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Terao Kyohei

  • Faculty of Engineering and Design
  • Department of Engineering and Design
  • Nano-Micro Structure Device Integrated Reseach Center
  • Graduate School of Science for Creative Emergence
  • Division of Science for Creative Emergence
  • Professor
Last Updated :2025/04/24

Researcher Information

J-Global ID

Research Interests

  • BioMEMS   MicroTAS   Lab on a Chip   バイオナノテクノロジー   BioMEMS   Lab on a Chip   Bionanotechnology   Single Cell Analysis   

Research Areas

  • Nanotechnology/Materials / Nano/micro-systems

Academic & Professional Experience

  • 2024/04 - Today  Kagawa UniversityInternational Instutute of Rare Sugar Research and Education教授
  • 2024/04 - Today  Kagawa UniversityFaculty of Engineering and DesignProfessor
  • 2015/10 - Today  Kagawa UniversityNano-Micro Structure Device Integrated Research CenterVice Director
  • 2018/04 - 2024/03  Kagawa UniversityFaculty of Engineering and DesignAssociate professor
  • 2016/10 - 2024/03  Kagawa UniversityInternational Instutute of Rare Sugar Research and Education准教授
  • 2019/04 - 2020/03  The Open University of Japan香川学習センター非常勤講師
  • 2018/09 - 2019/04  Institut CuriePhysicochemistry Curie LaboratoryVisiting researcher
  • 2014/10 - 2018/03  Japan Science and Technology AgencyPRESTO Researcher
  • 2013/05 - 2018/03  Kagawa UniversityFaculty of EngineeringAssociate professor
  • 2015/04 - 2016/03  The Open University of Japan香川学習センター非常勤講師
  • 2009/04 - 2013/04  Kagawa UniversityFaculty of EngineeringAssistant professor
  • 2007/04 - 2009/03  京都大学大学院工学研究科博士研究員

Education

  • 2002/04 - 2007/03  The University of Tokyo  工学系研究科  Department of Mechanical Engineering
  • 1998/04 - 2002/03  Kyoto Univeristy  Faculty of Engineering  物理工学科

Association Memberships

  • 電気学会   日本分子生物学会   日本機械学会   

Published Papers

Books etc

  • バイオプロセスハンドブック バイオケミカルエンジニアリングの基礎から有用物質生産・環境調和技術まで
    エヌ・ティー・エス 2007 9784860431068

Conference Activities & Talks

  • A 0.1μM-Resoution Silicon Tactile Sensor with Precisely Designed Piezoresitve Sensing Structure  [Not invited]
    Tsubasa Nakashima; Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao
    2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII  2019/06 
    © 2019 IEEE. In this paper, a newly developed ultra-high resolution tactile sensor with a spatial resolution of 0.1μm and a force resolution of 60μN is reported for the first time. The ultrahigh resolution tactile sensor is required for quality control of finished metal surface and painted surface of automobiles that are not replaced by 'non-contact' optical measurements. A 0.1μm spatial resolution is realized by a needle-like contactor-tip precisely formed by deep-RIE. A 60μN force resolution is realized by partly narrowed silicon spring. Also, piezoresistors were arranged to maximize the stress sensitivity considering the crystal orientation dependency on piezoresistive effect. The fabricated new device in this study has realized 6 times higher performance in vertical displacement and 40 times higher performance in frictional force resolution than the tactile sensor device that we reported in 2018 [1]. Measured surface shape corresponded well to the actual surface shape in deep sub-micron region.
  • Simultaneous Measurement of Surface Texture and Elasticity Using Tactile Sensor with Differently Protruded Contactor Array  [Not invited]
    Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao
    2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII  2019/06 
    © 2019 IEEE. In this study, a novel design of array type tactile sensor with differently protruded contactors and a new detection principle were developed for simultaneous measurement of high-resolution surface texture and the elasticity (or softness) of the touching object. Six bi-axial detectors for micro surface roughness and local slip friction are integrated with different protrusion lengths of three levels from the chip edge of sensor. Since indentation depth of the three contactor pairs depends on softness of object, it is possible to calculate the elasticity of the object only by one-time sweeping using the relative relationship between indentation depth. Also, the principle of this sensor cancel out the effect of contact angle to the target surface. In the experiments, surface shape and slip friction of the samples having elasticity from 0.57 to 2.6MPa were successfully measured, and simultaneous measurement of their elasticities has been demonstrated for the first time.
  • Highly Sensitive Detection of Fine Electrostatic Attraction by Resonance-Driven Silicon-Hair  [Not invited]
    Kohki Hamamoto; Yusaku Maeda; Kyohei Terao; Fusao Shimokawa; Fumikazu Oohira; Hidekuni Takao
    2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII  2019/06 
    © 2019 IEEE. This paper reports highly sensitive detection of fine electrostatic attraction using resonance-driven silicon-hair device. The device in this study is reproducing highly sensitive hair follicle to acquire peculiar sense in hairy skin of human. The device has a fine silicon-hair with 10 μm width and 5 mm length, and it independently detects 2-axis force and 1-axis moment applied to itself. The fine silicon-hair is vibrated at its resonant frequency by an external piezoelectric driver. Electrostatic attraction works to the fine silicon-hair, and the resonance frequency of vibration is affected and detected using the highly sensitive 1-axis moment detector. The 2-axis force detectors are used to monitor the operation condition of device. In the experiments, the minimum sensitivity of electrostatic attraction have reached to 0.1μN range. Resolution of force and moment detectors have been improved by tenfold using the resonance-drive of silicon-hair.
  • 指先の手触り感計測に向けた走査型高分解能触覚センシングシステムの製作  [Not invited]
    西田吉広; 中光孝太; 綿谷一輝; 寺尾京平; 下川房男; 高尾英邦
    電気学会全国大会講演論文集(CD-ROM)  2019/03
  • A Monolithic Fingerprint-Like Tactile Sensor Array Realizaing High Resolution Imaging of Spatially Distributed Tactile Information  [Not invited]
    Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao
    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)  2019/01 
    © 2019 IEEE. In this study, a novel 'array type' monolithic fingerprint-like tactile sensor has been developed for acquiring high resolution images of tactile information of surface. Six high resolution tactile sensors are arrayed in line at a pitch of 500\mu \mathrm{m}, which is equivalent to typical pitch of human's fingerprint. Each tactile sensor can detect biaxial motion of contactor for detection of 'micro surface roughness' and 'local slip friction', even if it is a very soft material like clothes. As an important result obtained with the array of tactile sensors, 'non-linear deformation characteristic of soft fabrics' has been acquired successfully. Moreover, distributed tactile information on 'shape' and 'slip friction' has been 3D visualized on a soft cloth surface at a 100\mu \mathrm{m} spatial resolution for the first time.
  • A Highly Sensitive Planer Silicon-Hair Device Reproducing the Function of Human Hair Follicle  [Not invited]
    Koki Hamamoto; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao
    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)  2019/01 
    © 2019 IEEE. This is the first report of a novel silicon-hair device with the function of highly sensitive hair follicle to realize peculiar sense in hairy skin of human. The target sensitivities of our device are 10\mu \mathrm{N} in force and 10nN·m in moment, since they are considered as the sensitivities of human hair follicle. A fine silicon-hair with 10\mu \mathrm{m}-width and 5mm-length is monolithically integrated, and 2-axis forces and 1-axis moment applied to the silicon-hair are detected independently by tri-axis sensing structure. The fabricated device was evaluated, and the minimum detectable input was 5\mu \mathrm{N} in axial force, 1\mu \mathrm{N} in shear force, and 3nN·m in moment. These sensitivities are advantageous to human's hair follicle, and it is very promising to apply the device to novel measurement applications. As the first application, surface tension of liquid was precisely acquired. Absolute value of surface tensions were successfully measured at small absolute error using the highly sensitive silicon-hair device.
  • 生体試料の空間分画を実現するSiブレードアレイデバイスの開発  [Not invited]
    塩見太朗; 平藤衛; 石塚裕己; 高尾英邦; 下川房男; 寺尾京平
    化学とマイクロ・ナノシステム学会研究会講演要旨集  2018/10
  • Development of single cell stimulation device for quantitative analysis of spare receptors  [Not invited]
    松井 祐樹; MuhammadThaqifIqbalBinMokhtar; 平野 勝也; 高尾 英邦; 下川 房男; 石塚 裕己; 寺尾 京平
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2018/10
  • Discrimination of Touch Feeling in Submicron Region Realized by Ultra-High Resolution Tactile Sensor  [Not invited]
    中島 翼; 綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2018/10
  • A Highly Sensitive MEMS Silicon-Hair Device Reproducing the Function of Hair Follicle  [Not invited]
    濱本 晃輝; 寺尾 京平; 下川 房男; 高尾 英邦
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2018/10
  • Development of molecular processing platform using DNA trapping device with tool-stock function  [Not invited]
    増田 晃士; 石塚 裕己; 高尾 英邦; 下川 房男; 寺尾 京平
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2018/10
  • An Array-Type MEMS Fingerprint-like Tactile Sensor Realizing High Resolution Measurement of Spatially Distributing Tactile Information  [Not invited]
    綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2018/10
  • Measurement and Evaluation of Touch Feeling on Hair Surface Using High Resolution Two-Axis MEMS Tactile Sensor  [Not invited]
    中光 孝太; 綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2018/10
  • Sense of touch in submicron region realized by two-axis tactile sensor with a needle-like contactor  [Not invited]
    Tsubasa Nakashima; Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao
    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)  2018/04 
    © 2018 IEEE. This is the first report about 'sense of touch in submicron region' realized by novel 2-axis tactile sensor with a needle-like contactor. Simultaneous detection of submicron surface shape and correlated minute frictional force is realized by 0.5μm-radius contactor tip and highly sensitive strain sensing part of the sensor. Furthermore, contacting the contactor tip to measuring sample surface at a 10° slant angle, one-point contact is realized, and the spatial resolution of tactile sensing has been drastically improved to submicron range.
  • モーメント検出能を有する高分解能MEMS触覚センサ  [Not invited]
    濱本晃輝; 寺尾京平; 下川房男; 高尾英邦; 濱本晃輝; 寺尾京平; 下川房男; 高尾英邦
    電気学会全国大会講演論文集(CD-ROM)  2018/03
  • 色素分子ドープポリマー製フォトニック結晶ナノ共振器の開発  [Not invited]
    前野権一; 安藝翔馬; 寺尾京平; 塩見太朗; 末吉健志; 久本秀明; 遠藤達郎; 遠藤達郎
    応用物理学会春季学術講演会講演予稿集(CD-ROM)  2018/03
  • 打撃による材料の硬さ情報取得を目指したMEMSアクティブ触覚センサ  [Not invited]
    宮澤賢樹; 寺尾京平; 下川房男; 高尾英邦; 宮澤賢樹; 寺尾京平; 下川房男; 高尾英邦
    電気学会全国大会講演論文集(CD-ROM)  2018/03
  • 触覚センサの計測時における微細凹凸表面形状と摩擦力の関係  [Not invited]
    綿谷一輝; 寺尾京平; 下川房男; 高尾英邦; 綿谷一輝; 寺尾京平; 下川房男; 高尾英邦
    電気学会全国大会講演論文集(CD-ROM)  2018/03
  • 高分解能MEMS触覚センサを用いた毛髪表面の手触り感計測  [Not invited]
    中光孝太; 綿谷一輝; 寺尾京平; 下川房男; 高尾英邦; 中光孝太; 綿谷一輝; 寺尾京平; 下川房男; 高尾英邦
    電気学会全国大会講演論文集(CD-ROM)  2018/03
  • 高分解能触覚センサと深層学習を用いた接触対象の精密判別  [Not invited]
    上田剣政; 綿谷一輝; 寺尾京平; 下川房男; 高尾英邦; 上田剣政; 綿谷一輝; 寺尾京平; 下川房男; 高尾英邦
    電気学会全国大会講演論文集(CD-ROM)  2018/03
  • 針状接触子を有する2軸触覚センサによるサブミクロン領域の手触り感計測  [Not invited]
    中島翼; 綿谷一輝; 寺尾京平; 下川房男; 高尾英邦; 中島翼; 綿谷一輝; 寺尾京平; 下川房男; 高尾英邦
    電気学会全国大会講演論文集(CD-ROM)  2018/03
  • 2波長の共振モードによる蛍光増強を指向したハニカム格子フォトニック結晶の設計  [Not invited]
    志水友哉; 安藝翔馬; 前野権一; 寺尾京平; 塩見太朗; 末吉健志; 久本秀明; 遠藤達郎; 遠藤達郎
    応用物理学会春季学術講演会講演予稿集(CD-ROM)  2018/03
  • 超低侵襲実装を志向する「細胞化センサ」デバイス  [Not invited]
    高尾英邦; 森宏仁; 前田祐作; 綿谷一輝; 寺尾京平; 下川房男; 前田光平; 香西亮吾
    電子情報通信学会論文誌 C(Web)  2018/01
  • Sense of Touch in Submicron Region Realized by Two-axis Tactile Sensor with a Needle-like Contactor  [Not invited]
    中島翼; 綿谷一輝; 寺尾京平; 下川房男; 高尾英邦; Tubasa Nakashima; Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao
    Proceedings of 31st IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2018)  2018/01
  • 電気刺激と静電刺激を用いた触覚ディスプレイの製作  [Not invited]
    廣津卓磨; 加藤邦拓; 下川房男; 高尾英邦; 寺尾京平; 梶本裕之; 石塚裕己
    計測自動制御学会システムインテグレーション部門講演会(CD-ROM)  2017/12
  • 空間分解能を有した臓器解析の実現に向けたSiブレードアレイの開発  [Not invited]
    塩見 太朗; 香川 大地; 高尾 英邦; 下川 房男; 寺尾 京平
    生命科学系学会合同年次大会  2017/12
  • マイクロ流体デバイスによる敗血症に伴う腎微小環境変化の解析  [Not invited]
    田尾 祐一; 高尾 英邦; 下川 房男; 中野 大介; 寺尾 京平
    生命科学系学会合同年次大会  2017/12
  • Laser-Manipulated Microtool with Enzyme-Functionalized Surface for On Site Molecular Processing  [Not invited]
    増田晃士; 高尾英邦; 下川房男; 寺尾京平
    Proceedings of 21th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS2017)  2017/11
  • Optical driven microtool with enzyme-functionalized surface for direct molecular processing  [Not invited]
    増田 晃士; 高尾 英邦; 下川 房男; 寺尾 京平
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2017/10
  • Investigation of Process Parameters for Control of Diameter and Alignment of Self-assembled DNA Nanowires  [Not invited]
    神谷 昌吾; 高尾 英邦; 下川 房男; 寺尾 京平
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2017/10
  • A "Micro-Macro" Integrated Multiscale MEMS Tactile Sensor for Detection Ability of Surface Texture  [Not invited]
    綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2017/10
  • Development of Si blade array device of through hole type for realizing organ analysis  [Not invited]
    塩見 太朗; 香川 大地; 高尾 英邦; 下川 房男; 寺尾 京平
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2017/10
  • Imaging dynamics of single circular DNA molecules using DNA trapping device  [Not invited]
    土肥 大輝; 平野 研; 寺尾 京平
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2017/10
  • 環状DNA1分子トラップデバイスを利用した分子ダイナミクスの計測  [Not invited]
    土肥大輝; 平野研; 寺尾京平; 寺尾京平
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2017/10
  • 臓器解析の実現に向けた貫通孔型Siブレードアレイデバイスの開発  [Not invited]
    塩見太朗; 香川大地; 高尾英邦; 下川房男; 寺尾京平; 寺尾京平
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2017/10
  • 指紋・指腹の表面質感検知能を集積したマルチスケール型MEMS触覚センサ  [Not invited]
    綿谷一輝; 寺尾京平; 寺尾京平; 下川房男; 下川房男; 高尾英邦; 高尾英邦
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2017/10
  • 微細な表面形状と摩擦を用いたザラザラ感定量化モデル  [Not invited]
    大西智博; 綿谷一輝; 佐藤敬子; 佐藤敬子; 寺尾京平; 寺尾京平; 下川房男; 下川房男; 高尾英邦; 高尾英邦
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2017/10
  • 酵素機能を融合した光駆動分子加工ツールの開発  [Not invited]
    増田晃士; 高尾英邦; 下川房男; 寺尾京平; 寺尾京平
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2017/10
  • 自己組織化DNAナノワイヤの直径と配列の制御に向けたプロセス検討  [Not invited]
    神谷昌吾; 高尾英邦; 下川房男; 寺尾京平; 寺尾京平
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2017/10
  • Biological information (pH/EC) sensor device for quantitatively monitoring plant health conditions  [Not invited]
    Ryosuke Izumi; Akihito Ono; Hiroki Ishizuka; Kyohei Terao; Hidekuni Takao; Tsuyoshi Kobayashi; Ikuo Kataoka; Fusao Shimokawa
    Proceedings of IEEE Sensors  2017/10 
    © 2017 IEEE. In this study, a sensor device based on MEMS technology is proposed to quantitatively monitor the health conditions of plants using biological information (i.e., pH and electrical conductivity (EC)). The proposed sensor device comprises an ion-sensitive field-effect transistor (ISFET)-based sensor (for pH measurement), an EC sensor, and a p-n diode temperature sensor (for adjusting the temperature dependency of the pH and EC measurements). A prototype of the proposed sensor device was fabricated. Furthermore, the basic performance of the ISFET-based pH sensor and EC sensor was evaluated. Through experiments with mimicking plant, the feasibility of measuring the internal biological information (pH and EC) of plants was demonstrated.
  • 微細な表面形状と摩擦の波動に基づくザラザラ感定量化の研究  [Not invited]
    大西智博; 綿谷一輝; 佐藤敬子; 佐藤敬子; 寺尾京平; 寺尾京平; 下川房男; 下川房男; 高尾英邦; 高尾英邦
    日本バーチャルリアリティ学会大会論文集(CD-ROM)  2017/09
  • 表面質感の取得を目指した高感度触覚センサ  [Not invited]
    綿谷一輝; 寺尾京平; 寺尾京平; 下川房男; 下川房男; 高尾英邦; 高尾英邦
    日本バーチャルリアリティ学会大会論文集(CD-ROM)  2017/09
  • Highly pure phloem-sap-extraction sensor device for direct component analysis of nutrition in plant shoots  [Not invited]
    Akihito Ono; Ryosuke Izumi; Hiroki Ishizuka; Kyohei Terao; Hidekuni Takao; Ryuji Ichihashi; Tsuyoshi Kobayashi; Ikuo Kataoka; Fusao Shimokawa
    TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems  2017/07 
    © 2017 IEEE. This paper describes a highly pure phloem-sap-extraction sensor device that mounts a phloem position-identification sensor. Convenient methods of artificially extracting highly pure phloem sap for quantitative analysis of plant nutrition have yet to be established. To realize direct analysis of nutrition as well as long-term monitoring of its component fluctuation, we propose a novel sensor device that can distinguish phloem and xylem positions stably for a long time and extract only pure phloem sap.
  • 1MPa resistant MEMS slide valve driven by an external actuator for high power fluidic applications  [Not invited]
    Hidekuni Takao; Satoshi Takemasa; Kyohei Terao; Fusao Shimokawa
    TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems  2017/07 
    © 2017 IEEE. This paper reports a durable MEMS slide valve with enhanced controllability by long-stroke actuation and high pressure resistance more than 1MPa. The features are realized by combination of precise processing accuracy of MEMS and powerful driving force of external actuator. The merits of MEMS microvalves (i.e. highly accurate micro structures) and the merits of 'macro-scale' valves (i.e. long-stroke/powerful actuators) are combined to solve problem of conventional MEMS microvalves for high-power applications with high pressure fluidic flow. This microvalve copes with both high pressure resistance more than 1MPa and highly accurate flow rate control ability from 5 to 100ml/min for the first time.
  • Development of a multi-electrode electrovibration tactile display with 1 mm resolution  [Not invited]
    H. Ishizuka; K. Suzuki; K. Terao; H. Takao; F. Shimokawa; H. Kajimoto
    2017 IEEE World Haptics Conference, WHC 2017  2017/07 
    © 2017 IEEE. In this study, we demonstrate the characteristics of an electrovibration tactile display with a 1 mm resolution. Electrovibration is one of the promising stimulus methods for mobile tactile devices because of its simplicity in terms of structure of the tactile display and principle. While several groups have developed electrovibration tactile displays, the resolution of the displays have not been discussed. Resolution is an important feature to emulate the surface textures of real objects that deform the skin with a 1 mm resolution. To achieve electrovibration stimulus with high resolution, we fabricated an electrovibration tactile display consisting of an array of electrodes with a width of 1 mm. We also evaluated the characteristics of the fabricated tactile display. We asked the test subjects if they could perceive the electrovibration stimulus. From the results, we determined that while the amplitude and the frequency of the applied sinusoidal voltage affected the size of the perceived stimulus, the area of the electrovibration did not affect this perception. We also found that the insulator of the tactile display was broken down. The proposed tactile display was able to present a spatial electrovibration stimulus and required optimization of the applied voltage.
  • Development of high resolution electrostatic tactile display  [Not invited]
    H. Ishizuka; K. Suzuki; K. Terao; H. Takao; F. Shimokawa
    2017 International Conference on Electronics Packaging, ICEP 2017  2017/06 
    © 2017 Japan Institute of Electronics Packaging. In this study, we demonstrate an electrovibration tactile display with an array of electrodes. Electovibration is a promising stimulus method for tactile feedback in mobile devices. The electrovibration tactile displays have been developed for the last several decades. However, these studies focused on application of the tactile display. The resolution of the tactile display, which is important for tactile sensation, is not investigated. In this study, we developed a electrovibration tactile display with high resolution. The tactile display consists of an array of electrodes with the width of 0.95 mm. The electrodes are arranged with the interval of 0.05 mm. The resulting resolution is 1 mm. We established the fabrication process of the tactile display and evaluated the fundamental characteristics. The results indicated that the perception was determined by the amplitude of the applied voltage. And also, the perception was not related to the contacting area and applied voltage. The proposed tactile display was able to present a spatial electrovibration stimulus and required optimization of the applied voltage.
  • HIGHLY PURE PHLOEM-SAP-EXTRACTION SENSOR DEVICE FOR DIRECT COMPONENT ANALYSIS OF NUTRITION IN PLANT SHOOTS  [Not invited]
    小野瑛人; 泉亮輔; 石塚 裕己; 寺尾京平; 高尾英邦; 小林剛; 片岡郁雄; 下川房男(Akitito Ono; Ryousuke Izumi; Hiroki Ishizuka; K. Terao; Hidekuni Takao; Tsujoshi Kobayashi; Ikuo Kataoka; F. Shimokaw
    Digest of Technical Papers of The 18th International Conference on Solid-State Sensors, Actuators and Microsystems (IEEE Transducers 2017)  2017/06
  • 1MPa resistant MEMS slide valve driven by an external actuator for high power fluidic applications  [Not invited]
    高尾英邦; 武政智史; 寺尾京平; 下川房男; Hidekuni Takao; S. Takemasa; K. Terao; F. Shimokaw
    Digest of Technical Papers of The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2017)  2017/06
  • Nanoblade array for spatial dissection of single cells and tissues  [Not invited]
    D. Kagawa; M. Kusumoto; Y. Takemura; H. Takao; F. Shimokawa; K. Terao
    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)  2017/02 
    © 2017 IEEE. We propose a novel method for sampling single cells and intracellular biomolecules without losing spatial information in tissues or in single cells, using Si nano-blade array device. The device has an array of thin blade structures ranging from 300 nm to tens of μm in thickness. The blade design is easily arrangeable in accordance with the target samples (single cells and tissues). Pushing the device physically against cultured cells or a sliced tissue allows us to dissect and keep them in the space walled by the blade structures. The biomolecules are extracted in each space without contaminating each other, and are collected with ligand molecules immobilized on the blades or a micropipette approaching from the backside of the device. The device allows the sampling of biomolecules extracted from tissue or single cells with spatial information, which is expected to realize the analysis of spatial distribution of biomolecules.
  • A 'micro-macro' integrated planar MEMS tactile sensor for precise modeling and measurement of fingertip sensation  [Not invited]
    Kazuki Watatani; Ryogo Kozai; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao
    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)  2017/02 
    © 2017 IEEE. In this study, a novel 'micro-macro' planer MEMS tactile sensor integrating two different scales of tactile sensors has been developed for artificial realization of human's fingertip feeling. The 'micro-scale' tactile sensor detects 'micro surface shape' and 'micro-area frictional force' that are generated and detected at a fingerprint on human's fingertip skin. On the other hand, the integrated 'macro-scale' tactile sensor detects 'overall contact pressure' and 'macro-area sliding friction' that are detected by wide-area on fingertip skin. Since the combination of 'micro and macro' tactile information has an important meaning in human's fingertip sensation, this tactile sensor realizes multi-scale tactile detection at the same time and at the same point on the sample surface. It will be a very powerful tool for understanding how humans recognize objects using their fingertip skin sensation.
  • On-site manipulation of single DNA molecules using optically-driven microchopsticks  [Not invited]
    Ryo Inukai; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao
    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)  2017/02 
    © 2017 IEEE. This paper reports a novel DNA manipulation technique for the analysis of single DNA molecules under a fluorescence microscope. We successfully manipulated single DNA molecules using two microstructures driven by two laser beams, where we handled them like 'chopsticks'. We evaluated the dimensions and the shapes of microstructures, intended for grasping single DNA molecules efficiently. We have found that the geometry of the structure is dominant parameter for effective handling of single DNA molecules. This manipulation technique allows the imaging of single DNA molecules with its intact state, which will lead to the nanotechnology-based DNA analysis.
  • NANOBLADE ARRAY FOR SPATIAL DISSECTION OF SINGLE CELLS AND TISSUES  [Not invited]
    香川大地; 楠本将貴; 竹村祐人; 高尾英邦; 下川房男; 寺尾京平
    Proceedings of 30th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2017)  2017/01
  • ON-SITE MANIPULATION OF SINGLE DNA MOLECULES USING OPTICALLY-DRIVEN MICROCHOPSTICKS  [Not invited]
    犬飼亮; 高尾英邦; 下川房男; 寺尾京平
    Proceedings of 30th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2017)  2017/01
  • A “Micro-Macro” Integrated Planar MEMS Tactile Sensor for Precise Modeling and Measurement of Fingertip Sensation  [Not invited]
    綿谷一輝; 香西亮吾; 寺尾京平; 下川房男; 高尾英邦
    Proceedings of 30th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2017)  2017/01
  • Development of 2V sensitivity static electricity sensor with vertically mounted large electrode  [Not invited]
    Atsuya Iima; Yusaku Oka; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao
    Proceedings of IEEE Sensors  2016/11 
    © 2016 IEEE. This paper reports a very high sensitivity static electricity sensor assembled with a vertically mounted large area electrode. The electrode is fabricated by perforation of single crystalline silicon, and automatically aligned on an electrostatic actuator stage. The sensor measures a charged voltage of measuring object surface using a 4×4 mm2 electrode driven at the resonant frequency in vertical direction to the object surface. The charged voltage of surface is in proportion to the alternative current caused by change of capacitance existing between the electrode and surface. Realized resolution of static electricity was 1.96V, and it is about 100 times higher performance than the previously reported MEMS static electricity sensor.
  • A two-axis tactile sensor with 1μm diameter tip of contactor for detection ability of micro region surface texture  [Not invited]
    Kazuki Watatani; Ryogo Kozai; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao
    Proceedings of IEEE Sensors  2016/11 
    © 2016 IEEE. This paper reports development of tactile sensor with a fine tip of contactor has been developed for detection of micro region surface texture. Since human's fingertip can discriminate surface texture finer than 1μm, it is considered that a higher resolution of tactile sensors is required for quantification of tactile sense. Tip diameter of contactor of this device is designed as 1μm to realize higher spatial resolution than previous tactile sensor with 200μm diameter tip. Design of suspension structures and piezoresistive detection circuits is optimized in order to obtain a higher sensitivity and suitable contact pressure for micro region tactile sensing. Measured sensitivity of surface shape is about 2mV/μm at a 10V supply voltage, which is enough for sub-micron shape detection. The device in this study have realized a high spatial resolution which is similar to a stylus surface profiler (DEKTAK8).
  • Microscale phloem sap extraction sensor device for measuring biological information in plant branches  [Not invited]
    Akihito Ono; Akihito Yoneda; Yuichi Tao; Kyohei Terao; Hidekuni Takao; Ryuji Ichihashi; Tsuyoshi Kobayashi; Ikuo Kataoka; Fusao Shimokawa
    Proceedings of IEEE Sensors  2016/11 
    © 2016 IEEE. In this study, a microscale phloem sap extraction sensor device based on MEMS technology is proposed to artificially extract phloem sap and monitor biological information in plant branches. The device consists of electrical resistance sensors to distinguish the positions of vascular bundles (xylem/phloem) and hollow-structured cantilevers with reservoirs for fluid extraction. A prototype of the proposed sensor device was fabricated. Furthermore, the performance of the position-distinction sensor was evaluated, and the feasibility of the fluid-extraction structure was validated.
  • Microscale phloem sap dynamics measurement sensor device for monitoring the transport of nutritive substances in plants  [Not invited]
    小野瑛人; 矢野裕也; 寺尾京平; 高尾英邦; 市橋隆自; 小林剛; 片岡郁雄; 下川房男(Akihito Ono; Yuya Yano; K. Terao; H. Takao; Riji Ichihashi; Tsuyoshi Kobayashi; Ikuo Kataoka; F. Shimokaw
    29th International Microprocesses and Nanotechnology Conference (MNC2016)  2016/11
  • Realization of MEMS Static Electricity Sensor with High Sensitivity Using Vertical Mounting method of Large Electrode  [Not invited]
    飯間 敦矢; 岡 勇作; 寺尾 京平; 下川 房男; 高尾 英邦
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2016/10
  • A Two-Axis Tactile Sensor with High Sensitivity Aimed at Measurement of Micro Region Surface Texture  [Not invited]
    綿谷 一輝; 香西 亮吾; 寺尾 京平; 下川 房男; 高尾 英邦
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2016/10
  • Molecular Quoits in Microfluidic Channel for Imaging Dynamics of Single Circular DNA Molecules  [Not invited]
    Daiki Dohi; Ken Hirano; Kyohei Terao
    Proc. of 20th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2016)  2016/10
  • 高等植物の道管流・師管流の計測技術と生態学における研究展開 MEMS技術を用いた超小型道管流センサ  [Not invited]
    越智誠; 矢野裕也; 寺尾京平; 鈴木孝明; 高尾英邦; 小林剛; 片岡郁雄; 下川房男
    日本生態学会誌  2016/07
  • Development of microfluidic device for imaging paracrine communication  [Not invited]
    田尾祐一; 福田健太; 高尾英邦; 下川房男; 寺尾京平; 寺尾京平
    電気学会バイオ・マイクロシステム研究会資料  2016/06
  • Development of microfluidic device for imaging dynamics of single circular DNA molecule  [Not invited]
    土肥大輝; 平野研; 寺尾京平; 寺尾京平
    電気学会バイオ・マイクロシステム研究会資料  2016/06
  • Measurement of Surface Texture on Cloth Samples Using a Highly Sensitive Two-Axis Tactile Sensor  [Not invited]
    綿谷一輝; 香西亮吾; 寺尾京平; 下川房男; 高尾英邦
    Proceedings of Asia-Pacific Conference of Transducers and Micro-Nano Technology 2016  2016/06
  • Micro Cell Array Using Cell Surface Medication  [Not invited]
    鈴木孝明; 鈴木孝明; 寺村裕治; 北濱若奈; 寺尾京平; 高尾英邦; 下川房男; 上野秀貴
    電気学会バイオ・マイクロシステム研究会資料  2016/04
  • 流体操作機構を集積化した小型細胞固定デバイスの開発  [Not invited]
    古谷尚輝; 島上卓也; 寺尾京平; 高尾英邦; 下川房男; 秋光和也; 鈴木孝明
    日本機械学会情報・知能・精密機器部門講演会論文集(CD-ROM)  2016/03
  • Development of Local Light Stimulation and Multi-point Measurement Device for Neural Network Analysis  [Not invited]
    UENO Hidetaka; KOMAI Shoji; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; KOTERA Hidetoshi; SUZUKI Takaaki
    The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP  2016/03 

    In brain science and psychology, one of the most important purposes of recent studies about neural network, biological circuit in brain, is to establish a method of treatment for the central nervous system disease, such as Alzheimer. Neurons in a neural network is stimulated and controlled by visible lights by Optogenetics methods. In this paper, we propose a microchip integrated micro electrodes, micro lenses, and pinholes. The proposed microchip is capable of stimulating a neural network with two focused lights which have different affection to the neuron, and measuring the electrical reaction of the neural network.

  • E-2-4 Development of Local Light Stimulation and Multi-point Measurement Device for Neural Network Analysis  [Not invited]
    UENO Hidetaka; KOMAI Shoji; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; KOTERA Hidetoshi; SUZUKI Takaaki
    Conference on Information, Intelligence and Precision Equipment : IIP  2016/03 
    In brain science and psychology, one of the most important purposes of recent studies about neural network, biological circuit in brain, is to establish a method of treatment for the central nervous system disease, such as Alzheimer. Neurons in a neural network is stimulated and controlled by visible lights by Optogenetics methods. In thie paper, we propose a microchip integrated micro electrodes, micro lenses, and pinholes. The proposed microchip is capable of stimulating a neural network with two focused lights which have different affection to the neuron, and measuring the electrical reaction of the neural network.
  • E-2-3 Development of a Compact Cell Trapping Device Integrated with Fluid Handling Components  [Not invited]
    Furuya Naoki; SHIMAGAMI Takuya; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; AKIMITSU Kazuya; SUZUKI Takaaki
    Conference on Information, Intelligence and Precision Equipment : IIP  2016/03 
    In recent years, the various studies of trapping and operating single cells by using a microfluidic have been proceeded. Many conventional methods requires a fluid operating unit outside the device. Therefore, it is difficult to carry the device during operation. In this study, We integrate a small cell trapping device with miniature peristaltic pumps and a chip made by multidirectional photolithography method. The cells on the highly portable device are easily stored in an incubator and observed under the microscope.
  • 高温微細加工を目指したマイクロフレームアレイデバイス  [Not invited]
    井原拓也; 寺尾京平; 下川房男; 高尾英邦; 高尾英邦
    電気学会全国大会講演論文集(CD-ROM)  2016/03
  • 大面積電極の垂直実装を用いた高感度静電気センサの開発  [Not invited]
    飯間敦矢; 寺尾京平; 下川房男; 高尾英邦; 高尾英邦
    電気学会全国大会講演論文集(CD-ROM)  2016/03
  • マイクロピラー構造を用いた環状DNA一分子トラップ技術の開発  [Not invited]
    土肥大輝; 平野研; 寺尾京平; 寺尾京平
    静電気学会講演論文集  2016
  • 単一細胞マイクロアレイの孔形状が固定効率に及ぼす影響  [Not invited]
    古谷尚輝; 島上卓也; 佐藤竜偉; 寺尾京平; 高尾英邦; 下川房男; 秋光和也; 鈴木孝明; 鈴木孝明
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2016
  • 微細領域の質感取得を目指した高分解能2軸MEMS触覚センサ  [Not invited]
    綿谷一輝; 香西亮吾; 寺尾京平; 寺尾京平; 下川房男; 下川房男; 高尾英邦; 高尾英邦
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2016
  • 1分子解析を目指したDNA1分子物理操作に関する研究  [Not invited]
    犬飼 亮; 増田 千洋; 高尾 英邦; 下川 房男; 小穴 英廣; 鷲津 正夫; 寺尾 京平
    日本生化学会大会・日本分子生物学会年会合同大会講演要旨集  2015/12
  • Reduction of Contact Force Dependence on the MEMS Hardness Sensor Using Reference Plane to Detect Human Body Hardness  [Not invited]
    前田祐作; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦; Y. Maeda; K. Terao; T. Suzuki; F. Shimokawa; Hidekuni Takao
    Proc. of the 28th IEEE Sensors Conference (IEEE Sensors 2015)  2015/11
  • Optimization of Applied Voltage in μEP Chip for Plant Cell  [Not invited]
    古谷 尚輝; 島上 卓也; 下川 房男; 寺尾 京平; 高尾 英邦; 秋光 和也; 鈴木 孝明
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2015/10
  • Molecular wiring with single giant DNA molecules using optically-driven microstructures  [Not invited]
    犬飼 亮; 高尾 英邦; 下川 房男; 鈴木 孝明; 寺尾 京平
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2015/10
  • Kretschmann type SPR sensing assisted with electrokinetic effects  [Not invited]
    近藤 翔平; 高尾 英邦; 下川 房男; 鈴木 孝明; 寺尾 京平
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2015/10
  • Microscale phloem flow sensor fabricated using MEMS technology  [Not invited]
    田尾 祐一; 濱田 洋輝; 矢野 裕也; 寺尾 京平; 高尾 英邦; 下川 房男; 鈴木 孝明; 小林 剛; 片岡 郁雄
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2015/10
  • Fabrication of Nano-Actuator for Modulating Surface Plasmon Resonance Wavelength Using Crystalline Anisotropic Plasma Etching  [Not invited]
    香川 大地; 鏡原 照正; 下川 房男; 高尾 英邦; 寺尾 京平; 山口 堅三; 鈴木 孝明
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2015/10
  • A new tactile evaluation method for quantification of touch sensation using an in-plane motion MEMS tactile sensor  [Not invited]
    香西 亮吾; 寺尾 京平; 下川 房男; 高尾 英邦
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2015/10
  • 結晶異方性プラズマエッチング法によるSP共鳴波長変調アクチュエータの作製  [Not invited]
    香川大地; 鏡原照正; 下川房男; 高尾英邦; 寺尾京平; 山口堅三; 鈴木孝明
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2015/10
  • 厚膜スプレーコート法のモデル化による高精度膜厚制御  [Not invited]
    藤原清; 赤松幹夫; 寺尾京平; 高尾英邦; 下川房男; 鈴木孝明
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2015/10
  • MEMS技術を用いた超小型師管流センサ  [Not invited]
    田尾祐一; 濱田洋輝; 矢野裕也; 寺尾京平; 高尾英邦; 下川房男; 鈴木孝明; 小林剛; 片岡郁雄
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2015/10
  • Si/polymer/glassチップを用いた神経細胞組織内局所光刺激デバイスの開発  [Not invited]
    上野秀貴; 駒井章治; 寺尾京平; 高尾英邦; 下川房男; 小寺秀俊; 鈴木孝明
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2015/10
  • 周波数変調された可動板を用いたマイクロ流体制御技術  [Not invited]
    河合駿; 山下紘史; 寺尾京平; 高尾英邦; 山田功; 下川房男; 鈴木孝明
    日本機械学会マイクロ・ナノ工学シンポジウム講演論文集(CD-ROM)  2015/10
  • MEMS技術を用いた超小型師管流センサ(2)  [Not invited]
    濱田洋輝; 田尾祐一; 米田晃人; 寺尾京平; 高尾英邦; 下川房男; 小林剛; 片岡郁雄
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2015/10
  • 植物細胞向けμEPチップにおける印加電圧の最適化  [Not invited]
    古谷尚輝; 島上卓也; 下川房男; 寺尾京平; 高尾英邦; 秋光和也; 鈴木孝明
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2015/10
  • 界面動電効果を利用したクレッチマン型SPRセンシング法の提案  [Not invited]
    近藤翔平; 高尾英邦; 下川房男; 鈴木孝明; 寺尾京平; 寺尾京平
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2015/10
  • 光駆動微小構造体を用いた巨大DNA分子液中配線技術の提案  [Not invited]
    犬飼亮; 高尾英邦; 下川房男; 鈴木孝明; 寺尾京平; 寺尾京平
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2015/10
  • 面内変位型触覚センサを用いた手触り感の定量化のための新たな触覚評価方法  [Not invited]
    香西亮吾; 寺尾京平; 下川房男; 高尾英邦
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2015/10
  • 回転傾斜露光法とPDMSモールディングを用いたDNAファイバ解析チップの作製  [Not invited]
    北野広大; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    日本機械学会マイクロ・ナノ工学シンポジウム講演論文集(CD-ROM)  2015/10
  • 30pm1-A-4 Fabrication of DNA Fiber Analysis Chip Using Rotated/Inclined Photolithography and PDMS Molding Process  [Not invited]
    KITANO Kodai; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki
    マイクロ・ナノ工学シンポジウム  2015/10 
    We propose a disposable-type DNA fiber analysis chip having 3D microstructures fabricated by PDMS molding. The proposed chip extends chromosomes by flow induced by a centrifugal force and aligns them with the 3D microstructures. We easily fabricate a mold having complex structures by the rotated/inclined exposure with a fixed mask. It is experimentally confirmed that the fabricated chip uniformly extends the chromosomes on the microstructures.
  • 30am2-PN-24 Microfluidic control method using fin structures operated by frequency modulation  [Not invited]
    KAWAI Hayao; YAMASHITA Hirohumi; TERAO Kyohei; TAKAO Hidekuni; YAMADA Kou; SHIMOKAWA Fusao; SUZUKI Takaaki
    マイクロ・ナノ工学シンポジウム  2015/10 
    As a fluid operation technique in microfluidic systems, we proposed a microfluidic control device to change mixing and pumping modes by frequency modulation. The proposed device has a movable fin structure supported by hinges in a microchannel and driven by electromagnetic force. We designed the fin structure to have a short difference of resonant frequencies between vertical and torsional modes for changing mixing and pumping modes. To evaluate the fluid flow generated by the fabricated device, we demonstrated a driving test in the water.
  • Design and Characteristics of a MEMS Human Body Hardness Sensor Aimed to Diagnosis of Lesion Size  [Not invited]
    前田祐作; 寺尾京平; 下川房男; 高尾英邦; Y. Maeda; K. Terao; F. Shimokawa; Hidekuni Takao
    Proc. of 2015 International Conference on Solid State Devices and Materials (SSDM2015)  2015/09
  • Development of Thick photoresist for BioMEMS  [Not invited]
    鈴木孝明; 圓尾且也; 上野秀貴; 寺尾京平; 高尾英邦; 下川房男; 小寺秀俊
    電子情報通信学会技術研究報告  2015/07
  • Analysis of cell responses induced by chemical stimulation to single cell in a pancreatic β cell cluster  [Not invited]
    寺尾京平; 寺尾京平; 今井啓輔; 高尾英邦; 下川房男; 鈴木孝明; 小寺秀俊
    電気学会フィジカルセンサ研究会資料  2015/07
  • A New Extraction Method of Information for Quantification of the Sense of Touch Using a Novel Two-Axis Tactile Sensor  [Not invited]
    香西亮吾; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦(R. Kozai; K. Terao; T. Suzuki; F. Shimokawa; Hidekuni Takao
    Digest of Technical Papers of The 18th International Conference on Solid-State Sensors, Actuators and Microsystems (IEEE Transducers2015)  2015/06
  • Generation of Low-Temperature Atmospheric Pressure Plasma-Jet Patternable Array at a 320micron Pitch Channel Array  [Not invited]
    井原拓也; 山崎秀貴; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦; T. Ihara; H. Yamasaki; K. Terao; T. Suzuki; F. Shimokawa; Hidekuni Takao
    Digest of Technical Papers of The 18th International Conference on Solid-State Sensors, Actuators and Microsystems (IEEE Transducers2015)  2015/06
  • MEMS硬さセンサにおける基準面構造による押し当て荷重依存性低減効果の検証  [Not invited]
    前田祐作; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦
    電気学会全国大会講演論文集(CD-ROM)  2015/03
  • 植物新梢末端の師管流計測を目指した超小型師管流センサ(2)―師管液の抽出・成分測定―  [Not invited]
    米田晃人; 矢野裕也; 寺尾京平; 鈴木孝明; 高尾英邦; 下川房男; 小林剛; 片岡郁雄
    日本生態学会大会講演要旨(Web)  2015
  • 植物新梢末端の師管流計測を目指した超小型師管流センサ(1)―師管流の向き,師管流量の測定―  [Not invited]
    矢野裕也; 寺尾京平; 鈴木孝明; 高尾英邦; 小林剛; 片岡郁雄; 下川房男
    日本生態学会大会講演要旨(Web)  2015
  • A NOVEL CONFIGURATION OF TACTILE SENSOR TO ACQUIRE THE CORRELATION BETWEEN SURFACE ROUGHNESS AND FRICTIONAL FORCE  [Not invited]
    香西 亮吾; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦
    Proceedings of 28th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2015)  2015/01
  • A TACTILE SENSOR WITH THE REFERENCE PLANE FOR DETECTION ABILITIES OF FRICTIONAL FORCE AND HUMAN BODY HARDNESS AIMED TO MEDICAL APPLICATIONS  [Not invited]
    前田 祐作; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦
    Proceedings of 28th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2015)  2015/01
  • 感光性磁気ナノ複合材料を用いた電磁マイクロポンプの送液特性に関する研究  [Not invited]
    植田勇作; 中原佐; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 小寺秀俊; 鈴木孝明
    MAGDAコンファレンス講演論文集  2014/12
  • SU‐8/Feコンポジットを用いた磁気駆動型マイクロバルブの開発  [Not invited]
    鈴木淳也; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    MAGDAコンファレンス講演論文集  2014/12
  • Fabrication and Evaluation of the Atmospheric Pressure Plasma Jet Array having Channels of 320μm pitch using Silicon Microfabrication Technology  [Not invited]
    武政 智史; 山崎 秀貴; 寺尾 京平
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2014/10
  • 21am2-E7 Separation and detection of biosamples using SPR sensor chip integrated with microslit structures  [Not invited]
    Terao Kyohei; Hiramatsu Shinichi; Shimizu Kazunori; Miyanishi Nobumitsu; Suzuki Takaaki; Takao Hidekuni; Shimokawa Fusao; Ohira Fumikazu
    マイクロ・ナノ工学シンポジウム  2014/10 
    Surface plasmon resonance (SPR) sensing is a non-labeling technique that is widely used for detecting biosamples, which is based on the change of the surface characteristics of a sensor chip. We developed a novel SPR sensor chip fabricated with microslit structures that allows on site filtering of particles and simultaneous analyte detection. To test the feasibility, 2 applications were demonstrated in this paper; detection of aggregation/disaggregation of nanoparticles and fast detection of serum proteins from whole blood.
  • Evaluation of Soft Materials Using a Highly Sensitive MEMS Hardness Sensor with Reference Plane Structure  [Not invited]
    前田 祐作; 寺尾 京平; 鈴木 孝明
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2014/10
  • Horizontal Type MEMS Tactile Sensor to Acquire the Correlation Between Surface Roughness and Frictional Force  [Not invited]
    香西 亮吾; 寺尾 京平; 鈴木 孝明
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2014/10
  • Measurement of quenching distance aimed to realize micro flame jet device  [Not invited]
    井原 拓也; 寺尾 京平; 鈴木 孝明
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2014/10
  • マイクロスリット構造を有したSPRセンサチップによる生体試料分離・検出  [Not invited]
    寺尾京平; 平松真一; 清水一範; 宮西伸光; 鈴木孝明; 高尾英邦; 下川房男; 大平文和
    日本機械学会マイクロ・ナノ工学シンポジウム講演論文集(CD-ROM)  2014/10
  • 細胞内物質局在解析を目指した微細ナノ構造による単一細胞空間分画  [Not invited]
    竹村祐人; 鈴木孝明; 高尾英邦; 下川房男; 寺尾京平
    化学とマイクロ・ナノシステム学会研究会講演要旨集  2014/10
  • 単一細胞内物質の多段階抽出マイクロデバイスの設計  [Not invited]
    織田拓也; 鈴木孝明; 高尾英邦; 下川房男; 寺尾京平
    化学とマイクロ・ナノシステム学会研究会講演要旨集  2014/10
  • J2230202 Development of High Accuracy Spray Coating Method Using Low Viscosity Thick Film Photoresist  [Not invited]
    FUJIWARA Kiyoshi; AKAMATSU Mikio; KOUDA Naoko; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; SUZUKI Takaaki
    Mechanical Engineering Congress, Japan  2014/09 
    A spray coating of thick photoresist is one of the key techniques for obtaining high-aspect-ratio microstructures. We have studied a high-accuracy spray coating method for obtaining wide-range of resist thickness. In this paper, we evaluated few process parameters for characterizing the coated film in the spray coating method. Then, it is possible to improve controllability and repeatability of the proposed spray coating method by modeling the spraying behavior.
  • 低粘度厚膜フォトレジストを用いた高精度スプレー塗布法の開発  [Not invited]
    藤原清; 赤松幹夫; 幸田尚子; 寺尾京平; 高尾英邦; 下川房男; 鈴木孝明
    日本機械学会年次大会講演論文集(CD-ROM)  2014/09
  • 材料判別を実現する熱伝導率センサ集積型メッシュ状シリコン触覚イメージャ  [Not invited]
    大杉亮太; 高木優佑; 前田祐作; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦
    応用物理学会秋季学術講演会講演予稿集(CD-ROM)  2014/09
  • E-1-2 Improvement of Cell Trapping Efficiency in Microfluidic Device Having Micro-Orifice Array  [Not invited]
    ISHII Takahiro; NISHIZAKI Hayato; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki
    Conference on Information, Intelligence and Precision Equipment : IIP  2014/03 
    Recently, there are many researches related to single cell trapping techniques using a microfluidic device. We have proposed a cell trapping array having micro-channels, micro-orifices, and tapered structure for single cell analysis fabricated by multidirectional photolithography and soft-micromachining. In this study, we investigated agglutination of cell samples infused to the cell trapping array to improve cell trapping efficiency at each orifice.
  • E-1-3 Chromosome Stretching Characterization of High-Throughput DNA Fiber Analysis Device using centrifugal force  [Not invited]
    KITANO Kodai; NITTA Yuki; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki
    Conference on Information, Intelligence and Precision Equipment : IIP  2014/03 
    For gene analysis in clinical diagnosis, we have demonstrated extension of chromosomes by flow induced by a centrifugal force and compartmentalize them at the microfabricated 3 dimensional mesh array. In this study, we analyzed flow field generated by the centrifugal force by finite element method. Then, we evaluated the correlation of the experimental and numerical results. The drag force in the fluid mainly extends the chromosomes on the microchip.
  • E-2-4 Development of Local Light Stimulation Device for Neural Network Analysis  [Not invited]
    UENO Hidetaka; KOMAI Shoji; TERAO Kyohei; TAKAO Hidekuni; SIMOKAWA Fusao; KOTERA Hidetoshi; SUZUKI Takaaki
    Conference on Information, Intelligence and Precision Equipment : IIP  2014/03 
    In brain science and psychology, one of the most important purposes of recent studies about neural network, biological circuit in brain, is to establish a method of treatment for the central nervous system disease, such as Alzheimer. "Optogenetics" is a new technique for analyzing neural network. In optogenetics, neurons in a neural network is stimulated and controlled by visible lights. In this paper, we propose an integrated microchip having micro electrodes and micro lenses. The proposed microchip stimulates a brain slice sample with two focused lights which have different affection to the neuron, and measures the electrical reaction of the neural network.
  • E-2-5 Plasma Resistant Evaluation of Photoresist Treated by Vacuum UV Cure Process in ECR Plasma Etching  [Not invited]
    HAMA Haruyosi; TERAO Kyohei; TAKAO Hidekuni; SIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki
    Conference on Information, Intelligence and Precision Equipment : IIP  2014/03 
    Generally, chrome thin film is used for shading material of a photo mask. Pattern precision of the chrome mask is unstable in chrome wet etching, and process cost and environmental risk increase in chrome dry etching using chlorine gas. In this study, we investigate dry etching method using non-chlorine gas for the Cr mask patterning. Etch selectively between Cr thin film and protective resist treated by vacuum UV cure method were measured in electron cyclotron resonance plasma etching using Ar gas as inert gas.
  • 遠心力を用いた高速DNAファイバ解析デバイスの染色体伸張特性  [Not invited]
    北野広大; 新田祐幹; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    日本機械学会情報・知能・精密機器部門講演会論文集(CD-ROM)  2014/03
  • ECRプラズマエッチングに対する真空UVキュアレジストのプラズマ耐性の評価  [Not invited]
    濱治慶; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    日本機械学会情報・知能・精密機器部門講演会論文集(CD-ROM)  2014/03
  • オリフィス構造を有するマイクロ流体デバイスにおける細胞固定効率の改善  [Not invited]
    石井敬洋; 西崎隼人; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    日本機械学会情報・知能・精密機器部門講演会論文集(CD-ROM)  2014/03
  • 神経細胞ネットワーク解析のための局所光刺激デバイスの開発  [Not invited]
    上野秀貴; 駒井章治; 寺尾京平; 高尾英邦; 下川房男; 小寺秀俊; 鈴木孝明
    日本機械学会情報・知能・精密機器部門講演会論文集(CD-ROM)  2014/03
  • 電解液の電位変動を受けた圧力センサの挙動についての解析  [Not invited]
    前田光平; 前田祐作; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦
    電気学会全国大会講演論文集(CD-ROM)  2014/03
  • 手触り感の定量的評価にむけたMEMS横型触覚センサ  [Not invited]
    香西亮吾; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦
    電気学会全国大会講演論文集(CD-ROM)  2014/03
  • ヒータ加熱方式を用いた超小型香り発生デバイスの性能評価  [Not invited]
    柏木賢太; 上田隆幸; 寺尾京平; 鈴木孝明; 高尾英邦; 下川房男; 中本高道
    電気学会全国大会講演論文集(CD-ROM)  2014/03
  • 320μmピッチの流路を有するシリコン大気圧プラズマアレイデバイス  [Not invited]
    山崎秀貴; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦
    電気学会全国大会講演論文集(CD-ROM)  2014/03
  • 生体組織などの柔軟材料における硬さ判別を目指したMEMS硬さセンサ  [Not invited]
    前田祐作; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦
    電気学会全国大会講演論文集(CD-ROM)  2014/03
  • Microscale Phloem Flow Sensor Fabricated Using MEMS Technology For Measuring Biological Information of Plant Branches  [Not invited]
    矢野裕也; 越智誠; 寺尾京平; 鈴木孝明; 高尾英邦; 下川房男; 小林剛; 片岡郁雄
    NANOSciTech2014 & IC-NET2014  2014/03
  • 遠心法による高速DNAファイバ解析デバイスの操作特性  [Not invited]
    北野広大; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2014
  • 低自家蛍光な厚膜フォトレジストの特性評価と染色体分析デバイスへの応用  [Not invited]
    玉井秀隆; 圓尾且也; 寺尾京平; 小寺秀俊; 鈴木孝明
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2014
  • 電位計測アレイを集積化した細胞組織内局所光刺激デバイスの開発  [Not invited]
    上野秀貴; 駒井章治; 寺尾京平; 高尾英邦; 下川房男; 小寺秀俊; 鈴木孝明
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2014
  • 材料判別を実現する熱伝導率センサ集積型メッシュ状シリコン触覚イメージャ  [Not invited]
    大杉亮太; 高木優佑; 前田祐作; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2014
  • Assist-Free Assembry Technique of Standing Optical Devices on Soft Spring Actuator Stages  [Not invited]
    岡 勇作; 篠崎 亮輔; 寺尾京平; 鈴木孝明; 下川房男; 大平文和; 高尾英邦
    Proceedings of 27th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2014)  2014/01
  • Induction and Measurement of Intracellular Heterogeneity Using Micro/Nano Structures  [Not invited]
    1st African International Biotechnology and Biomedical Conference and the 8th International Workshop on Approaches to Single Cell Analysis  2014
  • 感光性磁気ナノ複合材料を用いた電磁マイクロポンプの開発  [Not invited]
    植田勇作; 中原佐; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 小寺秀俊; 鈴木孝明
    MAGDAコンファレンス講演論文集  2013/12
  • Driving and Sensing Characteristics of Electrostatic In-Plane MEMS Rotational Mirror aimed to Silicon Optical Bench Applications  [Not invited]
    篠崎 亮輔; 岡 勇作; 寺尾 京平
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2013/11
  • Automatically Aligned Assembly Technique of Optical Element on the Movable MEMS Devices  [Not invited]
    岡 勇作; 篠崎 亮輔; 寺尾 京平
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2013/11
  • Fabrication of Integrated Tactile Sensor with Improved Load Tolerance of Contact-tip Realized by SU-8 Adhesive Layer  [Not invited]
    前田 祐作; 寺尾 京平; 鈴木 孝明
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2013/11
  • 回転傾斜露光法により作製した細胞固定デバイスの固定効率の評価  [Not invited]
    西崎隼人; 福田泰佑; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    日本機械学会マイクロ・ナノ工学シンポジウム講演論文集  2013/11
  • 5PM1-C-1 Measurement of Trapping Efficiency of a Cell Trapping Device Fabricated by Single-Mask Multidirectional Photolithography  [Not invited]
    Nishizaki Hayato; Fukuda Taisuke; Terao Kyohei; Takao Hidekuni; Oohira Fumikazu; Suzuki Takaaki
    マイクロ・ナノ工学シンポジウム  2013/11 
    Recently, there are many cell operating researches to measure cell functions in microTAS field. We have proposed a cell trapping device having micro-channels, micro-orifices and tapered structures for single cell analysis, and fabricated the prototype by multidirectional UV lithography in short process time. In this study, we designed dimensions of the tapered structure to adjust number of trapping cells. Then, we evaluated cell trapping efficiency and number of trapped cells by trap tests of fluorescent micro-beads and plant cells.
  • Chemical stimulation to single cell for analyzing cell‐cell interactions in a cell cluster  [Not invited]
    今井啓補; 鈴木孝明; 高尾英邦; 下川房男; 松岡達; 小寺秀俊; 寺尾京平
    電気学会バイオ・マイクロシステム研究会資料  2013/10
  • J161011 Finite element analysis for driving characteristics of a polymer-MEMS mirror driven attractive force  [Not invited]
    SUZUKI Junya; MIURA Takuya; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; NAMAZU Takahiro; MORIKAKU Toshiyuki; OOHIRA Fumikazu; SUZUKI Takaaki
    Mechanical Engineering Congress, Japan  2013/09 
    In this paper, we proposed a 2D polymer-MEMS mirror made of negative photoresist SU-8 containing magnetic particles as a magnetically driven actuator. It is important to evaluate the material reliability of a polymer applied for movable structures. So, we analyzed the proposed mirror structure using a finite element analysis based on obtained mechanical and magnetic properties of the used polymer. From the analytical results, the proposed mirror is actuated with the optical deflection angle 20deg. under the fracture stress 40MPa of the composite, and analytical frequency characteristic is similar to the experimental result.
  • J161012 Improvement of Mask Etching Selectivity and its application using Vacuum UV Curing Method  [Not invited]
    FUJIMURA Kimiya; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki
    Mechanical Engineering Congress, Japan  2013/09 
    In the fine processing technology, the etching tolerance improvement of resists as a protective layer is required for higher performance in the dry etching process. One of improving approaches is the resist curing method for the etch selectivity. So, we have focused on the etch selectivity of Si/resist treated by vacuum UV curing process. By the results of previous studies, it is possible to improve the etch selectivity of the protective layer treated by the vacuum UV curing process. In this study, we investigated the improvement of etch selectivity by processing under a variety of etching conditions and the processing accuracy of Si microstructures protected by the cured resist.
  • J161015 Evaluation of chromosome extension properties on microstructures of gene analysis chip  [Not invited]
    NITTA Yuki; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki
    Mechanical Engineering Congress, Japan  2013/09 
    For gene analysis, we have proposed a chromosome extension technique using the centrifugal force on a circular microchip in order to obtain high resolution and short analysis time, and a simple fabrication technique for the circular microchip having concentrically aligned micromesh structures. In this study, we investigated the miniaturization of the concentric micro mesh structures on the chip to improve the shape manipulation characteristic of the extended chromosome.
  • J161021 Evaluation of a Polymer MEMS mirror integrated an angular rate sensor  [Not invited]
    YAMASHITA Hirofumi; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki
    Mechanical Engineering Congress, Japan  2013/09 
    We present a large deflection optical scanner driven by low power consumption without resonant. Low rigidity polymer SU-8 is applied for drive hinges of the proposed MEMS-mirror. Regarding the problems of viscoelasticity polymer in a MEMS device, in this study, we present the angular rate sensor integrated in the polymer-MEMS mirror induced electromotive force. The fabricated mirror deflects over ±30deg. at non-resonant frequency. Resonant frequency is 49.5Hz and Q factor 24.8. The output signal from the integrated sensor is superimposed on the large noise. Since the output signal through the lock-in detection is the proportion to the deflection angle, the feasibility of amplitude control of the proposed polymer MEMS mirror.
  • J161022 Reduction of misalignment for integrated microfluidic systems made of polydimethylsiloxane  [Not invited]
    TAMAI Hidetaka; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki
    Mechanical Engineering Congress, Japan  2013/09 
    In this study, we quantitatively measured fundamental shrinkage ratio of PDMS under various curing condition to solve the misalignment problem of PDMS fabricated by the soft lithography for integrated microfluidic systems having over 100mm square. It is experimentally confirmed that the curing of PDMS is expressed by the Arrhenius equation, and we precisely evaluated the shrinkage ratio in the change of the curing temperature, curing time and the PDMS layer thickness using the curing constant derived from the curing rate constant. From the results, there are a proportional relationship to the shrinkage ratio and the curing constant, and the effect of the initial heat treatment. It is possible to predict the shrinkage ratio of PDMS and improve alignment accuracy by applying the obtained shrinkage ratio for the design of a photomask.
  • 角度センサを集積したポリマーMEMSミラーの駆動評価  [Not invited]
    山下紘史; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    日本機械学会年次大会講演論文集(CD-ROM)  2013/09
  • 遺伝子解析チップの微細構造による染色体伸張特性に関する評価  [Not invited]
    新田祐幹; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    日本機械学会年次大会講演論文集(CD-ROM)  2013/09
  • 集積化PDMS製マイクロ流体システムにおける位置ズレの低減  [Not invited]
    玉井秀隆; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    日本機械学会年次大会講演論文集(CD-ROM)  2013/09
  • 吸引駆動型ポリマーMEMSミラーの駆動特性に関する有限要素解析  [Not invited]
    鈴木淳也; 三浦卓也; 寺尾京平; 高尾英邦; 下川房男; 生津資大; 森角寿之; 大平文和; 鈴木孝明
    日本機械学会年次大会講演論文集(CD-ROM)  2013/09
  • 真空UVキュア法による保護膜選択比の改善とその応用  [Not invited]
    藤村仁也; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    日本機械学会年次大会講演論文集(CD-ROM)  2013/09
  • Dual-Axis Polymer-MEMS Mirror Made of Photosensitive Nanocomposite  [Not invited]
    J. Suzuki; T. Miura; K. Terao; H. Takao; F. Shimokawa; T. Namazu; F. Oohira; 鈴木孝明
    Proc. of IEEE Optical MEMS & Nanophotonics Conference  2013/08
  • Iintegration of Angular Rate Sensor on Large Deflection Polymer-MEMS Mirror  [Not invited]
    H. Yamashita; K. Terao; H. Takao; F. Shimokawa; F. Oohira; 鈴木孝明
    Proc. of IEEE Optical MEMS & Nanophotonics Conference  2013/08
  • MEMSアクチュエータへのMEMS素子自動アライメント技術  [Not invited]
    岡勇作; 篠崎亮輔; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦
    応用物理・物理系学会中国四国支部合同学術講演会講演予稿集  2013/07
  • ソフトリソグラフィにおけるPDMS収縮の温度・形状依存性定量評価  [Not invited]
    玉井秀隆; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    応用物理・物理系学会中国四国支部合同学術講演会講演予稿集  2013/07
  • 医療応用を目的としたMEMS大気圧プラズマジェットアレイデバイス  [Not invited]
    山崎秀貴; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦
    応用物理・物理系学会中国四国支部合同学術講演会講演予稿集  2013/07
  • 物体表面から摩擦力と硬さ情報を同時取得する機能集積化皮膚感覚イメージセンサ  [Not invited]
    前田祐作; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦
    応用物理・物理系学会中国四国支部合同学術講演会講演予稿集  2013/07
  • 回転傾斜露光法による同心円マイクロメッシュ構造の作製と遺伝子解析デバイスへの応用  [Not invited]
    新田祐幹; 鈴木博之; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    応用物理・物理系学会中国四国支部合同学術講演会講演予稿集  2013/07
  • ソフトリソグラフィにおけるPDMSの転写精度評価  [Not invited]
    玉井秀隆; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    日本機械学会情報・知能・精密機器部門講演会講演論文集  2013/03
  • 感光性ナノコンポジットを用いた磁気駆動型マイクロポンプの開発  [Not invited]
    植田勇作; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    日本機械学会情報・知能・精密機器部門講演会講演論文集  2013/03
  • Polymer‐MEMSミラーへのセンサ集積化に関する研究  [Not invited]
    山下紘史; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    日本機械学会情報・知能・精密機器部門講演会講演論文集  2013/03
  • E-1-1 Development of a magnetically-driven micropump with photosensitivity nanocomposit  [Not invited]
    UEDA Yusaku; TERAO Kyohei; TAKAO Hidekuni; SIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki
    Conference on Information, Intelligence and Precision Equipment : IIP  2013/03 
    Recently,micro/nano-systems have been required to satisfy the integration,further miniaturization,and shortening fabrication process time for more complex application.In the case of micro Total Analysis Systems,many types of microfluidic components,i.e.microchannels,microvalves,micromixers,and micropumps are integrated on a chip.In this study,we propose a simple-structural micropump having a magnetically-driven diaphragm made of a photosensitive nanocomposite for an easy integration method.A fabricated micropump generated the one-directional fluid flow at the flow rate of 0.35μ1/min evaluated by using image analysis with fluorescent microscope images.
  • E-1-2 Accuracy Evaluation of a Polydimethylsiloxane Replica in Soft Lithography  [Not invited]
    TAMAI Hidetaka; TAKAO Hidekuni; OOHIRA Fumikazu; TERAO Kyohei; SIMOKAWA Fusao; SUZUKI Takaaki
    Conference on Information, Intelligence and Precision Equipment : IIP  2013/03 
    In micro Total Analysis Systems(μ-TAS) field,polydimethylsiloxane(PDMS) is widely used for the structural material of a microfluidic device. However,a large scale integration of the microfluidic system becomes a laborious process because of theshrinkage of PDMS at curing process.In this study,we quantitatively evaluated the shrinkage of PDMS depend on the curing temperature,the curing time and the thickness of PDMS samples.As a result,it is seen that there is correlation between total heattransfer per unit volume and the shrinkage of PDMS.Especially,the initial heat treatment has significant effect for the saturated value of the shrinkage.
  • E-2-4 Integration of an angular rate sensor on a polymer MEMS mirror  [Not invited]
    YAMASHITA Hirofumi; TERAO Kyohei; TAKAO Hidekuni; SIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki
    Conference on Information, Intelligence and Precision Equipment : IIP  2013/03 
    In recent years,many researches of a large deflection MEMS mirror having polymer hinges have been actively done.Since the polymer materials have the demerits of time and temperature dependencies of the mechanical property related to the reproducibility of the mirror position,sensing and controlling of the mirror angle are necessary for realize a stable laser scan.In this paper,we propose a polymer-MEMS mirror integrated an angular rate sensor.The mirror is electromagnetically driven by the Lorentz force,and the mirror angle is measured by the induced electromotive force of the sensor coil on the mirror.A prototype of the fabricated mirror deflected over±30 degree and generated the sensor signal at the sensor coil.So,it is possible that the proposed mirror integrated the angular rate sensor on the device is precisely driven with feedback control.
  • 材料判別能にむけた複合センサを集積するメッシュ状シリコン触覚イメージセンサ  [Not invited]
    高木優佑; 前田祐作; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦
    電気学会全国大会講演論文集  2013/03
  • 可動MEMSデバイスへの光学素子垂直自動アライメント技術  [Not invited]
    岡勇作; 篠崎亮輔; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦
    電気学会全国大会講演論文集  2013/03
  • マイクロ流体デバイスを用いた膵β細胞クラスター内における細胞間相互作用の計測  [Not invited]
    今井啓輔; 鈴木孝明; 高尾英邦; 下川房男; 松岡達; 小寺秀俊; 寺尾京平
    日本分子生物学会年会プログラム・要旨集(Web)  2013
  • Si/Polymerヒンジを組み合わせた2軸Hybrid‐MEMSミラー  [Not invited]
    山下紘史; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2013
  • 植物末端の樹液流量の測定を目指した超小型道管流センサ  [Not invited]
    越智誠; 矢野裕也; 寺尾京平; 鈴木孝明; 高尾英邦; 小林剛; 片岡郁雄; 下川房男
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2013
  • 集積型細胞培養マイクロシステムを用いたMEMS材料の細胞毒性評価  [Not invited]
    玉井秀隆; 井上雅俊; 上野秀貴; 寺尾京平; 鈴木孝明; 小此木孝仁; 小寺秀俊
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2013
  • 遠心伸張した染色体の微細メッシュ構造上における固定形状の評価  [Not invited]
    新田祐幹; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2013
  • Patternable Atmospheric-Pressure Plasma Jets with Gas Discharge in Microfluidic Channel Array  [Not invited]
    山崎 秀貴; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦; H. Yamasaki; K. Terao; T. Suzuki; F. Shimokawa; H. Takao
    The 26th International Conference on Micro Electro Mechanical Systems (IEEE MEMS2013)  2013/01
  • Development of a Universal Integrated Micro Cell Culture System  [Not invited]
    M. Inoue; A. Okonogi; K. Terao; H. Takao; F. Shimokawa; F. Oohira; H. Kotera; T. Suzuki
    The 6th International Conference on Nano/Molecular Medicine and Engineering [IEEE NANOMED2012]  2012/11
  • DNA FIBER PREPARATION TECHNIQUE ON A CHIP FOR CLINICAL DIAGNOSIS  [Not invited]
    Takaaki Suzuki; Kyohei Terao; Hiroyuki Suzuki; Yuki Nitta; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Daisuke Hiramaru; Hidetoshi Kotera
    The 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences [microTAS2012]  2012/11
  • LARGE AREA 3D MICROFABRICATION TECHNIQUE BY MULTIDIRECTIONAL PHOTOLITHOGRAPHY FOR A CHROMOSOME EXTENSION CHIP  [Not invited]
    Yuki Nitta; Hiroyuki Suzuki; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Takaaki Suzuki
    The 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences [microTAS2012]  2012/11
  • マイクロ流路を用いた継続的局所薬剤刺激による細胞極性誘導  [Not invited]
    寺尾京平
    化学とマイクロ・ナノシステム研究会講演要旨集  2012/10
  • MEMS技術を利用した高速DNAファイバ解析デバイスの開発  [Not invited]
    鈴木孝明; 寺尾京平; 鈴木博之; 新田祐幹; 高尾英邦; 下川房男; 大平文和; 平丸大介; 小寺秀俊
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2012/10
  • マイクロ駆動素子の流路内作製法の開発とマイクロバルブへの応用  [Not invited]
    鈴木淳也; 細川祐揮; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2012/10
  • 多層塗布による高精度厚膜スプレーコート法の開発  [Not invited]
    赤松幹夫; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2012/10
  • 露光波長選択的な傾斜露光法による微細3次元形状の一括形成  [Not invited]
    西崎隼人; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2012/10
  • 回転傾斜露光法の加工面積の大型化とその応用  [Not invited]
    新田祐幹; 鈴木博之; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2012/10
  • 感光性ナノコンポジットを用いた磁気駆動型ポリマーMEMSミラーの駆動特性評価  [Not invited]
    三浦卓也; 鈴木孝明; 寺尾京平; 高尾英邦; 下川房男; 生津資大; 森角寿之; 大平文和
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2012/10
  • 高汎用集積型細胞培養マイクロシステムの構築  [Not invited]
    井上雅俊; 小此木孝仁; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 小寺秀俊; 鈴木孝明
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2012/10
  • 結晶異方性プラズマエッチングを用いた複雑3次元構造の作製  [Not invited]
    藤村仁也; 三嶋利幸; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2012/10
  • 混合噴射機能を持つマルチジェット型ベンチュリ噴霧器と力覚・冷覚複合提示ディスプレイへの応用  [Not invited]
    荒井將崇; 寺尾京平; 鈴木孝明; 下川房男; 大平文和; 高尾英邦
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2012/10
  • 微小流路内放電を用いるMEMS大気圧プラズマアレイデバイス  [Not invited]
    山崎秀貴; 寺尾京平; 鈴木孝明; 下川房男; 大平文和; 高尾英邦
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2012/10
  • 角度センシング機能を有する回転型MEMSミラーの設計・製作  [Not invited]
    篠崎亮輔; 大平文和; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2012/10
  • 基準面を用いて物体表面から摩擦力および硬さ情報を取得する機能集積型皮膚感覚センサアレイ  [Not invited]
    前田祐作; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2012/10
  • Fast whole blood testing for detecting biomarkers by size-exclusion SPR sensing  [Not invited]
    TERAO Kyohei; HIRAMATSU Shin-ichi; SHIMIZU Kazunori; MIYANISHI Nobumitsu; SUZUKI Takaaki; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu
    The 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS2012)  2012/10
  • Continuous Local Exposure to Chemical Substances of Single Cell  [Not invited]
    TERAO Kyohei; GEL Murat; OKONOGI Atsuhito; FUKE Ariko; OKITSU Teru; TADA Takashi; SUZUKI Takaaki; WASHIZU Masao; KOTERA Hidetoshi
    The 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS2012)  2012/10
  • A Novel Integrated Tactile Image Sensor for Detection of Surface Friction and Hardness Using the Reference Plane Structure  [Not invited]
    前田祐作; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦; Y. Maeda; K. Terao; T. Suzuki; F. Shimokawa; H. Takao
    IEEE Sensors2012 Conference  2012/10
  • A Post-CMOS Process of High Adhesion SU-8 Structure to Apply to Sensor Device  [Not invited]
    前田祐作; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦; Y. Maeda; K. Terao; T. Suzuki; F. Shimokawa; H. Takao
    25th International Microprocesses and Nanotechnology Conference (MNC2012)  2012/10
  • J161023 Improvement of Si/Photoresist Mask Etching Selectivity using Vacuum UV Curing Method  [Not invited]
    FUJIMURA Kimiya; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki
    Mechanical Engineering Congress, Japan  2012/09 
    In the fine processing technology in recent years, the etching tolerance improvement of resists as a protective layer is requested with higher performance of the dry etching method. The curing methods with vacuum or UV have been proposed for controlling the reflow of the resist. Moreover, it is expected that the improvement of the etch selectivity Si/resist is improved by the curing method. In this study, we quantitatively evaluated the dry etch selectivity of the silicon with a protective layer made from the resist cured with vacuum and UV.
  • J161045 A cell trap chip having mesh structures fabricated by single-mask inclined photolithography  [Not invited]
    NISHIZAKI Hayato; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki
    Mechanical Engineering Congress, Japan  2012/09 
    Recently, many types of micro electroporation methods have been proposed for high-efficiency gene transfer technique to living cells. The convensional devices were difficult to operate a large number of cells by a simple operation, and fabicated by the compricated methods with laborious process. In this study , we propose a cell trap chip having mesh structures to operation many cells by a simple operation and a simple fabrication method using single-mask inclined UV lithography. We evaluated the applicability to operate many cells and measure the cell function at single cell level by a cell immobilization test.
  • 単一マスク傾斜露光法により作製したメッシュ型細胞固定チップの開発  [Not invited]
    西崎隼人; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    日本機械学会年次大会講演論文集(CD-ROM)  2012/09
  • 真空UVキュア法によるSi/レジスト保護膜選択比の改善  [Not invited]
    藤村仁也; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    日本機械学会年次大会講演論文集(CD-ROM)  2012/09
  • Optically-Driven Microstructures for Manipulating Single DNA Molecule under Fluorescence Microscop  [Not invited]
    MASUDA Chihiro; TERAO Kyohei; OANA Hidehiro; WASHIZU Masao; SUZUKI Takaaki; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu
    Proceedings of 38th International Conference on Micro and Nano Engineering (MNE2012)  2012/09
  • Design and Fabrication of Electrostatically Driven In-Plane MEMS Rotational Mirror with Electrostatic Rotary Encoder  [Not invited]
    篠崎亮輔; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦(R. Shinozaki; K. Terao; T. Suzuki; F. Shimokawa; H. Takao
    2012 International Conference on Optical MEMS & Nanophotonics  2012/08
  • Improvement of Processing Reproducibility for a Magnetic-Driven Microstructure Made of Photosensitive Nanocomposite  [Not invited]
    T. Nakahara; J. Suzuki; Y. Hosokawa; Y. Ueda; K. Terao; H. Takao; F. Shimokawa; F. Oohira; H. Miyagawa; H. Kotera; T. Suzuki
    IEEE Optical MEMS & Nanophotonics Conference 2012  2012/08
  • Evaluation for Work Area of Rotated/Inclined UV Lithography and its Application for Gene Analysis Chip  [Not invited]
    NITTA Yuki; SUZUKI Hiroyuki; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki
    電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan  2012/06
  • Fabrication of magnetic active membrane for micropump made of photosensitive nanocomposite  [Not invited]
    NAKAHARA Tasuku; HOSOKAWA Yuuki; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; MIYAGAWA Hayato; NAMAZU Takahiro; KOTERA Hidetoshi; SUZUKI Takaaki
    電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan  2012/06
  • 電気めっき法による金ナノ構造の形成と表面化学センサの高感度化への応用  [Not invited]
    長瀬紀子; 垣田千洋; 寺尾京平; 宮西伸光; 鈴木孝明; 高尾英邦; 下川房男; 大平文和
    化学とマイクロ・ナノシステム  2012/03
  • 角度センシング機能を有する回転型静電MEMSミラーの設計と製作  [Not invited]
    篠崎亮輔; 大平文和; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦
    電気学会全国大会講演論文集  2012/03
  • MEMS技術を用いた微細大気圧プラズマアレイデバイスの製作  [Not invited]
    山崎秀貴; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦
    電気学会全国大会講演論文集  2012/03
  • Improvement of Coating Uniformity for Thick Photoresist Using a Partial Spray Coat  [Not invited]
    M. Akamatsu; K. Terao; H. Takao; F. Shimokawa; F. Oohira; T. Suzuki
    Technical digest of 7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems [IEEE NEMS2012]  2012/03
  • A Magnetic-Driven Membrane Made of Photosensitive Nanocomposite without Alignment Process  [Not invited]
    T. Nakahara; Y. Hosokawa; K. Terao; H. Takao; F. Shimokawa; F. Oohira; H. Miyagawa; T. Namazu; H. Kotera; T. Suzuki
    Technical digest of 7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems [IEEE NEMS2012]  2012/03
  • Cell Culture on MEMS Materials in Micro-Environment Limited by a Physical Condition  [Not invited]
    M. Inoue; A. Okonogi; K. Terao; H. Takao; F. Shimokawa; F. Oohira; H. Kotera; 鈴木孝明
    Micro & Nano Letters  2012/03
  • 接触面から複数の触覚情報を取得する機能集積型皮膚感覚センサアレイの設計と製作  [Not invited]
    前田祐作; 高木優佑; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦
    応用物理学関係連合講演会講演予稿集(CD-ROM)  2012/02
  • AIR-FLOW BASED MULTIFUNCTIONAL TACTILE DISPLAY DEVICE WITH MULTI-JET INTEGRATED MICRO VENTURI NOZZLE ARRAY  [Not invited]
    荒井將崇; 寺尾京平; 鈴木孝明; 下川房男; 大平文和; 高尾英邦; Masataka Arai; K. Terao; T. Suzuki; F. Shimokawa; F. Oohira; H. Takao
    The 25th International Conference on Micro Electro Mechanical Systems (IEEE MEMS2012)  2012/01
  • Self-Aligned Fabrication Process for Active Membrane Made of Photosensitive Nanocomposite  [Not invited]
    T. Nakahara; Y. Hosokawa; K. Terao; H. Takao; F. Shimokawa; F. Oohira; T. Namazu; H. Kotera; T. Suzuki
    Technical digest of 25th IEEE International Conference on Micro Electro Mechanical Systems [IEEE MEMS2012]  2012/01
  • Bio-Nano Platform for cell-cell communication  [Not invited]
    SBE’s 6th International Conference on Bioengineering and Nanotechnology (ICBN)  2012
  • Optically-Driven Microstructures for Manipulating Single DNA Molecule under Fluorescence Microscope  [Not invited]
    38th International Conference on Micro and Nano Engineering (MNE2012)  2012
  • A microfluidic device of continuous local drug delivery for the induction of cell polarity  [Not invited]
    Symposium on New Technology for Cell-based Drug Assay  2012
  • High-driven-type micro device ordor generator with MEMS actuator  [Not invited]
    第29回「センサ・マイクロマシンと応用システム」シンポジウム  2012
  • 電気めっき法による金ナノ構造の形成と表面化学センサの高感度化への応用  [Not invited]
    長瀬紀子; 垣田千洋; 寺尾京平; 鈴木孝明; 高尾英邦; 下川房男; 大平文和
    化学とマイクロ・ナノシステム研究会講演要旨集  2011/11
  • マイクロスリットアレイを有したSPRセンサチップによるナノ粒子の凝集・脱凝集現象の検出  [Not invited]
    平松真一; 清水一範; 寺尾京平; 宮西伸光; 嶋本聖子; 鈴木孝明; 高尾英邦; 下川房男; 大平文和
    化学とマイクロ・ナノシステム研究会講演要旨集  2011/11
  • DNA1分子操作に用いる光駆動微小構造体の特性評価  [Not invited]
    増田千洋; 寺尾京平; 鈴木孝明; 高尾英邦; 下川房男; 小穴英廣; 鷲津正夫; 大平文和
    化学とマイクロ・ナノシステム研究会講演要旨集  2011/11
  • A Venturi-type Micro Mist Generator fabricated by MEMS Technology and its Application to Local Surface Cooling of Target Objects  [Not invited]
    荒井將崇; 寺尾京平; 鈴木孝明; 下川房男; 大平文和; 高尾英邦; Masataka Arai; K. Terao; T. Suzuki; F. Shimokawa; F. Oohira; H. Takao
    24th International Microprocesses and Nanotechnology Conference (MNC2011)  2011/10
  • ベンチュリ構造によるマイクロミスト生成機構と冷感集積化複合触覚提示デバイスへの応用  [Not invited]
    荒井將崇; 寺尾京平; 鈴木孝明; 下川房男; 大平文和; 高尾英邦
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2011/09
  • CMOS集積化に向けたMEMSデバイスのスケーリング効果  [Not invited]
    平井紳太郎; 寺尾京平; 鈴木孝明; 下川房男; 大平文和; 高尾英邦
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2011/09
  • 感光性ナノコンポジットを用いた駆動膜のセルフアライメント加工技術の開発  [Not invited]
    中原佐; 細川祐揮; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2011/09
  • 電気浸透流を用いた開放型流路内における流体制御と生体試料操作への応用  [Not invited]
    寺尾京平; 北沢裕子; 横川隆司; 大平文和; 鷲津正夫; 小寺秀俊
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2011/09
  • マイクロ空間での細胞培養における物理的/化学的影響の定量評価  [Not invited]
    井上雅俊; 小此木孝仁; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 小寺秀俊; 鈴木孝明
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2011/09
  • 回転傾斜露光法を用いた三次元マイクロ鋳型作製と細胞固定デバイスへの応用  [Not invited]
    福田泰佑; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2011/09
  • RIEプロセスを用いたシリコン結晶異方性エッチング  [Not invited]
    三嶋利幸; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2011/09
  • 厚膜レジスト用スプレーコート法の開発  [Not invited]
    赤松幹夫; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2011/09
  • フィルター機能付き微細構造形成SPRチップのインプリント技術による製作と評価  [Not invited]
    守分仁成; 渡邉英応; 寺尾京平; 鈴木孝明; 高尾英邦; 下川房男; 大平文和
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2011/09
  • 使用温度下におけるトーションバーの機械強度評価に基づくポリマーMEMSミラーの設計と評価  [Not invited]
    佐々木修; 鈴木孝明; 寺尾京平; 高尾英邦; 下川房男; 貝原吉智; 生津資大; 大平文和
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2011/09
  • 臨床診断向けオンチップDNAファイバプレパレーション技術の開発  [Not invited]
    鈴木博之; 平丸大介; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 小寺秀俊; 鈴木孝明
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2011/09
  • 磁性ナノ粒子含有レジストを用いたマイクロ駆動素子の流路内作製方法  [Not invited]
    細川祐揮; 中原佐; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    日本機械学会マイクロ・ナノ工学シンポジウム講演論文集  2011/09
  • MP-48 In Situ Fabrication of Active Microfluidic Components Using Photoresist Containing Magnetic Nanoparticles  [Not invited]
    Hosokawa Yuuki; Nakahara Tasuku; Terao Kyohei; Takao Hidekuni; Simokawa Fusao; Oohira Fumikazu; Suzuki Takaaki
    マイクロ・ナノ工学シンポジウム  2011/09 
    Nanocomposite made of photoresist and functional nanoparticles has been greatly expected to active micro components for micro/nano systems made by photolithography only. In this study, we propose an in situ microfabrication method for active microcomponents for microfluidic systems. A sacrifical layer made of a positive photoresist, and nanocomposite made of a negative photoresist and magnetic particles are sequentially infused into a PDMS microchannel. Then, the sacrificial layer and the nanocomposite are directly exposed by UV light through a transparent microchannel wall and developed by dipping in a developer having an effect on both photoresists. So, the active components in the microchannels are simply fabricated without the assembly process.
  • J161014 Proliferative capacity of biological cells in a microchannel  [Not invited]
    INOUE Masatoshi; OKONOGI Atsuhito; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; Oohira Fumikazu; KOTERA Hidetoshi; SUZUKI Takaaki
    Mechanical Engineering Congress, Japan  2011/09 
    We propose a long-term cell culturing device for controlling the micro-environment, and evaluate cell proliferation potency in the selective change of chemical/physical conditions. The conventional studies about the cytotoxicity have evaluated complex effects with these chemical and physical factors such as the channel material, the cell concentration, the channel dimension, the pressure and the flow rate. So, it has not been individually clarified that each chemical/physical factor affect the proliferative capacity of biological cells. In this study, we evaluated the proliferative capacity of biological cells affected by each chemical/physical factor by controlling the micro-environment using the proposed portable microdevice. The proposed device integrates a portable perfusion system composed of a culturing channel, a micropump with batteries, and a reservoir for replacing and storing culture medium with suspended cells. It was confirmed that the proposed device selectively controls the physical and the chemical factors due to high portability and controllability by minimizing the dead volume.
  • マイクロ空間が細胞の増殖性に与える影響  [Not invited]
    井上雅俊; 小此木孝仁; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 小寺秀俊; 鈴木孝明
    日本機械学会年次大会講演論文集(CD-ROM)  2011/09
  • Design and Fabrication of polymer MEMS Mirror Based on the Mechanical Characteristic Evaluation of Polyimide Materials  [Not invited]
    Osamu Sasaki; Kyouhei Terao; Takaaki Suzuki; Hidekuni Takao; Fumikazu Oohira; Yoshinori Kaibara; Takahiro Namazu
    16th International Conference on Optical MEMS and Nanophotonics [OMN2011]  2011/08
  • Fabrication and evaluation of polymer MEMS mirror based on the mechanical characteristic of polymer containing magnetic particles  [Not invited]
    Takuya Miura; Takaaki Suzuki; Kyouhei Terao; Hidekuni Takao; Fumikazu Oohira; Yoshinori Kaibara; Takahiro Namazu
    16th International Conference on Optical MEMS and Nanophotonics [OMN2011]  2011/08
  • Single Cell Stimulation Assay: Microfluidic Substance Delivery to a Laterally Trapped Cell  [Not invited]
    TERAO Kyohei; GEL Murat; OKONOGI Atsuhito; SUZUKI Takaaki; OOHIRA Fumikazu; WASHIZU Masao; KOTERA Hidetoshi
    The ASME-JSME-KSME Joint Fluids Engineering Conference 2011 (AJK2011-FED)  2011/07
  • Size-Exclusion Surface Plasmon Resonance Sensing with a Microslit Array Chip  [Not invited]
    NAGASE Noriko; SHIMIZU Kazunori; MIYANISHI Nobumitsu; SHIMAMOTO Seiko; TERAO Kyohei; SUZUKI Takaaki; OOHIRA Fumikazu
    The ASME-JSME-KSME Joint Fluids Engineering Conference 2011 (AJK2011-FED)  2011/07
  • Open-Access and Multi-Directional Electroosmotic Flow Chip: Handling Single Cells and Single DNA Molecules  [Not invited]
    Kyohei Terao; Yuko Kitazawa; Ryuji Yokokawa; Hidetoshi Kotera; WASHIZU Masao; OOHIRA Fumikazu
    The 6th International Conference on Microtechnologies in Medicine and Biology (MMB2011)  2011/05
  • Intracellular Response of a Pancreatic Beta Cell to Localized Glucose Stimulation  [Not invited]
    TERAO Kyohei; GEL Murat; OKONOGI Atsuhito; FUKE Ariko; OKITSU Teru; TADA Takashi; SUZUKI Takaaki; OOHIRA Fumikazu; WASHIZU Masao; KOTERA Hidetoshi
    The 6th International Conference on Microtechnologies in Medicine and Biology (MMB2011)  2011/05
  • Surface Plasmon Resonance Sensing by Electrodeposited Au Nanostructures for Sensitivity Enhancement  [Not invited]
    NAGASE Noriko; SHIMIZU Kazunori; MIYANISHI Nobumitsu; UCHIYAMA Noboru; TAMAI Kazunori; TERAO Kyohei; SUZUKI Takaaki; OOHIRA Fumikazu
    The 6th International Conference on Microtechnologies in Medicine and Biology (MMB2011)  2011/05
  • Fabrication of a Magnetically-Driven Microstructure Made of Magnetic Nanoparticles/SU-8 Composite  [Not invited]
    Y. Hosokawa; T. Nakahara; K. Terao; H. Takao; F. Shimokawa; F. Oohira; T. Suzuki
    Proceedings of the 6th International Conference on Microtechnologies in Medicine and Biology [MMB2011]  2011/05
  • 回転傾斜露光法を用いた三次元マイクロ鋳型の製作とエレクトロポレーションデバイスヘの応用  [Not invited]
    福田泰佑; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    日本機械学会情報・知能・精密機器部門講演会講演論文集  2011/03
  • スプレー塗布による厚膜レジストの膜厚制御性に関する研究  [Not invited]
    赤松幹夫; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    日本機械学会情報・知能・精密機器部門講演会講演論文集  2011/03
  • 単一細胞操作デバイスにおける流路幅の影響に関する研究  [Not invited]
    高崎翔一; 寺尾京平; 高尾英邦; 下川房男; 大平文和; 鈴木孝明
    日本機械学会情報・知能・精密機器部門講演会講演論文集  2011/03
  • インプリント技術による微細構造形成SPRチップの製作と評価  [Not invited]
    守分仁成; 渡邉英応; 清水一範; 寺尾京平; 鈴木孝明; 高尾英邦; 下川房男; 大平文和
    日本機械学会情報・知能・精密機器部門講演会講演論文集  2011/03
  • D-2-2 Thickness control of thick photoresist using spray coating  [Not invited]
    AKAMATSU Mikio; TERAO Kyouhei; TAKAO Hidekuni; SIMOKAWA Fusao; OOHIRA Humikazu; SUZUKI Takaaki
    Conference on Information, Intelligence and Precision Equipment : IIP  2011/03 
    Recently, polymer MEMS has attracted considerable attention. In particular, control of film thickness is one of major problems for application of thick resist. In this study, we evaluated a spray coating method which can be controlled by a number of process parameters for coating thick resist. Smoothness and uniformity of the coating film and thickness reproducibility were examined in various coating conditions. Moreover, edge bead caused by surface tension of thick film was reduced by a spray coating method with a cover to the edge.
  • P-1-6 Fabrication of three-dimensional micro molds using single-mask multidirectional photolithography for micro-electroporation  [Not invited]
    Fukuda Taisuke; Terao Kyouhei; Takao Hidekuni; Shimokawa Fusao; Oohira Fumikazu; Suzuki Takaaki
    Conference on Information, Intelligence and Precision Equipment : IIP  2011/03 
    In this paper, we propose a novel microfabrication technique without assembling process including alignment and bonding for 3-D micro-molds in microfludics. The proposed process can integrate microchannels with free path, orifices, and openings by using the inclined/rotated UV lithography with a characteristic single-mask of whole image exposure in a short period of time. In order to confirm the validity of the proposed fabrication process, we fabricated a micro-electroporation device with two flow channel to introduce cell and substance suspension, six orifices to fix the cell, two inlets and one outlet by using single-mask multidirectional photolithography. The immobilization efficiency of cells were investigated in the fabricated devices.
  • P-1-8 Influence of microchannel width on a microdevice for single-cell manipulation  [Not invited]
    TAKASAKI Shouiti; TERAO Kyouhei; TAKAO Hidekuni; SIMOKWA Fusao; OOHIRA Humikazu; SUZUKI Takaaki
    Conference on Information, Intelligence and Precision Equipment : IIP  2011/03 
    In this study, we investigated influence of the microchannel width on a microdevice for single-cell manipulation. The proposed device was fabricated by the Single-Mask inclined exposure method which can fabricated a lot of micro-holes to fix cells and lower microchannel to load reagent. We estimated the restriction of the fabrication process due to the width of the lower microchannel. Moreover, we proposed a reduction method of the warp of the fabricated device made of the thick permanent film resist to achieve a wide lower microchannel.
  • P-1-4 Fabrication and evaluation of SPR chip with micro structures by imprint technology  [Not invited]
    Moriwake Masayoshi; Watanabe Hideo; Shimizu Kazunori; Terao Kyohei; Suzuki Takaaki; Takao Hidekuni; Simokawa Fusao; Oohira Fumikazu
    Conference on Information, Intelligence and Precision Equipment : IIP  2011/03 
    This paper describes a fabrication of SPR(Surface Plasmon Resonance) chip with micro structures by an imprint technology. We developed the SPR chip with the filter effect by the micro structures whose height are more than the sensing area in SPR sensing. We fabricated the SPR chip with the filter effect by using the imprint technology. We evaluated the characteristics of the chip, then confirmed the feasibility of the low cost filter chip.
  • Real-time Monitoring of Ca2+ Concentration in Pancreatic Beta Cells by a Microfluidic Device Integrated with Total Internal Refrection(TIR)-Based Chip  [Not invited]
    Y. Kitazawa; R. Yokokawa; K. Terao; A. Okonogi; F. Oohira; D.V. Dao; S. Sugiyama; I. Kanno; H. Kotera
    The 24th IEEE International Conference on Micro Electro Mechanical Systems (IEEE-MEMS2011)  2011/01
  • Crystalline Anisotropic Dry Etching for Single Crystal Silicon  [Not invited]
    T. Mishima; K. Terao; H. Takao; F. Shimokawa; F. Oohira; T. Suzuki
    Technical digest of 24th IEEE International Conference on Micro Electro Mechanical Systems [IEEE MEMS2011]  2011/01
  • Micro Fluidic Circuit Design with “SPICE Simulation  [Not invited]
    高尾英邦; M. Sugiura; 石田誠; 寺尾京平; 鈴木孝明; 大平文和; 下川房男; Hidekuni Takao; M. Sugiura; Makoto Ishida; K. Terao; T. Suzuki; F. Oohira; F. Shimokaw
    The 24th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2011)  2011/01
  • Development of a Three Dimensional Passive Lamination Micromixer  [Not invited]
    ASME-JSME-KSME Joint Fluids Engineering Conference 2011[AJK2011]  2011
  • Measurement of attractive force generated by magnetic photosensitive nanocomposite  [Not invited]
    JSME International Workshop on Micro/Nano-Engineering  2011
  • A partial coat for removal of edge bead from thick photoresist using a spray method  [Not invited]
    JSME International Workshop on Micro/Nano-Engineering  2011
  • FEM analysis of a polymer MEMS mirror using photosensitive nano composite  [Not invited]
    JSME International Workshop on Micro/Nano-Engineering  2011
  • Quantitative evaluation of cell proliferation in an integrated micro cell culture system  [Not invited]
    JSME International Workshop on Micro/Nano-Engineering  2011
  • 微細流路構造を用いた単一細胞局所薬剤刺激に対する細胞内応答計測  [Not invited]
    寺尾 京平; Gel Murat; 小此木 孝仁; 興津 輝; 鈴木 孝明; 多田 高; 鷲津 正夫; 小寺 秀俊
    日本生化学会大会・日本分子生物学会年会合同大会講演要旨集  2010/12
  • クロマチンと染色体の構造 学際的アプローチによる挑戦 微細加工技術・微細操作技術のクロマチン研究への応用  [Not invited]
    小穴 英廣; 寺尾 京平; 齋藤 拓哉; 西川 香里; 佐藤 吉信; Gel Murat; 鷲津 正夫
    日本生化学会大会・日本分子生物学会年会合同大会講演要旨集  2010/12
  • A robust and sensitive silicon tactile imager with individually formed SU-8 protective layers on piezoresistor pixels  [Not invited]
    H. Takao; H. Okada; M. Ishida; K. Terao; T. Suzuki; F. Oohira
    Proceedings of IEEE Sensors  2010/12 
    In this paper, a new structure of silicon tactile imager with SU-8 protective layer is presented. The protective layer is formed on the surface of integrated piezoresistor array to prevent direct contact of the sensor surface to the object. The protective layer is formed individually on each pixel circuit to prevent degradation of the spatial resolution. This tactile imager is fabricated by an established post-CMOS process without any process damage to the MOS integrated circuits. The independent protective layer is simply formed by a single step of SU-8 lithography on the pixel array. The experimental device fabricated in this study integrates 5x5 array of piezoresistors on a silicon 10μm-thick diaphragm fabricated by an SOI active layer. The scale of integration and the pitch of the piezoresistor pixel array (800μm) are determined by the feature size of circuit fabrication technology and the minimum resolution of the SU-8 lithography process. In the fabricated device, both high sensitivity and spatial resolution are obtained by the new structure with high robustness. ©2010 IEEE.
  • Low cost and large deflection angle polymer MEMS mirror using glass substrate  [Not invited]
    Osamu Sasaki; Takaaki Suzuki; Kyouhei Terao; Hidekuni Takao; Fumikazu Oohira
    2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010  2010/12 
    In this paper, we propose a polymer MEMS mirror device which has the futures of the large deflection angle and the low cost fabrication. Many conventional MEMS mirror devices have been composed of Si wafer and, the expensive dry etching equipment has been necessary when etching the Si substrate. Then, we propose new composition and the novel fabrication method without the dry etching process by using the inexpensive glass substrate. Also, the torsion bar is composed of a photosensitive polymer that is a low rigid material and can be easily fabricated by the photolithography process. A multilayer wiring process is examined so that the low current actuation and the large deflection angle is attained. The fabricated device showed the large optical deflection angle of more than ±40 degrees at the current of ±16mA when the torsion bar length was 1800μm. The variation of the optical deflection angle was within 0.8 degrees at the 106 times repeatability test. ©2010 IEEE.
  • Vertical comb-drive MEMS mirror with sensing function for phase-shift device  [Not invited]
    Kentaro Oda; Kyohei Terao; Takaaki Suzuki; Hidekuni Takao; Ichiro Ishimaru; Fumikazu Oohira
    2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010  2010/12 
    We aim to achieve the phase-shift device which is a key component of two-dimensional Fourier spectrometer using the MEMS mirror fabricated by the micro fabrication technology. This mirror maintains parallel movement to the reference plane toward the vertical direction with a high precision. Therefore, in this study, the vertical electrostatic comb-drive actuator and displacement capacitive sensors were fabricated monolithically on one chip, and they were arrayed in 4 directions of the movable mirror. We fabricated the MEMS mirror that can move toward the vertical direction with sensing the tilting angle. As the result, we confirmed that the vertical comb-drive MEMS mirror with the sensing function for the phase-shift device could be realized. ©2010 IEEE.
  • Development of simple microfluidic cell culturing system toward observation of cell-to-cell communication  [Not invited]
    A. Okonogi; K. Terao; T. Okitsu; T. Suzuki; R. Yokokawa; M. Ohoka; H. Kotera
    14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010  2010/12 
    Microfluidic cell culturing in channels is required to deliver a cell suspension from an external source to the channels where the cells are attached to the bottom surface of it. But cell types, which require frequent feeding, are difficult to attach to the substrate of micro-fluidic channels in static culture medium, because the cells deplete nutrient and oxygen until sufficient cell attachment. We present for a new micro-fluidic culturing method which can perfuse medium m the channels without flushing cells which deposit on the substrate in gravity. Our approach eliminates the need to hold cells by micro-structures in perfusion cultivation.
  • 金黒形成SPRチップによるSPRセンシングの高感度化  [Not invited]
    長瀬紀子; 清水一範; 内山昇; 玉井一規; 寺尾京平; 鈴木孝明; 大平文和
    化学とマイクロ・ナノシステム研究会講演要旨集  2010/11
  • 全反射照明蛍光観察デバイスによる細胞の刺激応答観察  [Not invited]
    北澤裕子; 横川隆司; 寺尾京平; 小此木孝仁; 神野伊策; 小寺秀俊
    化学とマイクロ・ナノシステム研究会講演要旨集  2010/11
  • 三次元多層流生成デバイスの開発  [Not invited]
    鈴木孝明; 萩尾吉則; 大谷典史; 平丸大介; 寺尾京平; 小此木孝仁; 神野伊策; 大平文和; 小寺秀俊
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2010/10
  • 同心円マイクロメッシュ構造を用いた高速染色体解析デバイスの開発  [Not invited]
    鈴木博之; 平丸大介; 寺尾京平; 高尾英邦; 大平文和; 小寺秀俊; 鈴木孝明
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2010/10
  • 生体内環境を模倣したマイクロ流体デバイスによる単一細胞への局所薬剤刺激  [Not invited]
    寺尾京平; GEL Murat; 小此木孝仁; 興津輝; 多田高; 鈴木孝明; 鷲津正夫; 小寺秀俊
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2010/10
  • 磁性粒子含有レジストを用いた磁気駆動型ポリマーMEMSミラーの製作  [Not invited]
    三浦卓也; 中野哲郎; 寺尾京平; 高尾英邦; 生津資大; 貝原吉智; 鈴木孝明; 大平文和
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2010/10
  • Development of Simple Microfluidic Cell Culturing System toward Observation of Cell-to-Cell Communication  [Not invited]
    OKONOGI Atsuhito; TERAO Kyohei; OKITSU Teru; SUZUKI Takaaki; YOKOKAWA Ryuji; OHOKA Masataka; KOTERA Hidetoshi
    The 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS2010)  2010/10
  • Analysis of Intracellular Response to Localized Chemical Stimulation on Tissue-Mimicking Microdevice  [Not invited]
    TERAO Kyohei; GEL Murat; OKONOGI Atsuhito; FUKE Ariko; OKITSU Teru; SUZUKI Takaaki; TADA Takashi; WASHIZU Masao; KOTERA Hidetoshi
    The 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS2010)  2010/10
  • A Robust and Sensitive Silicon Tactile Imager with Individually Formed SU-8 Protective Layers on Piezoresistor Pixels  [Not invited]
    高尾英邦; H. Okada; M. Ishida; 寺尾京平; 鈴木孝明; 大平文和; Hidekuni Takao; H. Okada; M. Ishida; K. Terao; T. Suzuki; F. Oohira
    IEEE Sensors 2010 Conference  2010/10
  • ガラス基板とポリマー材料を用いて製作したPolymer‐MEMSミラーの駆動特性評価  [Not invited]
    佐々木修; 寺尾京平; 鈴木孝明; 高尾英邦; 大平文和
    日本機械学会年次大会講演論文集  2010/09
  • 電気浸透流を利用した異種細胞配置用デバイス開発および細胞間相互作用の開発  [Not invited]
    北澤裕子; 寺尾京平; 横川隆司; 小此木孝仁; 神野伊策; 小寺秀俊
    日本機械学会年次大会講演論文集  2010/09
  • J0207-2-1 Heterotypic cell positioning using electroosmotic flow and observation of cell-cell interactions  [Not invited]
    KITAZAWA Yuko; TERAO Kyohei; YOKOKAWA Ryuji; OKONOGI Atsuhito; KANNO Isaku; KOTERA Hidetoshi
    年次大会講演論文集 : JSME annual meeting  2010/09 
    This paper presents a novel technique of positioning heterotypic cells using electroosmotic flow (EOF). Positioning heterotypic cells is a key technique toward the development of single cell analysis. Several techniques for positioning cells have been developed, such as using dielectrophoresis and physical trapping in microchannel. These techniques, however, require additional methods for subsequent biological experiments after arraying cells. In this study, we demonstrated the positioning of two kinds of cells at designated pocket-like microstructures. In this method, cells were positioned using multi-directional EOF in open-to-air flow chamber which would allow easy handling for further biological experiments. After positioning heterotypic cells, we cultivated them and observed cell-cell interactions via gap junctions by the transfer of a fluorescent dye.
  • T1601-1-3 The Evaluation of Driving characteristics for a Polymer-MEMS mirror fabricated by a glass substrate  [Not invited]
    Sasaki Osamu; Terao Kyouhei; Suzuki Takaaki; Takao Hidekuni; Oohira Fumikazu
    年次大会講演論文集 : JSME annual meeting  2010/09 
    MEMS mirror devices are widely used in several fields. Recently, the MEMS mirror devices with torsion bars made of polymer materials have been studied for the purpose of the large deflection angle. Most of the conventional MEMS mirror devices have a substrate of a Si wafer, etched by expensive dry etching equipments. So, we propose the lower cost and the large deflection angle mirror device driven by the Lorentz force. The Polymer-MEMS mirror is composed of an inexpensive glass substrate and polymer torsion bars. To evaluate the validity of the proposed device, we measured dynamic characteristics of the fabricated mirror devices using PSD system.
  • Vertical Comb-drive MEMS mirror with sensing function for phase-shift device  [Not invited]
    Kentaro Oda; 寺尾京平; 鈴木孝明; 高尾英邦; 石丸伊知郎; 大平文和; Kentaro Oda; K. Terao; T. Suzuki; Hidekuni Takao; I. Ishimaru; F. Oohira
    Optical MEMS and Nanophotonics 2010  2010/08
  • Low Cost and Large Deflection Angle Polymer MEMS Mirror Using Glass Substrate  [Not invited]
    Osamu Sasaki; Takaaki Suzuki; Kyouhei Terao; Hidekuni Takao; Fumikazu Oohira
    Proceedings of 2010 International Conference on Optical MEMS & Nanophotonics [Optical-MEMS2010]  2010/08
  • Heterotypic cell positioning using electroosmotic flow and observation of cell-cell interactions in open-access flow chamber  [Not invited]
    KITAZAWA Yuko; TERAO Kyohei; YOKOKAWA Ryuji; OKONOGI Atsuhito; KANNO Isaku; KOTERA Hidetoshi
    電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan  2010/06
  • ナノ磁性粒子とSU‐8からなる複合材料を用いたマイクロ磁気駆動構造の作製  [Not invited]
    細川祐揮; 中野哲郎; 寺尾京平; 高尾英邦; 大平文和; 鈴木孝明
    日本機械学会情報・知能・精密機器部門講演会講演論文集  2010/03
  • 単眼受光素子を用いた三次元形状測定器  [Not invited]
    三浦洋昇; 寺尾京平; 鈴木孝明; 高尾英邦; 谷口朝信; 浦治男; 大平文和
    日本機械学会情報・知能・精密機器部門講演会講演論文集  2010/03
  • 遠心力によるマイクロ構造上での染色体形状の操作  [Not invited]
    鈴木博之; 平丸大介; 寺尾京平; 高尾英邦; 大平文和; 小寺秀俊; 鈴木孝明
    日本機械学会情報・知能・精密機器部門講演会講演論文集  2010/03
  • サブミクロンギャップのマイクロピラーアレイを有する液体クロマトグラフィーチップの作製  [Not invited]
    垣田千洋; 寺尾京平; 宮西伸光; 鈴木孝明; 高尾英邦; 大平文和; 真島英司
    日本機械学会情報・知能・精密機器部門講演会講演論文集  2010/03
  • P-4 Fabrication of liquid chromatography chip with micro pillar array of sub micron spacing  [Not invited]
    Kakita Chihiro; TERAO Kyohei; MIYANISHI Nobumitsu; SUZUKI Takaaki; TAKAO Hidekuni; OOHIRA Fumikazu; MAJIMA Eiji
    Conference on Information, Intelligence and Precision Equipment : IIP  2010/03 
    We propose a micro liquid chromatography chip which has a high density pillar array of a submicron gap for the purpose of the reduction of sample volume and analysis time. Submicron gap was achieved by alternate deposition of oxide film and poly-Si to the micro pillars fabricated by Si microfabrication process. The chip was evaluated by the relationship between flow rate and gap length and the substrate dependency of surface modification. We examined the feasibility of the separation of the lysozyme using this chip.
  • P-5 3-D Shape Measurement instrument Using Single Image Sensor  [Not invited]
    Miura Hironori; TERAO Kyouhei; SUZUKI Takaaki; TAKAO Hidekuni; TANIGUCHI Tomonobu; URA Haruo; OOHIRA Fumikazu
    Conference on Information, Intelligence and Precision Equipment : IIP  2010/03 
    In the optical 3-D shape measurement instrument, we propose a new constitution which uses only one CCD camera. Conventional 3-D shape measurement instrument was uses two CCD cameras. However we propose to measure the 3-D shape by using single CCD camera this study. In this system, we can expect anticipate reduction in size and weight of measurement instrument. In addition, this measurement instrument can measure the shape with alignment-free between the optical source and CCD camera. We proposed the new constitution, designed the measurement instrument and confirmed the measurement principle.
  • P-3 Fabrication of a magnetically-driven microstructure made from magnetic nanoparticles/SU-8 composite  [Not invited]
    HOSOKAWA Yuuki; NAKANO Teturou; TERAO Kyouhei; TAKAO Hidekuni; OOHIRA Humikazu; SUZUKI Takaaki
    Conference on Information, Intelligence and Precision Equipment : IIP  2010/03 
    Composite material made of magnetic nanoparticles/SU-8 is expected to be material of microactuators which can be controlled by external magnetizing field and easily fabricated by only photolithography. In this study, we evaluated the dispersion degree of the proposed nanocomposites mixed by both a planetary stirrer and an ultrasonic stirrer. As a result, the planetary stirrer achieve higher dispersion degree than the ultrasonic one. By a magnetic driving test in a microchannel, it is confirmed that the fabricated element made of the proposed nanocomposite move with the external magnetic field applied by an electromagnet.
  • B-5 Manipulation of Stretching Chromosomes Form on Microstructures Using Centrifugal Force  [Not invited]
    SUZUKI Hiroyuki; HIRAMARU Daisuke; TERAO Kyouhei; TAKAO Hidekuni; OOHIRA Humikazu; KOTERA Hidetoshi; SUZUKI Takaaki
    Conference on Information, Intelligence and Precision Equipment : IIP  2010/03 
    In this study, we propose a concentrically arrayed micro-mesh structure for high resolution gene analysis using fiber DNA. The micro-mesh structures composed of tapered micro-wires were fabricated by a rotated / inclined exposure method with a single step of the lithography. DNA fibers are constructed over micro-mesh structure array by centrifugal stretching, and can achieve high throughput Fluorescent In Situ Hybridization.
  • Development of techniques for DNA micromanipulation toward single DNA molecule analysis  [Not invited]
    OANA Hidehiro; TERAO Kyohei; MORI Yasuhiro; SATO Yoshinobu; WASHIZU Masao
    電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan  2010/01
  • A High-Throughput FISH Microchip for Clinical Genetics  [Not invited]
    H. Suzuki; D. Hiramaru; K. Terao; H. Takao; F. Oohira; H. Kotera; T. Suzuki
    Proceedings of The 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences[MicroTAS2010]  2010
  • Sensing Characteristics of Vertical Combo-Drive MEMS Mirror with Sensing Function for Phase-Shift Denices  [Not invited]
    The 27th Sensor Symposium on Sensors, micromachines and Applied Systems  2010
  • Crystalline Anisotropic Etching for Single Crystal Slicon Using Dry Etching  [Not invited]
    The 27th Sensor Symposium on Sensor, Micromachines and Applied Systems  2010
  • 微細加工技術・微細操作技術のクロマチン研究への応用  [Not invited]
    小穴英廣; 寺尾京平; 齋藤拓哉; 西川香里; 佐藤吉信; GEL Murat; 鷲津正夫
    生化学  2010
  • Low cost polymer MEMS mirrors fabricated by photolithography and wet etching processes  [Not invited]
    Fumikazu Oohira; Tetsurou Nakano; Osamu Sasaki; Kyouhei Terao; Takaaki Suzuki
    ISOT 2009 - International Symposium on Optomechatronic Technologies  2009/12 
    This paper presents two types of low cost mirror devices composed of the glass and the polymer material. These devices are new constructions composed of the inexpensive glass as the mirror substrate and the polymer as the torsion hinge. The devices can be fabricated by the photolithography and wet etching processes without deep-RIE process. The proposed one construction is the Lorentz force type mirror device made of polyimide material. And the other construction is the electromagnet force type mirror device made of SU-8 material containing the magnetic particles. In the former type mirror, the mirror device was fabricated without expensive dry etching equipment such as RIE, and the device can be fabricated only by the sputtering, photolithography and wet etching processes. Further, the inexpensive glass and polymer material are used instead of expensive Si. In the latter type mirror, the SU-8 polymer material containing the magnetic particles is used. The actuation system which attracts the mirror directly with the electromagnet is adopted. We fabricated the large-sized mirror (20mm x 10mm) device without expensive dry etching equipment such as deep-RIE, and evaluated the characteristics of the fabricated mirror device. The optical deflection angle of ±20deg. was achieved. As the result, we confirmed the feasibility to realize the low cost polymer MEMS mirror. © 2009 IEEE.
  • Open-access cell array using electroosmotic flow  [Not invited]
    K. Terao; Y. Kitazawa; A. Okonogi; H. Kotera
    TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems  2009/12 
    This paper presents a novel technique of single-cell array. For easy handling in biological experiments, we developed open-to-air flow well with pocket-like microstructures. Cells are positioned at the microstructures, one at a place, by the use of electroosmotic flow that provides constant and controllable hydrodynamic drag force for the transport of the cells. Precise positioning of mammalian cells was demonstrated here. The cell array is open to air like a common culture dish, thus the conventional dish-based experiments are potentially applicable. ©2009 IEEE.
  • Local stimulation to single cell on tissue-mimicking microfluidic device  [Not invited]
    K. Terao; A. Okonogi; T. Okitsu; T. Suzuki; M. Washizu; H. Kotera
    TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems  2009/12 
    In this paper, we developed a novel device for the analysis of intracellular response to external stimulus in single-cell level with high-spatial resolution that simulates in vivo tissue micro-environment. We utilized multidirectional UV lithography technique to realize simple 3-dimentional fabrication of the tissue-mimicking device. Microchannel with an aperture at its sidewall was fabricated. Localized delivery of stimuli to single cell was demonstrated here. ©2009 IEEE.
  • Tissue-mimicking in vitro analysis system to exclusively stimulate single cell and detect its physiological reaction  [Not invited]
    Atsuhito Okonogi; Kyohei Terao; Teru Okitsu; Takaaki Suzuki; Hidetoshi Kotera
    TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems  2009/12 
    In this paper, we present imaging of the physiological cell reaction of stimulus-responsive cells using a new orifice channel chip named the TISSUE-MIMICKING IN VITRO ANALYSIS SYSTME. The chip enables designated cells treatment using orifice-channels similar to blood vessels, and cell-array like a tissue: cells are along on the blood vessels. These cell handling is an important part in the observation of regulation of cell-functions on stimulus-responsive cells (e.g. pancreas). To study this role, we address to detect cellular stimulation response to designated stimulation using the chip. ©2009 IEEE.
  • エレクトロポレーションによる細胞内物質導入のリアルタイム観察  [Not invited]
    小竹宏紀; 寺尾京平; 小此木孝仁; 横川隆司; ムラト ゲル; ムラト ゲル; 鷲津正夫; 小寺秀俊
    化学とマイクロ・ナノシステム研究会講演要旨集  2009/11
  • 電気浸透流を用いた異種細胞配置に関する研究  [Not invited]
    北澤裕子; 寺尾京平; 横川隆司; 小此木孝仁; 小寺秀俊
    化学とマイクロ・ナノシステム研究会講演要旨集  2009/11
  • 感光性ポリイミドとガラス基板を用いたPolymer‐MEMSミラーの製作  [Not invited]
    佐々木修; 中野哲郎; 大平文和; 鈴木孝明; 寺尾京平; 橋口原
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2009/10
  • 任意の細胞へ薬剤刺激を与えることができるデバイスの構築  [Not invited]
    小此木孝仁; 興津輝; 寺尾京平; 鈴木孝明; 小寺秀俊
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2009/10
  • 磁性粒子を含むSU‐8を用いたフォトリソグラフィとウエットエッチングによるポリマーMEMSミラーの製作  [Not invited]
    中野哲郎; 寺尾京平; 鈴木孝明; 大平文和; 橋口原
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2009/10
  • 超臨界流体を用いた埋め込み型流路の洗浄・乾燥効果の評価  [Not invited]
    大谷典史; 大平文和; 鈴木孝明; 寺尾京平; 角陸悟
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2009/10
  • 多重マスク回転傾斜露光法を用いた染色体伸張マイクロデバイスの開発  [Not invited]
    鈴木博之; 平丸大介; 福家有子; 寺尾京平; 神野伊策; 大平文和; 小寺秀俊; 鈴木孝明
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2009/10
  • 任意の細胞へ薬剤刺激を与えることができるデバイスの構築  [Not invited]
    小此木孝仁; 興津輝; 寺尾京平; 鈴木孝明; 大岡正孝; 小寺秀俊
    化学とマイクロ・ナノシステム  2009/10
  • Development of piezoelectric MEMS deformable mirrors and their application for adaptive optics  [Not invited]
    平丸大介; 千歳裕之; 小此木孝仁; 寺尾京平; 三浦岳; 鈴木孝明; 神野伊策; 小寺秀俊
    日本機械学会年次大会講演論文集  2009/09
  • T1601-2-1 Development of piezoelectric MEMS deformable mirrors and their application for adaptive optics  [Not invited]
    HIRAMARU Daisuke; SENZAI Hiroyuki; OKONOGI Atsuhito; TERO Kyohei; MIURA Takashi; SUZUKI Takaaki; KANNO Isaku; KOTERA Hidetoshi
    年次大会講演論文集 : JSME annual meeting  2009/09 
    We propose a novel concept that self-organized vasculature integrates artificial orifices on a microfluidic device using inducible protein VEGF (Vascular Endothelial Growth Factor) for fluid induction into vasculature. Micro gel beads containing VEGF immobilized on orifices, it is able to induce angiogenesis to orifices on embedded channels. Endothelial cells (HUVEC) characteristically organize vasculature by themselves in collagen gel and grow along the VEGF concentration gradient. HUVEC were cultured on the device for a day in collagen gel and vasculature was forming on orifices by self-organized. And angiogenetic effect was evaluated quantitatively.
  • 微細構造を用いたゲノムDNA形態制御と単分子解析への応用  [Not invited]
    佐藤吉信; MURAT Gel; 寺尾京平; 金井保; 跡見晴幸; 今中忠行; 鷲津正夫; 小穴英廣
    化学とマイクロ・ナノシステム研究会講演要旨集  2009/05
  • 任意の細胞へ薬剤刺激を与えることができるデバイスの構築  [Not invited]
    小此木孝仁; 興津輝; 寺尾京平; 鈴木孝明; 大岡正孝; 小寺秀俊
    化学とマイクロ・ナノシステム研究会講演要旨集  2009/05
  • Single-Mask Multidirectional Photolithography with Multiple Resist Coat for Multi-Layered Microfluidic Networks  [Not invited]
    2009 International Conference on Microtechnologies in Medicine and Biology [MMB2009]  2009
  • Localized Substance Delivery to Single Cell by Three Dimentional Microfluidic Device  [Not invited]
    The 2009 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment [MIPE2009]  2009
  • The Developement of Tissue-Like Chips to Exclusively Stimulate Single Cell and Detect its Physiological Reaction  [Not invited]
    The 2009 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment [MIPE2009]  2009
  • Development of an Assembly-Free 3D Lithography for Bio-Microsystems  [Not invited]
    The 3rd IEEE International Conference on Nano/Molecular Engineering and Medicine (IEEE-NANOMED2009)  2009
  • Space-resolved detection of protein binding sites on genomic DNA by dynamic stretching using optically driven microstructures  [Not invited]
    Yoshinobu Sato; Murat Gel; Kyohei Terao; Tamotsu Kanai; Haruyuki Atomi; Tadayuki Imanaka; Masao Washizu; Hidehiro Oana
    Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences  2009/01 
    We report a novel method for the detection and location of protein-binding sequence on single genomic DNA using fluorescence microscopy. In this method, we utilized optically driven micro-fabricated structures named microhook for single genomic DNA manipulation. We have demonstrated that the optically driven microhook can be a powerful tool for the space-resolved detection of a fluorescence labelled DNA-binding protein on a genomic DNA fiber. © 2009 CBMS.
  • Three-Dimentional Electroporation Chip for Realtime Monitoring of Intracellular Dynamics  [Not invited]
    The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences [MicroTAS2009]  2009
  • Electroosmosis-driven positioning of heterotypic cells in open-access flow chamber  [Not invited]
    Yuko Kitazawa; Kyohei Terao; Atsuhito Okonogi; Ryuji Yokokawa; Hidetoshi Kotera
    Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences  2009/01 
    This paper presents a novel technique of positioning cells using electroosmotic flow (EOF). Different types of cells are positioned at designated pocket-like microstructures (micro-pockets) separately by the control of the flow direction. In this method, cells are positioned in open-to-air flow chamber. This open-access configuration would allow easy handling for further biological experiments. © 2009 CBMS.
  • Development of a single cell stimulation device toward measuring of cell to cell communication  [Not invited]
    Atsuhito Okonogi; Teru Okitsu; Kyohei Terao; Masataka Ohoka; Takaaki Suzuki; Hidetoshi Kotera
    Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences  2009/01 
    We propose a novel cell-array device to immobilize cells and stimulate them exclusively with an intended manner is proposed and demonstrated. The proposed device is composed of a micro-chamber and micro-channels which are layered and connected through micro-orifice. And we demonstrate the effectively of proposed device by measuring cytosolic Ca2+ concentration of immobilized cells. The cell are loaded in micro-chamber and immobilized on the micro-orifice. Then the cells are stimulated at the orifice by the reagents which are loaded from the micro-channel. Murine pancreatic beta cell line, MIN6-m9, was applied to design the device and validate its function. © 2009 CBMS.
  • Development of novel hybrid biodevice with self-organized vessels and artificcial microchannels  [Not invited]
    Daisuke Hiramaru; Hiroyuki Senzai; Kyohei Terao; Atsuhito Okonogi; Takashi Miura; Takaaki Suzuki; Isaku Kanno; Hidetoshi Kotera
    Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences  2009/01 
    In this study, we proposed the hybrid biomicrodevice composed of biological self-organized vessels and artificial resin-based microchannels as a biocompatible tissue culturing device. When the tissue is cultured on the device, the biological vessels can remodel themselves as the tissue grows. Our hybrid device has microchannels connected to the self-organized vessels to supply sufficient nutrients. In this configuration, much better biocompatibility would be expected for our hybrid devices than that of conventional culture media or microdevices with only artificial vessels. © 2009 CBMS.
  • Three dimentional multi-layered flow generator  [Not invited]
    Takaaki Suzuki; Yoshinori Hagio; Daisuke Hiramaru; Kyohei Terao; Atsuhito Okonogi; Isaku Kanno; Hidetoshi Kotera
    Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences  2009/01 
    In this paper, we propose a three-dimentional multi-layered flow generator fabricated by inclined UV lithography to expose a single layerded photoresist coated on a patterned mask. The fabricated flow generator can be applied for a passive micromixer with laminated and/or secondary flows, a sheath flow generator, and an multi-layered emulsion system. © 2009 CBMS.
  • Three-dimensional electroporation chip for realtime monitoring of intracellular dynamics  [Not invited]
    H. Kotake; K. Terao; A. Okonogi; R. Yokokawa; M. Gel; M. Washizu; H. Kotera
    Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences  2009/01 
    This paper presents a novel method for observing intracellular events involving electroporation. We fabricated a 3-dimensional micro fluidic chip comprising two micro channels with electrodes to induce single cell electroporation. The channels are separated by a thin membrane. This membrane has lateral micro hole of ca. 1 μm in diameter. This chip enables us to quantify the electroporation-induced uptake of molecules at single cell level and to observe intracellular dynamics before/after electroporation with high spatial resolution. © 2009 CBMS.
  • LATERAL CELL TRAPPING ON CHIP FABRICATED BY MULTIDIRECTIONAL UV LITHOGRAPHY FOR HIGH-RESOLUTION INTRACELLULAR DYNAMICS STUDY  [Not invited]
    The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies (APCOT2008)  2008
  • CONSTRUCTION OF CELL-ARRAY DEVICE ON WHICH INTENSIVE STIMULATION CAN BE EXCLUCIVELY  [Not invited]
    The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies (APCOT2008)  2008
  • 4D Imaging of intracellular response to localized stimulus on tissuemimicking microdevice  [Not invited]
    K. Terao; A. Okonogi; T. Okitsu; T. Suzuki; M. Washizu; H. Kotera
    12th International Conference on Miniaturized Systems for Chemistry and Life Sciences - The Proceedings of MicroTAS 2008 Conference  2008/01 
    We proposed and developed a method for the localized stimulation of single cell and 4D (x, y, z, t) imaging for the analysis of intracellular cascade events. We developed the device that consisted of a micro fluid channel that mimics the arterial capillary, having apertures in its sidewall to subject the cell to chemical stimuli. The targeted delivery of external substances to the surface, as well as the imaging of intracellular insulin granules, were demonstrated. © 2008 CBMS.
  • Imaging of physiological cellular stimulation-response phenomena on tissue-reproducing cell array device  [Not invited]
    Atsuhito Okonogi; Kyohei Terao; Teru Okitsu; Takaaki Suzuki; Hidetoshi Kotera
    12th International Conference on Miniaturized Systems for Chemistry and Life Sciences - The Proceedings of MicroTAS 2008 Conference  2008/01 
    We visualize physiological cell response using a novel cell array device. The device is fabricated by the SIMPLE Process. The device is configured so that cells can be attached a micro orifice and stimulated through a micro channel underneath. The device is used to stimulate cells from Pancreatic beta-cell line (MIN6) by glucose through a selected orifice. We observe an increase of intercellular Ca2+ concentration, which is a physiological reaction prior to insulin release. © 2008 CBMS.
  • 接触性細胞間コミュニケーションによる膵島機能制御を解析するための細胞アレイの構築  [Not invited]
    小此木 孝仁; 鈴木 孝明; 寺尾 京平; 大岡 正孝; 鷲津 正夫; 小寺 秀俊
    日本生化学会大会・日本分子生物学会年会合同大会講演要旨集  2007/11
  • Manipulation of Chromosomal DNA Molecules Using Optically‐Driven Microstructures  [Not invited]
    寺尾京平; 小穴英廣; 鷲津正夫
    日本機械学会情報・知能・精密機器部門講演会講演論文集  2007/03
  • 1104 Manipulation of Chromosomal DNA Molecules Using Optically-Driven Microstructures  [Not invited]
    TERAO Kyohei; OANA Hidehiro; WASHIZU Masao
    Conference on Information, Intelligence and Precision Equipment : IIP  2007/03 
    This paper presents novel methods of manipulation of single chromosomal DNA molecules for single molecular genomic studies. Chromosomal DNA molecules are, first, extended to the full length by electroosmotic flow. We demonstrated translocation and winding of the extended DNA fibers in solution using optically-driven microstructures. An extended DNA fiber is translocated with a micro-fabricated hook driven by a focused-laser beam. When two optically-driven micro-fabricated bobbins are made into contact with a DNA fiber and the bobbin revolved around the other, the fiber is wound and suspended between them. The combination of the partial DNA manipulation using the hook and the whole manipulation using the bobbins leads to the chromosomal DNA-protein interaction assay in single molecular level.
  • Complete extension of chromosomal DNA and its manipulation using optically-driven micro-structures  [Not invited]
    Kyohei Terao; Hiroyuki Kabata; Hidehiro Oana; Masao Washizu
    2006 IEEE International Symposium on Micro-Nano Mechanical and Human Science, MHS  2006/12 
    This paper presents a novel method for extension and manipulation of chromosomal DNA using electroosmotic flow (EOF) and optically-driven micro-structures, which is intended for the use in nanotechnology-based genomic studies. Chromosomal DNA fibers are first hydrodynamically extended to the full length between micro-pillars on a substrate by EOF. In order to manipulate single chromosomal DNA fibers, we developed micro-hook and micro-bobbin, which were fabricated with SU-8 photo resist and grasped by focused laser beams. A targeted position of an extended DNA fiber was picked up with the micro-hook and translocated by moving the hook. To manipulate a whole DNA fiber, an extended fiber was wound to be compact using micro-bobbins. These handling techniques realize the observation of single chromosomal DNA molecules with high spatial resolution.
  • Manipulation of yeast chromosomal DNA using optically-driven microstructures  [Not invited]
    Kyohei Terao; Hiroyuki Kabata; Hidehiro Oana; Masao Washizu
    Proceedings of SPIE - The International Society for Optical Engineering  2006/12 
    This paper presents a novel method for manipulating single chromosomal DNA, which is intended for the use in high-resolution genomic studies. Such operations as translocation, winding and unwinding of single DNA fiber are achieved using optically-driven micro-fabricated structures, including micro-hooks and micro-bobbins for picking-up and winding DNA, with a typical dimension of several μm. The geometry of the laser-manipulated micro-structures is designed in such a way that a spontaneous orientation occurs with its major axis parallel to the laser beam and accepts a DNA fiber. While monitoring under a fluorescence microscope, yeast chromosomal DNA is first extended to the full length by electroosmotic flow. Then the micro-hooks are dispensed in the solution, and a DNA fiber is picked up with the micro-hook which is driven by a focused laser beam, to separate the targeted DNA from the others. The winding is achieved with a pair of micro-bobbins. The laser is split into two, the first beam being fixed, and the second movable circularly around the first. When the bobbins are made into contact with DNA and revolving motion started, the fiber is wound and suspended between them. The unwinding can be achieved just by reversing the revolving motion. optical tweezers, micro-fabrication, DNA, molecular manipulation, electroosmotic flow.
  • Manipulation of Chromosomal DNA Using Optically‐driven Microstructures  [Not invited]
    寺尾京平; 小穴英廣; 鷲津正夫
    日本ロボット学会学術講演会予稿集(CD-ROM)  2006/09
  • Electroosmotic Extension of Chromosomal DNA and Its Manipulation Using Optically-driven Microstructures  [Not invited]
    TERAO Kyohei; KABATA Hiroyuki; OANA Hidehiro; WASHIZU Masao
    電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan  2006/05
  • 光駆動微小構造体を用いた酵母染色体の液中分子操作  [Not invited]
    寺尾京平; 加畑博幸; 小穴英広; 鷲津正夫
    化学とマイクロ・ナノシステム研究会講演要旨集  2005/12
  • 微細流路中における酵母細胞及び染色体DNAのハンドリング  [Not invited]
    小穴英広; 萩谷功; 大内真紀; 佐藤由夏; 寺尾京平; 鷲津正夫
    化学とマイクロ・ナノシステム研究会講演要旨集  2005/12
  • 電気浸透流を利用したヒト染色体DNAの伸長  [Not invited]
    竹内実; 福家有子; 寺尾京平; 小此木孝仁; 鷲津正夫; 加畑博幸
    日本分子生物学会年会講演要旨集  2005/11
  • 光ピンセットを用いた酵母細胞からの染色体DNA単離及び高次構造制御  [Not invited]
    小穴英広; 萩谷功; 大内真紀; 佐藤由夏; 寺尾京平; 鷲津正夫
    日本分子生物学会年会講演要旨集  2005/11
  • 光駆動微小構造体を用いた酵母染色体の液中分子操作  [Not invited]
    寺尾京平; 加畑博幸; 小穴英広; 鷲津正夫
    日本分子生物学会年会講演要旨集  2005/11
  • Complete extension of chromosomal DNA and its manipulation using optically-driven micro-fabricated hooks  [Not invited]
    Kyohei Terao; Hiroyuki Kabata; Hidehiro Oana; Masao Washizu
    Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences  2005/01 
    This paper presents a novel method for extension and manipulation of chromosomal DNA in solution using optically-driven micro-fabricated hooks. Chromosomal DNA strands are first hydrodynamically extended on a substrate to the full length by electroosmotic flow. Then, a micro-hook, which is fabricated with SU-8 photo resist, is grasped by a focused laser beam, and a targeted position of an extended DNA strand is picked up with the hook to be separated from other strands. This manipulation technique realizes the observation of single chromosomal DNA molecules with high spatial resolution, which leads to high-efficiency gene location. Copyright © 2005 by the Transducer Research Foundation, Inc.
  • 電気浸透流を利用した酵母染色体の液中分子展開・操作  [Not invited]
    寺尾京平; 加畑博幸; 鷲津正夫
    日本分子生物学会年会プログラム・講演要旨集  2004/11
  • 電気浸透流による酵母染色体の液中分子操作:原理とゲノム生物学への応用  [Not invited]
    寺尾京平; 加畑博幸; 上野勝; 鷲津正夫
    日本分子生物学会年会プログラム・講演要旨集  2003/11
  • Stretching Yeast Genomic DNA by Electroosmotic Flow  [Not invited]
    寺尾京平; 加畑博幸; 鷲津正夫
    電気学会ケミカルセンサ研究会資料  2003/09

MISC

  • 1細胞進化動力学を目指したがん細胞微小循環モデル
    寺尾 京平  上原記念生命科学財団研究報告集  35-  1  -4  2021
  • 寺尾 京平  電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）  141-  (1)  NL1_2  -NL1_2  2021/01
  • Development of 3D model of capillary microconstriction for analysis of cancer cell dynamics
    白神 吉洋; 高尾 英邦; 下川 房男; 寺尾 京平  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  37-  4p  2020/10
  • On site cell assembly in a microfluidic device using optically driven microtools with antibody-immobilized surface
    Shuntaro Mori; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao  MicroTAS 2021 - 25th International Conference on Miniaturized Systems for Chemistry and Life Sciences  37-  4p  -290  2020/10
  • Development of Liquid/Particle-Resistant Packaging of High-Resolution MEMS Tactile Sensor for Medical Applications
    綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  37-  3p  2020/10
  • Acquisition of Local Tactile Information by Spot Contact Using A Highly Sensitive MEMS Silicon-Hair Device
    植村 周; 濱本 晃輝; 寺尾 京平; 下川 房男; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  37-  3p  2020/10
  • A MEMS Tactile Antenna with Integrated Inclination Sensor for Tilt-Angle Detection to the Target Surface
    岡 早秀; 寺尾 京平; 下川 房男; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  37-  5p  2020/10
  • Yusaku Maeda; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)  2020-January-  689  -692  2020/01  [Refereed]
  • Laser-manipulated microtool with enzyme-functionalized surface for on site molecular processing
    Akihito Masuda; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao  21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017  433  -434  2020  [Refereed]
  • K. Ando; T. Yamamoto; Y. Maeda; K. Terao; F. Shimokawa; M. Fujiwara; H. Takao  Technical Digest - International Electron Devices Meeting, IEDM  2019-December-  IEDM19-422  -IEDM19-425  2019/12  [Refereed]
  • A curved Surface-Type MEMS Tactile Array Sensor Realizing Simultaneous Measurement of Micro-Roughness, Friction and Hardness
    綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  36-  4p  2019/11
  • Development of "The Touch Feeling Scanner" for Objective Evaluation of Fingertip Sensation
    西田 吉広; 中光 孝太; 綿谷 一輝; 寺尾 京平; 下川 房男; 有本 和民; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  36-  4p  2019/11
  • Development of microfluidic device for analysis of sepsis infected kidney microenvironment
    小山 哲哉; 中野 大介; 高尾 英邦; 下川 房男; 寺尾 京平  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  36-  4p  2019/11
  • Fablication and Evaluation of Nano Region Tactile Sensor with 60μN Frictional Force Sensitivity and 0.5μm Spatial Resolution
    中島 翼; 綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  36-  4p  2019/11
  • Development of Force Sensor Using Structural Color change for Wireless Detection of Grab State During Endoscope Operation
    前田 祐作; 寺尾 京平; 下川 房男; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  36-  3p  2019/11
  • Yuki Sakakihara; Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao  Proceedings of IEEE Sensors  2019-October-  PAPER ID 1686  2019/10  [Refereed]
  • Koki Hamamoto; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao  Electronics and Communications in Japan  102-  (10)  50  -56  2019/10
  • Kohki Hamamoto; Yusaku Maeda; Kyohei Terao; Fusao Shimokawa; Fumikazu Oohira; Hidekuni Takao  2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII  1874  -1877  2019/06  [Refereed]
  • Tsubasa Nakashima; Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao  2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII  1807  -1810  2019/06  [Refereed]
  • Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao  2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII  454  -457  2019/06  [Refereed]
  • Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)  2019-January-  182  -185  2019/01  [Refereed]
  • Koki Hamamoto; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)  2019-January-  198  -201  2019/01  [Refereed]
  • Microscale sap dynamic sensor using heat pulse method
    Naoki Hara; Yuki Hara; Hiroki Ishizuka; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa  Proceedings of the 31th International Microprocesses and Nanotechnology Conference (MNC 2018)  16P-11  -85  2018/11  [Refereed]
  • An Array-Type MEMS Fingerprint-like Tactile Sensor Realizing High Resolution Measurement of Spatially Distributing Tactile Information
    綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  35-  3p  2018/10
  • Development of molecular processing platform using DNA trapping device with tool-stock function
    増田 晃士; 石塚 裕己; 高尾 英邦; 下川 房男; 寺尾 京平  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  35-  6p  2018/10
  • Discrimination of Touch Feeling in Submicron Region Realized by Ultra-High Resolution Tactile Sensor
    中島 翼; 綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  35-  4p  2018/10
  • Development of single cell stimulation device for quantitative analysis of spare receptors
    松井 祐樹; MuhammadThaqifIqbalBinMokhtar; 平野 勝也; 高尾 英邦; 下川 房男; 石塚 裕己; 寺尾 京平  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  35-  5p  2018/10
  • Measurement and Evaluation of Touch Feeling on Hair Surface Using High Resolution Two-Axis MEMS Tactile Sensor
    Kota Nakamitsu; Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao  Asia-Pacific Conference of Transducers and Micro-Nano Technology(APCOT2018)  35-  3p  2018/10
  • Microscale xylem sap flow sensor facilitating the simultaneous measurement of flow velocity and direction
    Yuki Hara; Naoki Hara; Hiroki Ishizuka; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa  Proceedings of the EUROSENSORS 2018 conference (EUROSENSORS 2018)  141  -ID7169  2018/09  [Refereed]
  • Extraction of “Real Friction Coefficient” Depending on Micro Surface Roughness Using High Resolution MEMS Tactile Sensor
    Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao  Asia-Pacific Conference of Transducers and Micro-Nano Technology(APCOT2018)  2pages  2018/06  [Refereed]
  • Fabrication of Xylem Sap Flow Sensor Microneedles for Extending its Applications
    T. Takahash; Y. Hara; A. Ono; H. Ishizuka; K. Terao; H. Takao; F. Shimokawa  Proceedings of the 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2018)  PS2  -235  2018/04  [Refereed]
  • Tsubasa Nakashima; Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)  2018-January-  870  -873  2018/04  [Refereed]
  • Maeno Kenichi; Aki Syoma; Terao Kyohei; Siomi Taro; Sueyoshi Kenji; Hisamoto Hideaki; Endo Tatsuro  JSAP Annual Meetings Extended Abstracts  2018.1-  2975  -2975  2018/03
  • Ryosuke Izumi; Akihito Ono; Hiroki Ishizuka; Kyohei Terao; Hidekuni Takao; Tsuyoshi Kobayashi; Ikuo Kataoka; Fusao Shimokawa  Proceedings of IEEE Sensors  2017-December-  1  -3  2017/12  [Refereed]
  • マイクロ流体デバイスによる敗血症に伴う腎微小環境変化の解析
    田尾 祐一; 高尾 英邦; 下川 房男; 中野 大介; 寺尾 京平  生命科学系学会合同年次大会  2017年度-  [1P  -0599]  2017/12
  • Development of Si blade array device of through hole type for realizing organ analysis
    塩見 太朗; 香川 大地; 高尾 英邦; 下川 房男; 寺尾 京平  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  34-  4p  2017/10
  • A "Micro-Macro" Integrated Multiscale MEMS Tactile Sensor for Detection Ability of Surface Texture
    綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  34-  1  -4  2017/10
  • Investigation of Process Parameters for Control of Diameter and Alignment of Self-assembled DNA Nanowires
    神谷 昌吾; 高尾 英邦; 下川 房男; 寺尾 京平  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  34-  5p  2017/10
  • Optical driven microtool with enzyme-functionalized surface for direct molecular processing
    増田 晃士; 高尾 英邦; 下川 房男; 寺尾 京平  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  34-  6p  2017/10
  • Imaging dynamics of single circular DNA molecules using DNA trapping device
    土肥 大輝; 平野 研; 寺尾 京平  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  34-  6p  2017/10
  • Hidekuni Takao; Satoshi Takemasa; Kyohei Terao; Fusao Shimokawa  TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems  1364  -1367  2017/07  [Refereed]
  • Atsuya Iima; Yusaku Oka; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao  Proceedings of IEEE Sensors  1168  -1170  2017/01  [Refereed]
  • Kazuki Watatani; Ryogo Kozai; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao  Proceedings of IEEE Sensors  4pages  2017/01  [Refereed]
  • Realization of MEMS Static Electricity Sensor with High Sensitivity Using Vertical Mounting method of Large Electrode
    飯間 敦矢; 岡 勇作; 寺尾 京平; 下川 房男; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  33-  1  -4  2016/10
  • A Two-Axis Tactile Sensor with High Sensitivity Aimed at Measurement of Micro Region Surface Texture
    綿谷 一輝; 香西 亮吾; 寺尾 京平; 下川 房男; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  33-  1  -4  2016/10
  • Measurement of Surface Texture on Cloth Samples Using a Highly Sensitive Two-Axis Tactile Sensor
    綿谷一輝; 香西亮吾; 寺尾京平; 下川房男; 高尾英邦  Proceedings of Asia-Pacific Conference of Transducers and Micro-Nano Technology 2016  61-62  2016/06  [Refereed]
  • E-2-3 Development of a Compact Cell Trapping Device Integrated with Fluid Handling Components
    Furuya Naoki; SHIMAGAMI Takuya; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; AKIMITSU Kazuya; SUZUKI Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2016-  "E  -2-3-1"-"E-2-3-3"  2016/03
  • Micro Cell Array Using Cell Surface Medication
    鈴木孝明; 鈴木孝明; 寺村裕治; 北濱若奈; 寺尾京平; 高尾英邦; 下川房男; 上野秀貴  電気学会バイオ・マイクロシステム研究会資料  BMS-16-  (1-8)  2016
  • UENO Hidetaka; KOMAI Shoji; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; KOTERA Hidetoshi; SUZUKI Takaaki  The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP  2016-  (0)  E  -2-4  2016
  • Fabrication of Nano-Actuator for Modulating Surface Plasmon Resonance Wavelength Using Crystalline Anisotropic Plasma Etching
    香川 大地; 鏡原 照正; 下川 房男; 高尾 英邦; 寺尾 京平; 山口 堅三; 鈴木 孝明  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  32-  1  -4  2015/10
  • A new tactile evaluation method for quantification of touch sensation using an in-plane motion MEMS tactile sensor
    香西 亮吾; 寺尾 京平; 下川 房男; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  32-  1  -4  2015/10
  • Optimization of Applied Voltage in μEP Chip for Plant Cell
    古谷 尚輝; 島上 卓也; 下川 房男; 寺尾 京平; 高尾 英邦; 秋光 和也; 鈴木 孝明  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  32-  1  -4  2015/10
  • Molecular wiring with single giant DNA molecules using optically-driven microstructures
    犬飼 亮; 高尾 英邦; 下川 房男; 鈴木 孝明; 寺尾 京平  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  32-  1  -6  2015/10
  • Kretschmann type SPR sensing assisted with electrokinetic effects
    近藤 翔平; 高尾 英邦; 下川 房男; 鈴木 孝明; 寺尾 京平  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  32-  1  -5  2015/10
  • 30am2-PN-24 Microfluidic control method using fin structures operated by frequency modulation
    KAWAI Hayao; YAMASHITA Hirohumi; TERAO Kyohei; TAKAO Hidekuni; YAMADA Kou; SHIMOKAWA Fusao; SUZUKI Takaaki  マイクロ・ナノ工学シンポジウム  2015-  (7)  "30am2  -PN-24-1"-"30am2-PN-24-2"  2015/10
  • 30pm1-A-4 Fabrication of DNA Fiber Analysis Chip Using Rotated/Inclined Photolithography and PDMS Molding Process
    KITANO Kodai; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  マイクロ・ナノ工学シンポジウム  2015-  (7)  "30pm1  -A-4-1"-"30pm1-A-4-2"  2015/10
  • Si/polymer/glassチップを用いた神経細胞組織内局所光刺激デバイスの開発
    上野秀貴; 駒井章治; 寺尾京平; 高尾英邦; 下川房男; 小寺秀俊; 鈴木孝明  センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  32nd-  ROMBUNNO.30AM2-PS-148  2015/10
  • Design and Characteristics of a MEMS Human Body Hardness Sensor Aimed to Diagnosis of Lesion Size
    前田祐作; 寺尾京平; 下川房男; 高尾英邦; Y. Maeda; K. Terao; F. Shimokawa; Hidekuni Takao  Proc. of 2015 International Conference on Solid State Devices and Materials (SSDM2015)  pp.164-165  2015/09  [Refereed]
  • MoP-25 DEVELOPMENT OF A LOCAL LIGHT STIMULATION DEVICE INTEGRATED WITH MICRO ELECTRODE ARRAY
    UENO Hidetaka; KOMAI Shoji; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; KOTERA Hidetoshi; SUZUKI Takaaki  Proceedings of ... JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE  2015-  "MoP  -25-1"-"MoP-25-3"  2015/06
  • Takuya Ihara; Hidetaka Yamasaki; Kyohei Terao; Takaaki Suzuki; Fusao Shimokawa; Hidekuni Takao  2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)  1838  -1841  2015  [Refereed]
  • Ryogo Kozai; Kyohei Terao; Takaaki Suzuki; Fusao Shimokawa; Hidekuni Takao  2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)  1191  -1194  2015  [Refereed]
  • Yusaku Maeda; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao  2015 IEEE SENSORS  267  -270  2015  [Refereed]
  • Yusaku Maeda; Kyohei Terao; Takaaki Suzuki; Fusao Shimokawa; Hidekuni Takao  2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015)  253  -256  2015  [Refereed]
  • Ryogo Kozai; Kyohei Terao; Takaaki Suzuki; Fusao Shimokawa; Hidekuni Takao  2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015)  245  -248  2015  [Refereed]
  • Horizontal Type MEMS Tactile Sensor to Acquire the Correlation Between Surface Roughness and Frictional Force
    香西 亮吾; 寺尾 京平; 鈴木 孝明  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  31-  1  -4  2014/10
  • Evaluation of Soft Materials Using a Highly Sensitive MEMS Hardness Sensor with Reference Plane Structure
    前田 祐作; 寺尾 京平; 鈴木 孝明  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  31-  1  -4  2014/10
  • Measurement of quenching distance aimed to realize micro flame jet device
    井原 拓也; 寺尾 京平; 鈴木 孝明  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  31-  1  -4  2014/10
  • Fabrication and Evaluation of the Atmospheric Pressure Plasma Jet Array having Channels of 320μm pitch using Silicon Microfabrication Technology
    武政 智史; 山崎 秀貴; 寺尾 京平  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  31-  1  -4  2014/10
  • 21am2-E7 Separation and detection of biosamples using SPR sensor chip integrated with microslit structures
    Terao Kyohei; Hiramatsu Shinichi; Shimizu Kazunori; Miyanishi Nobumitsu; Suzuki Takaaki; Takao Hidekuni; Shimokawa Fusao; Ohira Fumikazu  マイクロ・ナノ工学シンポジウム  2014-  (6)  "21am2  -E7-1"-"21am2-E7-2"  2014/10
  • J2230202 Development of High Accuracy Spray Coating Method Using Low Viscosity Thick Film Photoresist
    FUJIWARA Kiyoshi; AKAMATSU Mikio; KOUDA Naoko; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; SUZUKI Takaaki  Mechanical Engineering Congress, Japan  2014-  "J2230202  -1"-"J2230202-4"  2014/09
  • E-2-5 Plasma Resistant Evaluation of Photoresist Treated by Vacuum UV Cure Process in ECR Plasma Etching
    HAMA Haruyosi; TERAO Kyohei; TAKAO Hidekuni; SIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2014-  "E  -2-5-1"-"E-2-5-3"  2014/03
  • E-1-2 Improvement of Cell Trapping Efficiency in Microfluidic Device Having Micro-Orifice Array
    ISHII Takahiro; NISHIZAKI Hayato; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2014-  "E  -1-2-1"-"E-1-2-2"  2014/03
  • E-1-3 Chromosome Stretching Characterization of High-Throughput DNA Fiber Analysis Device using centrifugal force
    KITANO Kodai; NITTA Yuki; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2014-  "E  -1-3-1"-"E-1-3-3"  2014/03
  • 神経細胞ネットワーク解析のための局所光刺激デバイスの開発
    上野秀貴; 駒井章治; 寺尾京平; 高尾英邦; 下川房男; 小寺秀俊; 鈴木孝明  日本機械学会情報・知能・精密機器部門講演会講演論文集  2014 (CD-ROM)-  ROMBUNNO.E-2-4  2014/03
  • Yusaku Oka; Ryosuke Shinozaki; Kyohei Terao; Takaaki Suzuki; Fusao Shimokawa; Fumikazu Oohira; Hidekuni Takao  2014 IEEE 27TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)  433  -436  2014  [Refereed]
  • 電位計測アレイを集積化した細胞組織内局所光刺激デバイスの開発
    上野秀貴; 駒井章治; 寺尾京平; 高尾英邦; 下川房男; 小寺秀俊; 鈴木孝明  センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  31st-  ROMBUNNO.21PM3-PS116  2014
  • Automatically Aligned Assembly Technique of Optical Element on the Movable MEMS Devices
    岡 勇作; 篠崎 亮輔; 寺尾 京平  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  30-  4p  2013/11
  • Driving and Sensing Characteristics of Electrostatic In-Plane MEMS Rotational Mirror aimed to Silicon Optical Bench Applications
    篠崎 亮輔; 岡 勇作; 寺尾 京平  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  30-  4p  2013/11
  • Fabrication of Integrated Tactile Sensor with Improved Load Tolerance of Contact-tip Realized by SU-8 Adhesive Layer
    前田 祐作; 寺尾 京平; 鈴木 孝明  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  30-  5p  2013/11
  • 5PM1-C-1 Measurement of Trapping Efficiency of a Cell Trapping Device Fabricated by Single-Mask Multidirectional Photolithography
    Nishizaki Hayato; Fukuda Taisuke; Terao Kyohei; Takao Hidekuni; Oohira Fumikazu; Suzuki Takaaki  マイクロ・ナノ工学シンポジウム  2013-  (5)  25  -26  2013/11
  • J161022 Reduction of misalignment for integrated microfluidic systems made of polydimethylsiloxane
    TAMAI Hidetaka; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Mechanical Engineering Congress, Japan  2013-  "J161022  -1"-"J161022-4"  2013/09
  • J161012 Improvement of Mask Etching Selectivity and its application using Vacuum UV Curing Method
    FUJIMURA Kimiya; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Mechanical Engineering Congress, Japan  2013-  "J161012  -1"-"J161012-4"  2013/09
  • J161021 Evaluation of a Polymer MEMS mirror integrated an angular rate sensor
    YAMASHITA Hirofumi; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Mechanical Engineering Congress, Japan  2013-  "J161021  -1"-"J161021-4"  2013/09
  • J161015 Evaluation of chromosome extension properties on microstructures of gene analysis chip
    NITTA Yuki; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Mechanical Engineering Congress, Japan  2013-  "J161015  -1"-"J161015-4"  2013/09
  • J161011 Finite element analysis for driving characteristics of a polymer-MEMS mirror driven attractive force
    SUZUKI Junya; MIURA Takuya; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; NAMAZU Takahiro; MORIKAKU Toshiyuki; OOHIRA Fumikazu; SUZUKI Takaaki  Mechanical Engineering Congress, Japan  2013-  "J161011  -1"-"J161011-4"  2013/09
  • E-1-1 Development of a magnetically-driven micropump with photosensitivity nanocomposit
    UEDA Yusaku; TERAO Kyohei; TAKAO Hidekuni; SIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2013-  28  -30  2013/03
  • E-1-2 Accuracy Evaluation of a Polydimethylsiloxane Replica in Soft Lithography
    TAMAI Hidetaka; TAKAO Hidekuni; OOHIRA Fumikazu; TERAO Kyohei; SIMOKAWA Fusao; SUZUKI Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2013-  31  -33  2013/03
  • E-2-4 Integration of an angular rate sensor on a polymer MEMS mirror
    YAMASHITA Hirofumi; TERAO Kyohei; TAKAO Hidekuni; SIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2013-  52  -54  2013/03
  • Hirofumi Yamashita; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Takaaki Suzuki  International Conference on Optical MEMS and Nanophotonics  69  -70  2013  [Refereed]
  • Junya Suzuki; Takuya Miura; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Takahiro Namazu; Fumikazu Oohira; Takaaki Suzuki  International Conference on Optical MEMS and Nanophotonics  101  -102  2013  [Refereed]
  • Hidetaka Yamasaki; Kyohei Terao; Takaaki Suzuki; Fusao Simokawa; Hidekuni Takao  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)  205  -208  2013  [Refereed]
  • LARGE AREA 3D MICROFABRICATION TECHNIQUE BY MULTIDIRECTIONAL PHOTOLITHOGRAPHY FOR A CHROMOSOME EXTENSION CHIP
    Yuki Nitta; Hiroyuki Suzuki; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Takaaki Suzuki  The 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences [microTAS2012]  1822-1824  -1824  2012/11  [Refereed]
  • Fast whole blood testing for detecting biomarkers by size-exclusion SPR sensing
    Shin Ichi Hiramatsu; Kyohei Terao; Kazunori Shimizu; Nobumitsu Miyanishi; Takaaki Suzuki; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira  Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012  186-188  -188  2012/10  [Refereed]
  • A Post-CMOS Process of High Adhesion SU-8 Structure to Apply to Sensor Device
    前田祐作; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦; Y. Maeda; K. Terao; T. Suzuki; F. Shimokawa; H. Takao  25th International Microprocesses and Nanotechnology Conference (MNC2012)  2012/10  [Refereed]
  • J161045 A cell trap chip having mesh structures fabricated by single-mask inclined photolithography
    NISHIZAKI Hayato; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Mechanical Engineering Congress, Japan  2012-  "J161045  -1"-"J161045-4"  2012/09
  • J161023 Improvement of Si/Photoresist Mask Etching Selectivity using Vacuum UV Curing Method
    FUJIMURA Kimiya; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Mechanical Engineering Congress, Japan  2012-  "J161023  -1"-"J161023-4"  2012/09
  • Optically-Driven Microstructures for Manipulating Single DNA Molecule under Fluorescence Microscop
    MASUDA Chihiro; TERAO Kyohei; OANA Hidehiro; WASHIZU Masao; SUZUKI Takaaki; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu  Proceedings of 38th International Conference on Micro and Nano Engineering (MNE2012)  P409-355  2012/09  [Refereed]
  • Fabrication of magnetic active membrane for micropump made of photosensitive nanocomposite
    NAKAHARA Tasuku; HOSOKAWA Yuuki; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; MIYAGAWA Hayato; NAMAZU Takahiro; KOTERA Hidetoshi; SUZUKI Takaaki  電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan  2012-  (8)  45  -48  2012/06
  • Evaluation for Work Area of Rotated/Inclined UV Lithography and its Application for Gene Analysis Chip
    NITTA Yuki; SUZUKI Hiroyuki; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan  2012-  (8)  41  -44  2012/06
  • Improvement of Coating Uniformity for Thick Photoresist Using a Partial Spray Coat
    M. Akamatsu; K. Terao; H. Takao; F. Shimokawa; F. Oohira; T. Suzuki  Technical digest of 7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems [IEEE NEMS2012]  W3P-33  2012/03  [Refereed]
  • Development of a Universal Integrated Micro Cell Culture System
    Masatoshi Inoue; Atsuhito Okonogi; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Hidetoshi Kotera; Takaaki Suzuki  6TH IEEE INTERNATIONAL CONFERENCE ON NANO/MOLECULAR MEDICINE AND ENGINEERING (IEEE-NANOMED 2012)  2012
  • Masataka Arai; Kyohei Terao; Takaaki Suzuki; Fusao Simokawa; Fumikazu Oohira; Hidekuni Takao  2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)  148-151  2012  [Refereed]
  • R. Shinozaki; F. Oohira; K. Terao; T. Suzuki; F. Simokawa; H. Takao  2012 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN)  107  -108  2012  [Refereed]
  • Yusaku Maeda; Kyohei Terao; Takaaki Suzuki; Fusao Shimokawa; Hidekuni Takao  2012 IEEE SENSORS PROCEEDINGS  40  -43  2012  [Refereed]
  • Kyohei Terao; Murat Gel; Atsuhito Okonogi; Takaaki Suzuki; Fumikazu Oohira; Masao Washizu; Hidetoshi Kotera  FLUID MEASUREMENTS AND INSTRUMENTATION CAVITATION AND MULTIPHASE FLOW ADVANCES IN FLUIDS ENGINEERING EDUCATION MICROFLUIDICS, VOL 2  2-  317  -319  2012
  • Tasuku Nakahara; Norifumi Ootani; Toshiyuki Asanuma; Yoshinori Hagio; Daisuke Hiramaru; Kyohei Terao; Atsuhito Okonogi; Fumikazu Oohira; Hidetoshi Kotera; Takaaki Suzuki  FLUID MEASUREMENTS AND INSTRUMENTATION CAVITATION AND MULTIPHASE FLOW ADVANCES IN FLUIDS ENGINEERING EDUCATION MICROFLUIDICS, VOL 2  2-  371  -373  2012
  • DNA fiber preparation technique on a chip for clinical diagnosis
    Takaaki Suzuki; Kyohei Terao; Hiroyuki Suzuki; Yuki Nitta; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Daisuke Hiramaru; Hidetoshi Kotera  Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012  272  -274  2012/01
  • Continuous local exposure to chemical substances of single cell
    Kyohei Terao; Murat Gel; Ariko Fuke; Atsuhito Okonogi; Teru Okitsu; Takashi Tada; Takaaki Suzuki; Masao Washizu; Hidetoshi Kotera  Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012  1567  -1569  2012/01
  • Tasuku Nakahara; Yuuki Hosokawa; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Takahiro Namazu; Hidetoshi Kotera; Takaaki Suzuki  2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)  25th Vol.2-  1181  -1184  2012
  • T. Nakahara; J. Suzuki; Y. Hosokawa; Y. Ueda; K. Terao; H. Takao; F. Shimokawa; F. Oohira; H. Miyagawa; H. Kotera; T. Suzuki  2012 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN)  204  -+  2012
  • Masatoshi Inoue; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Takaaki Suzuki; Atsuhito Okonogi; Hidetoshi Kotera  6TH IEEE INTERNATIONAL CONFERENCE ON NANO/MOLECULAR MEDICINE AND ENGINEERING (IEEE-NANOMED 2012)  70  -73  2012
  • A Magnetic-Driven Membrane Made of Photosensitive Nanocomposite without Alignment Process
    T. Nakahara; Y. Hosokawa; K. Terao; H. Takao; F. Shimokawa; F. Oohira; H. Miyagawa; T. Namazu; H. Kotera; T. Suzuki  7th Annual IEEE International Conference onNano/Micro Engineered and Molecular Systems,March 5-8  2012/01  [Refereed]
  • A Venturi-type Micro Mist Generator fabricated by MEMS Technology and its Application to Local Surface Cooling of Target Objects
    荒井將崇; 寺尾京平; 鈴木孝明; 下川房男; 大平文和; 高尾英邦; Masataka Arai; K. Terao; T. Suzuki; F. Shimokawa; F. Oohira; H. Takao  24th International Microprocesses and Nanotechnology Conference (MNC2011)  2011/10  [Refereed]
  • MP-48 In Situ Fabrication of Active Microfluidic Components Using Photoresist Containing Magnetic Nanoparticles
    Hosokawa Yuuki; Nakahara Tasuku; Terao Kyohei; Takao Hidekuni; Simokawa Fusao; Oohira Fumikazu; Suzuki Takaaki  マイクロ・ナノ工学シンポジウム  2011-  (3)  163  -164  2011/09
  • J161014 Proliferative capacity of biological cells in a microchannel
    INOUE Masatoshi; OKONOGI Atsuhito; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; Oohira Fumikazu; KOTERA Hidetoshi; SUZUKI Takaaki  Mechanical Engineering Congress, Japan  2011-  "J161014  -1"-"J161014-3"  2011/09
  • Fabrication of a Magnetically-Driven Microstructure Made of Magnetic Nanoparticles/SU-8 Composite
    Y. Hosokawa; T. Nakahara; K. Terao; H. Takao; F. Shimokawa; F. Oohira; T. Suzuki  Proceedings of the 6th International Conference on Microtechnologies in Medicine and Biology [MMB2011]  74-75  2011/05  [Refereed]
  • P-1-6 Fabrication of three-dimensional micro molds using single-mask multidirectional photolithography for micro-electroporation
    Fukuda Taisuke; TERAO Kyohei; Takao Hidekuni; Shimokawa Fusao; Oohira Fumikazu; Suzuki Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2011-  171  -174  2011/03
  • D-2-2 Thickness control of thick photoresist using spray coating
    AKAMATSU Mikio; TERAO Kyohei; TAKAO Hidekuni; SIMOKAWA Fusao; OOHIRA Humikazu; SUZUKI Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2011-  30  -33  2011/03
  • P-1-8 Influence of microchannel width on a microdevice for single-cell manipulation
    TAKASAKI Shouiti; TERAO Kyohei; TAKAO Hidekuni; SIMOKWA Fusao; OOHIRA Humikazu; SUZUKI Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2011-  181  -183  2011/03
  • P-1-4 Fabrication and evaluation of SPR chip with micro structures by imprint technology
    Moriwake Masayoshi; Watanabe Hideo; Shimizu Kazunori; Terao Kyohei; Suzuki Takaaki; Takao Hidekuni; Simokawa Fusao; Oohira Fumikazu  Conference on Information, Intelligence and Precision Equipment : IIP  2011-  161  -164  2011/03
  • MICRO FLUIDIC CIRCUIT DESIGN WITH "SPICE" SIMULATION
    H. Takao; M. Sugiura; M. Ishida; K. Terao; T. Suzuki; F. Shimokawa; F. Oohira  2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)  1154  -1157  2011  [Refereed]
  • Yuko Kitazawa; Ryuji Yokokawa; Kyohei Terao; Atsuhito Okonogi; Dzung Viet Dao; Susumu Sugiyama; Isaku Kanno; Hidetoshi Kotera  2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)  956  -959  2011  [Refereed]
  • A high-throughput fish microchip for clinical genetics
    Hiroyuki Suzuki; Daisuke Hiramaru; Kyohei Terao; Hidekuni Takao; Fumikazu Oohira; Hidetoshi Kotera; Takaaki Suzuki  14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010  1-  702  -704  2010/12
  • Analysis of intracellular response to localized chemical stimulation on tissue-mimicking microdevice
    K. Terao; K. Terao; M. Gel; M. Gel; A. Fuke; A. Okonogi; A. Okonogi; T. Okitsu; T. Okitsu; T. Suzuki; T. Suzuki; T. Tada; T. Tada; M. Washizu; M. Washizu; H. Kotera; H. Kotera  14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010  3-  1631  -1633  2010/12
  • Development of simple microfluidic cell culturing system toward observation of cell-to-cell communication
    A. Okonogi; K. Terao; T. Okitsu; T. Suzuki; R. Yokokawa; M. Ohoka; H. Kotera  14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010  2-  854  -856  2010/12
  • Heterotypic cell positioning using electroosmotic flow and observation of cell-cell interactions in open-access flow chamber
    KITAZAWA Yuko; TERAO Kyohei; YOKOKAWA Ryuji; OKONOGI Atsuhito; KANNO Isaku; KOTERA Hidetoshi  電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan  2010-  (7)  27  -32  2010/06
  • P-5 3-D Shape Measurement instrument Using Single Image Sensor
    Miura Hironori; TERAO Kyouhei; SUZUKI Takaaki; TAKAO Hidekuni; TANIGUCHI Tomonobu; URA Haruo; OOHIRA Fumikazu  Conference on Information, Intelligence and Precision Equipment : IIP  2010-  122  -126  2010/03
  • P-4 Fabrication of liquid chromatography chip with micro pillar array of sub micron spacing
    Kakita Chihiro; TERAO Kyohei; MIYANISHI Nobumitsu; SUZUKI Takaaki; TAKAO Hidekuni; OOHIRA Fumikazu; MAJIMA Eiji  Conference on Information, Intelligence and Precision Equipment : IIP  2010-  118  -121  2010/03
  • B-5 Manipulation of Stretching Chromosomes Form on Microstructures Using Centrifugal Force
    SUZUKI Hiroyuki; HIRAMARU Daisuke; TERAO Kyohei; TAKAO Hidekuni; OOHIRA Humikazu; KOTERA Hidetoshi; SUZUKI Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2010-  (0)  75  -79  2010/03
  • Development of techniques for DNA micromanipulation toward single DNA molecule analysis
    OANA Hidehiro; TERAO Kyohei; MORI Yasuhiro; SATO Yoshinobu; WASHIZU Masao  電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan  2010-  (1)  5  -9  2010/01
  • H. Takao; H. Okada; M. Ishida; K. Terao; T. Suzuki; F. Oohira  2010 IEEE SENSORS  2079  -2082  2010  [Refereed]
  • Development of Hybrid Bio-Device with Self-Organized Huvec Vessels and Artificial Micro-Channels,
    D. Hiramaru; H. Senzai; A. Okonogi; K. Terao; T. Miura; T. Suzuki; I. Kanno; H. Kotera  The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology, pp. 154A-B, Perth, Australia, 8th July,  2010  [Refereed]
  • Space-resolved detection of protein binding sites on genomic DNA by dynamic stretching using optically driven microstructures
    Yoshinobu Sato; Murat Gel; Murat Gel; Kyohei Terao; Kyohei Terao; Tamotsu Kanai; Haruyuki Atomi; Tadayuki Imanaka; Masao Washizu; Masao Washizu; Hidehiro Oana; Hidehiro Oana  Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences  1368  -1370  2009/11
  • HIRAMARU Daisuke; SENZAI Hiroyuki; OKONOGI Atsuhito; TERAO Kyohei; MIURA Takashi; SUZUKI Takaaki; KANNO Isaku; KOTERA Hidetoshi  年次大会講演論文集 : JSME annual meeting  2009-  (8)  245  -246  2009/09
  • P-MCH-03 LOCALIZED SUBSTANCE DELIVERY TO SINGLE CELL BY THREE DIMENTIONAL MICROFLUIDIC DEVICE(Micro/Nanomechatronics,Technical Program of Poster Session)
    TERAO Kyohei; GEL Murat; KOTAKE Hiroki; OKONOGI Atsuhito; OKITSU Teru; SUZUKI Takaaki; WASHIZU Masao; KOTERA Hidetoshi  Proceedings of ... JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE  2009-  385  -386  2009/06  [Refereed]
  • Three dimentional multi-layered flow generator
    Takaaki Suzuki; Yoshinori Hagio; Daisuke Hiramaru; Kyohei Terao; Atsuhito Okonogi; Isaku Kanno; Hidetoshi Kotera  Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences  52  -54  2009/01
  • K. Terao; Y. Kitazawa; A. Okonogi; H. Kotera  TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems  69  -72  2009
  • DEVELOPMENT OF A SINGLE CELL STIMULATION DEVICE TOWARD MEASURING OF CELL TO CELL COMUNICATION,
    A.Okonogi; T. Okitsu; K. Terao; M. Ohoka; T. Suzuki; H. Kotera  MicroTAS 2009, Jeju, Korea. Nov. 01-05.  2009  [Refereed]
  • DEVELOPMENT OF TISSUE-LIKE CHIPS TO EXCLUSIVELY STIMULATE SINGLE CELL AND DETECT ITS PHYSIOLOGICAL REACTION,
    A. Okonogi; K. Terao; T. Okitsu; T. Suzuki; H. Kotera  2009 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE2009), Tsukuba, Japan. Jun. 17-20.  2009  [Refereed]
  • Single-Mask Multidirectional Photolithography with Multiple Resist Coat for Multi-Layered Microfluidic Networks,
    T. Suzuki; Y. Hirabayashi; K. Terao; I. Kanno; M. Washizu; H. Kotera  2009 International Conference on Microtechnologies in Medicine and Biology [MMB2009], pp. 52-53, Quebec, CANADA, Apr, 01-03,  2009  [Refereed]
  • Electroosmosis-driven positioning of heterotypic cells in open-access flow chamber
    Yuko Kitazawa; Kyohei Terao; Atsuhito Okonogi; Ryuji Yokokawa; Hidetoshi Kotera  Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences  1234  -1236  2009/01
  • Three-dimensional electroporation chip for realtime monitoring of intracellular dynamics
    H. Kotake; K. Terao; A. Okonogi; R. Yokokawa; M. Gel; M. Washizu; H. Kotera  Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences  1159  -1161  2009/01
  • Imaging of physiological cellular stimulation-response phenomena on tissue-reproducing cell array device
    Atsuhito Okonogi; Kyohei Terao; Teru Okitsu; Teru Okitsu; Takaaki Suzuki; Takaaki Suzuki; Hidetoshi Kotera; Hidetoshi Kotera  12th International Conference on Miniaturized Systems for Chemistry and Life Sciences - The Proceedings of MicroTAS 2008 Conference  1123  -1125  2008/01
  • 4d Imaging of Intracellular Response to Localized Stimulus on Tissue-Mimicking Microdevice,
    K. Terao; A. Okonogi; T. Okitsu; T. Suzuki; M. Washizu; H. Kotera  The 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences [MicroTAS2008], pp. 501-503, San Diego, USA, Oct,12-16,  501  -503  2008/01
  • Construction of Cell-Array Device on Which Intensive Stimulation Can Be Exclucively,
    A. Okonogi; T. Suzuki; K. Terao; T. Okitsu; M. Ohoka; H. Kotera  The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies (APCOT2008), pp. Taiwan, Jun,22-25,  2008  [Refereed]
  • Lateral Cell Trapping on Chip Fabricated by Multidirectional Uv Lithography for High-Resolution Intracellular Dynamics Study,
    K. Terao; A. Okonogi; T. Okitsu; T. Suzuki; M. Washizu; H. Kotera  The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies (APCOT2008), pp. Taiwan, Jun,22-25,  2008  [Refereed]
  • 1104 Manipulation of Chromosomal DNA Molecules Using Optically-Driven Microstructures
    TERAO Kyohei; OANA Hidehiro; WASHIZU Masao  Conference on Information, Intelligence and Precision Equipment : IIP  2007-  13  -16  2007/03
  • Electroosmotic Extension of Chromosomal DNA and Its Manipulation Using Optically-driven Microstructures
    TERAO Kyohei; KABATA Hiroyuki; OANA Hidehiro; WASHIZU Masao  電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan  2006-  (1)  19  -24  2006/05
  • Kyohei Terao; Hiroyuki Kabata; Hidehiro Oana; Masao Washizu  2006 IEEE International Symposium on Micro-Nano Mechanical and Human Science, MHS  2006
  • Complete extension of chromosomal DNA and its manipulation using optically-driven micro-fabricated hooks
    Kyohei Terao; Hiroyuki Kabata; Hidehiro Oana; Masao Washizu  Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences  1-  715  -717  2005/10
  • 電気浸透流を利用した酵母染色体の液中分子展開・操作
    寺尾京平; 加畑博幸; 鷲津正夫  日本分子生物学会年会プログラム・講演要旨集  27th-  2004
  • 電気浸透流による酵母染色体の液中分子操作:原理とゲノム生物学への応用
    寺尾京平; 加畑博幸; 上野勝; 鷲津正夫  日本分子生物学会年会プログラム・講演要旨集  26th-  2003
  • Stretching Yeast Genomic DNA by Electroosmotic Flow
    寺尾京平; 加畑博幸; 鷲津正夫  電気学会ケミカルセンサ研究会資料  CHS-03-  (51-55)  2003

Awards & Honors

  • 2021/12 JRM Best Paper Award
     
    受賞者: Kazuki Watatani;Kyohei Terao;Fusao Shimokawa;Hidekuni Takao
  • 2018/05 公益社団法人新化学技術推進協会 第7回新化学技術研究奨励賞
     
    受賞者: 寺尾 京平
  • 2018/04 文部科学省 科学技術分野の文部科学大臣表彰 若手科学者賞
     JPN
  • 2017/07 第八回集積化MEMS技術研究会ワークショップ 優秀ポスター賞
     JPN
  • 2014/05 電気学会 第70回電気学術振興賞 論文賞
     JPN
  • 2013/11 電気学会センサ・マイクロマシン部門 第30回「センサ・マイクロマシンと応用システム」シンポジウム 優秀ポスター賞
     JPN 
    受賞者: 寺尾 京平
  • 2013/05 エレキテル尾崎財団 源内奨励賞
     JPN
  • 2012/10 電気学会センサ・マイクロマシン部門 第29回「センサ・マイクロマシンと応用システム」シンポジウム 最優秀技術論文賞
     JPN 
    受賞者: 寺尾 京平
  • 2012/03 Finalist of CM HO Best Paper Award in Micro/Nano Fluidics
  • 2010/04 船井情報科学振興財団 船井研究奨励賞
     JPN
  • 2009/10 電気学会センサ・マイクロマシン部門 第26回「センサ・マイクロマシンと応用システム」シンポジウム 最優秀ポスター賞
     JPN
  • 2006/11 IEEE International Symposium on Micro-Nanomechatronics and Human Science 2006 IEEE-MHS Best Paper Award

Research Grants & Projects

  • Mechanical processing platform for single cells and single molecules using optically-driven nanotools
    Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B)
    Date (from‐to) : 2020/04 -2023/03 
    Author : 寺尾 京平
     
    本研究は、細胞・分子機械加工を達成するため、２つの構成要素からなるプラットフォームを実現する。一つはA)光操作型ナノ工具であり、もう一つは加工する場である加工テーブルに相当するB)マイクロ流体ワークテーブルである。 半導体微細加工技術によってナノメートルサイズの微小構造体を作製し、表面に様々な酵素・抗体を固定することで「ナノ工具」を実現する。このナノ工具は光操作するためのハンドル部と、加工するための反応部から成る。集光レーザーによりハンドル部をトラップ（光ピンセット）することで、溶液中で位置や姿勢を自在に操作できる。反応部に接触した生体分子はその位置でピンポイントに酵素が触媒する化学反応により加工される。もしくは、抗体により構造体に固定化される。 マイクロ流体ワークテーブルは、顕微鏡ステージに設置され、加工に必要な工具と細胞を収容し、細胞を所定の位置に搬送・配置する機能を持つ。２つの構成要素の本年度の具体的な研究開発実績を以下に示す。 A) 光操作型ナノ工具：加工条件の詳細を検討したナノ加工法について、加工限界（最小サイズ、加工面積、加工形状）の把握と光操作特性の測定を行った。また、ナノ工具の高度化に向けて電極パターンの形成手法の検討と電界シミュレーションを実施した。 B) マイクロ流体ワークテーブル：本デバイスはマイクロ流路の中に、ナノ工具を収容する工具ストックチャンバー、細胞配置アレイ構造と加工エリア、溶液導入ポートを有している。本年度は、キャピラリーを利用した簡易な回収機構を開発することで、効率的な実験が可能なプラットフォームの構築を目指し、マイクロ流体デバイスを開発した。
  • In vitro three-dimensional blood capillary model for dynamics of cancer cell evolution
    Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research
    Date (from‐to) : 2020/07 -2022/03 
    Author : Terao Kyohei
     
    To elucidate the effect of mechanical constraints on circulating tumor cells, we developed a methodology that allows us to visualize the dynamics of cancer cells passing microconstrictions and to recover them for further analysis. The microconstrictions reproduce in-vivo capillary shape, which has circular micro cross section. Using the in-vitro model, we demonstrated the visualization of cell and cell nucleus in a constriction.
  • 分子輪投げによる環状DNA1分子の直接リアルタイム解析
    Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (C)
    Date (from‐to) : 2018/04 -2021/03 
    Author : 平野 研; 寺尾 京平
     
    本研究課題においては、環状DNA1分子を「輪」の状態で観察して、酵素反応等を直接リアルタイムで解析することを最終目的としている。顕微鏡観察下において、独自の分子輪投げデバイ スにより、環状DNA1分子を輪投げの要領でマイクロピラーに引っ掛けて「輪」の状態で捕捉する。この捕捉技術により環状 DNAと酵素(ジャイレース等)や核酸結合タンパク質(ヒストン等)、周囲溶液環境との相互作用など解析を行い、環状DNAの構造・形態変化のダイナミクスの他、DNAのねじれ(トポロジー)そのものや生体イベントとの関連性をリアルタイム観察により1分子レベルで明らかにし、また直接観察により予測等に対する直接的なエビデンスを示すことを目的としている。 本年度は、分子輪投げ用のマイクロ流体デバイスの開発に取り組むと共に、分子輪投げデバイスを拡張し、分子輪投げした後、ピラーを中心に微小電極対により回転電界を形成し環状DNA1分子を 「真円」としてリアルタイム観察する分子フラフープ捕捉法の開発に取り組んだ。前者では、マイクロ流路中にマイクロメートルサイズのピラーを立て、ピラー構造(直径等)や流れの検討を行い高効率に環 状DNA1分子を分子輪投げ(補足)できる好適なチップを達成できた。後者においては、前者の手法が確立した後に検討し、マイクロ流路内に回転電界を形成するためフォトリソグラフィや真空蒸着法などにより微小電極の作製を試み、各種電極デザインによる最適な回転電場形成のための検討を行うことにより、回転電場による環状DNA１分子の分子フラフープ捕捉を示唆できる基礎的成果を得ることができた。
  • 酵素固定化ナノマイクロ構造体を用いた生体分子機械加工技術の創出
    Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research Challenging Research (Exploratory)
    Date (from‐to) : 2018/06 -2020/03 
    Author : 寺尾 京平
     
    機械加工とは工具や工作機械を用いて素材を加工することである。本研究は素材としてこれまでの機械加工の概念になかった生体分子１分子をターゲットにした極限的な機械加工技術の実現を目標としている。独自技術である光駆動ナノマイクロ構造体による生体分子１分子の物理操作技術をベースに、ナノマイクロ構造体表面に様々な化学反応を触媒する酵素を固定することで、分子加工用の工具として利用する。研究期間内に本提案原理を実証するため、具体的にはDNA分子１分子へのピンポイントな分子鎖切断に取り組んだ。 半導体微細加工技術によって作製したナノマイクロメートルサイズの微小構造体に対して、表面に様々な酵素を固定することで微小工具として利用する。この微小工具はレーザーによりトラップされ、溶液中で自在に操作できる。構造体が接触した生体分子はその位置でピンポイントに酵素が触媒する化学反応により加工される。構造体の形状は任意に作製することができ、対象となる生体分子のサイズや形状、周囲環境に合わせてデザインすることができる。 具体的なターゲット分子として、これまでも物理操作の実績があることに加えて、生物学分野での重要な解析対象であることからDNA分子をターゲットとした。構造体は電子線描画装置によるナノ加工とUVリソグラフィによるマイクロ加工を組み合わせて作製した。構造体への酵素固定化にはこれまでに開発したプラズマ処理とクロスリンク処理を組み合わせた手法を利用し、本年度、目標とするDNA切断酵素DNaseによるDNA切断を実証した。
  • Development of 3D spatial dissection of an organ at single cell resolution
    Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research Grant-in-Aid for Young Scientists (A)
    Date (from‐to) : 2016/04 -2020/03 
    Author : Terao Kyohei
     
    This research aims to develop a methodology for spatial dissection of biological organs at single cell resolution to realize biosampling of single cells with spatial information. The device we developed has an array of the blades of nanometer~micrometer width to cut and pixelize an organ sample. In the project, spatial dissection system have been developed as a component attached to a conventional microscope. We demonstrated spatial dissection using a mouse brain slice as a model sample, and analyse its transcriptomics information. We also developed techniques to collect dissected sample with high throughput, employing 3D fabrication of microfluidic device.
  • Development of microfluidic device for spatial dissection of single cells
    Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research Fund for the Promotion of Joint International Research (Fostering Joint International Research)
    Date (from‐to) : 2017 -2019 
    Author : TERAO KYOHEI
     
    This research aims to develop a microfluidic device for single cell analysis. The project have been driven by the international collaboration with the research group in France. We focused on circulating tumor cells that play a significant role in cancer metastasis. We developed a microfluidic device reproducing the in vivo microenvironment to analyse the dynamics of circulating tumor cells at single cell level. The single cell manipulation technique that the principle investigator developed is integrated with the microfluidic techniques developed by the research group. We successfully reproduced blood capillary constrictions in a microfluidic device and analysed the deformation and recovery induced by the movement at the narrow space. The device will bring further insights for the understanding of cancer metastasis at single cell resolution.
  • シングルセル分解計測へ向けた細胞空間分画技術の創出
    科学技術振興機構：戦略的創造研究推進経費 さきがけ
    Date (from‐to) : 2014/10 -2018/03 
    Author : 寺尾 京平
  • High-density packaging of nano-devices using DNA highwires as scaffolds
    Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research Grant-in-Aid for Challenging Exploratory Research
    Date (from‐to) : 2015/04 -2017/03 
    Author : TERAO Kyohei
     
    We propose a packaging technology using DNA molecules as scaffolds for realizing high-density and precise arrangement of DNA nano-devices. Single DNA molecules are extended and immobilized between micro-electrodes to form "DNA highwires". In this project, we focused on a DNA manipulation technique under a fluorescence microscope for forming DNA highwires. We successfully manipulated single DNA molecules using two microstructures driven by two laser beams, where we handled them like ‘chopsticks’. We evaluated the dimensions and the shapes of microstructures, intended for holding single DNA molecules between them efficiently. We have found that the geometry of the structure is dominant parameter for effective handling of single DNA molecules. This manipulation technique allows the imaging of single DNA molecules with its intact state, which will lead to fabrication of DNA nanosystems.
  • Development of molecular wiring using giant DNA for the integration of micro and nano electronics
    Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research Grant-in-Aid for Challenging Exploratory Research
    Date (from‐to) : 2013/04 -2015/03 
    Author : TERAO Kyohei
     
    This project aims at the development of the technique to connect DNA nanodevices to micron-size devices, including MEMS or IC, on a single chip using giant DNA molecules as molecular wires, which have the size of 2 nm in width and over 100 micrometers in length. For the demonstration of the DNA molecular wiring, we fabricated the micropillar electrodes covered with gold on a glass substrate, on which a DNA wire is immobilized and connected electrically. The side walls of the pillars were successfully covered with gold, which are also used for chemical modification to improve the adhesion between DNA and the pillars. For the manipulation of each single DNA molecules, we developed optically-driven microstructures and evaluated their characteristics. We demonstrated the extension of single yeast chromosomal DNA molecules of Mbp size by catching them between 2 optically-driven microstructures and translocating them in aqueous situation.
  • Construction of chromosome fiber analysis platform using MEMS technology
    Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B)
    Date (from‐to) : 2011/04 -2014/03 
    Author : SUZUKI Takaaki; TERAO Kyohei
     
    In this study, we propose a simple observation method of the shape and molecular orientation of the chromosomes extracted from cells. The proposed technique is composed of total preparation technique such as cell immobilization, chromosomes extraction, stretching, suspension and analysis using a disposable microchip controlled by centrifugal force only. It is experimentally confirmed that the chip having two kinds of microstructures arranged concentrically on a chip immobilizes cells and stretches chromosomes extracted from the immobilized cells for a sample-to-analysis system in clinical diagnosis.
  • Development of optically-driven tool for nano-bio processing and its applications in molecular dissection of genomic DNA
    Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research Grant-in-Aid for Young Scientists (B)
    Date (from‐to) : 2011 -2012 
    Author : TERAO Kyohei; OANA Hidehiro; OOHIRA Fumikazu
     
    In this research project, we developed a novel nano/micro-fabricated tool for processing single biomolecule for the application in the research field of genome analysis. The technique for fabricating nano/micro structures was developed, which enables us to control the visibility of the structures under a fluorescence microscope. Their characteristics including the yield of fabrication and the trapping force were evaluated. We also verified the immobilization of proteins on their surface by surface plasmon resonance sensing. The results suggest the successful protein immobilization and the functionalization for a protein-modified nano/micro tool.

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