusao Simokawa; Fumikazu Oohira; Takaaki Suzuki IEEJ Transactions on Sensors and ...See More
Hidetaka Yamasaki; Kyohei Terao; Takaaki Suzuki; Fusao Simokawa; Hidekuni Takao Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 205 -208 2013
Patternable atmospheric-pressure plasma jets with gas discharge in microfluidic channel arrayHidetaka Yamasaki; Kyohei Terao; Takaaki Suzuki; Fusao Simokawa; Hidekuni Takao Proceedings of the IEEE In...See More
Hidetaka Yamasaki; Kyohei Terao; Takaaki Suzuki; Fusao Simokawa; Hidekuni Takao Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 205 -208 2013
A Post-CMOS Process of High Adhesion SU-8 Structure to Apply to Sensor Device
前田祐作; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦; Y. Maeda; K. Terao; T. Suzuki; F. Shimokawa; H. Takao 25th International Microprocesses and Nanotechnology Conference (MNC2012) 2012/10 [Refereed]
A Post-CMOS Process of High Adhesion SU-8 Structure to Apply to Sensor Device前田祐作; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦; Y. Maeda; K. Terao; T. Suzuki; F. Shimokawa; H. Takao 25th International Microprocesses and ...See More
A Post-CMOS Process of High Adhesion SU-8 Structure to Apply to Sensor Device
前田祐作; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦; Y. Maeda; K. Terao; T. Suzuki; F. Shimokawa; H. Takao 25th International Microprocesses and Nanotechnology Conference (MNC2012) 2012/10 [Refereed]
J161045 A cell trap chip having mesh structures fabricated by single-mask inclined photolithography
Optically-Driven Microstructures for Manipulating Single DNA Molecule under Fluorescence Microscop
MASUDA Chihiro; TERAO Kyohei; OANA Hidehiro; WASHIZU Masao; SUZUKI Takaaki; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu Proceedings of 38th International Conference on Micro and Nano Engineering (MNE2012) P409-355 2012/09 [Refereed]
Optically-Driven Microstructures for Manipulating Single DNA Molecule under Fluorescence MicroscopMASUDA Chihiro; TERAO Kyohei; OANA Hidehiro; WASHIZU Masao; SUZUKI Takaaki; TAKAO Hidekuni; SHIMOKAWA ...See More
Optically-Driven Microstructures for Manipulating Single DNA Molecule under Fluorescence Microscop
MASUDA Chihiro; TERAO Kyohei; OANA Hidehiro; WASHIZU Masao; SUZUKI Takaaki; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu Proceedings of 38th International Conference on Micro and Nano Engineering (MNE2012) P409-355 2012/09 [Refereed]
M. Inoue; A. Okonogi; K. Terao; H. Takao; F. Shimokawa; F. Oohira; H. Kotera; T. Suzuki MICRO & NANO LETTERS 7- (8) 725 -728 2012/08 [Refereed]
Cell culture on MEMS materials in microenvironment limited by a physical conditionM. Inoue; A. Okonogi; K. Terao; H. Takao; F. Shimokawa; F. Oohira; H. Kotera; T. Suzuki MICRO & NANO LETTERS 7- (8)...See More
M. Inoue; A. Okonogi; K. Terao; H. Takao; F. Shimokawa; F. Oohira; H. Kotera; T. Suzuki Micro and Nano Letters 7- (8) 725 -728 2012/08 [Refereed]
Cell culture on MEMS materials in microenvironment limited by a physical conditionM. Inoue; A. Okonogi; K. Terao; H. Takao; F. Shimokawa; F. Oohira; H. Kotera; T. Suzuki Micro and Nano Letters 7- (...See More
M. Inoue; A. Okonogi; K. Terao; H. Takao; F. Shimokawa; F. Oohira; H. Kotera; T. Suzuki Micro and Nano Letters 7- (8) 725 -728 2012/08 [Refereed]
Fabrication of magnetic active membrane for micropump made of photosensitive nanocomposite
NAKAHARA Tasuku; HOSOKAWA Yuuki; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; MIYAGAWA Hayato; NAMAZU Takahiro; KOTERA Hidetoshi; SUZUKI Takaaki 電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan 2012- (8) 45 -48 2012/06
Fabrication of magnetic active membrane for micropump made of photosensitive nanocompositeNAKAHARA Tasuku; HOSOKAWA Yuuki; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; MIYAGAWA Haya...See More
Fabrication of magnetic active membrane for micropump made of photosensitive nanocomposite
NAKAHARA Tasuku; HOSOKAWA Yuuki; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; MIYAGAWA Hayato; NAMAZU Takahiro; KOTERA Hidetoshi; SUZUKI Takaaki 電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan 2012- (8) 45 -48 2012/06
Evaluation for Work Area of Rotated/Inclined UV Lithography and its Application for Gene Analysis Chip
NITTA Yuki; SUZUKI Hiroyuki; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki 電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan 2012- (8) 41 -44 2012/06
Evaluation for Work Area of Rotated/Inclined UV Lithography and its Application for Gene Analysis ChipNITTA Yuki; SUZUKI Hiroyuki; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUK...See More
Evaluation for Work Area of Rotated/Inclined UV Lithography and its Application for Gene Analysis Chip
NITTA Yuki; SUZUKI Hiroyuki; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki 電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan 2012- (8) 41 -44 2012/06
A Magnetic-Driven Membrane Made of Photosensitive Nanocomposite without Alignment Process
T. Nakahara; Y. Hosokawa; K. Terao; H. Takao; F. Shimokawa; F. Oohira; H. Miyagawa; T. Namazu; H. Kotera; T. Suzuki Technical digest of 7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems [IEEE NEMS2012] W1B-4 2012/03 [Refereed]
A Magnetic-Driven Membrane Made of Photosensitive Nanocomposite without Alignment ProcessT. Nakahara; Y. Hosokawa; K. Terao; H. Takao; F. Shimokawa; F. Oohira; H. Miyagawa; T. Namazu; H. Kotera; T. Su...See More
A Magnetic-Driven Membrane Made of Photosensitive Nanocomposite without Alignment Process
T. Nakahara; Y. Hosokawa; K. Terao; H. Takao; F. Shimokawa; F. Oohira; H. Miyagawa; T. Namazu; H. Kotera; T. Suzuki Technical digest of 7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems [IEEE NEMS2012] W1B-4 2012/03 [Refereed]
Improvement of Coating Uniformity for Thick Photoresist Using a Partial Spray Coat
M. Akamatsu; K. Terao; H. Takao; F. Shimokawa; F. Oohira; T. Suzuki Technical digest of 7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems [IEEE NEMS2012] W3P-33 2012/03 [Refereed]
Improvement of Coating Uniformity for Thick Photoresist Using a Partial Spray CoatM. Akamatsu; K. Terao; H. Takao; F. Shimokawa; F. Oohira; T. Suzuki Technical digest of 7th Annual IEEE International...See More
Improvement of Coating Uniformity for Thick Photoresist Using a Partial Spray Coat
M. Akamatsu; K. Terao; H. Takao; F. Shimokawa; F. Oohira; T. Suzuki Technical digest of 7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems [IEEE NEMS2012] W3P-33 2012/03 [Refereed]
Development of a Universal Integrated Micro Cell Culture System
Masatoshi Inoue; Atsuhito Okonogi; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Hidetoshi Kotera; Takaaki Suzuki 6TH IEEE INTERNATIONAL CONFERENCE ON NANO/MOLECULAR MEDICINE AND ENGINEERING (IEEE-NANOMED 2012) 2012
Development of a Universal Integrated Micro Cell Culture SystemMasatoshi Inoue; Atsuhito Okonogi; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Hidetoshi Kotera; Takaaki Suzuki 6TH ...See More
Development of a Universal Integrated Micro Cell Culture System
Masatoshi Inoue; Atsuhito Okonogi; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Hidetoshi Kotera; Takaaki Suzuki 6TH IEEE INTERNATIONAL CONFERENCE ON NANO/MOLECULAR MEDICINE AND ENGINEERING (IEEE-NANOMED 2012) 2012
Fast whole blood testing for detecting biomarkers by size-exclusion SPR sensing
Shin Ichi Hiramatsu; Kyohei Terao; Kazunori Shimizu; Nobumitsu Miyanishi; Takaaki Suzuki; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012 186 -188 2012
Fast whole blood testing for detecting biomarkers by size-exclusion SPR sensingShin Ichi Hiramatsu; Kyohei Terao; Kazunori Shimizu; Nobumitsu Miyanishi; Takaaki Suzuki; Hidekuni Takao; Fusao Shimokawa...See More
Fast whole blood testing for detecting biomarkers by size-exclusion SPR sensing
Shin Ichi Hiramatsu; Kyohei Terao; Kazunori Shimizu; Nobumitsu Miyanishi; Takaaki Suzuki; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012 186 -188 2012
Tasuku Nakahara; Yuuki Hosokawa; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Takahiro Namazu; Hidetoshi Kotera; Takaaki Suzuki Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 1181 -1184 2012
Self-aligned fabrication process for active membrane made of photosensitive nanocompositeTasuku Nakahara; Yuuki Hosokawa; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Takahiro Namaz...See More
J. Suzuki; T. Nakahara; Y. Hosokawa; Y. Ueda; K. Terao; H. Takao; F. Shimokawa; F. Oohira; H. Miyagawa; H. Kotera; T. Suzuki International Conference on Optical MEMS and Nanophotonics 204 -205 2012
Improvement of processing reproducibility for a magnetic-driven microstructure made of photosensitive nanocompositeJ. Suzuki; T. Nakahara; Y. Hosokawa; Y. Ueda; K. Terao; H. Takao; F. Shimokawa; F. Oo...See More
J. Suzuki; T. Nakahara; Y. Hosokawa; Y. Ueda; K. Terao; H. Takao; F. Shimokawa; F. Oohira; H. Miyagawa; H. Kotera; T. Suzuki International Conference on Optical MEMS and Nanophotonics 204 -205 2012
Large area 3D microfabrication technique by multidirectional photolithography for a chromosome extension chip
Yuki Nitta; Hiroyuki Suzuki; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Takaaki Suzuki Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012 1822 -1824 2012
Large area 3D microfabrication technique by multidirectional photolithography for a chromosome extension chipYuki Nitta; Hiroyuki Suzuki; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira...See More
Large area 3D microfabrication technique by multidirectional photolithography for a chromosome extension chip
Yuki Nitta; Hiroyuki Suzuki; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Takaaki Suzuki Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012 1822 -1824 2012
DNA fiber preparation technique on a chip for clinical diagnosis
Takaaki Suzuki; Kyohei Terao; Hiroyuki Suzuki; Yuki Nitta; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Daisuke Hiramaru; Hidetoshi Kotera Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012 272 -274 2012
DNA fiber preparation technique on a chip for clinical diagnosisTakaaki Suzuki; Kyohei Terao; Hiroyuki Suzuki; Yuki Nitta; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Daisuke Hiramaru; Hidetoshi...See More
DNA fiber preparation technique on a chip for clinical diagnosis
Takaaki Suzuki; Kyohei Terao; Hiroyuki Suzuki; Yuki Nitta; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Daisuke Hiramaru; Hidetoshi Kotera Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012 272 -274 2012
R. Shinozaki; F. Oohira; K. Terao; T. Suzuki; F. Simokawa; H. Takao International Conference on Optical MEMS and Nanophotonics 107 -108 2012
Design and fabrication of electrostatically driven in-plane MEMS rotational mirror with electrostatic rotary encoderR. Shinozaki; F. Oohira; K. Terao; T. Suzuki; F. Simokawa; H. Takao International C...See More
A novel integrated tactile image sensor for detection of surface friction and hardness using the reference plane structureYusaku Maeda; Kyohei Terao; Takaaki Suzuki; Fusao Shimokawa; Hidekuni Takao P...See More
A Venturi-type Micro Mist Generator fabricated by MEMS Technology and its Application to Local Surface Cooling of Target Objects
荒井將崇; 寺尾京平; 鈴木孝明; 下川房男; 大平文和; 高尾英邦; Masataka Arai; K. Terao; T. Suzuki; F. Shimokawa; F. Oohira; H. Takao 24th International Microprocesses and Nanotechnology Conference (MNC2011) 2011/10 [Refereed]
A Venturi-type Micro Mist Generator fabricated by MEMS Technology and its Application to Local Surface Cooling of Target Objects荒井將崇; 寺尾京平; 鈴木孝明; 下川房男; 大平文和; 高尾英邦; Masataka Arai; K. Terao; T. Suzuki; ...See More
A Venturi-type Micro Mist Generator fabricated by MEMS Technology and its Application to Local Surface Cooling of Target Objects
荒井將崇; 寺尾京平; 鈴木孝明; 下川房男; 大平文和; 高尾英邦; Masataka Arai; K. Terao; T. Suzuki; F. Shimokawa; F. Oohira; H. Takao 24th International Microprocesses and Nanotechnology Conference (MNC2011) 2011/10 [Refereed]
MP-48 In Situ Fabrication of Active Microfluidic Components Using Photoresist Containing Magnetic Nanoparticles
MP-48 In Situ Fabrication of Active Microfluidic Components Using Photoresist Containing Magnetic NanoparticlesHosokawa Yuuki; Nakahara Tasuku; Terao Kyohei; Takao Hidekuni; Simokawa Fusao; Oohira Fum...See More
MP-48 In Situ Fabrication of Active Microfluidic Components Using Photoresist Containing Magnetic Nanoparticles
Fabrication of a Magnetically-Driven Microstructure Made of Magnetic Nanoparticles/SU-8 Composite
Y. Hosokawa; T. Nakahara; K. Terao; H. Takao; F. Shimokawa; F. Oohira; T. Suzuki Proceedings of the 6th International Conference on Microtechnologies in Medicine and Biology [MMB2011] 74-75 2011/05 [Refereed]
Fabrication of a Magnetically-Driven Microstructure Made of Magnetic Nanoparticles/SU-8 CompositeY. Hosokawa; T. Nakahara; K. Terao; H. Takao; F. Shimokawa; F. Oohira; T. Suzuki Proceedings of the 6t...See More
Fabrication of a Magnetically-Driven Microstructure Made of Magnetic Nanoparticles/SU-8 Composite
Y. Hosokawa; T. Nakahara; K. Terao; H. Takao; F. Shimokawa; F. Oohira; T. Suzuki Proceedings of the 6th International Conference on Microtechnologies in Medicine and Biology [MMB2011] 74-75 2011/05 [Refereed]
P-1-6 Fabrication of three-dimensional micro molds using single-mask multidirectional photolithography for micro-electroporation
P-1-8 Influence of microchannel width on a microdevice for single-cell manipulationTAKASAKI Shouiti; TERAO Kyouhei; TAKAO Hidekuni; SIMOKWA Fusao; OOHIRA Humikazu; SUZUKI Takaaki Conference on Inform...See More
P-1-8 Influence of microchannel width on a microdevice for single-cell manipulation
T. Mishima; K. Terao; H. Takao; F. Shimokawa; F. Oohira; T. Suzuki Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 221 -224 2011
Crystalline anisotropic dry etching for single crystal siliconT. Mishima; K. Terao; H. Takao; F. Shimokawa; F. Oohira; T. Suzuki Proceedings of the IEEE International Conference on Micro Electro Mech...See More
T. Mishima; K. Terao; H. Takao; F. Shimokawa; F. Oohira; T. Suzuki Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 221 -224 2011
H. Takao; M. Sugiura; M. Ishida; K. Terao; T. Suzuki; F. Shimokawa; F. Oohira Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 1154 -1157 2011
Micro fluidic circuit design with "SPICE" simulationH. Takao; M. Sugiura; M. Ishida; K. Terao; T. Suzuki; F. Shimokawa; F. Oohira Proceedings of the IEEE International Conference on Micro Electro Mec...See More
H. Takao; M. Sugiura; M. Ishida; K. Terao; T. Suzuki; F. Shimokawa; F. Oohira Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 1154 -1157 2011
Shingo Uchiyama; Makoto Sato; Mitsuo Usui; Tomomi Sakata; Fusao Shimokawa Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 819 -822 2010
New H-shape soft tortion spring and its micro mirror applicationShingo Uchiyama; Makoto Sato; Mitsuo Usui; Tomomi Sakata; Fusao Shimokawa Proceedings of the IEEE International Conference on Micro Ele...See More
Shingo Uchiyama; Makoto Sato; Mitsuo Usui; Tomomi Sakata; Fusao Shimokawa Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 819 -822 2010
M. Mizukami; J. Yamaguchi; N. Nemoto; Y. Kawajiri; H. Hirata; S. Uchiyama; M. Makihara; T. Sakata; N. Shimoyama; H. Ishii; F. Shimokawa 2009 International Conference on Photonics in Switching, PS '09 2009
128×128 3D-MEMS optical switch module with simultaneous optical paths connection for optical cross-connect systemsM. Mizukami; J. Yamaguchi; N. Nemoto; Y. Kawajiri; H. Hirata; S. Uchiyama; M. Makihara...See More
M. Mizukami; J. Yamaguchi; N. Nemoto; Y. Kawajiri; H. Hirata; S. Uchiyama; M. Makihara; T. Sakata; N. Shimoyama; H. Ishii; F. Shimokawa 2009 International Conference on Photonics in Switching, PS '09 2009
Tomomi Sakata; Mitsuo Usui; Shingo Uchiyama; Nobuhiro Shimoyama; Junichi Kodate; Hiromu Ishii; Tohru Matsuura; Fusao Shimokawa; Yasuhiro Sato Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS 579 -580 2009
High-aspect-ratio gold electrodes fabricated by thick-multilevel interconnection technology for electrical isolation of MEMS mirrors in wavelength-selective switchesTomomi Sakata; Mitsuo Usui; Shingo ...See More
Tomomi Sakata; Mitsuo Usui; Shingo Uchiyama; Nobuhiro Shimoyama; Junichi Kodate; Hiromu Ishii; Tohru Matsuura; Fusao Shimokawa; Yasuhiro Sato Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS 579 -580 2009
Small-footprint thermocapillary optical switch combined with a heater array on a CMOS IC chip
Makoto Sato; Mitsuhiro Makfflara; Fusao Shimokawa; Shinsuke Matsui Conference on Optical Fiber Communication, Technical Digest Series 1- 612 -614 2004
Small-footprint thermocapillary optical switch combined with a heater array on a CMOS IC chipMakoto Sato; Mitsuhiro Makfflara; Fusao Shimokawa; Shinsuke Matsui Conference on Optical Fiber Communicati...See More
Small-footprint thermocapillary optical switch combined with a heater array on a CMOS IC chip
Makoto Sato; Mitsuhiro Makfflara; Fusao Shimokawa; Shinsuke Matsui Conference on Optical Fiber Communication, Technical Digest Series 1- 612 -614 2004
Improvement of switching time in a thermocapillarity optical switch
T. Sakata; H. Togo; M. Makihara; F. Shimokawa; K. Kaneko Conference on Optical Fiber Communication, Technical Digest Series 54- (3) 2001
Improvement of switching time in a thermocapillarity optical switchT. Sakata; H. Togo; M. Makihara; F. Shimokawa; K. Kaneko Conference on Optical Fiber Communication, Technical Digest Series 54- (3...See More
Improvement of switching time in a thermocapillarity optical switch
T. Sakata; H. Togo; M. Makihara; F. Shimokawa; K. Kaneko Conference on Optical Fiber Communication, Technical Digest Series 54- (3) 2001
Tomomi Sakata; Mitsuhiro Makihara; Hiroyoshi Togo; Fusao Shimokawa; Kazumasa Kaneko Proceedings of SPIE - The International Society for Optical Engineering 4534- 55 -63 2001
Optical switch based on thermocapillarityTomomi Sakata; Mitsuhiro Makihara; Hiroyoshi Togo; Fusao Shimokawa; Kazumasa Kaneko Proceedings of SPIE - The International Society for Optical Engineering 4...See More
Tomomi Sakata; Mitsuhiro Makihara; Hiroyoshi Togo; Fusao Shimokawa; Kazumasa Kaneko Proceedings of SPIE - The International Society for Optical Engineering 4534- 55 -63 2001
Fusao Shimokawa; Makoto Sato; Mitsuhiro Makihara; Shuichiro Inagaki; Yasuhide Nishida Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering 66- (8) 1173 -1176 2000/08
Development of intersecting waveguide optical switch based on thermocapillaryFusao Shimokawa; Makoto Sato; Mitsuhiro Makihara; Shuichiro Inagaki; Yasuhide Nishida Seimitsu Kogaku Kaishi/Journal of th...See More
Fusao Shimokawa; Makoto Sato; Mitsuhiro Makihara; Shuichiro Inagaki; Yasuhide Nishida Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering 66- (8) 1173 -1176 2000/08
Strictly non-blocking N×N thermo-capillarity optical matrix switch using silica-based waveguide
Mitsuhiro Makihara; Fusao Shimokawa; Kazumasa Kaneko Conference on Optical Fiber Communication, Technical Digest Series 1- 207 -209 2000
Strictly non-blocking N×N thermo-capillarity optical matrix switch using silica-based waveguideMitsuhiro Makihara; Fusao Shimokawa; Kazumasa Kaneko Conference on Optical Fiber Communication, Technica...See More
Strictly non-blocking N×N thermo-capillarity optical matrix switch using silica-based waveguide
Mitsuhiro Makihara; Fusao Shimokawa; Kazumasa Kaneko Conference on Optical Fiber Communication, Technical Digest Series 1- 207 -209 2000
Micromechanical intersecting waveguide optical switch based on thermo-capillarity
Makoto Sato; Fusao Shimokawa; Shuichiro Inagaki; Yasuhide Nishida NTT R and D 48- (1) 9 -14 1999
H. Togo; M. Sato; F. Shimokawa Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) 418 -423 1999
Multi-element thermo-capillary optical switch and sub-nanoliter oil injection for its fabricationH. Togo; M. Sato; F. Shimokawa Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) 418 -...See More
H. Togo; M. Sato; F. Shimokawa Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) 418 -423 1999
Micro-mechanical optical switch
Fusao Shimokawa; Makoto Sato; Shinji Nagaoka NTT R and D 48- (9) 665 -673 1999
Waveguide optical switch for 8:1 standby system of optical line terminals
Makoto Sato; Fusao Shimokawa; Shuichiro Inagaki; Yasuhide Nishida Conference on Optical Fiber Communication, Technical Digest Series 1998-January- 194 -195 1998
Waveguide optical switch for 8:1 standby system of optical line terminalsMakoto Sato; Fusao Shimokawa; Shuichiro Inagaki; Yasuhide Nishida Conference on Optical Fiber Communication, Technical Digest ...See More
Waveguide optical switch for 8:1 standby system of optical line terminals
Makoto Sato; Fusao Shimokawa; Shuichiro Inagaki; Yasuhide Nishida Conference on Optical Fiber Communication, Technical Digest Series 1998-January- 194 -195 1998
Self-latching waveguide optical switch based on thermo-capillarity
Fast Silica Etching with High Density Plasma Etching System
Shimokawa Fusao; Nishida Yasuhide Proceedings of the IEICE General Conference 1996- (1) 226 -226 1996/03
Optical waveguide switches using oil movement byinterfacial tension control
Makihara Mitsuhiro; Simokawa Fusao; Hanaoka Yoriko; Nishida Yasuhide Proceedings of the IEICE General Conference 1996- (1) 309 -309 1996/03
Optical waveguide switches using oil movement byinterfacial tension controlMakihara Mitsuhiro; Simokawa Fusao; Hanaoka Yoriko; Nishida Yasuhide Proceedings of the IEICE General Conference 1996- (1)...See More
Optical waveguide switches using oil movement byinterfacial tension control
Makihara Mitsuhiro; Simokawa Fusao; Hanaoka Yoriko; Nishida Yasuhide Proceedings of the IEICE General Conference 1996- (1) 309 -309 1996/03
Self-holding optical waveguide switch controlled by micromechanisms
Fast and extremely selective polyimide etching with a magnetically controlled reactive ion etching systemFusao Shimokawa; Akinori Furuya; Shinsuke Matsui Proceedings. IEEE Micro Electro Mechanical Sy...See More
Fast and extremely selective polyimide etching with a magnetically controlled reactive ion etching system
FAST ATOM BOMBARDMENT SECONDARY NEUTRAL MASS SPECTROMETRY.
Kazutoshi Nagai; Hiroki Kuwano; Fusao Shimokawa Report of Research Center of Ion Beam Technology, Hosei University. Supplement 151 -154 1986
FAST ATOM BOMBARDMENT SECONDARY NEUTRAL MASS SPECTROMETRY.Kazutoshi Nagai; Hiroki Kuwano; Fusao Shimokawa Report of Research Center of Ion Beam Technology, Hosei University. Supplement 151 -154 19...See More
FAST ATOM BOMBARDMENT SECONDARY NEUTRAL MASS SPECTROMETRY.
Kazutoshi Nagai; Hiroki Kuwano; Fusao Shimokawa Report of Research Center of Ion Beam Technology, Hosei University. Supplement 151 -154 1986
Awards & Honors
2017 IEEE Transducers 2017 Outstanding Paper Award Finalist
2016 IEEE SENSORS 2016 Best Student Paper Finalist
2012 Finalist of CM HO Best Paper Award in Micro/Nano Fluidics
2012 第29回「センサ・マイクロマシンと応用システム」シンポジウム 最優秀技術論文賞 JPN
2011 優秀ポスター賞 JPN
Research Grants & Projects
A nanotechnology platform established in average science laboratories
Japan Society for the Promotion of Science:Grants-in-Aid for Scientific Research
Date (from‐to) : 2016/04 -2019/03
Author : Nagaoka Shiro; Shikama Tomokazu
Device fabrication experience is important for gaining deep understanding of the science of device physics. A nanotechnology platform has been developed for use in average science laboratories that makes design, fabrication and evaluation possible. Simplified processes including diffusion of Phosphorous and Boron, surface oxidization of silicon substrate, and metal thin film fabrication using thermal assisted silver sintering under normal air environment, and a simplification of the photo lithography process were studied and demonstrated successful fabrication of p-n junctions, MOS and bipolar transistors. The feasibility of the platform as an educational resource was also studied and its effectiveness was confirmed. The results confirm that the platform can be used to establish a nanotechnology platform in average science laboratories as an educational program to cultivate scientific minds and guide students from basics to beyond state of the art technology and science.
A nanotechnology platform established in average science laboratoriesJapan Society for the Promotion of Science:Grants-in-Aid for Scientific ResearchDate (from‐to) : 2016/04 -2019/03 Author : Nagaoka...See More
A nanotechnology platform established in average science laboratories
Japan Society for the Promotion of Science:Grants-in-Aid for Scientific Research
Date (from‐to) : 2016/04 -2019/03
Author : Nagaoka Shiro; Shikama Tomokazu
Device fabrication experience is important for gaining deep understanding of the science of device physics. A nanotechnology platform has been developed for use in average science laboratories that makes design, fabrication and evaluation possible. Simplified processes including diffusion of Phosphorous and Boron, surface oxidization of silicon substrate, and metal thin film fabrication using thermal assisted silver sintering under normal air environment, and a simplification of the photo lithography process were studied and demonstrated successful fabrication of p-n junctions, MOS and bipolar transistors. The feasibility of the platform as an educational resource was also studied and its effectiveness was confirmed. The results confirm that the platform can be used to establish a nanotechnology platform in average science laboratories as an educational program to cultivate scientific minds and guide students from basics to beyond state of the art technology and science.
Development of wavelength tuning type ultrafast THz switching by one-dimensional photonic crystal containing metamaterials
Japan Society for the Promotion of Science:Grants-in-Aid for Scientific Research
In order to carry out research on tunable ultrafast THz switch by hybridization of metamaterial and one-dimensional photonic crystal, we studied the following element technologies. First, a THz metamaterials such as a cut wire or an electric split ring resonator was fabricated on a semiconductor substrate, and their optical properties were evaluated. Next, broadband high intensity THz wave generation from air was carried out by dichroic laser induced plasma method. Finally, we analyzed the resonance characteristics of Fabry - Perot microcavity using wire grid and found that mode splitting occurs when metamaterial is introduced into the cavity. As a result, a useful wavelength variable type THz switch becomes possible.
Development of wavelength tuning type ultrafast THz switching by one-dimensional photonic crystal containing metamaterialsJapan Society for the Promotion of Science:Grants-in-Aid for Scientific Resear...See More
Development of wavelength tuning type ultrafast THz switching by one-dimensional photonic crystal containing metamaterials
Japan Society for the Promotion of Science:Grants-in-Aid for Scientific Research
In order to carry out research on tunable ultrafast THz switch by hybridization of metamaterial and one-dimensional photonic crystal, we studied the following element technologies. First, a THz metamaterials such as a cut wire or an electric split ring resonator was fabricated on a semiconductor substrate, and their optical properties were evaluated. Next, broadband high intensity THz wave generation from air was carried out by dichroic laser induced plasma method. Finally, we analyzed the resonance characteristics of Fabry - Perot microcavity using wire grid and found that mode splitting occurs when metamaterial is introduced into the cavity. As a result, a useful wavelength variable type THz switch becomes possible.
Micro-scale plant vascular sensor for monitoring of sap dynamics and nutrients dynamics in plant shoots
Japan Society for the Promotion of Science:Grants-in-Aid for Scientific Research
Date (from‐to) : 2015/04 -2018/03
Author : Shimokawa Fusao
We newly proposed the microscale xylem-sap-dynamics (flow velocity) sensor that uses the measuring principle of the Granier method. We also fabricated micro-sensor chips for functional verification by using MEMS technology, and assembled them on a resin film for mounting on the epidermis of plants. Furthermore, we measured the sap dynamics by using a mimicked plant experimental setup and actual plant, and succeeded in measuring the flow velocity(0-500μm/s). We also proposed the microscale phloem-sap-dynamics (flow velocity and direction) sensor, and confirmed the possibility of sap dynamic measurement in the actual plant shoots. We demonstrated the feasibility of a novel nutrients dynamics sensor that can conveniently identify the phloem positions and extract pure photosynthates samples in agricultural situations.
Micro-scale plant vascular sensor for monitoring of sap dynamics and nutrients dynamics in plant shootsJapan Society for the Promotion of Science:Grants-in-Aid for Scientific ResearchDate (from‐to) :...See More
Micro-scale plant vascular sensor for monitoring of sap dynamics and nutrients dynamics in plant shoots
Japan Society for the Promotion of Science:Grants-in-Aid for Scientific Research
Date (from‐to) : 2015/04 -2018/03
Author : Shimokawa Fusao
We newly proposed the microscale xylem-sap-dynamics (flow velocity) sensor that uses the measuring principle of the Granier method. We also fabricated micro-sensor chips for functional verification by using MEMS technology, and assembled them on a resin film for mounting on the epidermis of plants. Furthermore, we measured the sap dynamics by using a mimicked plant experimental setup and actual plant, and succeeded in measuring the flow velocity(0-500μm/s). We also proposed the microscale phloem-sap-dynamics (flow velocity and direction) sensor, and confirmed the possibility of sap dynamic measurement in the actual plant shoots. We demonstrated the feasibility of a novel nutrients dynamics sensor that can conveniently identify the phloem positions and extract pure photosynthates samples in agricultural situations.
Development of a novel 2D MEMS mirror combining different materials
Japan Society for the Promotion of Science:Grants-in-Aid for Scientific Research
Raster scan type MEMS mirrors are expected to be applied to various fields. For the purpose of large deflection angle drive, miniaturization, low power consumption, and high impact resistance of the MEMS mirror, we proposed a novel MEMS mirror configuration combining heterogeneous materials of silicon / polymer on hinges. Specifically, we fabricated and evaluated two types of MEMS mirrors; 1) a Lorentz driven MEMS mirror with a hybrid configuration combining different materials, and 2) a MEMS mirror integrated with a magnetically induced electromotive force type sensor coil.
Development of a novel 2D MEMS mirror combining different materialsJapan Society for the Promotion of Science:Grants-in-Aid for Scientific ResearchDate (from‐to) : 2014/04 -2017/03 Author : Suzuki Ta...See More
Development of a novel 2D MEMS mirror combining different materials
Japan Society for the Promotion of Science:Grants-in-Aid for Scientific Research
Raster scan type MEMS mirrors are expected to be applied to various fields. For the purpose of large deflection angle drive, miniaturization, low power consumption, and high impact resistance of the MEMS mirror, we proposed a novel MEMS mirror configuration combining heterogeneous materials of silicon / polymer on hinges. Specifically, we fabricated and evaluated two types of MEMS mirrors; 1) a Lorentz driven MEMS mirror with a hybrid configuration combining different materials, and 2) a MEMS mirror integrated with a magnetically induced electromotive force type sensor coil.
Development of intense THz light source using anisotropic metamaterial
Japan Society for the Promotion of Science:Grants-in-Aid for Scientific Research
Date (from‐to) : 2012/04 -2015/03
Author : TSURUMACHI Noriaki; FUSAO Shimokawa
(1)We fabricated metamaterial structure on the semiconductor substrate in THz region by photolithography technique. For example, wire grid structure acts as THz polarizer. We confirmed this phenomena by THz time-domain spectroscopy. (2)We fabricated poled polymer for THz generation by corona-poling technique. We chemically synthesized dye molecules named as LEMKE. We observed THz generation using LEMKE poled polymer film by THz time-domain spectroscopy. (3) Although we could not fabricated THz anisotropic metamaterial, we fabricated hyperbolic metamaterial in visible region as metal-dielectric multilayer structure. We confirmed broadband Purcell effect by time-resolved fluorescence measurement using several dye molecule on the metamaterial substrate.
Development of intense THz light source using anisotropic metamaterialJapan Society for the Promotion of Science:Grants-in-Aid for Scientific ResearchDate (from‐to) : 2012/04 -2015/03 Author : TSURUM...See More
Development of intense THz light source using anisotropic metamaterial
Japan Society for the Promotion of Science:Grants-in-Aid for Scientific Research
Date (from‐to) : 2012/04 -2015/03
Author : TSURUMACHI Noriaki; FUSAO Shimokawa
(1)We fabricated metamaterial structure on the semiconductor substrate in THz region by photolithography technique. For example, wire grid structure acts as THz polarizer. We confirmed this phenomena by THz time-domain spectroscopy. (2)We fabricated poled polymer for THz generation by corona-poling technique. We chemically synthesized dye molecules named as LEMKE. We observed THz generation using LEMKE poled polymer film by THz time-domain spectroscopy. (3) Although we could not fabricated THz anisotropic metamaterial, we fabricated hyperbolic metamaterial in visible region as metal-dielectric multilayer structure. We confirmed broadband Purcell effect by time-resolved fluorescence measurement using several dye molecule on the metamaterial substrate.
Micro scale sap flow sensor based on Granier sensor for measuring biological information of plant branches
Japan Society for the Promotion of Science:Grants-in-Aid for Scientific Research
We developed a micro sap flow sensor using the measuring principle of the Granier's method by applying MEMS technology. By using the micro fabrication techniques, we fabricated an integrated micro sap flow sensor consisting of micro probes, temperature sensor and thin-film micro heater on a Si substrate. The fabricated micro sensor was reduced to 1/10 the size of a conventional Granier sensor (diameter:φ2mm, length:20 mm). To investigate the use of the proposed sensor in measuring the actual sap flow amount of plants, an experimental system (to control the flow inside a tube) imitating a plant's stem was fabricated. As the result, we demonstrated the use of the sensor in obtaining sap flow amount data (0~150 μm/s), similar to the use of a conventional sensor. By using a fabricated micro sensor, a normal diurnal sap flow pattern was observed in model plant. Therefore, we successfully demonstrated the applicability of the proposed sensor to an actual plant.
Micro scale sap flow sensor based on Granier sensor for measuring biological information of plant branchesJapan Society for the Promotion of Science:Grants-in-Aid for Scientific ResearchDate (from‐to)...See More
Micro scale sap flow sensor based on Granier sensor for measuring biological information of plant branches
Japan Society for the Promotion of Science:Grants-in-Aid for Scientific Research
We developed a micro sap flow sensor using the measuring principle of the Granier's method by applying MEMS technology. By using the micro fabrication techniques, we fabricated an integrated micro sap flow sensor consisting of micro probes, temperature sensor and thin-film micro heater on a Si substrate. The fabricated micro sensor was reduced to 1/10 the size of a conventional Granier sensor (diameter:φ2mm, length:20 mm). To investigate the use of the proposed sensor in measuring the actual sap flow amount of plants, an experimental system (to control the flow inside a tube) imitating a plant's stem was fabricated. As the result, we demonstrated the use of the sensor in obtaining sap flow amount data (0~150 μm/s), similar to the use of a conventional sensor. By using a fabricated micro sensor, a normal diurnal sap flow pattern was observed in model plant. Therefore, we successfully demonstrated the applicability of the proposed sensor to an actual plant.
Development of Crystalline Anisotropic Plasma Etching for Single Crystal Silicon
Japan Society for the Promotion of Science:Grants-in-Aid for Scientific Research
In this study, we propose a novel fabrication process for complicated three-dimensional silicon microstructures using the crystalline anisotropic plasma etching of the single crystal silicon with an ordinary RIE process under the normal temperature. The proposed process combined of the conventional isotropic, the conventional vertical anisotropic, and the crystalline anisotropic silicon plasma etchings achieves the complicated microstructures under all dry process with single RIE machine with single mask. To confirm the validity of the proposed process, we demonstrated to fabricate a cantilever and a micro needle for bio-application. In the case of the cantilever, the cantilever released from a substrate was fabricated at 1/5 processing time of the conventional process. It is possible that the complicated three-dimensional silicon microstructures are fabricated in single dry etching equipment.
Development of Crystalline Anisotropic Plasma Etching for Single Crystal SiliconJapan Society for the Promotion of Science:Grants-in-Aid for Scientific ResearchDate (from‐to) : 2011 -2012 Author : SU...See More
Development of Crystalline Anisotropic Plasma Etching for Single Crystal Silicon
Japan Society for the Promotion of Science:Grants-in-Aid for Scientific Research
In this study, we propose a novel fabrication process for complicated three-dimensional silicon microstructures using the crystalline anisotropic plasma etching of the single crystal silicon with an ordinary RIE process under the normal temperature. The proposed process combined of the conventional isotropic, the conventional vertical anisotropic, and the crystalline anisotropic silicon plasma etchings achieves the complicated microstructures under all dry process with single RIE machine with single mask. To confirm the validity of the proposed process, we demonstrated to fabricate a cantilever and a micro needle for bio-application. In the case of the cantilever, the cantilever released from a substrate was fabricated at 1/5 processing time of the conventional process. It is possible that the complicated three-dimensional silicon microstructures are fabricated in single dry etching equipment.