Takao Hidekuni

Researcher Information

Degree

• (BLANK)（Toyohashi University of Technology）
• B.E.（Toyohashi University of Technology）
• M.E.（Toyohashi University of Technology）

J-Global ID

• 200901081255139507

Research Interests

• 集積回路   センサ   マイクロデバイス   Integrated Circuit   Sensor   Micro Device   

Research Areas

• Manufacturing technology (mechanical, electrical/electronic, chemical engineering) / Measurement engineering
• Manufacturing technology (mechanical, electrical/electronic, chemical engineering) / Electronic devices and equipment
• Informatics / Mechanics and mechatronics
• Informatics / Robotics and intelligent systems
• Nanotechnology/Materials / Nano/micro-systems
• Nanotechnology/Materials / Nanomaterials

Academic & Professional Experience

• 2018 - Today  香川大学創造工学部教授
• 2014 - Today  香川大学 微細構造デバイス統合研究センターセンター長
• 2014 - 2018/03  香川大学 工学部, 教授
• 2013 - 2014  Kagawa UniversityFaculty of Engineering
• 2009 - 2014  Kagawa UniversityNano-Micro Structure Device Integrated Research Center
• 2009 - 2013  Kagawa UniversityNano-Micro Structure Device Integrated Research Center
• 2005 - 2009  Toyohashi University of TechnologyIntelligent Sensing System Research Center
• 2009  Toyohashi University of TechnologyFaculty of Engineering, Department of Electrical and Electronic Engineering
• 1999 - 2005  Toyohashi University of TechnologyFaculty of Engineering, Department of Electrical and Electronic Engineering
• 1998 - 1999  日本学術振興会, 特別研究員（PD）

Education

• 1995/04 - 1998/03  国立豊橋技術科学大学  工学研究科  電子・情報工学専攻
• 1993/04 - 1995/03  国立豊橋技術科学大学  工学研究科  電気・電子工学専攻
• 1991/04 - 1993/03  国立豊橋技術科学大学  工学部  電気・電子工学課程
• 1986/04 - 1991/03  国立高松工業高等専門学校  電気工学科

Association Memberships

• 電気学会   日本機械学会   

Published Papers

• Compartmentalization Device of Microenvironment for Analyzing iPSCs Differentiation

  Daiki Fukai; Taro Toyoda; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao

  IEEJ Transactions on Sensors and Micromachines Institute of Electrical Engineers of Japan (IEE Japan) 144 (7) 164 - 169 1341-8939 2024/07
• Neural-Network-Based Tactile Perception System Using Ultrahigh-Resolution Tactile Sensor

  Yusaku Maeda; Kei Tanimoto; Kenichi Sasayama; Hidekuni Takao

  IEEE Transactions on Haptics 16 (4) 504 - 510 1939-1412 2023/10
• Optically driven microtools with an antibody‐immobilised surface for on‐site cell assembly

  Shuntaro Mori; Takumi Ito; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao

  IET Nanobiotechnology Institution of Engineering and Technology (IET) 1751-8741 2023/01
• Fabrication of Structural-Color Based Force Sensor with Biocompatibility for Endoscopic surgery

  Yusaku Maeda; Masato Sagara; Hidekuni Takao

  Proceedings of IEEE Sensors 1930-0395 2023
• The First Hand-Held Touch Feeling Measurement System Integrated with Force Sensing Mechanism

  Satoshi Hisayasu; Takaya Ohishi; Yusaku Maeda; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao

  Proceedings of IEEE Sensors 1930-0395 2023
• Fabrication of Structural-Color Based Force Sensor with Biocompatibility for Endoscopic surgery.

  Yusaku Maeda; Masato Sagara; Hidekuni Takao

  SENSORS 1 - 4 2023
• Novel Handheld Hair Texture-Scanner Capable of Acquiring Delicate Haptic Changes in Human Hair.

  Masahito Komatsubara; Gakuto Tanaka; Satoshi Hisayasu; Takaya Ohishi; Yusaku Maeda; Hirotoshi Oikaze; Yasunori Matsui; Hidekuni Takao

  SENSORS 1 - 4 2023
• The First Hand-Held Touch Feeling Measurement System Integrated with Force Sensing Mechanism.

  Satoshi Hisayasu; Takaya Ohishi; Yusaku Maeda; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao

  SENSORS 1 - 4 2023
• Microfluidic device for differentiation induction of iPS cells derived embryoid bodies with local chemical stimulation

  Naoto Kusunoki; Shuhei Konagaya; Mitsunori Nishida; Shigehiro Sato; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao

  Electronics and Communications in Japan 106 (1) 1942-9533 2023
• Pen-type pulse wave measurement system for detecting pathological changes in cardiac diseases

  Kosei Yamada; Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao

  Electronics and Communications in Japan 105 (3) 1942-9533 2022/09
• Pen-type Pulse Wave Measurement System for Detecting Pathological Changes in Cardiac Diseases

  Yamada Kosei; Watatani Kazuki; Terao Kyohei; Shimokawa Fusao; Takao Hidekuni

  IEEJ Transactions on Sensors and Micromachines The Institute of Electrical Engineers of Japan 142 (7) 160 - 165 1341-8939 2022/07 [Refereed]
  
• On-demand formation of heterogeneous gel fibers using two-dimensional micronozzle array

  Koki Takahashi; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao

  Microfluidics and Nanofluidics Springer Science and Business Media LLC 26 (2) 1613-4982 2022/02 [Refereed]
  
• 内視鏡環境における構造色式完全無線センサ

  前田祐作; 宅和宏樹; 中川智明; 森宏仁; 高尾英邦

  Medical Science Digest 48 (3) 46 - 49 2022/02 [Refereed]
  
• Highly sensitive flexible strain and temperature sensors using solution processed graphene palladium nanocomposite

  Suresh Nuthalapati; Vijay Shirhatti; Vaishakh Kedambaimoole; Veera Pandi N; Hidekuni Takao; M.M. Nayak; K. Rajanna

  Sensors and Actuators A: Physical Elsevier BV 334 113314 - 113314 0924-4247 2022/02 [Refereed]
  
• Development of a Minimally Invasive High-Resolution Tactile Sensor For Acquiring Delicate Haptic Changes in Hair

  Masahito Komatsubara; Tsubasa Nakashima; Kyohei Terao; Fusao Shimokawa; Yasunori Matsui; Hidekuni Takao

  2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) IEEE 2022-January 699 - 702 2160-1968 2022/01 [Refereed]
  
• 28-m W Fully Embedded AI Techniques with On-site Learning for Low-Power Handy Tactile Sensing System.

  Yuji Yano; Hisashi Iwamoto; Takuma Yoshimura; Yoshihiro Nishida; Tatsuya Mori; Kiyotaka Komoku; Hidekuni Takao; Kazutami Arimoto

  2022 International Symposium on VLSI Design, Automation and Test(VLSI-DAT) IEEE 1 - 4 2022
• Development of optical-driven nanoneedles using SU-8 nanofabrication

  Masahiko Harada; Hidekuni Takao; Fusao Simokawa; Kyohei Terao

  Electronics and Communications in Japan 105 (1) 1942-9533 2022 [Refereed]
  
• Flexible strain sensor with high sensitivity, fast response, and good sensing range for wearable applications

  Suresh Nuthalapati; Vaishakh Kedambaimoole; Vijay Shirhatti; Saurabh Kumar; Hidekuni Takao; M M Nayak; K Rajanna

  Nanotechnology IOP Publishing 32 (50) 505506 - 505506 0957-4484 2021/10 [Refereed]
  
• Quantitative Evaluation Method of NPPV Mask Fitting by the Application of Strap Load Measurement Technology

  Yoshie Asahara; Hidekuni Takao

  IEEJ Transactions on Sensors and Micromachines Institute of Electrical Engineers of Japan (IEE Japan) 141 (9) 312 - 320 1341-8939 2021/09 [Refereed]
  
• New Value Creation by Nano-Tactile Sensor Chip Exceeding our Fingertip Discrimination Ability

  Hidekuni Takao; Kazuki Watatani; Kazutami Arimoto

  2021 IEEE Hot Chips 33 Symposium (HCS),Online IEEE 2021/08 [Refereed]
  
• On-site processing of single chromosomal DNA molecules using optically driven microtools on a microfluidic workbench.

  Akihito Masuda; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao

  Scientific reports 11 (1) 7961 - 7961 2021/04 [Refereed]
  
• An Antenna-Shaped MEMS Tactile Sensor with Angle Detection Capability

  Hayahide Oka; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao

  2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) IEEE 2021-January 139 - 142 1084-6999 2021/01 [Refereed]
  
• Mems-Based “Multi-Tactile Scanner” With 100μm Spatial Resolution of Hardness

  Yoshihiro Nishida; Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao

  2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) IEEE 2021-January 693 - 696 1084-6999 2021/01 [Refereed]
  
• IN VITRO THREE-DIMENSIONAL MODEL OF CAPILLARY MICROCONSTRICTION FOR IMAGING CANCER CELL DYNAMICS

  Yoshihiro Shiraga; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao

  MicroTAS 2021 - 25th International Conference on Miniaturized Systems for Chemistry and Life Sciences 625 - 626 2021
• TWO-DIMENTIONAL MICROAPERTURE ARRAY FOR ON-DEMAND FORMATION OF HETEROGENEOUS GEL FIBERS

  Koki Takahashi; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao

  MicroTAS 2021 - 25th International Conference on Miniaturized Systems for Chemistry and Life Sciences 1245 - 1246 2021
• Single-Probe Heat-Pulse Microsensor for Water Transportation Measurement in Plant Shoots

  Fumiya Ino; Wataru Kameda; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa

  Proceedings of IEEE Sensors 2021-October 1930-0395 2021 [Refereed]
  
• Development of optical-driven nanoneedles using SU-8 nanofabrication

  Masahiko Harada; Hidekuni Takao; Fusao Simokawa; Kyohei Terao

  IEEJ Transactions on Sensors and Micromachines 141 (6) 173 - 178 1341-8939 2021 [Refereed]
  
• Microsensor Device for Minimally Invasive Measurement of Moisture Storage in Plants Shoots

  Fumiya Ino; Kazuma Ishida; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa

  Proceedings of IEEE Sensors 2020-October 1930-0395 2020/10 [Refereed]
  
• Capture and elongation of single chromosomal DNA molecules using optically-driven microchopsticks

  Ryo Inukai; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao

  Biomicrofluidics Vol.14, No.4 044114  2020/08 [Refereed]
  
• (Invited) Post-CMOS Compatible Silicon MEMS Nano-Tactile Sensor for Touch Feeling Discrimination of Materials

  Hidekuni Takao

  The Electrochemical Society Transactions Vol.97, No.5 pp.79-80  2020/04 [Refereed][Invited]
  
• A MEMS Tactile Sensor with Fingerprint-Like Array of Contactors for High Resolution Visualization of Surface Distribution of Tactile Information

  Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao

  Journal of Robotics and Mechatronics FUJI TECHNOLOGY PRESS LTD Vol.32, No. 2 (2) pp.305-314 - 314 0915-3942 2020/04 [Refereed]
  
• Stractural Color Based Tactile Sensor for Flexible Endoscopic Surgery to Detect Grab Stage and Organs Hardness

  Yusaku Maeda; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao

  The 33rd IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2020), Vancouver, Canada 2020-January pp.689-692 - 692 1084-6999 2020/01 [Refereed]
  
• MEMS-Based “Touch Feeling Scanner” for Quantitative Evaluation of Fingertip Sensation

  Yoshihiro Nishida; Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Kazutami Arimoto; Hidekuni Takao

  The 33rd IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2020), Vancouver, Canada 2020-January pp.984-987 - 987 1084-6999 2020/01 [Refereed]
  
• Highly Sensitive Silicon Slip Sensing Imager for Forceps Grippers Used under Low Friction Condition

  Kanako Ando; Takashi Yamamoto; Yusaku Maeda; Kyohei Terao; Fusao Shimokawa; Masao Fujiwara; Hidekuni Takao

  International Electron Devices Meeting(IEDM) 2019, San Francisco, USA 2019-December pp.IEDM19-422-IEDM19-425  0163-1918 2019/12 [Refereed]
  
• Time Series Classification Using Information of Multiple Dimensions

  Tomoya Takata; Yoko Uwate; Hidekuni Takao; Yoshifumi Nishio

  Nonlinear Maps and their applications 2019 (NOMA 2019), Palma, Spain pp.38-39  2019/10 [Refereed]
  
• Stainless Microfluidic Probe with 2D-Array Microappertures

  Shogo Kamiya; Koki Takahashi; Hidekuni Takao; Fusao Shimokawa; Kyohei; Terao

  The 23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS2019, Basel, Swizerland pp.1088-1089 - 1089 2019/10 [Refereed]
  
• Highly sensitive, scalable reduced graphene oxide with palladium nano-composite as strain sensor

  Suresh Nuthalapati; Vijay Shirhatti; Vaishakh Kedambaimoole; Nagarjuna Neella; M M Nayak; K Rajanna; Hidekuni Takao

  Nanotechnology Vol.31, No.3 035501  2019/10 [Refereed]
  
• New Phloem Sap Extraction and Storage Microdevice and Photosynthetic Products Analysis

  Hiroki Shikata; Kazuma Ishida; Akihito Ono; Kyohei Terao; Hidekuni Takao; Tsuyoshi Kobayashi; Fusao Shimokawa

  Proceedings of IEEE Sensors 2019, Montreal, Canada 2019-October 1930-0395 2019/10 [Refereed]
  
• Microsensor Device for Simultaneously Measuring Moisture Nutrient Substance Dynamics in Plants

  Kazuma Ishida; Hiroki Shikata; Kyohei Terao; Hidekuni Takao; Tsuyoshi Kobayashi; Ikuo Kataoka; Fusao Shimokawa

  Proceedings of IEEE Sensors 2019, Montreal, Canada 2019-October 1930-0395 2019/10 [Refereed]
  
• Parylene-C Coating on High Resolution MEMS Tactile Sensor for Protection of Measurement Surface

  Yuki Sakakihara; Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao

  Proceedings of IEEE Sensors 2019, Montreal, Canada 2019-October PAPER ID 1686  1930-0395 2019/10 [Refereed]
  
• Planar-type MEMS tactile sensor integrating micro-macro detection function of fingertip to evaluate surface touch sensation

  Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao

  Japanese Journal of Applied Physics 58 (9) pp.097002-1-097002-9  0021-4922 2019/08 [Refereed]
  
• A highly sensitive MEMS silicon-hair device reproducing the function of hair follicle

  Kohki Hamamoto; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao

  Electronics Communication in Japan pp.50-56  2019/08 [Refereed]
  
• A highly sensitive MEMS silicon-hair device reproducing the function of hair follicle

  濱本 晃輝; 寺尾 京平; 下川 房男; 高尾 英邦

  電気学会論文誌E 139 (7) pp.180-185  1341-8939 2019/07 [Refereed]
  
• Highly Sensitive Detection of Fine Electrostatic Attraction by Resonance-Driven Silicon-Hair

  Kohki Hamamoto; Yusaku Maeda; Kyohei Terao; Fusao Shimokawa; Fumikazu Oohira; Hidekuni Takao

  2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Berlin, Germany pp.1874-1877 - 1877 2019/06 [Refereed]
  
• A 0.1μM-Resoution Silicon Tactile Sensor with Precisely Designed Piezoresitve Sensing Structure

  Tsubasa Nakashima; Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao

  2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Berlin, Germany pp.1807-1810 - 1810 2019/06 [Refereed]
  
• A Highly Sensitive Planer Silicon-Hair Device Reproducing the Function of Human Hair Follicle

  Kohki Hamamoto; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao

  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Seoul, South Korea 2019-January pp.198-201 - 201 1084-6999 2019/01 [Refereed]
  
• A Monolithic Fingerprint-Like Tactile Sensor Array Realizaing High Resolution Imaging of Spatially Distributed Tactile Information

  Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao

  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Seoul, South Korea 2019-January pp.182-185 - 185 1084-6999 2019/01 [Refereed]
  
• Spatial dissection of biosamples using Si blade array device

  Taro Shiomi; Mamoru Hirafuji; Hiroki Ishiduka; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao

  22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences(MicroTAS) 2018, Kaohsiung, Taiwan 3 pp.1335-1338 - 1338 2018/11 [Refereed]
  
• Study of material surface shape detection model for MEMS tactile sensor by motion tracking

  Kiyotaka Komoku; Takuya Emi; Tomoyuki Yokogawa; Hitoshi Yamauchi; Yoichiro Sato; Kazutami Arimoto; Hidekuni Takao

  ICIIBMS 2017 - 2nd International Conference on Intelligent Informatics and Biomedical Sciences Institute of Electrical and Electronics Engineers Inc. 2018- 163 - 164 2018/11 [Refereed]
  
• Microscale sap dynamic sensor using heat pulse method

  Naoki Hara; Yuki Hara; Hiroki Ishizuka; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa

  Proceedings of the 31th International Microprocesses and Nanotechnology Conference (MNC 2018), Sapporo, Japan 16P-11-85  2018/11 [Refereed]
  
• Microscale xylem sap flow sensor facilitating the simultaneous measurement of flow velocity and direction

  Yuki Hara; Naoki Hara; Hiroki Ishizuka; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa

  Proceedings of the EUROSENSORS 2018 conference (EUROSENSORS 2018), Graz, Austria 141 - ID7169 2018/09 [Refereed]
  
• Wireless smart temperature sensor using pulse width modulation method

  Wang-Hoon Lee; Young-Tae Lee; Jong-Wan Kim; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  2007 70th ARFTG Microwave Measurement Conference: High Power RF Measurement Techniques, ARFTG 2007 Institute of Electrical and Electronics Engineers Inc. 1 - 4 2018/06
• Measurement of Touch Feeling on Hair Surface Using High Resolution Two-Axis MEMS Tactile Sensor

  Kota Nakamitsu; Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao

  Asia-Pacific Conference of Transducers and Micro-Nano Technology(APCOT2018), Hong Kong, 2 pages  2018/06 [Refereed]
  
• Extraction of “Real Friction Coefficient” Depending on Micro Surface Roughness Using High Resolution MEMS Tactile Sensor

  Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao

  Asia-Pacific Conference of Transducers and Micro-Nano Technology(APCOT2018), Hong Kong, 2pages  2018/06 [Refereed]
  
• Phloem-sap-dynamics sensor device for monitoring photosynthates transportation in plant shoots

  Yuya Yano; Akihito Ono; Kyohei Terao; Takaaki Suzuki; Hidekuni Takao; Tsuyoshi Kobayashi; Ikuo Kataoka; Fusao Shimokawa

  Japanese Journal of Applied Physics Vol.57, No.6 (6) 067001 - 067001 0021-4922 2018/06 [Refereed]
  
• Fully wireless pressure sensor based on endoscopy images

  Yusaku Maeda; Hirohito Mori; Tomoaki Nakagawa; Hidekuni Takao

  Japanese Journal of Applied Physics Japan Society of Applied Physics 57 (4) pp.04FC05-1-04FC05-5  1347-4065 2018/04 [Refereed]
  
• Fabrication of Xylem Sap Flow Sensor Microneedles for Extending its Applications

  T. Takahashi; Y. Hara; A. Ono; H. Ishizuka; K. Terao; H. Takao; F. Shimokawa

  Proceedings of the 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2018) PS2 - 235 2018/04 [Refereed]
  
• Pure Photosynthates Extraction Sensor Device with Highly Precise Phloem/Xylem Position Identification

  Akihito Ono; Akihito Yoneda; Hiroki Ishizuka; Kyohei Terao; Hidekuni Takao; Naoshi Takahashi; Tsuyoshi Kobayashi; Ikuo Kataoka; Fusao Shimokawa

  IEEE Sensors Journal 18 (4) 1739 - 1746 1530-437X 2018/02 [Refereed]
  
• Sense of touch in submicron region realized by two-axis tactile sensor with a needle-like contactor

  Tsubasa Nakashima; Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao

  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2018) 2018-January 870 - 873 1084-6999 2018/01 [Refereed]
  
• "Cell-like Sensor" Devices Directed to Ultra Low Invasive Implementation

  高尾英邦; 森宏仁; 前田祐作; 綿谷一輝; 寺尾京平; 下川房男; 前田光平; 香西亮吾

  電子情報通信学会論文誌 C Vol. J101-C (No. 1) 9 - 17 2018/01 [Refereed]
  
• 電気刺激と静電刺激を用いた触覚ディスプレイの製作

  廣津 卓磨; 加藤 邦拓; 下川 房男; 高尾 英邦; 寺尾 京平; 梶本 裕之; 石塚 裕己

  第18回計測自動制御学会システムインテグレーション部門講演会(CD-ROM) 18th 317 - 320 2017/12
• Evaluation of Multi-Electrode Effects on Electrovibration Tactile Stimulation

  Hiroki Ishizuka; Katsuyori Suzuki; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Hiroyuki Kajimoto

  Transactions of The Japan Institute of Electronics Packaging 10 E17-004-1  2017/12 [Refereed]
  
• Laser-Manipulated Microtool with Enzyme-Functionalized Surface for On Site Molecular Processing

  Akihito Masuda; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao

  Proceedings of 21th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS2017) 433 - 434 2017/11 [Refereed]
  
• Biological information (pH/EC) sensor device for quantitatively monitoring plant health conditions

  Ryosuke Izumi; Akihito Ono; Hiroki Ishizuka; Kyohei Terao; Hidekuni Takao; Tsuyoshi Kobayashi; Ikuo Kataoka; Fusao Shimokawa

  Proceedings of IEEE Sensors 2017-December 1 - 3 1930-0395 2017/10 [Refereed]
  
• The Fully Wireless Pressure Sensor Based on Endoscopic Image

  Yusaku Maeda; Hirohito Mori; Tomoaki Nakagawa; Hidekuni Takao

  Proc. of 2017 International Conference on Solid State Devices and Materials (SSDM2017) 371 - 372 2017/09 [Refereed]
  
• Development of a multi-electrode electrovibration tactile display with 1 mm resolution

  H. Ishizuka; K. Suzuki; K. Terao; H. Takao; F. Shimokawa; H. Kajimoto

  2017 IEEE World Haptics Conference, WHC 2017 659 - 664 2017/07 [Refereed]
  
• Development of high resolution electrostatic tactile display

  H. Ishizuka; K. Suzuki; K. Terao; H. Takao; F. Shimokawa

  2017 International Conference on Electronics Packaging, ICEP 2017 484 - 486 2017/06 [Refereed]
  
• 1MPa resistant MEMS slide valve driven by an external actuator for high power fluidic applications

  Hidekuni Takao; Satoshi Takemasa; Kyohei Terao; Fusao Shimokawa

  TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems 1364 - 1367 2017/06 [Refereed]
  
• HIGHLY PURE PHLOEM-SAP-EXTRACTION SENSOR DEVICE FOR DIRECT COMPONENT ANALYSIS OF NUTRITION IN PLANT SHOOTS

  Akihito Ono; Ryosuke Izumi; Hiroki Ishizuka; Kyohei Terao; Hidekuni Takao; Ryuji Ichihashi; Tsuyoshi Kobayashi; Ikuo Kataoka; Fusao Shimokawa

  2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) IEEE pp1604 - 1607 2017/06 [Refereed]
  
• Development of microfluidic device for imaging paracrine communication

  Yuichi Tao; Kenta Fukuda; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao

  IEEJ Transactions on Sensors and Micromachines 137 (5) 128 - 133 1341-8939 2017/05 [Refereed]
  
• Integrated pressure and temperature sensor with high immunity against external disturbance for flexible endoscope operation

  Yusaku Maeda; Kohei Maeda; Hideki Kobara; Hirohito Mori; Hidekuni Takao

  Japanese Journal of Applied Physics Institute of Physics 56 (4S) 04CF09-1-6  0021-4922 2017/03 [Refereed]
  
• A "MICRO-MACRO" INTEGRATED PLANAR MEMS TACTILE SENSOR FOR PRECISE MODELING AND MEASUREMENT OF FINGERTIP SENSATION

  Kazuki Watatani; Ryogo Kozai; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao

  30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017) IEEE 223 - 226 1084-6999 2017/01 [Refereed]
  
• On-Site Manipulation of Single DNA Molecules Using Optically-Driven Microchopsticks

  Ryo Inukai; Hidekuni Takao; Fusao Shimokawa; Kyohei Terao

  Proceedings of 30th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2017) IEEE 585 - 588 1084-6999 2017/01 [Refereed]
  
• Nanoblade Array for Spatial Dissection of Single Cellls and Tissues

  D. Kagawa; M. Kusumoto; Y. Takemura; H. Takao; F. Shimokawa; K. Terao

  Proceedings of 30th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2017) IEEE 577 - 580 1084-6999 2017/01 [Refereed]
  
• Microscale phloem sap dynamics measurement sensor device for monitoring the transport of nutritive substances in plants

  Akihito Ono; Yuya Yano; Kyohei Terao; Hidekuni Takao; Riji Ichihashi; Tsuyoshi Kobayashi; Ikuo Kataoka; Fusao Shimokawa

  Proceedings of the 29th IEEE Sensors Conference (IEEE Sensors 2016) 2016/11 [Refereed]
  
• Microscale Phloem Sap Extraction Sensor Device for Measuring Biological Information in Plant Branches

  Akihito Ono; Akihito Yoneda; Yuichi Tao; Kyohei Terao; Hidekuni Takao; Ryuji Ichihashi; Tsuyoshi Kobayashi; Ikuo Kataoka; Fusao Shimokawa

  2016 IEEE SENSORS IEEE 4pages  1930-0395 2016/10 [Refereed]
  
• 3D(2) Processing Architecture - High Reliability and Low Power Computing for Novel Nano Tactile Sensor Array -

  Kiyotaka Komoku; Kazutami Arimoto; Tomoyuki Yokogawa; Hitoshi Yamauchi; Yoichiro Sato; Hidekuni Takao

  13th International SoC Design Conference (ISOCC 2016) IEEE 202 - 203 2163-9612 2016/10 [Refereed]
  
• A Two-Axis Tactile Sensor with 1 mu m Diameter Tip of Contactor for Detection Ability of Micro Region Surface Texture

  Kazuki Watatani; Ryogo Kozai; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao

  2016 IEEE SENSORS IEEE 616 - 618 1930-0395 2016/10 [Refereed]
  
• Development of 2V Sensitivity Static Electricity Sensor with Vertically Mounted Large Electrode

  Atsuya Iima; Yusaku Oka; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao

  Proceedings of the 29th IEEE Sensors Conference (IEEE Sensors 2016) IEEE 1168 - 1170 1930-0395 2016/10 [Refereed]
  
• Intraluminal Pressure and Temperature Sensor Aimed at Application to Flexible Endoscope Operation

  Yusaku Maeda; Kohei Maeda; Hideki Kobara; Hirohito Mori; Hidekuni Takao

  2016 IEEE SENSORS IEEE 1114 - 1116 1930-0395 2016/10 [Refereed]
  
• Fabrication and Packaging of an Integrated Pressure and Temperature Sensor with High Immunity Against External Disturbance Under Flexible Endoscopic Operation

  Yusaku Maeda; Kohei Maeda; Hideki Kobara; Hirohito Mori; Hidekuni Takao

  Proc. of 2016 International Conference on Solid State Devices and Materials (SSDM2016) 391 - 392 2016/09 [Refereed]
  
• Development of a local light stimulation device integrated with micro electrode array

  Ueno Hidetaka; Komai Shoji; Terao Kyohei; Takao Hidekuni; Shimokawa Fusao; Kotera Hidetoshi; Suzuki Takaaki

  MECHANICAL ENGINEERING JOURNAL JAPAN SOC MECHANICAL ENGINEERS 3 (4) 15-00570 - 15-00570 2187-9745 2016/08 [Refereed]
  
• High resolution silicon MEMS tactile sensors for measurement of fingertip sensation

  Hidekuni Takao

  IMFEDK 2016 - 2016 International Meeting for Future of Electron Devices, Kansai Institute of Electrical and Electronics Engineers Inc. 2016/07 [Refereed]
  
• Development of a two-dimensional scanning micro-mirror utilizing magnetic polymer composite

  Junya Suzuki; Yoshiyuki Onishi; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Hayato Miyagawa; Takahiro Namazu; Takaaki Suzuki

  Japanese Journal of Applied Physics Japan Society of Applied Physics 55 (6S1) 06GP01 - 06GP01 1347-4065 2016/06 [Refereed]
  
• Embedded Sensor Packaging on Endoscopy Hood for Real Time Monitoring During Natural Orfice Translumenal Endoscopic Surgery

  Tomoaki Nakagawa; Yusaku Maeda; Kohei Maeda; Kazuki Watatani; Hideki Kobara; Hirohito Mori; Hidekuni Takao

  Proceedings of Asia-Pacific Conference of Transducers and Micro-Nano Technology 2016 259 - 260 2016/06 [Refereed]
  
• Measurement of Surface Texture on Cloth Samples Using a Highly Sensitive Two-Axis Tactile Sensor

  Kazuki Watatani; Ryogo Kozai; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao

  Proceedings of Asia-Pacific Conference of Transducers and Micro-Nano Technology 2016 61 - 62 2016/06 [Refereed]
  
• Characterisation of optically driven microstructures for manipulating single DNA molecules under a fluorescence microscope

  Kyohei Terao; Chihiro Masuda; Ryo Inukai; Murat Gel; Hidehiro Oana; Masao Washizu; Takaaki Suzuki; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira

  IET Nanobiotechnology INST ENGINEERING TECHNOLOGY-IET 10 (3) 124 - 128 1751-8741 2016/06 [Refereed]
  
• A MEMS hardness sensor with reduced contact force dependence based on the reference plane concept aimed for medical applications

  Yusaku Maeda; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao

  JAPANESE JOURNAL OF APPLIED PHYSICS IOP PUBLISHING LTD 55 (4S) 04EF11-1 - 04EF11-6 0021-4922 2016/03 [Refereed]
  
• Development of a Compact Cell Trapping Device Integrated with Fluid Handling Components

  Furuya Naoki; SHIMAGAMI Takuya; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; AKIMITSU Kazuya; SUZUKI Takaaki

  The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP The Japan Society of Mechanical Engineers 2016 E-2-3  2016
• Development of magnetically driven microvalve using photosensitive SU-8/Fe composite

  Takaaki Suzuki; Junya Suzuki; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Hayato Miyagawa

  International Journal of Applied Electromagnetics and Mechanics IOS Press 52 (3-4) 1585 - 1590 1383-5416 2016/01 [Refereed]
  
• Micro-scale sap flow sensor fabricated using MEMS technology

  Makoto Ochi; Yuya Yano; Kyouhei Terao; Takaaki Suzuki; Hidekuni Takao; Tsuyoshi Kobayashi; Ikuo Kataoka; Fusao Shimokawa

  Japanese Journal of Ecology Tohoku University 66 (2) 465 - 475 0021-5007 2016 [Refereed]
  
• A Novel Optical Self-Alignment Technology for Realization of Compact Optical Multi-Gas Sensor System

  Y. Yamamoto; R. Shinozaki; I. Asahi; H. Ninomiya; F. Shimokawa; H. Takao

  Proceedings of the 28th IEEE Sensors Conference (IEEE Sensors 2015) IEEE 1988 - 1991 1930-0395 2015/11 [Refereed]
  
• A Pressure/Temperature Sensor Embedded in an Endoscopy Hood for Intraluminal Monitoring During Flexible Endoscopic Operation

  Yusaku Maeda; Kohei Maeda; Hideki Kobara; Hirohito Mori; Hidekuni Takao

  Proceedings of the 28th IEEE Sensors Conference (IEEE Sensors 2015) IEEE 779 - 782 1930-0395 2015/11 [Refereed]
  
• Reduction of Contact Force Dependence on the MEMS Hardness Sensor Using Reference Plane to Detect Human Body Hardness

  Yusaku Maeda; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao

  Proceedings of the 28th IEEE Sensors Conference (IEEE Sensors 2015) IEEE 267 - 270 1930-0395 2015/11 [Refereed]
  
• Development of magnetically driven micro valve using SU-8/Fe composite

  Junya Suzuki; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Takaaki Suzuki

  Journal of the Japan Society of Applied Electromagnetics and Mechanics The Japan Society of Applied Electromagnetics and Mechanics 23 (2) 407 - 413 0919-4452 2015/09
• Design and Characteristics of a MEMS Human Body Hardness Sensor Aimed to Diagnosis of Lesion Size

  Yusaku Maeda; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao

  Proceedings of 2015 International Conference on Solid State Devices and Materials (SSDM2015) 164 - 165 2015/09 [Refereed]
  
• A Rotational MEMS Diffraction Grating for Realization of Micro-Sized Spectroscope System

  Y. Yamamoto; R. Shinozaki; Y. Oka; I. Asahi; H. Ninomiya; F. Shimokawa; F. Oohira; H. Takao

  Digest of Tech. Papers of the 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2015) IEEE 208 - 211 2015/06 [Refereed]
  
• Generation of Low-Temperature Atmospheric Pressure Plasma-Jet Petternable Array at A 320µm Pitch Channel Aarray

  Takuya Ihara; Hidetaka Yamasaki; Kyohei Terao; Takaaki Suzuki; Fusao Shimokawa; Hidekuni Takao

  Digest of Tech. Papers of the 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2015) IEEE 1838 - 1841 2015/06 [Refereed]
  
• A New Extraction Method of Information for Quantification of The Sense of Touch Using A Novel Two-Axis Tactile Sensor

  Ryogo Kozai; Kyohei Terao; Takaaki Suzuki; Fusao Shimokawa; Hidekuni Takao

  Digest of Tech. Papers of the 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2015) IEEE 1191 - 1194 2015/06 [Refereed]
  
• Fast protein detection in raw blood by size-exclusion SPR sensing

  Kyohei Terao; Shin-ichi Hiramatsu; Takaaki Suzuki; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira

  ANALYTICAL METHODS ROYAL SOC CHEMISTRY 7 (16) 6483 - 6488 1759-9660 2015 [Refereed]
  
• Precise tumor size measurement under constant pressure by novel real-time micro-electro-mechanical-system hood for proper treatment (with videos)

  Hirohito Mori; Hidekuni Takao; Hideki Kobara; Noriko Nishiyama; Shintaro Fujihara; Tae Matsunaga; Maki Ayaki; Tsutomu Masaki

  Surgical Endoscopy -And Other Interventional Techniques SPRINGER 29 (1) 212 - 219 0930-2794 2015/01 [Refereed]
  
• A Tactile Sensor with The Reference Plane for Detection Abilities of Frictional Force and Human Body Hardness Aimed to Medical Applications

  Yusaku Maeda; Kyohei Terao; Takaaki Suzuki; Fusao Shimokawa; Hidekuni Takao

  Proceedings of 28th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2015) IEEE 253 - 256 1084-6999 2015/01 [Refereed]
  
• A Novel Configuration of Tactile Sensor to Acquire The Correlation between Surface Roughness and Frictional Force

  Ryogo Kozai; Kyohei Terao; Takaaki Suzuki; Fusao Shimokawa; Hidekuni Takao

  Proceedings of 28th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2015) IEEE 245 - 248 1084-6999 2015/01 [Refereed]
  
• Development of an electromagnetic micropump with photosensitive magnetic nanocomposite

  Ueda Yusaku; Nakahara Tasuku; Terao Kyohei; Takao Hidekuni; Simokawa Fusao; Oohira Fumikazu; Kotera Hidetoshi; Suzuki Takaaki

  Journal of the Japan Society of Applied Electromagnetics and Mechanics The Japan Society of Applied Electromagnetics and Mechanics 22 (2) 202 - 207 0919-4452 2014/10
• Silicon Integrated Tactile Sensor Arrays Based On Cmos Compatible Mems Fabrication Technology

  Hidekuni Takao

  Proceedings of Seventh ISSS International Conference on Smart Materials Structures and Systems ISSS 2014 Invited4A (7pages in USB)  2014/07 [Refereed]
  
• Microscale Phloem Flow Sensor Fabricated Using MEMS Technology For Measuring Biological Information of Plant Branches

  矢野裕也; 越智誠; 寺尾京平; 鈴木孝明; 高尾英邦; 下川房男; 小林剛; 片岡郁雄

  NANOSciTech2014 & IC-NET2014 2014/03 [Refereed]
  
• Application of Silicon on Nothing Structure for Developing a Novel Capacitive Absolute Pressure Sensor

  Xiuchun Hao; Sinya Tanaka; Atsuhiko Masuda; Jun Nakamura; Koichi Sudoh; Kazusuke Maenaka; Hidekuni Takao; Kohei Higuchi

  IEEE SENSORS JOURNAL IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC 14 (3) 808 - 815 1530-437X 2014/03 [Refereed]
  
• Patternable Atmospheric-Pressure Plasma Jet Array Generated by an Integrated Microfluidic Device

  高尾英邦

  6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2014) 2pages in CD-ROM  2014/03 [Refereed]
  
• Dual-axis hybrid-MEMS mirror having Si and polymer hinges for large-area 2D raster scan

  Hirofumi Yamashita; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Takaaki Suzuki

  2014 International Conference on Optical MEMS and Nanophotonics(OMN) IEEE 167 - 168 2160-5033 2014 [Refereed]
  
• An analytical thermal-structural model of a gas-sealed capacitive pressure sensor with a mechanical temperature compensation structure

  Xiuchun Hao; Kazusuke Maenaka; Hidekuni Takao; Kohei Higuchi

  SENSORS AND ACTUATORS A-PHYSICAL ELSEVIER SCIENCE SA 205 92 - 102 0924-4247 2014/01 [Refereed]
  
• Assist-Free Assembly Technique of Standing Optical Devices on Soft Spring Actuator Stages

  Yusaku Oka; Ryosuke Shinozaki; Kyohei Terao; Takaaki Suzuki; Fusao Shimokawa; Fumikazu Oohira; Hidekuni Takao

  Proceedings of 27th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2014) IEEE 433 - 436 2014/01 [Refereed]
  
• Integrated Silicon MEMS Technology and Novel Functional Sensor Devices

  高尾英邦

  Proceedings of 26th International Microprocesses and Nanotechnology Conference (MNC2013) pp. 8B-8-1 (2pages)  2013/11 [Refereed]
  
• Compact optical multi-gas sensors using micromachining technology [II]-characteristics of raman scattering gas sensor and ultraviolet absorption spectroscopy gas sensor

  Ippei Asahi; Sachiyo Sugimoto; Hideki Ninomiya; Fusao Shimokawa; Hidekuni Takao; Fumikazu Oohira; Yasuyuki Tsutsui; Hiroki Hayashi; Takashi Konno

  IEEJ Transactions on Sensors and Micromachines 133 (9) 260 - 266 1341-8939 2013/09 [Refereed]
  
• Integration of angular rate sensor on large deflection polymer-MEMS mirror

  Hirofumi Yamashita; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Takaaki Suzuki

  Proceedings of IEEE Optical MEMS & Nanophotonics Conference (OMN2013) 69 - 70 2160-5033 2013/08 [Refereed]
  
• Dual-axis polymer-MEMS mirror made of Photosensitive Nanocomposite

  Junya Suzuki; Takuya Miura; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Takahiro Namazu; Fumikazu Oohira; Takaaki Suzuki

  International Conference on Optical MEMS and Nanophotonics 101 - 102 2160-5033 2013/08 [Refereed]
  
• Micro Sap Flow Sensor Using MEMS Technology for Application to Biological Information Measurement of Plants

  越智誠; 鈴木孝明; 高尾英邦; 下川房男; 小林剛; 片岡郁雄

  Third International Conference on Plant Vascular Biology 2013/07 [Refereed]
  
• Compact optical multi-gas sensors using micromachining technology ［1］

  伊藤将寛; 武田知也; 鈴木孝明; 高尾英邦; 大平文和; 下川房男

  電気学会論文誌(E) 133 (6) 237 - 242 2013/06 [Refereed]
  
• A Post-Complementary Metal Oxide Semiconductor Formation Process of High-Adhesiveness SU-8 Structures for Reliable Fabrication of Integrated Microelectromechanical System Sensors

  Yusaku Maeda; Kyohei Terao; Takaaki Suzuki; Fusao Shimokawa; Hidekuni Takao

  Japanese Journal of Applied Physics JAPAN SOC APPLIED PHYSICS 52 (6S) pp. 06GL18-06GL18-5  0021-4922 2013/06 [Refereed]
  
• Development of a High-Throughput DNA Fiber Analysis Device Using MEMS Technology

  Suzuki Takaaki; Terao Kyohei; Suzuki Hiroyuki; Nitta Yuki; Takao Hidekuni; Shimokawa Fusao; Oohira Fumikazu; Hiramaru Daisuke; Kotera Hidetoshi

  IEEJ Transactions on Sensors and Micromachines The Institute of Electrical Engineers of Japan 133 (5) 139 - 146 1341-8939 2013/05 [Refereed]
  
• Development of High Accuracy Spray Coating Method using Multi-layer Coat

  Akamatsu Mikio; Terao Kyohei; Takao Hidekuni; Simokawa Fusao; Oohira Fumikazu; Suzuki Takaaki

  IEEJ Transactions on Sensors and Micromachines The Institute of Electrical Engineers of Japan 133 (5) 170 - 176 1341-8939 2013/05 [Refereed]
  
• ASIC for Monitoring of Human Motion

  Takao Hidekuni; Maenaka Kazusuke; Higuchi Kohei; Nizhnik Oleg; Vinluan Olinver; Maksudi Ucu; Bartley Travis

  BME Japanese Society for Medical and Biological Engineering 51 M - 157-M-157 1347-443X 2013 [Refereed]
  
• Heart Rate Extraction Hardware from ECG Data

  Nii Manabu; Tanaka Tomoya; Matsumoto Yuki; Bartley Travis; Maksudi Ucu; Nizhnik Oleg; Sonoda Koji; Hidekuni Takao; Maenaka Kazusuke; Kohei Higuchi

  BME Japanese Society for Medical and Biological Engineering 51 M - 159-M-159 1347-443X 2013 [Refereed]
  
• Compact optical multi-gas sensors using micromachining technology [ I ] -Fabrication of high-precision micro-optical bench using ultra-thick film resin

  Masahiro Ito; Tomoya Takeda; Takaaki Suzuki; Hidekuni Takao; Fumikazu Oohira; Fusao Shimokawa; Yasuyuki Tsutsui; Hiroki Hayashi; Takashi Konno; Ippei Asahi; Sachiyo Sugimoto; Hideki Ninomiya

  IEEJ Transactions on Sensors and Micromachines 133 (6) 9 - 242 1341-8939 2013 [Refereed]
  
• Development of a high-throughput DNA fiber analysis device using MEMS technology

  Takaaki Suzuki; Kyohei Terao; Hiroyuki Suzuki; Yuki Nitta; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Daisuke Hiramaru; Hidetoshi Kotera

  IEEJ Transactions on Sensors and Micromachines 133 (5) 3 - 146 1341-8939 2013 [Refereed]
  
• Development of high accuracy spray coating method using multi-layer coat

  Mikio Akamatsu; Kyohei Terao; Hidekuni Takao; Fusao Simokawa; Fumikazu Oohira; Takaaki Suzuki

  IEEJ Transactions on Sensors and Micromachines 133 (5) 7 - 176 1341-8939 2013 [Refereed]
  
• Patternable atmospheric-pressure plasma jets with gas discharge in microfluidic channel array

  Hidetaka Yamasaki; Kyohei Terao; Takaaki Suzuki; Fusao Simokawa; Hidekuni Takao

  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 205 - 208 1084-6999 2013/01 [Refereed]
  
• A novel capacitive absolute pressure sensor using SON technology

  Xiuchun Hao; Atsuhiko Masuda; Kohei Higuchi; Hidekuni Takao; Sinya Tanaka; Kazusuke. Maenaka; Jun Nakamura; K. Sudoh

  Proceedings of IEEE Sensors 1 - 4 2012/12
• Signal enhancement of protein binding by electrodeposited gold nanostructures for applications in Kretschmann-type SPR sensors

  Noriko Nagase; Kyohei Terao; Nobumitsu Miyanishi; Kazunori Tamai; Noboru Uchiyama; Takaaki Suzuki; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira

  Analyst 137 (21) 5034 - 5040 0003-2654 2012/11 [Refereed]
  
• Large Area 3D Microfabrication Technique by Multidirectional Photolithography for A Chromosome Extension Chip

  Yuki Nitta; Hiroyuki Suzuki; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Takaaki Suzuki

  Proceedings of The 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS2012) 1822 - 1824 2012/11 [Refereed]
  
• DNA Fiber Preparation Technique on a Chip for Clinical Diagnosis

  Takaaki Suzuki; Kyohei Terao; Hiroyuki Suzuki; Yuki Nitta; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Daisuke Hiramaru; Hidetoshi Kotera

  Proceedings of The 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS2012) 272 - 274 2012/11 [Refereed]
  
• Development of a Universal Integrated Micro Cell Culture System

  Masatoshi Inoue; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Takaaki Suzuki; Atsuhito Okonogi; Hidetoshi Kotera

  The 6th International Conference on Nano/Molecular Medicine and Engineering (IEEE NANOMED2012) IEEE 70 - 73 2159-6964 2012/11 [Refereed]
  
• Fast whole blood testing for detecting biomarkers by size-exclusion SPR sensing

  Kyohei Terao; Shinichi Hiramatsu; Kazunori Shimizu; Nobumitsu Miyanishi; Takaaki Suzuki; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira

  Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012 186 - 188 2012/10 [Refereed]
  
• A Novel Integrated Tactile Image Sensor for Detection of Surface Friction and Hardness Using the Reference Plane Structure

  Yusaku Maeda; Kyohei Terao; Takaaki Suzuki; Fusao Shimokawa; Hidekuni Takao

  Proceedings of 25th International Microprocesses and Nanotechnology Conference (MNC2012) IEEE 40 - 43 1930-0395 2012/10 [Refereed]
  
• A Post-CMOS Process of High Adhesion SU-8 Structure to Apply to Sensor Device

  Yusaku Maeda; Kyohei Terao; Takaaki Suzuki; Fusao Shimokawa; Hidekuni Takao

  Proceedings of 25th International Microprocesses and Nanotechnology Conference (MNC2012) 2012/10 [Refereed]
  
• Optically-Driven Microstructures for Manipulating Single DNA Molecule under Fluorescence Microscop

  Chihiro Masuda; Kyohei Terao; Hidehiro Oana; Masao Washizu; Takaaki Suzuki; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira

  Proceedings of 38th International Conference on Micro and Nano Engineering (MNE2012) P409-355(2pages in CD-ROM)  2012/09 [Refereed]
  
• CMOS RF Transmitter Using Pulsewidth Modulation for Wireless Smart Sensors

  Wanghoon Lee; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  IEEE Transactions on Components Packaging and Manufacturing Technology IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC 2 (9) 1501 - 1509 2156-3950 2012/09 [Refereed]
  
• Cell culture on MEMS materials in microenvironment limited by a physical condition

  M. Inoue; A. Okonogi; K. Terao; H. Takao; F. Shimokawa; F. Oohira; H. Kotera; T. Suzuki

  MICRO & NANO LETTERS INST ENGINEERING TECHNOLOGY-IET 7 (8) 725 - 728 1750-0443 2012/08 [Refereed]
  
• Design and Fabrication of Electrostatically Driven In-Plane MEMS Rotational Mirror with Electrostatic Rotary Encoder

  Ryosuke Shinozaki; Fumikazu Oohira; Kyohei Terao; Takaaki Suzuki; Fusao Simokawa; Hidekuni Takao

  Proceedings of 2012 International Conference on Optical MEMS & Nanophotonics IEEE 107 - 108 2012/08 [Refereed]
  
• Vertical comb-drive MEMS mirror with sensing function for phase-shift device

  Kentaro Oda; Hidekuni Takao; Kyohei Terao; Takaaki Suzuki; Fusao Shimokawa; Ichirou Ishimaru; Fumikazu Oohira

  Sensors and Actuators, A: Physical 181 61 - 69 0924-4247 2012/07 [Refereed]
  
• Evaluation of Highly Sensitive C/V Converter with an Inverter for CMOS/MEMS Integration

  Hidekuni Takao; Ryo Kodama; Hajime Miyao; Makoto Ishida

  Proceedings of World Automation Congress 2012 (WAC2012) IEEE 1 - 4 2012/06 [Refereed]
  
• An Annular Mechanical Temperature Compensation Structure for Gas-Sealed Capacitive Pressure Sensor

  Xiuchun Hao; Yonggang Jiang; Hidekuni Takao; Kazusuke Maenaka; Kohei Higuchi

  SENSORS MDPI 12 (6) 8026 - 8038 1424-8220 2012/06 [Refereed]
  
• Size-exclusion SPR sensor chip: Application to detection of aggregation and disaggregation of biological particles

  Kyohei Terao; Kazunori Shimizu; Nobumitsu Miyanishi; Seiko Shimamoto; Takaaki Suzuki; Hidekuni Takao; Fumikazu Oohira

  Analyst 137 (9) 2192 - 2198 0003-2654 2012/05 [Refereed]
  
• Cell Culture on MEMS Materials in Micro-Environment Limited by a Physical Condition

  Masatoshi Inoue; Atsuhito Okonogi; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Hidetoshi Kotera; Takaaki Suzuki

  Technical digest of 7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS2012) Institution of Engineering and Technology (IET) 7 (8) W4A-3 - 725 1750-0443 2012/03 [Refereed]
  
• A Magnetic-Driven Membrane Made of Photosensitive Nanocomposite without Alignment Process

  T. Nakahara; Y. Hosokawa; K. Terao; H. Takao; F. Shimokawa; F. Oohira; H. Miyagawa; T. Namazu; H. Kotera; T. Suzuki

  Technical digest of 7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems [IEEE NEMS2012] W1B-4  2012/03 [Refereed]
  
• Improvement of Coating Uniformity for Thick Photoresist Using a Partial Spray Coat

  Mikio Akamatsu; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Takaaki Suzuki

  Technical digest of 7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems [IEEE NEMS2012] W3P-33  2012/03 [Refereed]
  
• Self-Aligned Fabrication Process for Active Membrane Made of Photosensitive Nanocomposite

  Tasuku Nakahara; Yuuki Hosokawa; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Takahiro Namazu; Hidetoshi Kotera; Takaaki Suzuki

  Proceedings of 25th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2012) IEEE 1181 - 1184 1084-6999 2012/02 [Refereed]
  
• Air-Flow Based Multifunctional Tactile Display Device with Multi-Jet Integrated Micro Venturi Nozzle Array

  Masataka Arai; Kyohei Terao; Takaaki Suzuki; Fusao Simokawa; Fumikazu Oohira; Hidekuni Takao

  Proceedings of 25th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2012) IEEE 148 - 151 1084-6999 2012/02 [Refereed]
  
• Development of a biocompatible and flexible strain sensor

  Hiroyuki Hamada; Kensuke Kanda; Hidekuni Takao; Takayuki Fujita; Kohei Higuchi; Kazusuke Maenaka

  IEEJ Transactions on Sensors and Micromachines 132 (9) 318 - 319 1341-8939 2012/01
• Evaluation of electrodeposited gold nanostructures for applications in QCM sensing

  Kyohei Terao; Chihiro Kakita; Noriko Nagase; Nobumitsu Miyanishi; Takaaki Suzuki; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira

  Analytical Sciences 28 (3) 291 - 294 0910-6340 2012 [Refereed]
  
• Improvement of Processing Reproducibility for a Magnetic-Driven Microstructure Made of Photosensitive Nanocomposite

  Tasuku Nakahara; Junya Suzuki; Yuki Hosokawa; Yusaku Ueda; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Hayato Miyagawa; Hidetoshi Kotera; Takaaki Suzuki

  Proceedings of 2012 International Conference on Optical MEMS & Nanophotonics IEEE 204 - 205 2012 [Refereed]
  
• 生体適合性を有するフレキシブルひずみセンサの開発

  濱田浩幸; 神田健介; 高尾英邦; 藤田孝之; 樋口行平; 前中一介

  電気学会論文誌E センサ・マイクロマシン部門誌 132 (9) 318-319  2012 [Refereed]
  
• Flexible Silicon Triaxial Tactile Imager with Integrated 800 mu m-Pitch Sensor Pixel Structures on a Diaphragm

  Hidekuni Takao; Hiroki Okada; Makoto Ishida; Takaaki Suzuki; Fumikazu Oohira

  Proceedings of IEEE Sensors2011 Conference IEEE 663 - 666 2011/10 [Refereed]
  
• A Venturi-type Micro Mist Generator fabricated by MEMS Technology and its Application to Local Surface Cooling of Target Objects

  Masataka Arai; Kyohei Terao; Takaaki Suzuki; Fusao Shimokawa; Fumikazu Oohira; Hidekuni Takao

  Proceedings of 24th International Microprocesses and Nanotechnology Conference (MNC 2011) 2pages in CD-ROM, 25B-2-3  2011/10 [Refereed]
  
• In-pixel type small-scale integrated C-V converter with chopper stabilized CMOS inverter

  Ryo Kodama; Hajime Miyao; Makoto Ishida; Hidekuni Takao

  Proceedings of 2011 International Conference on Solid State Devices and Materials (SSDM2011) 1039 - 1040 2011/09 [Refereed]
  
• Fabrication and evaluation of polymer MEMS mirror based on the mechanical characteristic of polymer containing magnetic particles

  Takuya Miura; Takaaki Suzuki; Kyouhei Terao; Hidekuni Takao; Fumikazu Oohira; Yoshinori Kaibara; Takahiro Namazu

  Proceedings of 16th International Conference on Optical MEMS and Nanophotonics (optical-MEMS2011) IEEE 2pages in CD-ROM, PO8-10011780  2011/08 [Refereed]
  
• Design and Fabrication of polymer MEMS mirror based on the mechanical characteristic evaluation of polyimide materials

  Osamu Sasaki; Kyouhei Terao; Takaaki Suzuki; Hidekuni Takao; Fumikazu Oohira; Yoshinori Kaibara; Takahiro Namazu

  Proceedings of 16th International Conference on Optical MEMS and Nanophotonics (optical-MEMS2011) IEEE 2pages in CD-ROM, P012-10016921  2011/08 [Refereed]
  
• Zero temperature coefficient gas-sealed pressure sensor using mechanical temperature compensation

  Xiuchun Hao; Yonggang Jiang; Hidekuni Takao; Kazusuke Maenaka; Takayuki Fujita; Kohei Higuchi

  Digest of Technical papers of the 16th International Solid-State Sensors, Actuators and Microsystems Conference (IEEE Transducers’ 11) 116 - 119 2011/06 [Refereed]
  
• Silicon Integrated Tactile Imagers Transcending the Human Fingertip Functions

  Hidekuni Takao

  The Journal of the Institute of Electronics, Information and Communication Engineers The Institute of Electronics, Information and Communication Engineers 94 (06) 470-474 - 474 0913-5693 2011/06 [Refereed]
  
• Fabrication of a Magnetically-Driven Microstructure Made of Magnetic Nanoparticles/SU-8 Composite

  Yuki Hosokawa; Tasuku Nakahara; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Takaaki Suzuki

  Proceedings of the 6th International Conference on Microtechnologies in Medicine and Biology [MMB2011] 74 - 75 2011/05 [Refereed]
  
• Crystalline Anisotropic Dry Etching for Single Crystal Silicon

  Toshiyuki Mishima; Kyohei Terao; Hidekuni Takao; Fusao Shimokawa; Fumikazu Oohira; Takaaki Suzuki

  Proceedings of The 24th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2011) IEEE 221 - 224 1084-6999 2011/01 [Refereed]
  
• MICRO FLUIDIC CIRCUIT DESIGN WITH "SPICE" SIMULATION

  Hidekuni Takao; Masanori Sugiura; Makoto Ishida; Kyohei Terao; Takaaki Suzuki; Fusao Shimokawa; Fumikazu Oohira

  The 24th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2011) IEEE 1154 - 1157 1084-6999 2011/01 [Refereed]
  
• Oscillation-controlled CMOS ring oscillator for wireless sensor systems

  Wang-Hoon Lee; Bon-Ju Gu; Yoshio Nishida; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Microelectronics Journal ELSEVIER SCI LTD 41 (12) 815 - 819 0026-2692 2010/12 [Refereed]
  
• Vertical Comb-drive MEMS mirror with sensing function for phase-shift device

  Kentaro Oda; Kyohei Terao; Takaaki Suzuki; Hidekuni Takao; Ichiro Ishimaru; Fumikazu Oohira

  Proceedings of 2010 International Conference on Optical MEMS & Nanophotonics 5 - 6 2010/08 [Refereed]
  
• A Versatile Integration Technology of SOI-MEMS/CMOS Devices Using Microbridge Interconnection Structures

  Hidekuni Takao; Takehiko Ichikawa; Tooru Nakata; Kazuaki Sawada; Makoto Ishida

  Journal of Microelectromechanical Systems IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC 19 (4) 919 - 926 1057-7157 2010/08 [Refereed]
  
• A multifunctional integrated silicon tactile imager with arrays of strain and temperature sensors on single crystal silicon diaphragm

  Hidekuni Takao; Masaki Yawata; Kazuaki Sawada; Makoto Ishida

  Sensors and Actuators A-Physical ELSEVIER SCIENCE SA 160 (1-2) 69 - 77 0924-4247 2010/05 [Refereed]
  
• A Membrane Tyep Si-MEMS Tactile Imager with Fingerprint Structure for Realization of Slip Sensing Capability

  Hiroki Okada; Masaki Yawata; Makoto Ishida; Kazuaki Sawada; Hidekuni Takao

  Proceedings of The 23rd IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2010) IEEE 608 - 611 1084-6999 2010/01 [Refereed]
  
• Low cost and large deflection angle polymer MEMS mirror using glass substrate

  Osamu Sasaki; Takaaki Suzuki; Kyouhei Terao; Hidekuni Takao; Fumikazu Oohira

  Proceedings of 2010 International Conference on Optical MEMS & Nanophotonics 29 - 30 2010 [Refereed]
  
• A High-Throughput FISH Microchip for Clinical Genetics

  Hiroyuki Suzuki; Daisuke Hiramaru; Kyohei Terao; Hidekuni Takao; Fumikazu Oohira; Hidetoshi Kotera; Takaaki Suzuki

  Proceedings of The 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences[MicroTAS2010] 702 - 704 2010 [Refereed]
  
• A Robust and Sensitive Silicon Tactile Imager with Individually Formed SU-8 Protective Layers on Piezoresistor Pixels

  Hidekuni Takao; Hiroyuki Okada; Makoto Ishida; Kyohei Terao; Takaaki Suzuki; Fumikazu Oohira

  IEEE Sensors 2010 Conference IEEE 2079 - 2082 1930-0395 2010 [Refereed]
  
• Design and Fabrication of Complementary Metal-Oxide-Semiconductor Sensor Chip for Electrochemical Measurement

  Tomoyuki Yamazaki; Takaaki Ikeda; Yoshiko Kano; Hidekuni Takao; Makoto Ishida; Kazuaki Sawada

  Japanese Journal of Applied Physics JAPAN SOC APPLIED PHYSICS 49 (4) 04DL11  0021-4922 2010 [Refereed]
  
• Fabrication of Smart Electrochemical Sensor with CMOS Integrated Circuits

  Tomoyuki Yamazaki; Takaaki Ikeda; Yoshiko Kano; Hidekuni Takao; Makoto Ishida

  2009 International Conference on Solid State Devices and Materials (SSDM2009) P-11-11  2009/10
• Examination of absorptiometry microchip application aiming for particle-enhanced turbidimetric immunoassay

  Toshihiko Noda; Young Shik Shin; Nozomu Hirokubo; Kazuhiro Miyamura; Koichi Matsumoto; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  IEEJ Transactions on Sensors and Micromachines 129 (8) 229 - 233 1341-8939 2009/08 [Refereed]
  
• Fabrication of a Multi‐Modal Sensor including an EC Sensor and a Temperature Sensor

  二川雅登; 岩崎太一; 石田三佳; 釜戸敬太; 高尾英邦; 石田誠; 澤田和明

  電気学会バイオ・マイクロシステム研究会資料 BMS-09 (8-24) 17 - 20 2009/07
• Three dimensional surface-shape tactile imager with fingertip-size silicon integrated sensor-membran

  Hidekuni Takao; Masaki Yawata; Kazuaki Sawada; Makoto Ishida; Hiroki Okada

  Digest of Technical papers of the 15th International Conference on Sensors, Actuators, and Microsystems (IEEE Transducers’09) 2186 - 2189 2009/06 [Refereed]
  
• Two-dimensional label-free acetylcholine image sensor for imaging neuronal communication

  Shoko Takenaga; Seung-Ro Lee; M. M. Rahman; Hidekuni Takao; Makoto Ishida; Kazuaki Sawada

  Digest of Technical papers of the 15th International Conference on Sensors, Actuators, and Microsystems (IEEE Transducers’09) 975 - 978 2009/06 [Refereed]
  
• 2-Dimensional potassium ion image sensor aiming for label-free dynamic imaging of living-cell activity

  Kazuya Atsumi; Yoshitomo Masaki; Toshihiro Noda; Toshiaki Hattori; Hidekuni Takao; Makoto Ishida; Kazuaki Sawada

  Digest of Technical papers of the 15th International Conference on Sensors, Actuators, and Microsystems (IEEE Transducers’09) 916 - 919 2009/06 [Refereed]
  
• Miniaturization of Electrical Conductivity Sensors for a Multimodal Smart Microchip

  Masato Futagawa; Taichi Iwasaki; Toshihiko Noda; Hidekuni Takao; Makoto Ishida; Kazuaki Sawada

  Japanese Journal of Applied Physics JAPAN SOCIETY APPLIED PHYSICS 48 (4) 04C184  0021-4922 2009/04 [Refereed]
  
• High-Performance and Multifunctional Tactile Image Sensors Realized by Silicon CMOS/MEMS Technology

  Hidekuni Takao

  Proceedings of International Conference on MEMS 2009 (ICMEMS2009) 6pages in CD-ROM  2009/01 [Refereed][Invited]
  
• Non-Linear Fluidic Integrated Circuits Realized by Pneumatic-Field Effect Transistors with Controllable Output Resistance

  Hidekuni Takao; N. Tanaka; Masakatu Sugiura; Kazuaki Sawada; Makoto Ishida

  Proceedings of The 22nd IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2009) IEEE 503 - 506 1084-6999 2009/01 [Refereed]
  
• Fabrication of a Multi-Modal Sensor with PH, EC and Temperature Sensing Areas for Agriculture Application

  Masato Futagawa; Taichi Iwasaki; Hidekuni Takao; Makoto Ishida; Kazuaki Sawada

  2009 IEEE SENSORS, VOLS 1-3 IEEE 2013 - 2016 2009 [Refereed]
  
• An enhanced glucose biosensor using charge transfer techniques

  Seung-Ro Lee; Kazuaki Sawada; Hidekuni Takao; Makoto Ishida

  Biosensors and Bioelectronics ELSEVIER ADVANCED TECHNOLOGY 24 (4) 650 - 656 0956-5663 2008/12 [Refereed]
  
• Development of a disposable glucose biosensor using electroless-plated Au/Ni/copper low electrical resistance electrodes

  Seung-Ro Lee; Young-Tae Lee; Kazuaki Sawada; Hidekuni Takao; Makoto Ishida

  Biosensors and Bioelectronics ELSEVIER ADVANCED TECHNOLOGY 24 (3) 410 - 414 0956-5663 2008/11 [Refereed]
  
• Multipurpose microchip system for photometric chemical analysis integrated with temperature controlled solution mixer

  Toshihiro Noda; Nozomu Hirokubo; Young Shik Shin; Kazuhiro Miyamura; Koichi Matsumoto; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Proceedings of The 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2008) 1057 - 1059 2008/10 [Refereed]
  
• A novel RF induced power supply system for monolithically integrated ubiquitous micro sensor nodes

  Minoru Sudou; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Sensors and Actuators A-Physical ELSEVIER SCIENCE SA 145 343 - 348 0924-4247 2008/07 [Refereed]
  
• Fabrication of Al/Si Schottky Diode in Standard CMOS Process for Microwave Detectors Used in Integrated Wireless Sensor Network

  Radhakrishna Vatedka; HidekuniTakao; Kazuaki.sawada; MakotoIshida

  Proceedings of Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2008) 4pages in CD-ROM  2008/06 [Refereed]
  
• Improvement in Filter-Less Fluorescence Sensor Capability by Optimization of Potential Distribution

  H. Ishii; Yuki Maruyama; Hidekuni Takao; Makoto Ishida; Kazuaki Sawada

  Proceedings of Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2008) 4pages in CD-ROM  2008/06 [Refereed]
  
• 32×32 CMOS DNA Sensor Array Using Charge Transfer Technique

  Yuki Maruyama; S. Terao; Hidekuni Takao; Makoto Ishida; Kazuaki Sawada

  Proceedings of Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2008) 4pages in CD-ROM  2008/06 [Refereed]
  
• “Source-Follower Amplicier Array with Vapor-Liquid-Solid Grown Silicon Microprobe Electrodes on Silicon (111) Substrate

  Kotaro Mayumi; Kuniharu Takei; Takahiro Kawashima; Takeshi Kawano; Hidekuni Takao; Ka zuaki Sawada; Makoto Ishida

  Proceedings of Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2008) 4pages in CD-ROM  2008/06 [Refereed]
  
• “Nano-Vacuum Device in Local Micro-Vacuum Package for Vacuum-CMOS Fused LSI

  Y. Nishijo; M. Hatakeyama; Hidekuni Takao; Makoto Ishida; Kazuaki Sawada

  Proceedings of Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2008) 4pages in CD-ROM  2008/06 [Refereed]
  
• Smart Microfluidic Devices with Micro Bridge Heater Fabricated by CMOS Compatible Process

  A. Kono; Y. Miyake; Y. Maruyama; Hidekuni Takao; Makoto Ishida; Kazuaki Sawada

  Proceedings of Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2008) 4pages in CD-ROM  2008/06 [Refereed]
  
• Evaluation of Antenna-Integrated 315MHz Transmitter for Smart Microsensors

  Jong-Wan Kim; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Proceedings of International Networked Sensing Systems 2008 (INSS2008) IEEE 74 - 79 2008/06 [Refereed]
  
• Low-noise fully differential amplifiers using JFET-CMOS integration technology for smart sensors

  Hidekuni Takao; Radhakrishna Vatedka; Yoshiaki Ito; Fumihito Komakine; Kolelas Serge; Kazuaki Sawada; Makoto Ishida

  IEEJ Transactions on Electrical and Electronic Engineering WILEY 3 (3) 274 - 280 1931-4973 2008/05 [Refereed]
  
• Integration of out-of-plane silicon dioxide microtubes, silicon microprobes and on-chip NMOSFETs by selective vapor-liquid-solid growth

  Kuniharu Takei; Takahiro Kawashima; Takeshi Kawano; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Journal of Micromechanics and Microengineering IOP PUBLISHING LTD 18 (3) 035033  0960-1317 2008/03 [Refereed]
  
• High performance acetylcholine biosensor using charge transfer technique

  Seung-Ro Lee; Kazuaki Sawada; Hidekuni Takao; Makoto Ishida; Hee Don Seo

  12th International Conference on Miniaturized Systems for Chemistry and Life Sciences - The Proceedings of MicroTAS 2008 Conference Chemical and Biological Microsystems Society 459 - 461 2008
• Multimodal pH and light imaging devices for dynamic chemical reaction observation

  J. Matsuo; K. Sawada; H. Takao; M. Ishida

  12th International Conference on Miniaturized Systems for Chemistry and Life Sciences - The Proceedings of MicroTAS 2008 Conference Chemical and Biological Microsystems Society 326 - 328 2008
• Neo-transmitter using pulse width modulation (PWM) method for wireless smart sensors

  Wang Hoon Lee; Jong-Wa Kim; Hidekuni Takao; Kazuaki Sawada; MakotO Ishida

  IEEJ Transactions on Sensors and Micromachines 128 (1) 7 - 11 1341-8939 2008/01 [Refereed]
  
• Silicon MEMS Tactile Imager Using Flexible Deformation of Integrated Pixel Array

  Hidekuni Takao; Masaki Yawata; Ryo Kodama; Kazuaki Sawada; Makoto Ishida

  Proceedings of World Automation Congress 2008 (WAC2008) IEEE 131 - 136 2008 [Refereed]
  
• Silicon smart microchips for intelligent sensing

  M. Ishida; T. Kawano; H. Takao; K. Sawada

  Digest of Technical Papers. Symposium on VLSI Technology (Symposium on VLSI Technology) IEEE 5 - 8 2008 [Refereed]
  
• Post-CMOS integration technology of thick-film SOI MEMS devices using micro bridge interconnections

  Hidekuni Takao; Takehiko Ichikawa; Tooru Nakata; Kazuaki Sawada; Makoto Ishida

  Proceedings of 21st IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2008 ) IEEE 359 - 362 1084-6999 2008/01 [Refereed]
  
• A Wide dynamic range photogate-type active pixel sensor using a self-regulation principle

  Yuki Maruyama; Kazuaki Sawada; Hidekuni Takao; Makoto Ishida

  Japanese Journal of Applied Physics JAPAN SOC APPLIED PHYSICS 47 (1) 173 - 178 0021-4922 2008/01 [Refereed]
  
• Fabrication of thermoelectric sensor using silicon-on-insulator structure

  Wang Hoon Lee; Young Tae Lee; Hidekuni Takao; Kazuaki Sawada; Makoto Ishidai

  Japanese Journal of Applied Physics Part. 1, Regular papers, brief communications & review papers INST PURE APPLIED PHYSICS 46 (11) 7232 - 7236 0021-4922 2007/11 [Refereed]
  
• Effect of high drain voltage on stress sensitivity in nMOSFETs

  Radhakrishna Vatedka; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Sensors and Actuators A: Physical ELSEVIER SCIENCE SA 140 (1) 89 - 93 0924-4247 2007/10 [Refereed]
  
• Multi-functional monolithic-MEMS tactile imager using flexible deformation of silicon IC

  Hidekuni Takao; Masaki Yawata; Ryo Kodama; Kazuaki Sawada; Makoto Ishida

  Proceedings of the Custom Integrated Circuits Conference 131 - 134 0886-5930 2007/09 [Refereed]
  
• Wafer-level integration technique of surface mount devices on a Si-wafer with vibration energy and gravity force

  Minoru Sudou; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  IEEE Transactions on Components and Packaging Technologies IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC 30 (3) 457 - 463 1521-3331 2007/09 [Refereed]
  
• Integrated inductors for RF transmitters in CMOS/MEMS smart microsensor systems

  Jong-Wan Kim; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Sensors MOLECULAR DIVERSITY PRESERVATION INT 7 (8) 1387 - 1398 1424-8220 2007/08 [Refereed]
  
• A robust and sensitive silicon-MEMS tactile-imager with scratch resistant surface and over-range protection

  Hidekuni Takao; Masaki Yawata; Kazuaki Sawada; Makoto Ishida

  Digest of Technical papers of the 14th International Conference on Sensors, Actuators, and Microsystems (Transducers’07) IEEE 1465 - 1468 2007/06 [Refereed]
  
• RF-powered silicon-MEMS microsensors for distributed and embedded sensing applications

  Hidekuni Takao; Syunsuke Kizuna; Kazuaki Sawada; Minoru Sudou; Makoto Ishida

  Proceedings of International Networked Sensing Systems 2007 (INSS2007) IEEE 35 - 42 2007/06 [Refereed]
  
• High performance blood glucose sensor using charge transfer technique

  Seung-Ro Lee; Takeshi Hizawa; Kazuaki Sawada; Hidekuni Takao; Makoto Ishida

  Digest of Technical papers of the 14th International Conference on Sensors, Actuators, and Microsystems (Transducers’07) IEEE 855 - 858 2007/06 [Refereed]
  
• Si micro probe and SIO2 micro tube array integrated with NMOSFETS

  Kuniharu Takei; Takahiro Kawashima; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Digest of Technical papers of the 14th International Conference on Sensors, Actuators, and Microsystems (Transducers’07) IEEE 1971 - 1974 2007/06 [Refereed]
  
• Charge transfer type pH sensor with super high sensitivity

  J. Matsuo; Takeshi Hizawa; Kazuaki Sawada; Hidekuni Takao; Makoto Ishida

  Digest of Technical papers of the 14th International Conference on Sensors, Actuators, and Microsystems (Transducers’07) IEEE 1881 - 1884 2007/06 [Refereed]
  
• 32 x 32 pH image sensors for real time observation of biochemical phenomena

  Takeshi Hizawa; J. Matsuo; T. Ishida; Hidekuni Takao; H. Abe; Kazuaki Sawada; Makoto. Ishida

  Digest of Technical papers of the 14th International Conference on Sensors, Actuators, and Microsystems (Transducers’07) IEEE 1311 - 1314 2007/06 [Refereed]
  
• Novel absorption photometry microchip with no reference solution

  Toshihiko Noda; Nozomu Hirokubo; Hidekuni Takao; Kazuhiro Miyamura; Narihiro Oku; Koichi Matsumoto; Kazuaki Sawada; Makoto Ishida

  Digest of Technical papers of the 14th International Conference on Sensors, Actuators, and Microsystems (Transducers’07) 2143 - 2146 2007/06 [Refereed]
  
• On-chip multi wavelength detection sensor for real time monitoring of fluorescence and opacity

  Yuki Maruyama; Kazuaki Sawada; Hidekuni Takao; Makoto Ishida

  Digest of Technical papers of the 14th International Conference on Sensors, Actuators, and Microsystems (Transducers’07) IEEE 1971 - 1974 2007/06 [Refereed]
  
• A novel RF induced DC power supply system for integrated ubiquitous micro sensor devices

  Minoru Sudou; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Digest of Technical papers of the 14th International Conference on Sensors, Actuators, and Microsystems (Transducers’07) IEEE 907 - 910 2007/06 [Refereed]
  
• Smart microfluidic electrochemical DNA sensors with signal processing circuits

  Kazuaki Sawada; Chigusa Oda; Hidekuni Takao; Makoto Ishida

  Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers INST PURE APPLIED PHYSICS 46 (5A) 3135 - 3138 0021-4922 2007/05 [Refereed]
  
• 32 x 32 SOICMOS image sensor with pinned photodiode on handle wafer

  Yong-Soo Cho; H. Takao; K. Sawada; M. Ishida; Sie-Young Choi

  OPTICAL REVIEW OPTICAL SOC JAPAN 14 (3) 125 - 130 1340-6000 2007/05 [Refereed]
  
• Development of radio frequency transmitters including on-chip antenna for intelligent human sensing systems

  Jong-Wan Kim; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  IEEJ Transactions on Electrical and Electronic Engineering John Wiley and Sons Inc. 2 (3) 365 - 371 1931-4981 2007/05 [Refereed]
  
• High performance penicillin sensor using charge transfer technique

  Seung-Ro Lee; Kazuaki Sawada; Hidekuni Takao; Makoto Ishida

  Proceedings of the 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007 Chemical and Biological Microsystems Society 1255 - 1257 2007
• Low-noise operation of charge-transfer-type ph sensor using charge accumulation technique

  E. Watanabe; T. Hizawa; S. Mimura; T. Ishida; H. Takao; K. Sawada; M. Ishida

  Proceedings of the 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007 Chemical and Biological Microsystems Society 479 - 481 2007
• High speed SOICMOS image sensor with pinned photodiode on handle wafer

  Yong-Soo Cho; H. Takao; K. Sawada; M. Ishida; Sie-Young Choi

  Microelectronics Journal (Microelectron J) ELSEVIER SCI LTD 38 (1) 102 - 107 0026-2692 2007/01 [Refereed]
  
• Pneumatic MEMS in-channel microvalves with in-plane control ports for micro fluidic systems integrated on a chip surface

  Hidekuni Takao; Makoto Ishida

  Sensors and Materials MYU, SCIENTIFIC PUBLISHING DIVISION 19 (1) 19 - 34 0914-4935 2007/01 [Refereed]
  
• Characteristics of highly sensitive pH sensors with charge accumulation operation

  Takeshi Hizawa; Kazuaki Sawada; Hidekuni Takao; Makoto Ishida

  Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers INST PURE APPLIED PHYSICS 45 (12) 9259 - 9263 0021-4922 2006/12 [Refereed]
  
• Performance of absorption photometry microchip for blood hemoglobin measurement integrated with processing circuits and Si(1 1 0) 45° mirrors

  Toshihiko Noda; Hidekuni Takao; Kazunori Yoshioka; Narihiro Oku; Mitsuaki Ashiki; Kazuaki Sawada; Koichi Matsumoto; Makoto Ishida

  Sensors and Actuators, B: Chemical 119 (1) 245 - 250 0925-4005 2006/11 [Refereed]
  
• Silicon MEMS Sensors and Devices Harmonized with LSI Technology

  Hidekuni Takao; Makoto Ishida

  International Workshop on Micro/Nano Science and Engineering for the 21st Century 49 - 52 2006/10 [Refereed]
  
• Evaluation of monolithically integrated antennas and RF transmitters for silicon smart micro sensors with wireless-communication ability

  Jong-Wan Kim; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Proceedings of The 5th IEEE Conference on Sensors (IEEE Sensors 2006) IEEE 34 - 36 1930-0395 2006/10 [Refereed]
  
• Fabrication of a two-dimensional pH image sensor using a charge transfer technique

  Takeshi Hizawa; Kazuaki Sawada; Hidekuni Takao; Makoto Ishida

  Sensors and Actuators B: Chemical ELSEVIER SCIENCE SA 117 (2) 509 - 515 0925-4005 2006/10 [Refereed]
  
• Low voltage SOICMOS image sensor with pinned photodiode on handle wafer

  Yong-Soo Cho; Sie Young Choi; H. Takao; K. Sawada; M. Ishida

  International Journal of Modern Physics B WORLD SCIENTIFIC PUBL CO PTE LTD 20 (25-27) 4207 - 4212 0217-9792 2006/10 [Refereed]
  
• Piezoresistive gas flow sensors by deep RIE technology

  Young-Tae Lee; Kang-Ho Ahn; Yong-Taek Kwon; Hidekuni Takao; Makoto Ishida

  2006 5th IEEE Conference on Sensors, VOLS 1-3 IEEE 1115 - 1118 1930-0395 2006/10 [Refereed]
  
• Sensing characteristics of charge transfer type pH sensor by accumulative operation

  Takeshi Hizawa; Kazuaki Sawada; Hidekuni Takao; Makoto Ishida

  Proceedings of 2006 5th IEEE Conference on Sensors, VOLS 1-3 IEEE 144 - 147 1930-0395 2006/10 [Refereed]
  
• Thermal characteristics in motion sensor for high temperature environments

  Kyung Il Lee; Hidekuni Takao; Kazuaki Sawada; Hee Don Seo; Makoto Ishida

  2006 5th IEEE Conference on Sensors, VOLS 1-3 IEEE 1191 - 1194 1930-0395 2006/10 [Refereed]
  
• A Self-Compensated Fully Differential SOI-CMOS Operational Amplifier for Wide Temperature Operation of Silicon Smart Sensors up to 275ºC

  Hidekuni Takao; Toshiaki Douzaka; K. Sakurano; Kazuaki Sawada; Makoto Ishida

  Proceedings of Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2006) 146 & 4pages (CD-ROM)  2006/06 [Refereed]
  
• Effect of High Drain Bias on Stress Sensitivity in MOSFETs

  Radhakrishna Vatedka; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Proceedings of Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2006) 145 & 4pages (CD-ROM)  2006/06 [Refereed]
  
• A Wide Dynamic Range Photogate type Image Sensor Based on Self Suppression Principle

  Yuki Maruyama; Kazuaki Sawada; Hidekuni Takao; Makoto Ishida

  Proceedings of Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2006) 153 & 4pages (CD-ROM)  2006/06 [Refereed]
  
• A Fabrication of P-N Junction Using Si-Micro-Probe Array by In-Situ Doping VLS Growth

  Md. Shofiqul Islam; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Proceedings of Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2006) 132 & 4pages (CD-ROM)  2006/06 [Refereed]
  
• Micro SiO2 Tube Array on Si(111) Substrates for Intelligent Devices Using Vapor-Liquid-Solid Method and Selective Si Etching by XeF2 Gas

  Kuniharu Takei; Takahiro Kawashima; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Proceedings of Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2006) 272 & 4pages (CD-ROM)  2006/06 [Refereed]
  
• Monolithic silicon smart tactile image sensor with integrated strain sensor array on pneumatically swollen single-diaphragm structure

  H Takao; K Sawada; M Ishida

  Proceedings of Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2006) IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC 53 (5) 1250 - 1259 0018-9383 2006/05 [Refereed]
  
• A novel filterless fluorescence detection sensor for DNA analysis

  Yuki Maruyama; Kazuaki Sawada; Hidekuni Takao; Makoto Ishida

  IEEE Transactions on Electron Devices IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC 53 (3) 553 - 558 0018-9383 2006/03 [Refereed]
  
• The fabrication of filter-less fluorescence detection sensor array using CMOS image sensor technique

  Yuki Maruyama; Kazuaki Sawada; Hidekuni Takao; Makoto Ishida

  Sensors and Actuators A: Physical ELSEVIER SCIENCE SA 128 (1) 66 - 70 0924-4247 2006/03 [Refereed]
  
• Smart Micro Sensors with RF Transmitter for Intelligent Human Sensing System

  Jong-Wan Kim; Takehiko Ichikawa; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Proceedings of the IEEE Sensors Applications Symposium (SAS) IEEE 78 - 81 2006/02 [Refereed]
  
• Two-dimensional silicon smart tactile image-sensor with single sensing diaphragm actuated by vibrating pressure for simultaneous detection of force and object hardness distributions

  Hidekuni Takao; Masaki Yawata; Kazuaki Sawada; Makoto Ishida

  Proceedings of The 19th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2006) IEEE 602 - 605 1084-6999 2006/01 [Refereed]
  
• Improvement of metal-oxide semiconductor interface characteristics in complementary metal-oxide semiconductor on Si(111) by combination of fluorine implantation and long-time hydrogen annealing

  Y Kato; H Takao; K Sawada; M Ishida

  Japanese Journal of Applied Physics INST PURE APPLIED PHYSICS 45 (4) L108 - L110 0021-4922 2006/01 [Refereed]
  
• Fabrication of ultrasonic transducers using epitaxial Pb(Zr,Ti)O-3 thin films on epitaxial gamma-Al2O3/Si-substrates for smart sensors

  Daisuke Akai; Yasuhiro Oba; Nagaya Okada; Mikinori Ito; Kazuaki Sawada; Hidekuni Takao; Makoto Ishida

  Sensors and Materials MYU, SCIENTIFIC PUBLISHING DIVISION 18 (3) 161 - 169 0914-4935 2006/01 [Refereed]
  
• Novel filter less fluorescence detection sensor array for DNA micro chip

  Yuki Maruyama; Kazuaki Sawada; Hidekuni Takao; Makoto Ishida

  Proceedings of 8th International Conference on Miniaturized Systems for Chemistry and Life Sciences ROYAL SOC CHEMISTRY (297) 491 - 493 0260-6291 2005/09 [Refereed]
  
• Ultimate 1/f noise reduction in JFET-based Operational Amplifiers for High-Performance CMOS Integrated Smart Microsensors

  Hidekuni Takao; Yusuke Edo; Yoshiaki Ito; Kazuaki Sawada; Makoto Ishida

  Conference Proceedings of The International Conference on Electrical Engineering 2005 (ICEE2005) DM1-10, ICEE-F0144  2005/07 [Refereed]
  
• Fabrication of Temperature Controlled Precise Three-Axis Accelerometer with Stabilized Temperature Characteristics over a Wide Temperature Range

  Kyung Il Lee; Hidekuni Takao; Kazuaki Sawada; Hee Don Seo; Makoto Ishida

  Conference Proceedings of The International Conference on Electrical Engineering 2005 (ICEE2005) PS2-46, ICEE-F0411  2005/07 [Refereed]
  
• Performance and reliability study of Si(111) CMOS subjected to high mechanical stress for smart sensor application

  Radhakrishna Vatedka; Yoshiko Kato; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Digest of Technical papers of the 13th International Conference on Sensors, Actuators, and Microsystems (Transducers’05) 1 871 - 874 2005/06 [Refereed]
  
• Smart microfuluidic electrochemical DNA sensors integrated signal processing circuits

  Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Digest of Technical papers of the 13th International Conference on Sensors, Actuators, and Microsystems (Transducers’05) IEEE 279 - 282 2005/06 [Refereed]
  
• The fabrication of filter-less fluorescence detection sensor array using CMOS image sensor technique

  Yuki Maruyama; Kazuaki Sawada; Hidekuni Takao; Makoto Ishida

  Digest of Technical papers of the 13th International Conference on Sensors, Actuators, and Microsystems (Transducers’05) IEEE 1026 - 1029 2005/06 [Refereed]
  
• Multifunctional smart tactile-image sensor with integrated arrays of strain and temperature sensors on single air-pressurized silicon diaphragm

  Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Digest of Technical papers of the 13th International Conference on Sensors, Actuators, and Microsystems (Transducers’05) IEEE 45 - 48 2005/06 [Refereed]
  
• Neural recording with low-invasive Si microprobe array

  Takeshi Kawano; Akito Ishihara; Tetsuhiro Harimoto; Takahiro Kawashima; Hidekuni Takao; Kazuaki Sawada; Shiro Usui; Makoto Ishida

  Digest of Technical papers of the 13th International Conference on Sensors, Actuators, and Microsystems (Transducers’05) IEEE 1222 - 1225 2005/06 [Refereed]
  
• Wafer-level integration technology of surface mount devices using automatic parts alignment technology with vibration

  Minoru Sudou; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Digest of Technical papers of the 13th International Conference on Sensors, Actuators, and Microsystems (Transducers’05) IEEE 1322 - 1325 2005/06 [Refereed]
  
• Fabrication of two-dimensional pH CMOS image sensors and real time imaging of chemical reaction

  Takeshi Hizawa; Kazuaki Sawada; Hidekuni Takao; Makoto Ishida

  Digest of Technical papers of the 13th International Conference on Sensors, Actuators, and Microsystems (Transducers’05) IEEE 1138 - 1141 2005/06 [Refereed]
  
• Highly sensitive electron-emission-type infrared sensor using a single crystalline LiNbO3

  Daisuke Takamuro; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Digest of Technical papers of the 13th International Conference on Sensors, Actuators, and Microsystems (Transducers’05) IEEE 581 - 584 2005/06 [Refereed]
  
• Improvement of thermal response in temperature controlled precise three-axis accelerometer with stabilized characteristics over a wide temperature range

  Kyung Il Lee; Hidekuni Takao; Kazuaki Sawada; Hee.Don.Seo; Makoto Ishida

  Digest of Technical papers of the 13th International Conference on Sensors, Actuators, and Microsystems (Transducers’05) IEEE 800 - 803 2005/06 [Refereed]
  
• Evaluation of novel blood-hemoglobin measurement microsystem with integrated processing circuits and Si(110) 45°-mirrors

  Toshihiko Noda; Hidekuni Takao; Kazunori Yoshioka; Narihiro Oku; Mitsuaki Ashiki; Kazuaki Sawada; Koichi Matsumoto; Makoto Ishida

  Digest of Technical papers of the 13th International Conference on Sensors, Actuators, and Microsystems (Transducers’05) 2 2007 - 2010 2005/06 [Refereed]
  
• A novel fused sensor for photo- and ion-sensing

  Kazuaki Sawada; Takahiro Ohshina; Takeshi Hizawa; Hidekuni Takao; Makoto Ishida

  Sensors and Actuators B: Chemical ELSEVIER SCIENCE SA 106 (2) 614 - 618 0925-4005 2005/05
• A MEMS microvalve with PDMS diaphragm and two-chamber configuration of thermo-pneumatic actuator for integrated blood test system on silicon

  Hidekuni Takao; Kazuhiro Miyamura; Hiroyuki Ebi; Mitsuaki Ashiki; Kazuaki Sawada

  Sensors and Actuators A Physical ELSEVIER SCIENCE SA 119 (2) 468 - 475 0924-4247 2005/04
• Realization of in situ doped n-type and p-type Si-microprobe array by selective vapor-liquid-solid (VLS) growth method

  Md. Shofiqul Islam; Hiroshi Ishino; Takeshi Kawano; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 44 (4 B) 2161 - 2165 0021-4922 2005/04 [Refereed]
  
• MEMS based high dose radiation resistant SOI pressure sensor for aerospace applications

  KI Lee; MM Nayak; H Takao; K Sawada; M Ishida; K Rajanna

  Sensors and Materials MYU, SCIENTIFIC PUBLISHING DIVISION 17 (5) 237 - 247 0914-4935 2005/01 [Refereed]
  
• Fabrication of high-temperature silicon pressure sensor using SDB-SOI technology

  Young-Tae Lee; Hidekuni Takao; Makoto Ishida

  Sensors and Materials MYU, SCIENTIFIC PUBLISHING DIVISION 17 (5) 269 - 276 0914-4935 2005/01 [Refereed]
  
• Three-dimensional multichannel Si microprobe electrode array chip for analysis of the nervous system

  Takeshi Kawano; Akito Ishihara; Tetsuhiro Harimoto; Hidekuni Takao; Kazuaki Sawada; Shiro Usui; M. Ishida

  Technical Digest,2004 International Electron Device Meeting (IEEE IEDM2004) IEEE 1013 - 1016 2004/12 [Refereed]
  
• The characteristic improvement of Si (111) metal-oxide-semiconductor field-effect transistor by long-time hydrogen annealing

  Yoshiko Kato; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Japanese Journal of Applied Physics INST PURE APPLIED PHYSICS 43 (10) 6848 - 6853 0021-4922 2004/10 [Refereed]
  
• Realization of n-Type and p-Type Si-Microprobe Array Using In-Situ Doping with Selective Vapor-Liquid-Solid (VLS) Growth Method

  Md. Shofiqul Islam; Hiroshi Ishino; Takeshi Kawano; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Extended Abstracts of the 2004 International Conference on Solid State Devices and Materials (SSDM2004) 2004 176 - 177 2004/09 [Refereed]
  
• Fabrication of pH CMOS image sensor for chemical reaction imaging

  Takeshi Hizawa; Kazuaki Sawada; Hidekuni Takao; Makoto Ishida

  Proceedings of 8th International Conference on Miniaturized Systems for Chemistry and Life Sciences ROYAL SOC CHEMISTRY (297) 440 - 442 0260-6291 2004/09 [Refereed]
  
• Neural recording chip with penetrating Si microprobe electrode array by selective vapor-solid growth method

  Takeshi Kawano; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Proceedings of the 26th Annual International Conference of the IEEE Eng. Med. Biological Society (IEEE EMBS) IEEE 1-7 (26) 2066 - 2069 1094-687X 2004/09 [Refereed]
  
• Improvement of an infrared light sensitivity in PZT photosensitive field emitter

  D Takamuro; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Sensors and Actuators A Physical ELSEVIER SCIENCE SA 114 (2-3) 230 - 235 0924-4247 2004/09
• Low-Noise Fully Differential Amplifiers for High Resolution Smart Sensors Using JFET-CMOS Technology

  Hidekuni Takao; Yoshiaki Ito; Kolelas Serge; Kazuaki Sawada; Makoto Ishida

  Proceedings of Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT MNT 2004) 20 - 25 2004/07 [Refereed]
  
• Device Characteristics of MOSFETs for Smart Sensor Systems on Si(111)

  Yoshiko Kato; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Proceedings of Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT MNT 2004) 112 - 116 2004/07 [Refereed]
  
• Thermal Response Analysis of a Temperature Controlled Three-axis Accelerometer for High Temperatures with Integrated Microheaters and Temperature Sensors

  Kyung Il Lee; Hidekuni Takao; Kazuaki Sawada; Hee Don Seo; Makoto Ishida

  Proceedings of Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT MNT 2004) 449 - 452 2004/07 [Refereed]
  
• Fabrication of the High Temperature Silicon Pressure Sensor

  Young-Tae Lee; Hidekuni Takao; Makoto Ishida

  Proceedings of Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT MNT 2004) 749 - 752 2004/07 [Refereed]
  
• MEMS Based High Dose Radiation Resistant SOI Pressure Sensor

  Kyung Il Lee; M. Muralidhar Nayak; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Proceedings of Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT MNT 2004) 1317 - 1321 2004/07 [Refereed]
  
• Electron emission characteristics from a single crystalline ferroelectric material by an infrared light irradiation

  Daisuke Takamuro; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Journal of Vacuum Science & Technology B A V S AMER INST PHYSICS 22 (3) 1396 - 1401 1071-1023 2004/06 [Refereed]
  
• SOI-CMOS precision front-end amplifier for wide range and high temperature (200 degrees C) operation of smart microsensors

  Hidekuni Takao; Fumie Ina; Toshiaki Douzaka; Kazuaki Sawada; Makoto Ishida

  Sensors and Actuators A Physical ELSEVIER SCIENCE SA 112 (2-3) 388 - 394 0924-4247 2004/05
• Characteristics of high-resolution hemoglobin measurement microchip integrated with signal processing circuit

  Toshihiko Noda; Hidekuni Takao; Mitsuaki Ashiki; Hiroyuki Ebi; Kazuaki Sawada; Makoto Ishida

  Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 43 (4 B) 2392 - 2396 0021-4922 2004/04 [Refereed]
  
• Highly sensitive ion sensors using charge transfer technique

  K Sawada; T Shimada; T Ohshina; H Takao; M Ishida

  Sensors and Actuators B-Chemical ELSEVIER SCIENCE SA 98 (1) 69 - 72 0925-4005 2004/03
• Selective Vapor-Liquid-Solid Epitaxial Growth of Micro-Si Probe Electrode Arrays with On-Chip Mosfets on Si (1 1 1) Substrates

  Takeshi Kawano; Yoshiko Kato; Ryoji Tani; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  IEEE Transactions on Electron Devices 51 (3) 415 - 420 0018-9383 2004/03 [Refereed]
  
• Neural recording chip with penetrating Si microprobe electrode array by selective vapor-liquid-solid growth method

  Takeshi Kawano; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Annual International Conference of the IEEE Engineering in Medicine and Biology - Proceedings 26 2066 - 2069 0589-1019 2004
• Microsensor Systems for High Temperature Environment Based on SOI Technology

  ISHIDA Makoto; TAKAO Hidekuni

  Jitsumu Hyomen Gijutsu The Surface Finishing Society of Japan 55 (1) 10 - 16 0915-1869 2004 [Refereed]
  
• Fabrication of JFET device on Si (111) for sensor interface array circuit

  Yoshiko Kato; Takashi Hashimoto; Liew Yoke Ching; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  IEICE Electronics Express 1 (9) 243 - 247 1349-2543 2004 [Refereed]
  
• Analysis and experimental verification of thermal drift in a constant temperature control type three-axis accelerometer for high temperatures with a novel composition of wheatstone bridge

  Kyung Il Lee; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Proceedings of The 17th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2004) IEEE 241 - 244 1084-6999 2004/01 [Refereed]
  
• Silicon Smart Tactile Image Sensor with Pneumatically Swollen Single Diaphragm Structure

  Hidkeuni Takao; Kazuaki Sawada; Makoto Ishida

  Proceedings of The 17th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2004) IEEE 846 - 849 1084-6999 2004/01 [Refereed]
  
• Integrated Electrochemical DNA Sensors with Microfluidic Channel Reactor

  Chie Oda; Kazuaki Sawada; Tomonobu Tsuchiya; Hidekuni Takao; Makoto Ishida

  The Seventh International Conference on Miniaturized Chemical and Biochemical Analysis Systems (micro-TAS 2003) 1 371 - 374 2003/10 [Refereed]
  
• 低雑音センサインターフェース回路に向けたJFET混載CMOS技術

  責任著者; 高尾英邦; 共著者; 浅岡力弥; 澤田和明; 川人祥二; 石田誠

  電気学会論文誌E, センサ・マイクロマシン準部門誌 123 (10) 422 - 428 2003/10
• A High Resolution Hemoglobin Measurement Cell Integrated with Signal Processing Circuit

  Toshihiko Noda; Hidekuni Takao; Mitsuaki Ashiki; Hiroyuki Ebi; Kazuaki Sawada; Makoto Ishida

  Extended Abstracts of the 2003 International Conference on Solid State Devices and Materials (SSDM2003) 694 - 695 2003/09 [Refereed]
  
• Back-Irradiation Type Photo-Detector Arrays Using Field Emitter Device

  Takashi Ono; Kazuaki Sawada; Young-Chul Jung; Yoshitake Moriyasu; Hidekuni Takao; Makoto Ishida

  IEICE Transactions on Electronics IEICE-INST ELECTRONICS INFORMATION COMMUNICATIONS ENG E86C (9) 1805 - 1809 0916-8524 2003/09 [Refereed]
  
• Electron emission characteristic from Pb(Zr,Ti)O-3 thin plate by infrared light irradiation

  Daisuke Takamuro; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Japanese Journal of Applied Physics Part 1-Regular Papers Short Notes & Review Papers INST PURE APPLIED PHYSICS 42 (9A) 5741 - 5746 0021-4922 2003/09
• Signal Conditioning CMOS Circuits Integrated on Si (111) for Image-Recording Sensor of Neural Activity

  Yoshiko Kato; Takeshi Kawano; Yoshiaki Ito; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  IEEJ Transactions on Sensors and Micromachines 123 (9) 363 - 367 1347-5525 2003/09 [Refereed]
  
• A Si nano-micro-wire array on a Si(111) substrate and field emission device applications

  Makoto Ishida; Takeshi Kawano; Masato Futagawa; Yuji Arai; Hidekuni Takao; Kazuaki Sawada

  Superlattices and Microstructures 34 (3-6) 567 - 575 0749-6036 2003/09 [Refereed]
  
• Microfluidic integrated circuits for signal processing using analogous relationship between pneumatic microvalve and MOSFET

  Hidekuni Takao; Makoto Ishida

  Journal of Microelectromechanical Systems IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC 12 (4) 497 - 505 1057-7157 2003/08
• Electron Emission Characteristics from a Single Crystalline Ferroelectric Material by An Infrared Light Irradiation

  Daisuke Takamuro; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Technical Digest of The 16th International Vacuum Microelectronics Conference (IVMC2003) JAPAN SOC PROMOT SCI 69 - 70 2003/07 [Refereed]
  
• Novel Fused Sensor For Photo and Ion Sensing

  Kazuaki Sawada; Takahiro Ohshina; Takeshi Hizawa; Hidekuni Takao; Makoto Ishida

  Digest of Technical Papers of The 12th International Conference on Solid-State Sensors, Actuators, and Microsystems (IEEE Transducers '03) IEEE 1023 - 1026 2003/06 [Refereed]
  
• A Thermo-Pneumatic In-Channel Microvalve with PDMS Diaphragm for Integrated Blood Examination System on Silicon

  H Takao; K Miyamura; H Ebi; M Ashiki; K Sawada; M Ishida

  Digest of Technical Papers of The 12th International Conference on Solid-State Sensors, Actuators, and Microsystems (IEEE Transducers '03) IEEE 139 - 142 2003/06 [Refereed]
  
• A precision SOI-CMOS front-end amplifier for smart microsensors applicable to severe operation environment with large temperature variation

  Hidekuni Takao; Fume Ina; Toshiaki Douzaka; Kazuaki Sawada; Makoto Ishida

  Digest of Technical Papers of The 12th International Conference on Solid-State Sensors, Actuators, and Microsystems (IEEE Transducers '03) IEEE 448 - 451 2003/06 [Refereed]
  
• Neuron size Si probe array fabricated on integrated circuits for multichannel electrode

  Takeshi Kawano; Yoshiko Kato; Ryoji Tani; Hiroshi Ishino; Hidekuni,Takao; Kazuaki Sawada; Makoto Ishida

  Digest of Technical Papers of The 12th International Conference on Solid-State Sensors, Actuators, and Microsystems (IEEE Transducers '03) IEEE 1679 - 1682 2003/06 [Refereed]
  
• “CMOS Signal Processing Circuits on Si (111) for Neural Activity Image-Recording with Epitaxially Grown Micro-Si Probes

  Yoshiko Kato; Takeshi Kawano; Yoshiaki Ito; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Digest of Technical Papers of The 12th International Conference on Solid - State Sensors, Actuators, and Microsystems (IEEE Transducers '03) IEEE 1687 - 1690 2003/06 [Refereed]
  
• Improvement of infrared lights sensitivity on PZT emitter

  Daisuke Takamuro; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Digest of Technical Papers of The 12th International Conference on Solid-State Sensors, Actuators, and Microsystems (IEEE Transducers '03) IEEE 1622 - 1625 2003/06 [Refereed]
  
• Fabrication of Avalanche Multiplication type CMOS Imager using a-Si:H photodiode film

  Masahiro Akiyama; Masaki Hanada; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Extended Abstracts of the 2003 IEEE Workshop on Charge-Coupled Devices and Advanced Image Sensors 49 - 53 2003/05 [Refereed]
  
• Multichannel 5 x 5-Site 3-Dimensional Si Micro-Probe Electrode Array for Neural Activity Recording

  Takeshi Kawano; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Japanese Journal of Applied Physics IOP Publishing 42 part 1 (4B) 2473 - 2477 0021-4922 2003/04 [Refereed]
  
• Low temperature dependence three-axis accelerometer for high temperature environments with temperature control of SOI piezoresistors

  Kyung Il Lee; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Sensors and Actuators A-Physical ELSEVIER SCIENCE SA 104 (1) 53 - 60 0924-4247 2003/03
• Fabrication and Analysis of Thermal Drift of a Constant Temperature Control Type Three-Axis Accelerometer for High Temperatures

  Kyung Il Lee; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Proceedings of International Sensor Conference 2003 79 - 80 2003/01 [Refereed]
  
• Silicon Microsensors for Severe Environment Using SOI Technology

  Makoto Ishida; Hidekuni Takao

  IEEJ Transactions on Sensors and Micromachines 123 (2) 31 - 36 1347-5525 2003 [Refereed]
  
• Analysis of Thermal Drift of A Constant Temperature Control Type Three-Axis Accelerometer for High Temperatures

  Kyung Il Lee; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  IEEJ Transactions on Sensors and Micromachines 123 (12) 583 - 587 1347-5525 2003 [Refereed]
  
• A JFET-CMOS Technology for Low-Noise Sensor Interface Circuits

  Hidekuni Takao; Rikiya Asaoka; Kazuaki Sawada; Shoji Kawahito; Makoto Ishida

  IEEJ Transactions on Sensors and Micromachines 123 (10) 422 - 428 1347-5525 2003/01 [Refereed]
  
• Analysis and Experimental Verification of Micro Fluidic Integrated Circuits Using Analogous Relationship between Pneumatic Microvalve and MOSFET

  Hidekuni Takao; Makoto Ishida

  Proceedings of IEEE The 16th Annual International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2003) IEEE 185 - 188 1084-6999 2003/01 [Refereed]
  
• A Three-Axis Accelerometer for High Temperatures with Low Temperature Dependence Using a Constant Temperature Control of SOI Piezoresistors

  Kyung Il Lee; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Proceedings of IEEE The 16th Annual International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2003) IEEE 478 - 481 1084-6999 2003/01 [Refereed]
  
• Field electron emission device using silicon nano-wires

  Kazuaki Sawada; Masato Futagawa; Yuji Arai; Takeshi Kawano; Hidekuni Takao; Makoto Ishida

  I2002 International Electron Device Meeting (IEEE IEDM 2002) IEEE 401 - 404 2002/12 [Refereed]
  
• Smart Chip with Selective Micro-Probes on Si(111) IC Chips for Detecting Nerve Potential

  Makoto Ishida; Takeshi Kawano; Hidekuni Takao; Kazuaki Sawada

  Proceedings of International Conference on Smart Materials Structures and Systems (ISSS-SPIE2002) SPIE-INT SOC OPTICAL ENGINEERING 302 - 309 0277-786X 2002/12 [Refereed][Invited]
  
• A pneumatically actuated full in-channel microvalve with MOSFET-like function in fluid channel networks

  Hidekuni Takao; Makoto Ishida; Kazuaki Sawada

  IEEE/ASME Journal of Microelectromechanical Systems IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC 11 (5) 421 - 426 1057-7157 2002/10 [Refereed]
  
• Clock feedthrough reduction of CMOS autozeroed operational amplifiers by two-stage self-compensation

  Hidekuni Takao; Fumie Ina; Kazuaki Sawada; Makoto Ishida

  IEICE Transactions on Electronics IEICE-INST ELECTRONICS INFORMATION COMMUNICATIONS ENG E85C (7) 1499 - 1505 0916-8524 2002/07 [Refereed]
  
• Excess noise characteristics of hydrogenated amorphous silicon p-i-n photodiode films

  Masahiro Akiyama; Masaki Hanada; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Japanese Journal of Applied Physics PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS INST PURE APPLIED PHYSICS 41 (4B) 2552 - 2555 0021-4922 2002/04 [Refereed]
  
• Fabrication and properties of ultrasmall Si wire arrays with circuits by vapor-liquid-solid growth

  Takeshi Kawano; Yoshiko Kato; Masato Futagawa; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Sensors and Actuators, A: Physical 97-98 709 - 715 0924-4247 2002/04 [Refereed]
  
• A sensor for blood cell counter using MEMS technology

  Daisuke Satake; Hiroyuki Ebi; Narihiro Oku; Koichiro Matsuda; Hidekuni Takao; Mitsuaki Ashiki; Makoto Ishida

  Sensors and Actuators B Chemical ELSEVIER SCIENCE SA 83 (1-3) 77 - 81 0925-4005 2002/03 [Refereed]
  
• A Silicon Microchip for Blood Hemoglobin Measurement Using Multireflection Structure

  Hidekuni Takao; Toshihiko Noda; Mitsuaki Ashiki; Kazuhiro Miyamura; Kazuaki Sawada; Makoto Ishida

  Proceedings of The Fifth International Conference on Miniaturized Chemical and Biochemical Analysis Systems (micro-TAS 2001) 363 - 364 2001/10 [Refereed]
  
• A CMOS integrated three-axis accelerometer fabricated with commercial submicrometer CMOS technology and bulk-micromachining

  Hidekuni Takao; Hirofumi Fukumoto; Makoto Ishida

  IEEE Transactions on Electron Devices IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC 48 (9) 1961 - 1968 0018-9383 2001/09 [Refereed]
  
• Properties of CMOS on Si(111) for nerve-potential smart sensor with Si probe array

  Makoto Ishida; F. Komakine; Hidekuni Takao; M. Futagawa; Takeshi Kawano; Kazuaki Sawada

  Proceedings of The International Conference on Electrical Engineering 2001 (ICEE2001) 1580 - 1583 2001/08 [Refereed]
  
• A durable sensor for blood cell counter using mems technology

  Daisuke Satake; Hiroyuki Ebi; Narihiro Oku; Koichiro Matsuda; Hidekuni Takao; Mitsuaki Ashiki; Makoto Ishida

  Digest of Technical Papers of The 11th International Conference on Solid - State Sensors and Actuators (Transducers '01), VOLS 1 AND 2 SPRINGER-VERLAG BERLIN 1198 - 1201 2001/06 [Refereed]
  
• Fabrication and properties of ultra small Si wire arrays by vapor-liquid-solid growth with circuits

  Takeshi Kawano; Yoshiko Kato; Masato Futagawa; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

  Digest of Technical Papers of The 11th International Conference on Solid - State Sensors and Actuators (Transducers '01) SPRINGER-VERLAG BERLIN 1066 - 1069 2001/06 [Refereed]
  
• A pneumatically-actuated silicon microvalve and its application to functional fluidic integrated circuits

  Hidekuni Takao; Makoto Ishida; Kazuaki Sawada

  Digest of Technical Papers of The 11th International Conference on Solid - State Sensors and Actuators (Transducers '01), VOLS 1 AND 2 SPRINGER-VERLAG BERLIN 946 - 949 2001/06
• Shape deterioration of mesa structures in post-CMOS anisotropic etching of silicon microsensors: an experimental study

  Hidekuni Takao; Chuck-Chen Yong; Konadur Rajanna; Makoto Ishida

  Sensors and Actuators A-Physical ELSEVIER SCIENCE SA 86 (1-2) 115 - 121 0924-4247 2000/10
• A Concept and Design of Integrated Temperature Control System in SOI Sensors for Precision Operation over a Wide Temperature Range

  Hidekuni Takao; Fumie Ina; Chuck-Chen Yong; Kazuaki Sawada; Makoto Ishida

  Proceedings of International Conference on Electrical Engineering 2000 (ICEE2k) 259 - 262 2000/07 [Refereed]
  
• Excess noise characteristics of hydrogenated amorphous silicon avalanche photodiode films using functionally graded structure

  Kazuaki Sawada; Masahiro Akiyama; Hidekuni Takao; Makoto Ishida

  Japanese Journal of Applied Physics Part 1-Regular Papers Short Notes & Review Papers JAPAN J APPLIED PHYSICS 39 (4B) 2364 - 2368 0021-4922 2000/04
• Fabrication of A Three-Axis Accelerometer Integrated with Commercial 0.8μm-CMOS Circuits

  Hidekuni Takao; Hirofumi Fukumoto; Makoto Ishida

  IEEE The 13th Annual International Conference on Micro Electro Mechanical Systems(MEMS2000) 781 - 786 2000/01
• Design of a Precision Chopper Amplifier for High Temperature Applications Using a Leakage Current Compensation Technique

  Hidekuni Takao; Fumie Ina; Kazuaki Sawada; Makoto Ishida

  Proceedings of XIV Design of Circuits and Integrated Systems Conference (DCIS ‘99) 155 - 160 1999/11
• A monolithically integrated three-axis accelerometer using CMOS compatible stress-sensitive differential amplifiers

  Hidekuni Takao; Yoshinori Matsumoto; Makoto Ishida

  IEEE Transactions on Electron Devices IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC 46 (1) 109 - 116 0018-9383 1999/01
• Stress-sensitive differential amplifiers using piezoresistive effects of MOSFETs and their application to three-axial accelerometers

  Hidekuni Takao; Yoshinori Matsumoto; Makoto Ishida

  Sensors and Actuators A-Physical ELSEVIER SCIENCE SA 65 (1) 61 - 68 0924-4247 1998/02
• A monolithically integrated three axial accelerometer using stress sensitive CMOS differential amplifiers

  Hidekuni Takao; Yoshinori Matsumoto; Makoto Ishida

  Digest of Technical Papers of The 9th International Conference on Solid-State Sensors and Actuators (Transducers '97), VOLS 1 AND 2 I E E E 1173 - 1176 1997
• Analysis and design considerations of three-dimensional vector accelerometer using SOI structure for wide temperature range

  Hidekuni Takao; Yoshinori Matsumoto; Heedon Seo; Makoto Ishida; Tetsuro Nakamura

  Sensors and Actuators A-Physical ELSEVIER SCIENCE SA LAUSANNE 55 (2-3) 91 - 97 0924-4247 1996/07
• Three-dimensional vector accelerometer using SOI structure for high-temperature use

  H Takao; Y Matsumoto; M Ishida; T Nakamura; H Tanaka; HD Seo

  ELECTRONICS AND COMMUNICATIONS IN JAPAN PART II-ELECTRONICS SCRIPTA TECHNICA PUBL 79 (3) 61 - 72 8756-663X 1996/03
• ＳＯＩ構造を用いた高温用三次元加速度ベクトルセンサ

  高尾 英邦; 松本 佳宣; 田中 秀一; 徐 煕敦; 石田 誠; 中村 哲郎

  電子情報通信学会論文誌 J78, C-2 (10) 495 - 505 1995/10 [Refereed]
  
• Device Characteristics of Three-Dimensional Vector Accelerometer Using SOI Structure for Wide Temperature Range

  Hidekuni Takao; Yoshinori Matsumoto; Hee Don Seo; Makoto Ishida; Tetsuro Nakamura

  Proceedings of the 6th Conference on Sensor Technology9) 517 - 524 1995/10 [Refereed]
  
• Three-Dimensional Vector Accelerometer Using SOI Structure for High Temperature

  Hidekuni Takao; Yoshinori Matsumoto; Hee Don Seo; Hidekazu Tanaka; Makoto Ishida; Tetsuro Nakamura

  Digest of Technical Papers of The 8th International Conference on Solid-State Sensors and Actuators (Transducers '95) 683 - 686 1995/06 [Refereed]
  
• Three-Dimensional Vector Accelerometer Using SOI Structure for High Temperature

  The Transactions of IEICE C-II J78 (10) 495  1995

Books etc

• センサ医工学 -最新医療センシングの研究開発-,第９章MEMS内視鏡センサ（超低侵襲内視鏡医療技術）

  シーエムシー出版 2022/05 9784781316703
• 狙いどおりの触覚・触感をつくる技術： 第4章第3節[3] 柔軟な素材表面を高精度で測定するMEMS 触覚センサ

  サイエンス＆テクノロジー株式会社 2017/11 9784864281621
• 異種機能デバイス集積化技術の基礎と応用 -MEMS,NEMS,センサ,CMOSLSIの融合-第13章集積化MEMSセンサ実現のための回路設計

  シーエムシー出版 2012/11 9784781306223
• 国際会議報告：The 10th Annual IEEE Conference on Sensors (IEEE Sensors2011)電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）132号

  高尾 英邦 一般社団法人 電気学会 2012
• 電気工学ハンドブック（第七版）10編第3章8節「集積化システムの製作プロセス」

  電気学会 2012
• Electronic Journal Archives No. 186 センサ・CMOS集積化技術★徹底解説

  株式会社 電子ジャーナル 2011
• Sensors, Focus on Tactile, Force and Stress Sensors

  I-Tech Publications 2009
• 薄膜ハンドブック

  日本学術振興会 薄膜第131委員会編 2008
• 次世代センサハンドブック

  培風館 2008
• MEMS/NEMS Handbook: Techniques and Applications

  Springer Publishers Inc. 2006
• プロフェッショナル英和辞典「SPED TERRA 物質・工学編」

  2004
• SOI Sensors-Sensors Update

  WILEY-VCH Verlag GmbH 2000

Conference Activities & Talks

• 高分解能触覚センサを用いたウレタン樹脂の手触り感の定量評価  [Not invited]

  井木 祐輔; 中島 雄次; 宮澤 篤史; 高尾 英邦

  第17回日本感性工学会春季大会, Online  2022/03
• 高分解能 MEMS触覚センサを用いた不織布構造体の「滑らかさ」の定量評価  [Not invited]

  井木 祐輔; 久安 悟史; 谷本 圭; 笹山 賢一; 高尾 英邦

  第17回日本感性工学会春季大会, Online  2022/03
• Development of a Minimally Invasive High-Resolution Tactile Sensor For Acquiring Delicate Haptic Changes in Hair  [Not invited]

  Masahito Komatsubara; Tsubasa Nakashima; Kyohei Terao; Fusao Shimokawa; Yasunori Matsui; Hidekuni Takao

  The 35th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2022)  2022/01
• 指先が持つ繊細な感覚を可視化するマルチフィジクス・ナノ触覚センサ  [Not invited]

  高尾英邦; 三瀬奈智; 久安 悟史; 神田 脩太

  SEMICON JAPAN 2022  2022/12  東京ビッグサイト  SEMIジャパン
  
• 髪の毛の手触り感を数量化可能なハンディ型毛髪スキャナー  [Not invited]

  小松原 雅仁; 松井 康訓; 高尾 英邦

  電気学会 第39回「センサ・マイクロマシンと応用システム」シンポジウム  2022/11  アスティとくしま（徳島県立産業観光交流センター）  電気学会センサ・マイクロマシン部門
  
• 肌表面の質感を高分解能で計測可能な防塵防滴構造を有するナノ触覚スキャナー  [Not invited]

  久安 悟史; 榊原 佑樹; 寺尾 京平; 下川 房男; 清水 裕子; 高尾 英邦

  電気学会 第39回「センサ・マイクロマシンと応用システム」シンポジウム  2022/11  アスティとくしま（徳島県立産業観光交流センター）  電気学会センサ・マイクロマシン部門
  
• 「温もり」を含めた素材の触質感を弁別可能な冷温覚集積型ナノ触覚センサ  [Not invited]

  三瀬 奈智; 小笹 光希; 寺尾 京平; 下川 房男; 高尾 英邦

  電気学会 第39回「センサ・マイクロマシンと応用システム」シンポジウム  2022/11  アスティとくしま（徳島県立産業観光交流センター）  電気学会センサ・マイクロマシン部門
  
• 指先の繊細な感覚を再現する高解像度触覚センサとライフサイエンスへの応用  [Invited]

  高尾英邦

  大阪商工会議所 次世代医療システム産業化フォーラム  2022/10  オンライン  大商MDF事務局
  
• 髪の毛の手触り感を数量化可能なハンディ型毛髪スキャナーの製作  [Not invited]

  小松原 雅仁; 寺尾 京平; 下川 房男; 松井 康訓; 高尾 英邦

  2022年度 応用物理・物理系学会 中国四国支部 合同学術講演会  2022/07  香川大学教育学部  応用物理学会 中国四国支部 日本物理学会 中国支部 四国支部 日本物理教育学会 中国四国支部 日本光学会 中国・四国支部
  
• 微細構造センサを用いた異分野融合研究の展開  [Invited]

  高尾英邦

  第 6 回日本臨床薬理学会中国・四国地方会、第 6 回黒潮カンファレンス合同学会 ―創発研究のススメー  2022/07  香川大学 幸町キャンパス イノベーションデザイン研究所  第 6 回黒潮カンファレンス合同学会
  
• シリコン製ナノ触覚センサ  [Invited]

  高尾 英邦

  日本学術振興会 R025 先進薄膜界面機能創成委員会 第9回研究会  2022/06  オンライン  独立行政法人日本学術振興会
  
• Ultra-Sensitive Tactile Texture Sensors for Touch ML/Compilers and Distributed Training Co-design Datacenter Recycling  [Invited]

  Hidekuni Takao

  Vail Computer Elements Workshop  2022/06  オンライン  VCEW
  
• 毛髪の繊細な手触り感変化を取得する低侵襲型高分解能触覚センサの開発  [Not invited]

  小松原 雅仁; 中島 翼; 寺尾 京平; 下川 房男; 高尾 英邦

  第38 回「センサ・マイクロマシンと応用システム」シンポジウム, Online  2021/11
• 心疾患等における病理学的変化を捉えるペン型脈波計測システム  [Not invited]

  山田 康誠; 綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦

  第38回「センサ・マイクロマシンと応用システム」シンポジウム, Online  2021/11
• “Mems-Based “Touch Feeling Scanner” for Quantitative Evaluation of Fingertip Sensation [MEMS Conference]  [Invited]

  Yoshihiro Nishida; Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Kazutami Arimoto; Hidekuni Takao

  第21回「関西コロキアム電子デバイスワークショップ」, Online  2021/09
• 繊細な指先の感覚を可視化する集積化ナノ触覚センサ  [Invited]

  高尾 英邦

  第82回応用物理学会秋季学術講演会, Online  2021/09
• New Value Creation by Nano-Tactile Sensor Chip Exceeding our Fingertip Discrimination Ability  [Not invited]

  Hidekuni Takao; Kazuki Watatani; Kazutami Arimoto

  IEEE Hot Chips 33 Symposium, Online  2021/08
• Reproducing Our Sense of Touch Realized by Fingertip-like High Resolution MEMS Tactile Sensors  [Invited]

  Hidekuni Takao

  The International Conference on Nano Research and Development (ICNRD-2021) Online  2021/03
• An Antenna-Shaped MEMS Tactile Sensor with Angle Detection Capability  [Not invited]

  Hayahide Oka; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao

  The 34th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021), Online  2021/01
• MEMS-Based “Multi-Tactile Scanner” with 100µm Spatial Resolution of Hardness  [Not invited]

  Yoshihiro Nishida; Kazuki Watatani; Kyohei Terao; Fusao Shimokawa; Hidekuni Takao

  The 34th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021), Online  2021/01
• Time Series Classification of Vibration Data Using Attractors Made from Multidimensional Space by Convolutional Neural Network  [Not invited]

  Tomoya Takata; Yoko Uwate; Hidekuni Takao; Yoshifumi Nishio

  The 6th International Forum on Advanced Technologies 2020 (IFAT2020)  2020/03
• 60μNの摩擦力感度と0.5µmの空間分解能を有するナノ領 域触覚センサの製作と評価  [Not invited]

  中島 翼; 綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦

  第11回集積化MEMSシンポジウム  2019/11
• 内視鏡手術における把持状態の無線計測に向けた構造色変 化を用いた力覚センサの開発  [Not invited]

  前田 祐作; 寺尾 京平; 下川 房男; 高尾 英邦

  第11回集積化MEMSシンポジウム  2019/11
• 計測表面の保護を目指した高分解能MEMS触覚センサ上へ のパリレン蒸着  [Not invited]

  榊原 佑樹; 綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦

  第11回集積化MEMSシンポジウム  2019/11
• 微細凹凸感・摩擦感・硬軟感の同時取得を可能にする指腹 曲面型MEMS触覚アレイセンサ  [Not invited]

  綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦

  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2019/11
• 繊細な触感の客観的評価を可能とする「手触り感スキャ ナー」の開発  [Not invited]

  西田 吉広; 中光 孝太; 綿谷 一輝; 寺尾 京平; 下川 房男; 有本 和民; 高尾 英邦

  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2019/11
• Reproducing our Fingertip Sensation by Super High Resolution Tactile Sensing  [Invited]

  Hidekuni Takao

  International Conference & Exhibition on Biosensors & Bioelectronics 2019  2019/10
• Reproducing our Fingertip Sensation by Super High Resolution Tactile Sensing  [Invited]

  Hidekuni Takao

  29th Assembly of Advanced Material Congress  2019/10
• 畳み込みニューラルネットワークによる再構成アトラクタの画像を用いた時系列分析  [Not invited]

  高田知弥; 上手洋子; 高尾英邦; 西尾芳文

  電子情報通信学会 非線形問題研究会  2019/09
• Time Series Analysis Using Attractors Made from Multidimensional Space with Convolutional Neural Network  [Not invited]

  Tomoya Takata; Yoko Uwate; Hidekuni Takao; Yoshifumi Nishio

  令和元年度電気関係学会四国支部連合大会  2019/09
• パリレンＣコーティングによるシリコンカンチレバーの機械特性変化の評価  [Not invited]

  榊原 佑樹; 寺尾 京平; 下川 房男; 高尾 英邦

  第10回集積化MEMS技術研究ワークショップ  2019/07
• アレイ型高分解能２軸触覚センサを 用いた触覚分布情報の計測と評価  [Not invited]

  綿谷一輝; 寺尾京平; 下川房男; 高尾英邦

  第10回集積化MEMS技術研究ワークショップ  2019/07
• 数値・情報解析はどんな未来につながるのか：センサーの例  [Invited]

  高尾英邦

  かがわ創生講座  2019/05
• 触覚センサによる手触り感数値化の実現に向けた触覚情報処理基盤技術  [Invited]

  高尾英邦

  技術情報協会  2019/04
• Touch Feeling Measurement with Novel High Resolution MEMS Tactile Sensors  [Invited]

  Hidekuni Takao

  The BIT’s 5th Annual World Congress of Smart Materials(WCSM2019)  2019/03
• High density tactile information obtained by integrated MEMS tactile sensor array and its processing to discriminate surface textures  [Invited]

  Hidekuni Takao

  2019 International Conference for Leading and Young Computer Scientists(IC-LYCS 2019)  2019/02
• 繊細な手触り感を取得するナノ触覚センシング技術  [Invited]

  高尾英邦

  EIIRISプロジェクト研究成果報告会 2018年度  2019/02
• 高分解能MEMS触覚センサによる毛髪表面の手触り感計測と評価  [Not invited]

  中光 孝太; 綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦

  第 10 回「集積化MEMSシンポジウム」2018  2018/11
• Development of single cell stimulation device for quantitative analysis of spare receptors  [Not invited]

  松井 祐樹; MuhammadThaqifIqbalBinMokhtar; 平野 勝也; 高尾 英邦; 下川 房男; 石塚 裕己; 寺尾 京平

  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2018/10  Institute of Electrical Engineers of Japan
  
• Development of molecular processing platform using DNA trapping device with tool-stock function  [Not invited]

  増田 晃士; 石塚 裕己; 高尾 英邦; 下川 房男; 寺尾 京平

  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2018/10  Institute of Electrical Engineers of Japan
  
• Temperature sensitivity evaluation of fully wireless optical type sensor for pressure and temperature monitoring on NOTES  [Not invited]

  前田 祐作; 森 宏仁; 大平 文和; 高尾 英邦

  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2018/10
• An Array-Type MEMS Fingerprint-like Tactile Sensor Realizing High Resolution Measurement of Spatially Distributing Tactile Information  [Not invited]

  綿谷一輝; 寺尾 京平; 下川 房男; 高尾 英邦

  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2018/10
• 超高分解能触覚センサによるサブミクロン領域の手触り感判別  [Not invited]

  中島 翼; 綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦

  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2018/10
• 毛包細胞の機能を模した高感度MEMSシリコン毛デバイス  [Not invited]

  濱本 晃輝; 寺尾 京平; 下川 房男; 高尾 英邦

  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2018/10
• Ultra-high resolution MEMS tactile sensors for nano-technology  [Invited]

  Hidekuni Takao

  European Advanced Materials Congress(EAMC2018)  2018/08
• シリコン集積化 MEMS 技術による高解像度触覚センシング  [Invited]

  高尾英邦

  第65回応用物理学会春季学術講演会  2018/03
• 触覚センサの計測時における微細凹凸表面形状と摩擦力の関係  [Not invited]

  綿谷一輝; 寺尾京平; 下川房男; 高尾英邦

  平成30年電気学会全国大会  2018/03
• 打撃による材料の硬さ情報取得を目指したMEMSアクティブ触覚センサ  [Not invited]

  宮澤賢樹; 寺尾京平; 下川房男; 高尾英邦

  平成30年電気学会全国大会  2018/03
• 高分解能MEMS触覚センサを用いた毛髪表面の手触り感計測  [Not invited]

  中光孝太; 綿谷一輝; 寺尾京平; 下川房男; 高尾英邦

  平成30年電気学会全国大会  2018/03
• 高分解能触覚センサと深層学習を用いた接触対象の精密判別  [Not invited]

  上田剣政; 綿谷一輝; 寺尾京平; 下川房男; 高尾英邦

  平成30年電気学会全国大会  2018/03
• 針状接触子を有する2軸触覚センサによるサブミクロン領域の手触り感計測  [Not invited]

  中島 翼; 綿谷一輝; 寺尾京平; 下川房男; 高尾英邦

  平成30年電気学会全国大会  2018/03
• 光学式センサによる軟性内視鏡手術下での腹腔内圧力モニタリングに向けた動物実験  [Not invited]

  前田祐作; 森 宏仁; 中川智明; 高尾英邦

  平成30年電気学会全国大会  2018/03
• モーメント検出能を有する高分解能MEMS触覚センサ  [Not invited]

  濱本晃輝; 寺尾京平; 下川房男; 高尾英邦

  平成30年電気学会全国大会  2018/03
• Ultra-High Resolution Tactile Sensing with MEMS Technology  [Invited]

  Hidekuni Takao

  The 1st JAIST World Conference  2018/02
• DRIEを用いたナノ触覚センサの開発と手触り計測技術の実現  [Invited]

  高尾英邦

  MEMS用シリコン深堀り(DRIE）装置活用セミナー  2018/01
• Novel High Resolution MEMS Tactile Sensors For Measurement of Fingertip Feelings  [Invited]

  Hidekuni Takao

  International Workshop on Physics of Semiconductor Devices: IWPSD 2017  2017/12
• マイクロ流体デバイスによる敗血症に伴う腎微小環境変化の解析  [Not invited]

  田尾 祐一; 高尾 英邦; 下川 房男; 中野 大介; 寺尾 京平

  生命科学系学会合同年次大会  2017/12  生命科学系学会合同年次大会運営事務局
  
• High Resolution Tactile Sensing with Silicon MEMS Sensors for Measurement of Fingertip Sensation  [Invited]

  Hidekuni Takao

  14th International SoC Design Conference (ISOCC 2017)  2017/11
• Optical driven microtool with enzyme-functionalized surface for direct molecular processing  [Not invited]

  増田 晃士; 高尾 英邦; 下川 房男; 寺尾 京平

  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2017/10  Institute of Electrical Engineers of Japan
  
• Investigation of Process Parameters for Control of Diameter and Alignment of Self-assembled DNA Nanowires  [Not invited]

  神谷 昌吾; 高尾 英邦; 下川 房男; 寺尾 京平

  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2017/10  Institute of Electrical Engineers of Japan
  
• Development of Si blade array device of through hole type for realizing organ analysis  [Not invited]

  塩見 太朗; 香川 大地; 高尾 英邦; 下川 房男; 寺尾 京平

  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2017/10  Institute of Electrical Engineers of Japan
  
• 微細な表面形状と摩擦を用いたザラザラ感定量化モデル  [Not invited]

  大西智博; 綿谷一輝; 佐藤敬子; 寺尾京平; 下川房男; 高尾英邦

  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2017/10
• 指紋・指腹の表面質感検知能を集積したマルチスケール型MEMS触覚センサ  [Not invited]

  綿谷一輝; 寺尾京平; 下川房男; 高尾英邦

  第9回「集積化MEMSシンポジウム」  2017/10
• 触覚MEMSセンサを用いた画像処理による物質表面形状検査モデルの作成の検討  [Not invited]

  江見拓哉; 小椋清孝; 横川智教; 佐藤洋一郎; 山内仁; 高尾英邦; 有本和民

  第9回「集積化MEMSシンポジウム」  2017/10
• 医療での皮膚感覚計測応用を目指した「細胞化センサ」技術  [Invited]

  高尾英邦

  第2回黒潮カンファレンス  2017/10
• 触り心地の定量評価と測定・解析技術  [Invited]

  高尾英邦

  技術情報協会  2017/10
• 表面質感の取得を目指した高感度触覚センサ  [Not invited]

  綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦

  第22回日本バーチャルリアリティ学会  2017/09
• 微細な表面形状と摩擦の波動に基づくザラザラ感定量化の研究  [Not invited]

  大西 智博; 綿谷 一輝; 佐藤 敬子; 寺尾 京平; 下川 房男; 高尾 英邦

  第22回日本バーチャルリアリティ学会  2017/09
• 触素材に対するテクスチャ知覚の研究ー2軸触覚センサによる物理的計測を用いてー  [Not invited]

  佐藤敬子; 四宮成克; 綿谷一輝; 大西智博; 高尾英邦

  日本心理学会第81回大会  2017/09
• Development of high resolution MEMS tactile sensor device and its application  [Invited]

  Hidekuni Takao

  The Collaborative Conference on Intelligent Systems and Materials 2017  2017/09
• 人間の感覚計測に向けたセンシングデバイス  [Invited]

  高尾英邦

  電気学会 電子情報システム部門大会  2017/09
• 指先の手触り感評価に向けた高精細触覚センサと化学繊維開発への応用  [Invited]

  高尾英邦

  第66回中国四国産学連携化学フォーラム  2017/08
• High Resolution MEMS Tactile Sensors for Realization of Artificial Sense of Fingertip  [Invited]

  Hidekuni Takao

  ISACIT2017  2017/08
• 微細な表面形状と摩擦を用いたザラザラ感定量化モデル  [Not invited]

  大西智博; 綿谷一輝; 佐藤敬子; 寺尾京平; 下川房男; 高尾英邦

  第8回集積化MEMS技術研究ワークショップ  2017/07
• 高分解能２軸触覚センサにおける対象表面と微細接触子間の接触解析  [Not invited]

  綿谷一輝; 寺尾京平; 下川房男; 高尾英邦

  第8回集積化MEMS技術研究ワークショップ  2017/07
• 超高解像型 MEMS 触覚センサにおける接触子破損に関する考察  [Not invited]

  中島 翼; 綿谷 一輝; 寺尾 京平; 下川 房男; 高尾英邦

  第8回集積化MEMS技術研究ワークショップ  2017/07
• 集積回路プロセスによる機能集積型MEMSマイクロセンサの開発  [Invited]

  高尾英邦

  Cat-CVD研究会  2017/07
• 超高解像度触覚センサによる手触り感計測技術への展開  [Invited]

  高尾英邦

  技術情報協会  2017/04
• 軟性内視鏡手術での腹腔内モニタリングに向けた光学式圧力センサ  [Not invited]

  中川 智明; 前田 祐作; ムハマド ザフリ; 小原英幹; 森 宏仁; 高尾 英邦

  第64回応用物理学会春季学術講演会  2017/03
• NOTESでの腹腔内モニタリングのための集積化圧力・温度センサの動物体内での長期安定性検証  [Not invited]

  前田 祐作; 前田 光平; 小原 英幹; 森 宏仁; 高尾 英邦

  第64回応用物理学会春季学術講演会  2017/03
• ナノ接触センシングﾞ技術の開発とソフトマテリアルへの期待  [Invited]

  高尾英邦

  日本化学会中国四国大会  2016/11
• A Two-Axis Tactile Sensor with High Sensitivity Aimed at Measurement of Micro Region Surface Texture  [Not invited]

  綿谷 一輝; 香西 亮吾; 寺尾 京平; 下川 房男; 高尾 英邦

  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2016/10  Institute of Electrical Engineers of Japan
  
• 大面積電極の垂直実装による高感度MEMS静電気センサの実現  [Not invited]

  飯間 敦矢; 岡 勇作; 寺尾 京平; 下川 房男; 高尾 英邦

  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2016/10
• 差分論理表現に基づく時間ペトリネットの有界モデル検査の高速化  [Not invited]

  江見拓哉; 横川智教; 佐藤洋一郎; 有本和民; 小椋清孝; 山内仁; 高尾英邦

  平成28年度 (第67回) 電気・情報関連学会中国支部連合大会  2016/10
• センシングの新分野を指向する「細胞化センサ」の開発  [Invited]

  高尾英邦

  2016年電子情報通信学会ソサイエティ大会  2016/09
• 高分解能２軸触覚センサを用いた布表面手触りの識別  [Not invited]

  綿谷一輝; 香西亮吾; 寺尾京平; 下川房男; 高尾英邦

  第7回集積化MEMS技術研究ワークショップ  2016/07
• 大面積垂直電極を有する高感度静電気センサの製作と評価  [Not invited]

  飯間敦矢; 岡勇作; 寺尾京平; 下川房男; 高尾英邦

  第7回集積化MEMS技術研究ワークショップ  2016/07
• 基準面構造を持つ生体硬さセンサにおける荷重依存性低減の理論的検証  [Not invited]

  前田祐作; 寺尾京平; 下川房男; 高尾英邦

  第7回集積化MEMS技術研究ワークショップ  2016/07
• High Resolution Silicon MEMS Tactile Sensors for Measurement of Fingertip Sensation  [Invited]

  Hidekuni Takao

  The 2016 International Meeting for Future of Electron Devices  2016/06
• 高温微細加工を目指したマイクロフレームアレイデバイス  [Not invited]

  井原拓也; 寺尾京平; 下川房男; 高尾英邦

  平成28年電気学会全国大会  2016/03
• 制御性と耐圧性を高めた組立式MEMSマイクロバルブの製作  [Not invited]

  武政智史; 相田泰志; 高尾英邦

  平成28年電気学会全国大会  2016/03
• 大面積電極の垂直実装を用いた高感度静電気センサの開発  [Not invited]

  飯間敦矢; 寺尾京平; 下川房男; 高尾英邦

  平成28年電気学会全国大会  2016/03
• 生体内でMEMSセンサを使用するための実装法  [Not invited]

  中川智明; 前田光平; 綿谷一輝; 前田祐作; 小原英幹; 森 宏仁; 高尾英邦

  平成28年電気学会全国大会  2016/03
• NOTES での生体内圧力センサにおける照度および温度変動への対策の検討  [Not invited]

  前田祐作; 前田光平; 綿谷一輝; 中川智明; 小原英幹; 森 宏仁; 高尾英邦

  平成28年電気学会全国大会  2016/03
• E-2-4 Development of Local Light Stimulation and Multi-point Measurement Device for Neural Network Analysis  [Not invited]

  UENO Hidetaka; KOMAI Shoji; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; KOTERA Hidetoshi; SUZUKI Takaaki

  Conference on Information, Intelligence and Precision Equipment : IIP  2016/03  The Japan Society of Mechanical Engineers
   

  In brain science and psychology, one of the most important purposes of recent studies about neural network, biological circuit in brain, is to establish a method of treatment for the central nervous system disease, such as Alzheimer. Neurons in a neural network is stimulated and controlled by visible lights by Optogenetics methods. In thie paper, we propose a microchip integrated micro electrodes, micro lenses, and pinholes. The proposed microchip is capable of stimulating a neural network with two focused lights which have different affection to the neuron, and measuring the electrical reaction of the neural network.
• E-2-3 Development of a Compact Cell Trapping Device Integrated with Fluid Handling Components  [Not invited]

  Furuya Naoki; SHIMAGAMI Takuya; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; AKIMITSU Kazuya; SUZUKI Takaaki

  Conference on Information, Intelligence and Precision Equipment : IIP  2016/03  The Japan Society of Mechanical Engineers
   

  In recent years, the various studies of trapping and operating single cells by using a microfluidic have been proceeded. Many conventional methods requires a fluid operating unit outside the device. Therefore, it is difficult to carry the device during operation. In this study, We integrate a small cell trapping device with miniature peristaltic pumps and a chip made by multidirectional photolithography method. The cells on the highly portable device are easily stored in an incubator and observed under the microscope.
• 繊細な触覚を検知できるナノ触覚デバイスの開発と前立腺癌骨転移への応用の可能性  [Invited]

  高尾英邦

  第15回KMU泌尿器科セミナー  2016/02
• シリコンで創る指先皮膚感覚：集積化シリコン触覚センサの開発と応用  [Invited]

  高尾英邦

  電子情報技術産業協会第13回知的センシング技術分科会  2016/01
• Development of a Pressure and Temperature Sensor Aimed to Monitoring of Abdominal Cavity in Endoscopic Surgery  [Not invited]

  前田 祐作; 前田 光平; 綿谷 一輝; 小原 英幹; 森 宏仁; 高尾 英邦

  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2015/10
• 面内変位型触覚センサを用いた手触り感の定量化のための新たな触覚評価方法  [Not invited]

  香西亮吾; 寺尾京平; 下川房男; 高尾英邦

  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2015/10
• 低侵襲内視鏡手術への適応に向けた動物体内でのMEMSセンサ埋め込み型フードの有効性検証  [Not invited]

  綿谷 一輝; 前田 光平; 前田; 小原 英幹; 森 宏仁; 高尾 英邦

  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2015/10
• マイクロ光学式マルチガスセンサの実現を目指したシリコン上の光学セルフアライメント技術  [Not invited]

  山本 善哉; 篠崎 亮輔; 朝日 一平; 二宮 英樹; 下川 房男; 高尾 英邦

  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2015/10
• Si/polymer/glassチップを用いた神経細胞組織内局所光刺激デバイスの開発  [Not invited]

  上野秀貴; 駒井章治; 寺尾京平; 高尾英邦; 下川房男; 小寺秀俊; 鈴木孝明

  センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2015/10
• 人間のように変化を感じるマイクロセンサ技術の最前線 ：日常生活に染み込むセンサー技術の将来を予測  [Invited]

  高尾英邦

  Embedded Technology West2015 組込み総合技術展 関西 テクニカルセッション  2015/06
• 低侵襲内視鏡手術への適応に向けたMEMSセンサ埋め込み型内視鏡フードの研究  [Not invited]

  前田光平; 前田祐作; 森 宏仁; 高尾英邦

  平成27年電気学会全国大会  2015/03
• MEMS硬さセンサにおける基準面構造による押し当て荷重依存性低減効果の検証  [Not invited]

  前田 祐作; 寺尾 京平; 鈴木 孝明; 下川 房男; 高尾 英邦

  平成27年電気学会全国大会  2015/03
• Digitizing Our Sense of Touch with Semiconductor Micro Integrated Sensors  [Invited]

  Hidekuni Takao

  The 3rd Taiwan-Japan Smart Tourism Workshop  2015
• シリコン微細加工技術を用いた320umピッチの流路を有する大気圧プラズマジェットアレイの製作と評価  [Not invited]

  武政 智史; 山崎 秀貴; 寺尾 京平; 鈴木 孝明; 下川 房男; 高尾 英邦

  第31回「センサ・マイクロマシンと応用システム」シンポジウム  2014/10
• 基準面構造を有する高感度MEMS硬さセンサによる柔軟材料の評価  [Not invited]

  前田 祐作; 寺尾 京平; 鈴木 孝明; 下川 房男; 高尾 英邦

  第31回「センサ・マイクロマシンと応用システム」シンポジウム  2014/10
• 凹凸と摩擦力の相関を取得可能なMEMS横型触覚センサ  [Not invited]

  香西 亮吾; 寺尾 京平; 鈴木 孝明; 下川 房雄; 高尾 英邦

  第31回「センサ・マイクロマシンと応用システム」シンポジウム  2014/10
• マイクロフレームジェットデバスの実現を目指した消炎距離の測定  [Not invited]

  井原 拓也; 寺尾 京平; 鈴木 孝明; 下川 房男; 高尾 英邦

  第31回「センサ・マイクロマシンと応用システム」シンポジウム  2014/10
• SiOBへの 適応を目指した光学自動アライメント技術の開発  [Not invited]

  山本 善哉, 篠崎 亮輔, 朝日 一平, 下川 房男, 二宮 英樹, 高尾 英邦

  第31回「センサ・マイクロマシンと応用システム」シンポジウム  2014/10
• 材料判別を実現する熱伝導率センサ集積型メッシュ状シリコン触覚イメージャ  [Not invited]

  大杉亮太; 高木優佑; 前田祐作; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦

  第31回「センサ・マイクロマシンと応用システム」シンポジウム  2014/10
• 材料判別を実現する熱伝導率センサ集積型メッシュ状シリコン触覚イメージャ  [Not invited]

  大杉亮太; 高木優佑; 前田祐作; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦

  2014年 第75回応用物理学会秋季学術講演会  2014/09
• 小型分光器の実現に向けた面内回転型MEMS分光デバイス  [Not invited]

  岡 勇作; 篠崎亮輔; 下川房男; 大平文和; 高尾英邦

  2014年 第75回応用物理学会秋季学術講演会  2014/09
• 最新マイクロセンサー技術の応用と展望：～人間の感覚に迫る多様なセンサー技術と有用性を探る～  [Not invited]

  Embedded Technology West2014 組込み総合技術展 関西 テクニカルセッション  2014/06
• 神経細胞ネットワーク解析のための局所光刺激デバイスの開発  [Not invited]

  上野秀貴; 駒井章治; 寺尾京平; 高尾英邦; 下川房男; 小寺秀俊; 鈴木孝明

  日本機械学会情報・知能・精密機器部門講演会講演論文集  2014/03
• 電位計測アレイを集積化した細胞組織内局所光刺激デバイスの開発  [Not invited]

  上野秀貴; 駒井章治; 寺尾京平; 高尾英邦; 下川房男; 小寺秀俊; 鈴木孝明

  センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2014
• 最新マイクロセンサー技術：～人間の感覚に迫る多様なセンサー技術で何ができ、どんな可能性が開けるのか～  [Not invited]

  Embedded Technology West2013 組込み総合技術展 関西 テクニカルセッション  2013/06
• 材料判別能にむけた複合センサを集積するメッシュ状シリコン触覚イメージセンサ  [Not invited]

  高木優佑; 前田祐作; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦

  平成25年電気学会全国大会  2013/03
• 可動MEMSデバイスへの光学素子垂直自動アライメント技術  [Not invited]

  岡 勇作; 篠﨑亮輔; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦

  平成25年電気学会全国大会  2013/03
• 集積化シリコンMEMS技術による新機能デバイスの創出（キーノートスピーチ）

  高尾 英邦

  精密工学会学術講演会講演論文集 2013  2013
• Patternable Atmospheric-Pressure Plasma Jets with Gas Discharge in Microfluidic Channel Array  [Not invited]

  Hidetaka Yamasaki; Kyohei Terao; Takaaki Suzuki; Fusao Simokawa; Hidekuni Takao

  The 26th International Conference on Micro Electro Mechanical Systems (IEEE MEMS2013)  2013/01
• A Post-CMOS Process of High Adhesion SU-8 Structure to Apply to Sensor Device  [Not invited]

  Y. Maeda; K. Terao; T. Suzuki; F. Shimokawa; H. Takao

  25th International Microprocesses and Nanotechnology Conference (MNC2012)  2012/11
• シリコン光学ベンチへの一体化を目指した回転型 MEMS ミラーの製作と評価  [Not invited]

  篠崎 亮輔; 大平 文和; 寺尾 京平; 鈴木 孝明; 下川 房男; 高尾 英邦

  第29回「センサ・ マイクロマシンと応用システム」シンポジウム  2012/10
• 混合噴射機能を持つマルチジェット型ベンチュリ噴霧器と力覚・冷覚複合提示ディスプレイへの応用  [Not invited]

  荒井 將崇; 寺尾 京平; 鈴木 孝明; 下川 房男; 大平 文和; 高尾 英邦

  第29回「センサ・マイクロマシンと応用システム」シンポジウム  2012/10
• 微小流路内放電を用いるMEMS大気圧プラズマアレイデバイス  [Not invited]

  山崎 秀貴; 寺尾 京平; 鈴木 孝明; 下川 房男; 高尾 英邦

  第29回「センサ・マイクロマシンと応用システム」シンポジウム  2012/10
• 基準面を用いて物体表面から摩擦力および硬さ情報を取得する機能集積型皮膚感覚センサアレイ  [Not invited]

  前田 祐作; 寺尾 京平; 鈴木 孝明; 下川 房男; 高尾 英邦

  第29回「センサ・マイクロマシンと応用システム」シンポジウム  2012/10
• A Novel Integrated Tactile Image Sensor for Detection of Surface Friction and Hardness Using the Reference Plane Structure  [Not invited]

  Yusaku Maeda; Kyohei Terao; Takaaki Suzuki; Fusao Shimokawa; Hidekuni Takao

  IEEE Sensors2012 Conference  2012/10
• 新機能創出にむけた集積化シリコンMEMS技術とその応用  [Not invited]

  高尾英邦

  第30回レーザセンシングシンポジウム  2012/09
• Design and Fabrication of Electrostatically Driven In-Plane MEMS Rotational Mirror with Electrostatic Rotary Encoder  [Not invited]

  R. Shinozaki; F. Oohira; K. Terao; T. Suzuki; F. Simokawa; H. Takao

  2012 International Conference on Optical MEMS & Nanophotonics  2012/08
• Evaluation of Highly Sensitive C/V Converter with an Inverter for CMOS/MEMS Integration  [Not invited]

  Hidekuni Takao; Ryo Kodama; Hajime Miyao; Makoto Ishida

  World Automation Congress 2012 (WAC2012)  2012/06
• 角度センシング機能を有する回転型静電MEMSミラーの設計と製作  [Not invited]

  篠崎亮輔; 大平文和; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦

  平成24年 電気学会全国大会  2012/03
• MEMS技術を用いた微細大気圧プラズマアレイデバイスの製作  [Not invited]

  山崎秀貴; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦

  平成24年 電気学会全国大会  2012/03
• 接触面から複数の触覚情報を取得する機能集積型皮膚感覚センサアレイの設計と製作  [Not invited]

  前田祐作; 高木優祐; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦

  2012年春期 第59回応用物理学関係連合講演会  2012/03
• AIR-FLOW BASED MULTIFUNCTIONAL TACTILE DISPLAY DEVICE WITH MULTI-JET INTEGRATED MICRO VENTURI NOZZLE ARRAY  [Not invited]

  Masataka Arai; Kyohei Terao; Takaaki Suzuki; Fusao Simokawa; Fumikazu Oohira; Hidekuni Takao

  The 25th International Conference on Micro Electro Mechanical Systems (IEEE MEMS2012)  2012/02
• Background correction method of the spectral-absorption-index image by the diffraction-grating-type quantitative-bandpass-plate  [Not invited]

  Satou Shun; Takuma Takashi; Inui Asuka; Tsutsumi Ryosuke; Yuzuriha Takehiko; Kojima Daisuke; Takao Hidekuni; Nishiyama Akira; Ishimaru Ichirou

  Proceedings of JSPE Semestrial Meeting  2012  The Japan Society for Precision Engineering
   

  生体組織内部構造から生じる微弱散乱光の暗視野分光イメージングによる，グルコースなどの生体成分定量化を目指している．分光吸収率から高精度に成分定量計測を行うには，光源光量変動や位相シフター移動精度の補正が重要になる．そこで，窓材の一部に設けた回折格子から生じる一次回折光の内，対物レンズ内に入射する波長帯を狭帯域参照光とし，干渉強度変化の振幅から光源変動，位相から位相シフターの揺らぎを同時に補正する．
• MEMS/CMOS集積化技術の過去・現在・未来 ～ デバイス技術と設計技術の変遷 ～  [Invited]

  高尾英邦

  デザインガイア2011 -VLSI設計の新しい大地—  2011/11
• Micro Fluidic Circuit Design with “SPICE Simulation  [Not invited]

  H. Takao; M. Sugiura; M. Ishida; K. Terao; T. Suzuki; F. Shimokawa; F. Oohira

  The 24th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2011)  2011/11
• A Venturi-type Micro Mist Generator fabricated by MEMS Technology and its Application to Local Surface Cooling of Target Objects  [Not invited]

  M. Arai; K. Terao; F. Shimokawa; T. Suzuki; F. Oohira; H. Takao

  24th International Microprocesses and Nanotechnology Conference (MNC2011)  2011/10
• Flexible Silicon Triaxial Tactile Imager with Integrated 800ｵm-Pitch Sensor Pixel Structures on a Diaphragm  [Not invited]

  H. Takao; H. Okada; M. Ishida; T. Suzuki; F. Oohira

  IEEE Sensors2011 Conference  2011/10
• In-pixel type small-scale integrated C-V converter with chopper stabilized CMOS inverter  [Not invited]

  Ryo Kodama; Hajime Miyao; Makoto Ishida; Hidekuni Takao

  2011 International Conference on Solid State Devices and Materials (SSDM2011)  2011/09
• ベンチュリ構造によるマイクロミスト生成機構と冷感集積化複合触覚提示デバイスへの応用  [Not invited]

  荒井將崇; 寺尾京平; 鈴木孝明; 下川房男; 大平文和; 高尾英邦

  第28回センサ・マイクロマシンと応用システムシンポジウム  2011/09
• CMOS 集積化に向けたMEMS デバイスのスケーリング効果  [Not invited]

  平井紳太郎; 寺尾 京平; 鈴木 孝明; 下川 房男; 大平文和; 高尾 英邦

  第28回センサ・マイクロマシンと応用システムシンポジウム  2011/09
• Zero Temperature Coefficient Gas-Sealed Pressure Sensor Using Mechanical Temperature Compensation  [Not invited]

  X.c. Hao; YG. Liang; H. Takao; K. Maenaka; T. Fujita; K. Higuchil

  The 16th International Conference on Solid-State Sensors, Actuators and Microsystems  2011/06
• ナノ時代におけるCMOS集積化MEMS技術の現状と展望  [Not invited]

  次世代ナノ技術に関する研究専門委員会主催第2回研究会「異種要素の集積化技術」  2011/01
• 集積化センサ技術とその実用例～そのポテンシャルを活かす回路と集積化の勘所～  [Not invited]

  NEアカデミー  2011
• センサ・CMOS集積化技術★徹底解説  [Not invited]

  Electronic Journal Technical Seminar  2011
• A Robust and Sensitive Silicon Tactile Imager with Individually Formed SU-8 Protective Layers on Piezoresistor Pixels  [Not invited]

  H. Takao; H. Okada; M. Ishida; K. Terao; T. Suzuki; F. Oohira

  IEEE Sensors 2010 Conference  2010/11
• 異種機能集積化におけるMEMS/CMOS設計技術  [Not invited]

  高尾英邦

  第71回応用物理学会学術講演会シンポジウム  2010/09
• T1601-1-3 ガラス基板とポリマー材料を用いて製作したPolymer-MEMSミラーの駆動特性評価([T1601-1]マイクロナノメカトロニクス(1))日本機械学会年次大会講演論文集 2010

  佐々木 修; 寺尾 京平; 鈴木 孝明; 高尾 英邦; 大平 文和

  日本機械学会年次大会講演論文集2010  2010/09
• 皮膚感覚の超越をめざすシリコン集積化触覚イメージャーの開発  [Not invited]

  高尾英邦

  2010年電子情報通信学会総合大会チュートリアルセッション「「五感」情報処理： アプリケーションの展望」  2010/03
• 社会の安全・安心にむけたユビキタス集積化マイクロセンサ技術  [Not invited]

  高尾英邦; 石田 誠; 澤田和明; Jong-Wan Kim; Wan-Hoon Lee

  2010年電子情報通信学会総合大会チュートリアルセッション「安全・安心な生活のために：情報通信ネットワーク・回路・システム技術の挑戦」  2010/03
• B-5 Manipulation of Stretching Chromosomes Form on Microstructures Using Centrifugal Force  [Not invited]

  SUZUKI Hiroyuki; HIRAMARU Daisuke; TERAO Kyouhei; TAKAO Hidekuni; OOHIRA Humikazu; KOTERA Hidetoshi; SUZUKI Takaaki

  Conference on Information, Intelligence and Precision Equipment : IIP  2010/03  一般社団法人日本機械学会
   

  In this study, we propose a concentrically arrayed micro-mesh structure for high resolution gene analysis using fiber DNA. The micro-mesh structures composed of tapered micro-wires were fabricated by a rotated / inclined exposure method with a single step of the lithography. DNA fibers are constructed over micro-mesh structure array by centrifugal stretching, and can achieve high throughput Fluorescent In Situ Hybridization.
• 集積化センサ技術～そのポテンシャルを活かす回路と集積化の勘所～  [Not invited]

  NEアカデミー  2010
• CMOS/MEMS技術の可能性と機能集積化触覚センサへの応用  [Not invited]

  第7回マイクロシステム応用研究会  2010
• A Membrane Tyep Si-MEMS Tactile Imager with Fingerprint Structure for Realization of Slip Sensing Capability  [Not invited]

  Hiroki Okada; Masaki Yawata; Makoto Ishida; Kazuaki Sawada; Hidekuni Takao

  The 23rd IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2010)  2010/01
• Fabrication of a multi-modal sensor with pH, EC and temperature sensing areas for agriculture application  [Not invited]

  Masato Futagawa; Taichi Iwasaki; Hidekuni Takao; Makoto Ishida; Kazuaki Sawada

  IEEE Sensors 2009 Conference  2009/10
• Fabrication of Smart Electrochemical Sensor with CMOS Integrated Circuits  [Not invited]

  Tomoyuki Yamazaki; Takaaki Ikeda; Yoshiko Kano; Hidekuni Takao; Makoto Ishida; Kazuaki Sawada

  2009 International Conference on Solid State Devices and Materials (SSDM2009)  2009/10
• Three Dimensional Surface-Shape Tactile Imager with Fingertip-Size Silicon Integrated Sensor-Membran  [Not invited]

  Hidekuni Takao; Masaki Yawata; Kazuaki Sawada; Makoto Ishida; Hiroki Okada

  the 15th International Conference on Sensors, Actuators, and Microsystems (IEEE Transducers’09)  2009/06
• 光・pH融合イメージセンサの提案と製作・評価(深い感性の喚起と情報センシング,高精細撮像,高感度及び一般)

  中澤 寛一; 松尾 純一; 飛澤 健; 高尾 英邦; 石田 誠; 澤田 和明

  映像情報メディア学会技術報告  2008/11
• 423 高密度集積化に適した表面加工型マイクロ流体集積回路の形成と評価(T09-1 微小機械システムにおけるマイクロ・ナノ力学(1) MEMSにおけるマイクロ・ナノ力学,大会テーマセッション,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

  高尾 英邦; 田中 信裕; 杉浦 正典; 澤田 和明; 石田 誠

  日本機械学会年次大会講演論文集 2008  2008/08
• 3321 埋め込み応用を目指したシリコンMEMS変形計測センサ(J26-4 マイクロメカトロニクス(4),J26 マイクロメカトロニクス)

  高尾 英邦; 木綱 俊輔; 早坂 慶一; 澤田 和明; 石田 誠

  日本機械学会年次大会講演論文集2007  2007/07
• 22-6 フィルタレス蛍光検出センサへの電荷蓄積技術の適用(第22部門 イメージセンサI)

  丸山 結城; 澤田 和明; 高尾 英邦; 石田 誠

  映像情報メディア学会年次大会講演予稿集 2005  2005
• 20-8 フィルタを使用しない蛍光検出センサの提案と試作(第20部門 特殊撮像・新機能新原理のイメージセンサ)

  丸山 結城; 澤田 和明; 高尾 英邦; 石田 誠

  映像情報メディア学会年次大会講演予稿集 2004  2004
• 20-9 CMOS pHイメージセンサの製作(第20部門 特殊撮像・新機能新原理のイメージセンサ)

  飛沢 健; 澤田 和明; 高尾 英邦; 石田 誠

  映像情報メディア学会年次大会講演予稿集 2004  2004
• 焦電体を用いた電界放出型赤外線センシングデバイス

  高室 大介; 高尾 英邦; 澤田 和明; 石田 誠

  映像情報メディア学会技術報告  2003/02
• a-Siアバランシェ増幅型光電変換膜積層型イメージセンサのCMOS読み出し回路の検討(映像入出力および一般)

  花田 昌樹; 秋山 正弘; 足木 光昭; 高尾 英邦; 澤田 和明; 石田 誠

  映像情報メディア学会技術報告  2002/11
• CMOSとの集積化に適したJFET素子と低雑音増幅回路の形成(アナログ・デジアナ・センサ, 通信用LSI)

  高尾 英邦; 浅岡 力也; 伊藤 芳晃; 澤田 和明; 川人 祥二; 石田 誠

  映像情報メディア学会技術報告  2002/09
• 光・化学融合イメージセンサの提案と試作(高機能イメージセンサ)

  澤田 和明; 大科 孝博; 高尾 英邦; 石田 誠

  映像情報メディア学会技術報告  2002/06
• n型多結晶シリコン膜上へのアモルファスシリコン系pinフォトダイオードの製作

  秋山 正弘; 花田 昌樹; 高尾 英邦; 澤田 和明; 石田 誠

  映像情報メディア学会技術報告  2001/11
• Autozero技術を用いた高温環境用SOI-CMOS演算増幅回路

  高尾 英邦; 伊奈 史恵; 堂坂 利彰; 澤田 和明; 石田 誠

  映像情報メディア学会技術報告  2001/09
• 24-3 ポリシリコン膜上へのアモルファスシリコン系pinフォトダイオードの製作

  秋山 正弘; 花田 昌樹; 高尾 英邦; 澤田 和明; 石田 誠

  映像情報メディア学会年次大会講演予稿集  2001/08
• 24-2 PZT薄板からの電界放出電子の画像化の検討

  高室 大介; 冨田 勝彦; 澤田 和明; 高尾 英邦; 石田 誠

  映像情報メディア学会年次大会講演予稿集  2001/08
• アモルファスシリコンpin光電変換膜の過剰雑音特性  [Not invited]

  秋山 正弘; 澤田 和明; 高尾 英邦; 石田 誠

  映像情報メディア学会年次大会講演予稿集 2000  2000

Works

• 超小型赤外分光イメージング用MEMSミラーの開発

  2011
• 「静電容量型圧力センサ」の開発

  2009 -2010

MISC

• iPS細胞胚様体の局所刺激を目指したマイクロデバイスの開発—Microfluidic Device for Differentiation Induction of iPS Cells-derived Embryoid Bodies with Local Chemical Stimulation

  楠 直人; 小長谷 周平; 西田 光徳; 佐藤 成弘; 高尾 英邦; 下川 房男; 寺尾 京平  電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines  142-  (12)  310  -315  2022/12
• 構造物ヘルスモニタリングに向けた構造色式荷重センサの製作工程の確立—Fabrication process of structural color-based force sensor for structural health monitoring

  佐柄 雅聡; 前田 祐作; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  39-  4p  2022/11
• Development of 3D model of capillary microconstriction for analysis of cancer cell dynamics

  白神 吉洋; 高尾 英邦; 下川 房男; 寺尾 京平  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  37-  4p  2020/10
• On site cell assembly in a microfluidic device using optically driven microtools with antibody-immobilized surface

  森 駿太郎; 高尾 英邦; 下川 房男; 寺尾 京平  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  37-  4p  2020/10
• Development of Liquid/Particle-Resistant Packaging of High-Resolution MEMS Tactile Sensor for Medical Applications

  綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  37-  3p  2020/10
• Acquisition of Local Tactile Information by Spot Contact Using A Highly Sensitive MEMS Silicon-Hair Device

  植村 周; 濱本 晃輝; 寺尾 京平; 下川 房男; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  37-  3p  2020/10
• A MEMS Tactile Antenna with Integrated Inclination Sensor for Tilt-Angle Detection to the Target Surface

  岡 早秀; 寺尾 京平; 下川 房男; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  37-  5p  2020/10
• SU-8ナノ加工を用いた光操作ナノニードルの開発—Development of optically-driven nanoneedles using SU-8 nanofabrication

  原田 雅彦; 高尾 英邦; 下川 房男; 寺尾 京平  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  37-  6p  2020/10
• A curved Surface-Type MEMS Tactile Array Sensor Realizing Simultaneous Measurement of Micro-Roughness, Friction and Hardness

  綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  36-  4p  2019/11
• Development of "The Touch Feeling Scanner" for Objective Evaluation of Fingertip Sensation

  西田 吉広; 中光 孝太; 綿谷 一輝; 寺尾 京平; 下川 房男; 有本 和民; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  36-  4p  2019/11
• Development of microfluidic device for analysis of sepsis infected kidney microenvironment

  小山 哲哉; 中野 大介; 高尾 英邦; 下川 房男; 寺尾 京平  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  36-  4p  2019/11
• Fablication and Evaluation of Nano Region Tactile Sensor with 60μN Frictional Force Sensitivity and 0.5μm Spatial Resolution

  中島 翼; 綿谷 一輝; 寺尾 京平; 下川 房男; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  36-  4p  2019/11
• Development of Force Sensor Using Structural Color change for Wireless Detection of Grab State During Endoscope Operation

  前田 祐作; 寺尾 京平; 下川 房男; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  36-  3p  2019/11
• 吸引吐出開口アレイを有する積層型マイクロ流体プローブの開発

  神谷昌吾; 石塚裕己; 高尾英邦; 下川房男; 寺尾京平  センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  35th-  2018
• マイクロ流体デバイスによる敗血症に伴う腎微小環境変化の解析

  田尾 祐一; 高尾 英邦; 下川 房男; 中野 大介; 寺尾 京平  生命科学系学会合同年次大会  2017年度-  [1P  -0599]  2017/12
• 触覚MEMSセンサを用いた画像処理による物質表面形状検査モデルの作成

  江見拓哉; 小椋清孝; 横川智教; 佐藤洋一郎; 山内仁; 有本和民; 高尾英邦  センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  34th-  2017
• E-2-3 Development of a Compact Cell Trapping Device Integrated with Fluid Handling Components

  Furuya Naoki; SHIMAGAMI Takuya; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; AKIMITSU Kazuya; SUZUKI Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2016-  "E  -2-3-1"-"E-2-3-3"  2016/03
• 触覚MEMSセンサを用いた画像処理による物質表面形状検査モデル作成の検討

  江見拓哉; 横川智教; 佐藤洋一郎; 有本和民; 小椋清孝; 山内仁; 高尾英邦  電気・情報関連学会中国支部連合大会講演論文集(CD-ROM)  67th-  2016
• Micro Cell Array Using Cell Surface Medication

  鈴木孝明; 鈴木孝明; 寺村裕治; 北濱若奈; 寺尾京平; 高尾英邦; 下川房男; 上野秀貴  電気学会バイオ・マイクロシステム研究会資料  BMS-16-  (1-8)  2016
• Fabrication of Nano-Actuator for Modulating Surface Plasmon Resonance Wavelength Using Crystalline Anisotropic Plasma Etching

  香川 大地; 鏡原 照正; 下川 房男; 高尾 英邦; 寺尾 京平; 山口 堅三; 鈴木 孝明  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  32-  1  -4  2015/10
• A new tactile evaluation method for quantification of touch sensation using an in-plane motion MEMS tactile sensor

  香西 亮吾; 寺尾 京平; 下川 房男; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  32-  1  -4  2015/10
• Optimization of Applied Voltage in μEP Chip for Plant Cell

  古谷 尚輝; 島上 卓也; 下川 房男; 寺尾 京平; 高尾 英邦; 秋光 和也; 鈴木 孝明  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  32-  1  -4  2015/10
• Molecular wiring with single giant DNA molecules using optically-driven microstructures

  犬飼 亮; 高尾 英邦; 下川 房男; 鈴木 孝明; 寺尾 京平  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  32-  1  -6  2015/10
• Verification of a MEMS embedded Endoscopic Hood in the Animal Body to the Adaptation to Endoscopic Surgery

  綿谷 一輝; 前田 光平; 前田 祐作; 小原 英幹; 森 宏仁; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  32-  1  -4  2015/10
• Development of a Pressure and Temperature Sensor Aimed to Monitoring of Abdominal Cavity in Endoscopic Surgery

  前田 祐作; 前田 光平; 綿谷 一輝; 小原 英幹; 森 宏仁; 高尾 英邦  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  32-  1  -4  2015/10
• Kretschmann type SPR sensing assisted with electrokinetic effects

  近藤 翔平; 高尾 英邦; 下川 房男; 鈴木 孝明; 寺尾 京平  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  32-  1  -5  2015/10
• 30am2-PN-24 Microfluidic control method using fin structures operated by frequency modulation

  KAWAI Hayao; YAMASHITA Hirohumi; TERAO Kyohei; TAKAO Hidekuni; YAMADA Kou; SHIMOKAWA Fusao; SUZUKI Takaaki  マイクロ・ナノ工学シンポジウム  2015-  (7)  "30am2  -PN-24-1"-"30am2-PN-24-2"  2015/10
• 30pm1-A-4 Fabrication of DNA Fiber Analysis Chip Using Rotated/Inclined Photolithography and PDMS Molding Process

  KITANO Kodai; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  マイクロ・ナノ工学シンポジウム  2015-  (7)  "30pm1  -A-4-1"-"30pm1-A-4-2"  2015/10
• MoP-25 DEVELOPMENT OF A LOCAL LIGHT STIMULATION DEVICE INTEGRATED WITH MICRO ELECTRODE ARRAY

  UENO Hidetaka; KOMAI Shoji; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; KOTERA Hidetoshi; SUZUKI Takaaki  Proceedings of ... JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE  2015-  "MoP  -25-1"-"MoP-25-3"  2015/06
• 21am2-E7 Separation and detection of biosamples using SPR sensor chip integrated with microslit structures

  Terao Kyohei; Hiramatsu Shinichi; Shimizu Kazunori; Miyanishi Nobumitsu; Suzuki Takaaki; Takao Hidekuni; Shimokawa Fusao; Ohira Fumikazu  マイクロ・ナノ工学シンポジウム  2014-  (6)  "21am2  -E7-1"-"21am2-E7-2"  2014/10
• J2230202 Development of High Accuracy Spray Coating Method Using Low Viscosity Thick Film Photoresist

  FUJIWARA Kiyoshi; AKAMATSU Mikio; KOUDA Naoko; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; SUZUKI Takaaki  Mechanical Engineering Congress, Japan  2014-  "J2230202  -1"-"J2230202-4"  2014/09
• E-2-5 Plasma Resistant Evaluation of Photoresist Treated by Vacuum UV Cure Process in ECR Plasma Etching

  HAMA Haruyosi; TERAO Kyohei; TAKAO Hidekuni; SIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2014-  "E  -2-5-1"-"E-2-5-3"  2014/03
• E-1-2 Improvement of Cell Trapping Efficiency in Microfluidic Device Having Micro-Orifice Array

  ISHII Takahiro; NISHIZAKI Hayato; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2014-  "E  -1-2-1"-"E-1-2-2"  2014/03
• E-1-3 Chromosome Stretching Characterization of High-Throughput DNA Fiber Analysis Device using centrifugal force

  KITANO Kodai; NITTA Yuki; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2014-  "E  -1-3-1"-"E-1-3-3"  2014/03
• 5PM1-C-1 Measurement of Trapping Efficiency of a Cell Trapping Device Fabricated by Single-Mask Multidirectional Photolithography

  Nishizaki Hayato; Fukuda Taisuke; Terao Kyohei; Takao Hidekuni; Oohira Fumikazu; Suzuki Takaaki  マイクロ・ナノ工学シンポジウム  2013-  (5)  25  -26  2013/11
• J161022 Reduction of misalignment for integrated microfluidic systems made of polydimethylsiloxane

  TAMAI Hidetaka; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Mechanical Engineering Congress, Japan  2013-  "J161022  -1"-"J161022-4"  2013/09
• J161012 Improvement of Mask Etching Selectivity and its application using Vacuum UV Curing Method

  FUJIMURA Kimiya; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Mechanical Engineering Congress, Japan  2013-  "J161012  -1"-"J161012-4"  2013/09
• J161021 Evaluation of a Polymer MEMS mirror integrated an angular rate sensor

  YAMASHITA Hirofumi; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Mechanical Engineering Congress, Japan  2013-  "J161021  -1"-"J161021-4"  2013/09
• J161015 Evaluation of chromosome extension properties on microstructures of gene analysis chip

  NITTA Yuki; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Mechanical Engineering Congress, Japan  2013-  "J161015  -1"-"J161015-4"  2013/09
• J161011 Finite element analysis for driving characteristics of a polymer-MEMS mirror driven attractive force

  SUZUKI Junya; MIURA Takuya; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; NAMAZU Takahiro; MORIKAKU Toshiyuki; OOHIRA Fumikazu; SUZUKI Takaaki  Mechanical Engineering Congress, Japan  2013-  "J161011  -1"-"J161011-4"  2013/09
• E-1-1 Development of a magnetically-driven micropump with photosensitivity nanocomposit

  UEDA Yusaku; TERAO Kyohei; TAKAO Hidekuni; SIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2013-  28  -30  2013/03
• E-1-2 Accuracy Evaluation of a Polydimethylsiloxane Replica in Soft Lithography

  TAMAI Hidetaka; TAKAO Hidekuni; OOHIRA Fumikazu; TERAO Kyohei; SIMOKAWA Fusao; SUZUKI Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2013-  31  -33  2013/03
• E-2-4 Integration of an angular rate sensor on a polymer MEMS mirror

  YAMASHITA Hirofumi; TERAO Kyohei; TAKAO Hidekuni; SIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2013-  52  -54  2013/03
• J161045 A cell trap chip having mesh structures fabricated by single-mask inclined photolithography

  NISHIZAKI Hayato; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Mechanical Engineering Congress, Japan  2012-  "J161045  -1"-"J161045-4"  2012/09
• J161023 Improvement of Si/Photoresist Mask Etching Selectivity using Vacuum UV Curing Method

  FUJIMURA Kimiya; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  Mechanical Engineering Congress, Japan  2012-  "J161023  -1"-"J161023-4"  2012/09
• Fabrication of magnetic active membrane for micropump made of photosensitive nanocomposite

  NAKAHARA Tasuku; HOSOKAWA Yuuki; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; MIYAGAWA Hayato; NAMAZU Takahiro; KOTERA Hidetoshi; SUZUKI Takaaki  電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan  2012-  (8)  45  -48  2012/06
• Evaluation for Work Area of Rotated/Inclined UV Lithography and its Application for Gene Analysis Chip

  NITTA Yuki; SUZUKI Hiroyuki; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; OOHIRA Fumikazu; SUZUKI Takaaki  電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan  2012-  (8)  41  -44  2012/06
• MP-48 In Situ Fabrication of Active Microfluidic Components Using Photoresist Containing Magnetic Nanoparticles

  Hosokawa Yuuki; Nakahara Tasuku; Terao Kyohei; Takao Hidekuni; Simokawa Fusao; Oohira Fumikazu; Suzuki Takaaki  マイクロ・ナノ工学シンポジウム  2011-  (3)  163  -164  2011/09
• J161014 Proliferative capacity of biological cells in a microchannel

  INOUE Masatoshi; OKONOGI Atsuhito; TERAO Kyohei; TAKAO Hidekuni; SHIMOKAWA Fusao; Oohira Fumikazu; KOTERA Hidetoshi; SUZUKI Takaaki  Mechanical Engineering Congress, Japan  2011-  "J161014  -1"-"J161014-3"  2011/09
• P-1-6 Fabrication of three-dimensional micro molds using single-mask multidirectional photolithography for micro-electroporation

  Fukuda Taisuke; Terao Kyouhei; Takao Hidekuni; Shimokawa Fusao; Oohira Fumikazu; Suzuki Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2011-  171  -174  2011/03
• D-2-2 Thickness control of thick photoresist using spray coating

  AKAMATSU Mikio; TERAO Kyouhei; TAKAO Hidekuni; SIMOKAWA Fusao; OOHIRA Humikazu; SUZUKI Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2011-  30  -33  2011/03
• P-1-8 Influence of microchannel width on a microdevice for single-cell manipulation

  TAKASAKI Shouiti; TERAO Kyouhei; TAKAO Hidekuni; SIMOKWA Fusao; OOHIRA Humikazu; SUZUKI Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2011-  181  -183  2011/03
• P-1-4 Fabrication and evaluation of SPR chip with micro structures by imprint technology

  Moriwake Masayoshi; Watanabe Hideo; Shimizu Kazunori; Terao Kyohei; Suzuki Takaaki; Takao Hidekuni; Simokawa Fusao; Oohira Fumikazu  Conference on Information, Intelligence and Precision Equipment : IIP  2011-  161  -164  2011/03
• P-5 3-D Shape Measurement instrument Using Single Image Sensor

  Miura Hironori; TERAO Kyouhei; SUZUKI Takaaki; TAKAO Hidekuni; TANIGUCHI Tomonobu; URA Haruo; OOHIRA Fumikazu  Conference on Information, Intelligence and Precision Equipment : IIP  2010-  122  -126  2010/03
• P-4 Fabrication of liquid chromatography chip with micro pillar array of sub micron spacing

  Kakita Chihiro; TERAO Kyohei; MIYANISHI Nobumitsu; SUZUKI Takaaki; TAKAO Hidekuni; OOHIRA Fumikazu; MAJIMA Eiji  Conference on Information, Intelligence and Precision Equipment : IIP  2010-  118  -121  2010/03
• B-5 Manipulation of Stretching Chromosomes Form on Microstructures Using Centrifugal Force

  SUZUKI Hiroyuki; HIRAMARU Daisuke; TERAO Kyouhei; TAKAO Hidekuni; OOHIRA Humikazu; KOTERA Hidetoshi; SUZUKI Takaaki  Conference on Information, Intelligence and Precision Equipment : IIP  2010-  75  -79  2010/03
• AT-1-1 Ubiquitous Microsensor Technologies for Sustainable and Secure Society

  Takao Hidekuni; Ishida Makoto; Sawada Kazuaki; Lee Wan-Hoon; Kim Jong-Wan  Proceedings of the IEICE General Conference  2010-  "SS  -11"-"SS-13"  2010/03
• C-12-48 Flexible Silicon-MEMS Tactile Imager with Slip Sensing Ability

  OKada Hiroki; Yawata Masaki; Sawada Kazuaki; Ishida Makoto; Takao Hidekuni  Proceedings of the IEICE General Conference  2010-  (2)  125  -125  2010/03
• C-12-72 Analysis and design technology of fluidic integrated circuits using SPICE simulation

  Sugiura Masanori; Takao Hidekuni; Sawada Kazuaki; Ishida Makoto  Proceedings of the IEICE General Conference  2010-  (2)  149  -149  2010/03
• C-12-47 In-pixel Type CV Conversion Circuit for Micro Capacitance Sensor Array

  Miyao Hajime; Kodama Ryo; Sawada Kazuaki; Ishida Makoto; Takao Hidekuni  Proceedings of the IEICE General Conference  2010-  (2)  124  -124  2010/03
• CDT-1-5 Development of Silicon Integrated Tactile Image Transcending the Human Fingertip Sensitivity

  Takao Hidekuni  Proceedings of the IEICE General Conference  2010-  (2)  "SS  -15"-"SS-18"  2010/03
• CT-1-6 Approaches on Integration of MEMS-Sensors on LSI and the Technology Futures

  Takao Hidekuni  Proceedings of the Society Conference of IEICE  2009-  (2)  "SS  -16"-"SS-19"  2009/09
• Study of EC sensor using LSI techniques in agricultural applications

  FUTAGAWA Masato; IWASAKI Taichi; TAKAO Hidekuni; ISHIDA Makoto; SAWADA Kazuaki  電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan  2009-  (1)  21  -24  2009/02
• Development of Intelligent Microchip for Photometric Analysis Integrated With Solution Pre-treatment Unit

  NODA Toshihiko; SHIN Young-Shik; TAKAO Hidekuni; MIYAMURA Kazuhiro; MATSUMOTO Kouichi; SAWADA Kazuaki; ISHIDA Makoto  電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan  2009-  (1)  29  -33  2009/02
• Technology and Applications of LSI-Integrated Microsensors

  TAKAO Hidekuni; SAWADA Kazuaki; ISHIDA Makoto  電気学会研究会資料. PHS, フィジカルセンサ研究会  2008-  (26)  1  -5  2008/12
• Intelligent Smart Microchip Fused LSI and Sensor Technology

  SAWADA Kazuaki; TAKAO Hidekuni; ISHIDA Makoto  電子情報通信学会技術研究報告. MW, マイクロ波  108-  (118)  81  -84  2008/06
• 2120 Formation of vertically micromachined silicon microvalve with active device function in fluidic analog integrated circuits

  TANAKA Nobuhiro; TAKAO Hidekuni; SAWADA Kazuaki; ISHIDA Makoto  Conference on Information, Intelligence and Precision Equipment : IIP  2008-  265  -268  2008/03
• 第24回「センサ・マイクロマシンと応用システム」シンポジウム

  橋口 原; 土屋 智由; 高尾 英邦  電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society  128-  (3)  108  -113  2008/03
• Novel pH Microscope Fabricated by CCD Image Sensor Technique

  SAWADA Kazuaki; MATSUO Junichi; HIZAWA Takeshi; TAKAO Hidekuni; ISHIDA Makoto  電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan  2007-  (32)  27  -30  2007/09
• A Microwave-Powered CMOS Power Supply Circuit for Integrated Si-MEMS Microsensors

  ENDO Daiki; TAKAO Hidekuni; KIZUNA Syunsuke; SAWADA Kazuaki; ISHIDA Makoto  IEICE technical report  107-  (194)  95  -100  2007/08
• 13-9 Improvement in wavelength differentiation characteristic of filter-less fluorescence detection sensor

  ISHII Hiroyasu; MARUYAMA Yuki; SAWADA Kazuaki; TAKAO Hidekuni; ISHIDA Makoto  Proceedings of the ... ITE annual convention  (2007)  "13  -9-1"-"13-9-2"  2007/08
• Fabrication of multi-modal sensor adhered to human body aims for detecting health condition

  MAKI Tokuho; TAKAO Hidekuni; SAWADA Kazuaki; ISHIDA Makoto  電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan  2007-  (7)  93  -96  2007/07
• Design of CMOS sweep signal generator for microfluidic-type smart DNA chip

  KANO Yoshiko; ISHIDA Makoto; TAKAO Hidekuni; SAWADA Kazuaki  電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan  2007-  (7)  33  -36  2007/07
• Fabrication and Primitive Characterization of Absorption Photometry Smart Microchip Integrated with Temperature Control and Noise Reduction Mechanism

  NODA Toshihiko; HIROKUBO Nozomu; TAKAO Hidekuni; MIYAMURA Kazuhiro; MATSUMOTO Kouichi; SAWADA Kazuaki; ISHIDA Makoto  電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan  2007-  (7)  81  -86  2007/07
• Fabrication of temperature sensor using thermopile based on Silicon on Insulator (SOI) structure

  LEE Wang-Hoon; LEE Young-Tae; TAKAO Hidekuni; SAWADA Kazuaki; ISHIDA Makoto  IEICE technical report  107-  (110)  303  -306  2007/06
• Development of an Integrated Inductor for Impedance Matching on the Fully Integrated Silicon Smart Microsensors

  KIM Jong-Wan; TAKAO Hidekuni; SAWADA Kazuaki; ISHIDA Makoto  IEICE technical report  107-  (110)  293  -296  2007/06
• 1116 Wafer-level Automatic Integration of Surface Mount Devices on Silicon Microchips and its Application to RF-powered Microsensor Devices

  TAKAO Hidekuni; KIZUNA Syunsuke; ENDO Daiki; SAWADA Kazuaki; SUDOU Minoru; ISHIDA Makoto  Conference on Information, Intelligence and Precision Equipment : IIP  2007-  52  -55  2007/03
• A quantitative evaluation of dsDNA and real time fluorescence measurement using filter less fluorescence detection sensor

  MARUYAMA Yuki; SAWADA Kazuaki; TAKAO Hidekuni; ISHIDA Makoto  ITE technical report  30-  (59)  5  -8  2006/11
• Fabrication of very fine micro tube array and experiment of injection through the tube

  TAKEI Kuniharu; KAWASHIMA Takahiro; TAKAO Hidekuni; SAWADA Kazuaki; ISHIDA Makoto  電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan  2006-  (1)  1  -4  2006/05
• Measurements of Charge Transfer Type pH Sensor Operated by Accumulation

  HIZAWA Takeshi; TAKAO Hidekuni; SAWADA Kazuaki; ISHIDA Makoto  電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan  2006-  (1)  37  -40  2006/05
• Design and Fabrication of C-Reactive Protein Measurement Microchip Integrated with Temperature Control Mechanism

  NODA Toshihiko; HIROKUBO Nozomu; TAKAO Hidekuni; YOSHIOKA Kazunori; MIYAMURA Kazuhiro; SAWADA Kazuaki; OKU Narihiro; MATSUMOTO Kouichi; ISHIDA Makoto  電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan  2006-  (1)  5  -10  2006/05
• Fabrication of Blood Test Microchip Integrated With Solution Pre-Treatment and Synchronous Photodetection Mechanism

  NODA Toshihiko; HIROKUBO Nozomu; TAKAO Hidekuni; OKU Narihiro; MATSUMOTO Kouichi; SAWADA Kazuaki; ISHIDA Makoto  IEICE technical report  106-  (45)  119  -124  2006/05
• A very-fine Si microprobe array aimed for in-vivo recording of neuronal activities

  Takahiro Kawashima; Takeshi Kawano; Hidekuni Takao; Kazuaki Sawada; Hidekazu Kaneko; Makoto Ishida  NEUROSCIENCE RESEARCH  55-  S157  -S157  2006
• A Wide Dynamic Range Photogate Type Image Sensor based on Self Suppression Principle

  MARUYAMA Yuki; SAWADA Kazuaki; TAKAO Hidekuni; ISHIDA Makoto  ITE technical report  29-  (61)  17  -20  2005/10
• Evaluation and Fabrication of Filter-less Fluorescence Detection Sensor

  MARUYAMA Yuki; SAWADA Kazuaki; TAKAO Hidekuni; ISHIDA Makoto  Technical report of IEICE. ICD  105-  (185)  63  -68  2005/07
• JFET-CMOS Low Noise Operational Amplifier for Sensor Interface Applications

  EDO Yusuke; TAKAO Hidekuni; SAWADA Kazuaki; ISHIDA Makoto  Technical report of IEICE. ICD  105-  (185)  7  -12  2005/07
• Silicon Smart Microsensors based on MEMS-CMOS Integration Technologies

  TAKAO Hidekuni; SAWADA Kazuaki; ISHIDA Makoto  Technical report of IEICE. ICD  105-  (185)  39  -44  2005/07
• Multichannel Si Microprobe Array for Neural Recording on Integrated Circuit

  FUNAGAYAMA Naoki; KAWANO Takeshi; TAKAO Hidekuni; SAWADA Kazuaki; ISHIDA Makoto  Technical report of IEICE. ICD  105-  (184)  83  -87  2005/07
• MEMS-CMOS集積化技術によるシリコンスマートマイクロセンサ

  高尾 英邦; 澤田 和明; 石田 誠  映像情報メディア学会技術報告  29-  (41)  39  -44  2005/07
• 光学フィルタを必要としない蛍光検出フォトセンサの試作・評価

  丸山 結城; 澤田 和明; 高尾 英邦  映像情報メディア学会技術報告  29-  (41)  63  -68  2005/07
• JFET-CMOS混載技術によるセンサインターフェース用演算増幅器の低雑音化

  江戸 勇介; 高尾 英邦; 澤田 和明  映像情報メディア学会技術報告  29-  (41)  7  -12  2005/07
• 集積回路との一体化を目指したマルチチャンネルSiマイクロプローブ神経電位センサ

  船ヶ山 直樹; 河野 剛士; 高尾 英邦  映像情報メディア学会技術報告  29-  (40)  83  -87  2005/07
• A proposal and fabrication of a new filter-less fluorescence detection sensor

  MARUYAMA Yuki; SAWADA Kazuaki; TAKAO Hidekuni; ISHIDA Makoto  IEICE technical report. Electron devices  105-  (89)  33  -37  2005/05
• C-12-25 Elimination of 1/f noise in operational amplifier using JFET-CMOS technology

  Edo Yusuke; Takao Hidekuni; Sawada Kazuaki; Ishida Makoto  Proceedings of the IEICE General Conference  2005-  (2)  88  -88  2005/03
• 強誘電体を用いた電子放出型焦電赤外線センシングデバイスの高感度化

  高室 大介; 澤田 和明; 高尾 英邦; 石田 誠  映像情報メディア学会技術報告  29-  (10)  57  -63  2005/02
• スマートクラスルーム-インテリジェント ヒューマン センシング技術による-

  青野雅樹; 中内 茂樹; 澤田 和明; 北崎 充晃; 若原 昭浩; 市川 周一; 高尾 英邦; 桂田 浩一; 新田 恒雄; 石田 誠  電気情報通信学会2005年総合大会講演論文集  "S  -25"-"S-26"  2005
• A Proposal of new Spectroscope for Image Sensor : Estimate and Fabrication of Filter-less Fluorescence Detection Sensor

  MARUYAMA Yuuki; SAWADA Kazuaki; TAKAO Hidekuni; ISHIDA Makoto  ITE technical report  28-  (59)  21  -24  2004/10
• Fabrication and Highly-Efficient-Izing of Back-Irradiation Type Photocathode Using Field Emitter

  TANDA Yoshio; ONO Takashi; SAWADA Kazuaki; TAKAO Hidekuni; ISHIDA Makoto  ITE technical report  28-  (53)  1  -4  2004/09
• Fabrication of Microfluidic Channel Type Smart Electrochemical DNA Sensors with Operational Amplifiers

  SAWADA Kazuaki; ODA Chigusa; TAKAO Hidekuni; ISHIDA Makoto  Extended abstracts of the ... Conference on Solid State Devices and Materials  2004-  376  -377  2004/09
• High Resolution Absorption Photometry Microchip Integrated with Silicon Photodetection System

  NODA Toshihiko; TAKAO Hidekuni; ASHIKI Mitsuaki; SAWADA Kazuaki; ISHIDA Makoto  ITE technical report  28-  (37)  11  -16  2004/07
• High Resolution Absorption Photometry Microchip Integrated with Silicon Photodetection System

  NODA Toshihiko; TAKAO Hidekuni; ASHIKI Mitsuaki; SAWADA Kazuaki; ISHIDA Makoto  Technical report of IEICE. ICD  104-  (174)  11  -16  2004/07
• C-12-23 A Design Technique of Low-Noise Operational Amplifiers Using JFET-CMOS Technology

  Takao Hidekuni; Ito Yoshiaki; Serge Kolelas; Sawada Kazuaki; Ishida Makoto  Proceedings of the IEICE General Conference  2004-  (2)  125  -125  2004/03
• SC-11-1 Characteristic Improvement of MOSFETs in Si (111) CMOS Technology

  Kato Yoshiko; Takao Hidekuni; Sawada Kazuaki; Ishida Makoto  Proceedings of the IEICE General Conference  2004-  (2)  "S  -53"-"S-54"  2004/03
• Hemoglobin Measurement Microchip Integrated with Signal Processing Circuit

  NODA Toshihiko; TAKAO Hidekuni; ASHIKI Mitsuaki; EBI Hiroyuki; SAWADA Kazuaki; ISHIDA Makoto  電気学会研究会資料. PHS, フィジカルセンサ研究会  2003-  (13)  31  -35  2003/11
• Si(111)CMOS Signal Detection Circuit for Integrated Micro Si Probe Chip

  KATO Yoshiko; KAWANO Takeshi; TAKAO Hidekuni; SAWADA Kazuaki; ISHIDA Makoto  ITE technical report  27-  (48)  1  -6  2003/09
• Si(111) CMOS Signal Detection Circuit for Integrated Micro Si Probe Chip

  KATO Yoshiko; KAWANO Takeshi; TAKAO Hidekuni; SAWADA Kazuaki; ISHIDA Makoto  Technical report of IEICE. ICD  103-  (298)  1  -6  2003/09
• Characteristic of a-Si: H type avalanche photoconversion film in a Signal Integration Mode using the Active Pixel Sensor (APS) configuration

  AKIYAMA Masahiro; HANADA Masaki; TAKAO Hidekuni; SAWADA Kazuaki; ISHIDA Makoto  ITE technical report  27-  (36)  17  -20  2003/06
• Si Microprobe Array Growth after IC Process and Application to Neural Recording Microchip

  KAWANO Takeshi; KATO Yoshiko; ISHINO Hiroshi; TAKAO Hidekuni; SAWADA Kazuaki; ISHIDA Makoto  IEICE technical report. Component parts and materials  103-  (49)  73  -78  2003/05
• A low-noise amplifier fabricated by JFET-CMOS technology for sensor applications

  Ito Yoshiaki; Takao Hidekuni; Sawada Kazuaki; Ishida Makoto  Proceedings of the IEICE General Conference  2003-  (2)  93  -93  2003/03
• Improvement of Temperature drift in SOI-CMOS Autozeroed Amplifier for High Temperature Environment

  Douzaka Toshiaki; Takao Hidekuni; Sawada Kazuaki; Ishida Makoto  Proceedings of the IEICE General Conference  2003-  (2)  92  -92  2003/03
• Electron Emission Type Infrared Light Sensor Using Ferroelectric Material

  TAKAMURO Daisuke; TAKAO Hidekuni; SAWADA Kazuaki; ISHIDA Makoto  IEICE technical report. Electron devices  102-  (502)  57  -62  2002/12
• Analysis of Temperature Characteristics of A Three-Axis Accelerometer for High Temperatures Using Constant Temperature Control Method

  LEE Kyung-il; TAKAO Hidekuni; SAWADA Kazuaki; ISHIDA Makoto  電気学会研究会資料. PHS, フィジカルセンサ研究会  2002-  (16)  5  -9  2002/11
• Characteristics of Silicon Integrated Hemoglobin Sensor Chip Using a Multi-Reflection Structure

  TAKAO Hidekuni; NODA Toshihiko; ASHIKI Mitsuaki; MIYAMURA Kazuhiro; SAWADA Kazuaki; ISHIDA Makoto  電気学会研究会資料. PHS, フィジカルセンサ研究会  2002-  (7)  11  -16  2002/09
• Formation of JFET-CMOS Low Noise Amplifiers for Sensor Interface Circuits

  TAKAO Hidekuni; ASAOKA Rikiya; SAWADA Kazuaki; KAWAHITO Syoji; ISHIDA Makoto  電気学会研究会資料. PHS, フィジカルセンサ研究会  2002-  (1)  29  -34  2002/09
• A JFET Device for CMOS Integrated Circuits and Its Application to CMOS-Based Low Noise Amplifiers

  TAKAO Hidekuni; ASAOKA Rikiya; ITO Yoshiaki; SAWADA Kazuaki; KAWAHITO Syoji; ISHIDA Makoto  Technical report of IEICE. ICD  102-  (339)  1  -6  2002/09
• 応用編 血球計数用平面状センサへの応用 (特集1 MEMSの最新技術動向と応用展開)

  衣斐 寛之; 佐竹 大輔; 高尾 英邦  電子材料  41-  (5)  40  -43  2002/05
• Temperature Characteristic of SOI-CMOS Autozerod Amplifier for High Temperature Environments

  Douzaaka Toshiaki; Takao Hidekuni; Ina Fumie; Sawada Kazuaki; Isida Makoto  Proceedings of the IEICE General Conference  2002-  (2)  131  -131  2002/03
• Characteristic Improvement by CMOS Scaling Effects in the CMOS Smart Three-Axis Accelerometer Using p-MOS Detection Elements

  TAKAO Hidekuni; FUKUMOTO Hirofumi; SAWADA Kazuaki; ISHIDA Makoto  電気学会研究会資料. PHS, フィジカルセンサ研究会  2001-  (18)  25  -30  2001/12
• Formation and Evaluation of a Precision CMOS Operational Amplifier For Sensors Used in High Temperature Environments

  TAKAO Hidekuni; INA Fumie; DOUZAKA Toshiaki; SAWADA Kazuaki; ISHIDA Makoto  電気学会研究会資料. PHS, フィジカルセンサ研究会  2001-  (1)  59  -64  2001/11
• Fabrication of a-Si:H avalanche multiplication photodiode films on polycrystalline silicon

  AKIYAMA Masahiro; HANADA Masaki; TAKAO Hidekuni; SAWADA Kazuaki; ISHIDA Makoto  IEICE technical report. Electronic information displays  101-  (404)  7  -12  2001/11
• Excess Noise Characteristics of a-Si:H p-i-n Photodiode Films

  AKIYAMA Masahiro; HANADA Masaki; TAKAO Hidekuni; SAWADA Kazuaki; ISHIDA Makoto  Extended abstracts of the ... Conference on Solid State Devices and Materials  2001-  600  -601  2001/09
• An Autozeroed SOI-CMOS Operational Amplifier for High Temperature Environments

  TAKAO Hidekuni; INA Fumie; DOUZAKA Toshiaki; SAWADA Kazuaki; ISHIDA Makoto  Technical report of IEICE. ICD  101-  (281)  15  -22  2001/08
• Fabrication and Proposition of High Sensitive Chemical Potential Sensor Used Charge Transfer Technique

  SAWADA Kazuaki; TAKAO Hidekuni; ISHIDA Makoto  IEICE technical report. Electron devices  101-  (79)  57  -61  2001/05
• Design of A CMOS Chopper Operational Amplifier with Reduced Clock Feedthrough Noise Effect

  Takao Hidekuni; Ina Fumie; Sawada Kazuaki; Ishida Makoto  Proceedings of the IEICE General Conference  2-  142  -142  2000
• Design of Precision Chopper Amplifier for High Temperature Environments

  Ina Fumie; Takao Hidekuni; Sawada Kazuaki; Ishida Makoto  Proceedings of the IEICE General Conference  2-  143  -143  2000
• Investigation of Proper Masking Material for Silicon Anisotoropic Etching in post-CMOS Micromachining

  TAKAO Hidekuni; YONG Chuck-Chen; SAWADA Kazuaki; ISHIDA Makoto  電気学会研究会資料. SMP, センサ材料・プロセス技術研究会  1999-  (13)  39  -44  1999/11
• Excess Noise Characteristics of a-Si:H Avalanche Photodiode Films Using Functionally Graded Structure

  SAWADA Kazuaki; AKIYAMA Masahiro; TAKAO Hidekuni; ISHIDA Makoto  Extended abstracts of the ... Conference on Solid State Devices and Materials  1999-  296  -297  1999/09
• Applications of the Stress Sensitive Differential Amplifiers to Physical Sensors Used in Harsh Environments

  TAKAO Hidekuni; KITAYAMA Yasuo; SOGAWA Kazuaki; MATSUMOTO Yoshinori; ISHIDA Makoto  電気学会研究会資料. PS, 物理センサ研究会  1997-  (20)  1  -6  1997/11
• A Study on CMOS Integrated Three Axial Accelerometer based on Piezoresistivity Effect in p-Type Inversion Layers

  TAKAO Hidekuni; MATSUMOTO Yoshinori; ISHIDA Makoto  電気学会研究会資料. PS, 物理センサ研究会  1996-  (6)  71  -80  1996/11

Industrial Property Rights

• 特許3848684:触覚センサ  

  高尾英邦  国立大学法人 香川大学
• 特許第7081814号:触覚センサ    2022/06/07

  高尾英邦
• 特許第7061784号:触覚センサ, 触覚測定装置, 学習済みモデル, および識別装置    2022/05/02

  高尾英邦
• 特許第6989093号:内視鏡  

  高尾英邦, 森 宏仁
• 特許6419156:触覚センサおよび手触り感の評価方法    2018/11/14

  高尾英邦
• 特許第6230049号:内視鏡フード、内視鏡および内視鏡用圧力センサ    2017/11/15

  高尾英邦
• 特許第6048947号:触覚センサ    2016/12/21

  高尾 英邦
• 電波発電回路

  登録番号:特許第4611093号
• シリコン基板を有する電子回路装置

  登録番号:特許第4628008号
• 加速度センサ

  登録番号:特許第4633982号
• Power Generation Circuit using Electromagnetic Wave

  登録番号:韓国特許10-1117888号
• Electronic Circuit Device Having Silicon Substrate

  登録番号:韓国特許10-1124891
• Power Generation Circuit using Electromagnetic Wave

  登録番号:韓国特許10-1168554
• 半導体素子および半導体センサ

  登録番号:特許第４５１５５４９号
• 差動増幅回路および高温用増幅回路

  登録番号:特許第４４９８５０７号

Awards & Honors

• 2024/11 材料科学技術振興財団 The 24th Yamazaki-Teiichi Prize
   

  受賞者: Hidekuni Takao
• 2023/10 CEATEC AWARD 2023 Committee CEATEC AWARD 2023 Grand Prix, Device Category
   

  受賞者: Kagawa University, JST-CREST
• 2023/04 Ministry of Education, Culture, Sports, Science and Technology Awards for Science and Technology (Research Category), The Commendation for Science and Technology by the Minister of Education, Culture, Sports, Science and Technology
   

  受賞者: Hidekuni Takao
• 2023/01 IEEE MEMS2023 Outstanding Student Oral Presentation Award Finalist
   

  受賞者: Genki Yamada;Yuto Morita;Kyohei Terao;Fusao Shimokawa;Hidekuni Takao
• 2023/01 IEEE MEMS2023 Outstanding Student Poster Presentation Award Winner
   

  受賞者: Nachi Mise, Mitsuki Kozasa, Kyohei Terao, Fusao Shimokawa, and Hidekuni Takao
• 2022/01 IEEE MEMS2022 Outstanding Student Paper Award Finalist
   

  受賞者: Masahito Komatsubara;Tsubasa Nakashima;Kyohei Terao;Fusao Shimokawa;Yasunori Matsui;Hidekuni Takao
• 2021/12 Journal of Robotics and Mechatronics The Best Paper Award 2021
   

  受賞者: Kazuki Watatani;Kyohei Terao;Fusao Shimokawa;Hidekuni Takao
• 2021/03 公益財団法人エレキテル尾崎財団 第28回源内大賞
   

  受賞者: 高尾英邦
• 2021/03 応用物理学会集積化MEMS技術研究会 優秀論文賞
  
• 2021/01 IEEE MEMS2021 Outstanding Student Paper Award Finalist
  
• 2020/03 応用物理学会集積化MEMS技術研究会 第十回集積化MEMS技術研究ワークショップ 優秀ポスター賞
  
• 2019/01 IEEE MEMS2019 Outstanding Student Paper Award Finalist
  
• 2018 第八回集積化MEMS技術研究会ワークショップ 優秀ポスター賞
   JPN
• 2016 STARC 感謝状
   JPN 

  受賞者: 高尾英邦
• 2013/11 電気学会センサ・マイクロマシン部門 部門大会 第30回「センサ・マイクロマシンと応用システム」シンポジウム 優秀ポスター賞
   JPN
• 2009/05 電子情報通信学会 集積回路研究専門委員会 ICD最優秀ポスターアワード
  
• 2008/04 第10回LSI IPデザイン・アワード 開発奨励賞
  
• 2008/04 Ministry of Education, Culture, Sports, Science and Technology, Japan The Young Scientists’ Award, The Commendation for Science and Technology by the Minister of Education, Culture, Sports, Science and Technology
   

  受賞者: Hidekuni Takao
• 2008/03 日本機械学会 情報・知能・精密機器部門賞・優秀講演論文賞
  
• 2007/04 第9回LSI IPデザイン・アワード IP賞
  
• 2006/11 IEEEシステムLSIデザイン賞, IEEE Solid-Stage Circuit Society Japan
  
• 2002/03 電気学会優秀論文発表賞
  
• 1997/06 電気学会センサマイクロマシン部門 第一回五十嵐賞
  

Research Grants & Projects

• 微小・狭窄領域へアクセス可能な集積化シリコン感覚毛による質感の知覚と認識

  日本学術振興会：科学研究費補助事業 基盤研究（A）

  Date (from‐to) : 2022/04 -2027/03 

  Author : 高尾 英邦
• 触覚の価値を創造する深化型マルチフィジックスセンシングシステム

  科学技術振興機構：戦略的創造研究推進事業CREST

  Date (from‐to) : 2020/12 -2026/03 

  Author : 高尾英邦
• Development of the relaxation effect evaluation system that measures the comfort of human skin

  Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research

  Date (from‐to) : 2020/04 -2024/03 

  Author : 清水 裕子; 高尾 英邦; 石丸 伊知郎; 峠 哲男

   

  令和2年11月までに、事前準備、被験者調整を行い、令和3年3月までに、皮膚面水分量測定の実施、脳波測定の実施、デモデータの中間評価を行う予定であったが、所属機関の新型コロナウイルス対策による研究活動制限のため、実施困難となった。 そこで、当初計画を修正し、そこで、再開後すぐに測定が開始できるよう、希少デバイスの開発、赤外線測定器材の準備、脳波測定の機器整備、イメージ測定表の準備を行い、測定に備えた。また、令和3年4月に被験者調整を行い、6月に倫理委員会の申請を行った。順調であれば7月から測定開始のところ、倫理委員会が混雑していたため、8月の審査となり、9月上旬に承認を得た。倫理委員会承認番号2021-089。倫理委員会の求めにより、「臨床研究実施計画・研究概要公開システム」への登録を行い、研究計画を公表した。登録番号ｊRCT1060210045。 倫理承認後間もなく、9月上旬から清拭後皮膚水分量の赤外線測定（分担研究者石丸教授）、希少デバイスによる皮膚面凹凸測定（分担研究者高尾教授）、脳波測定（分担研究者峠客員研究員）、研究代表者清水による皮膚面温度湿度、主観的イメージ測定を行い、9月末までに測定を終了した。測定にあたり、清拭の介入手技の統制を図るため、実験補助者らによる清拭訓練会を行い、手技の安定を図った。 その後、各測定部門ごとに解析作業に入り、令和4年1月から赤外線、希少デバイスと温度湿度、イメージ測定との相互関連のミーティングを開始した。赤外線測定は、近赤外線を用いたが、中赤外線との比較検討を行う必要があり、現在、近赤外線と中赤外線の双方の比較実験を行っている。温度や凹凸測定においては、温度の蓄積効果が影響している可能性が示唆されたため、温度湿度は、データの標準化を行って分担者の分析に供された。次年度も解析が行われ、各部門ごとの学会発表の準備を行う予定で、順調である。
• 先進内視鏡手術における執刀医のニーズに応えた「内視鏡知覚センシング技術」の開発

  日本学術振興会：科学研究費補助事業 基盤研究（A)

  Date (from‐to) : 2017/04 -2021/03 

  Author : 高尾英邦
• 繊細な触覚を定量的に検知する「ナノ触覚神経網」の開発と各種手触り感計測技術へ応用

  JST：JST-CREST

  Date (from‐to) : 2015 -2021 

  Author : Hidekuni Takao
• Development of “Nano-scale Tactile Sensing Nerve Network” for quantification of human tactile sense and its application to instrumental measurement of hand feeling

  JST Basic Research Programs (Core Research for Evolutional Science and Technology :CREST)

  Date (from‐to) : 2015 -2021
• Micro-scale plant vascular sensor for monitoring of sap dynamics and nutrients dynamics in plant shoots

  Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research

  Date (from‐to) : 2015/04 -2018/03 

  Author : Shimokawa Fusao

   

  We newly proposed the microscale xylem-sap-dynamics (flow velocity) sensor that uses the measuring principle of the Granier method. We also fabricated micro-sensor chips for functional verification by using MEMS technology, and assembled them on a resin film for mounting on the epidermis of plants. Furthermore, we measured the sap dynamics by using a mimicked plant experimental setup and actual plant, and succeeded in measuring the flow velocity(0-500μm/s). We also proposed the microscale phloem-sap-dynamics (flow velocity and direction) sensor, and confirmed the possibility of sap dynamic measurement in the actual plant shoots. We demonstrated the feasibility of a novel nutrients dynamics sensor that can conveniently identify the phloem positions and extract pure photosynthates samples in agricultural situations.
• Multifunctional Discharging Jet Array Device Realized by Integration of Micromachined Fluidic Channels and Electrodes

  Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research

  Date (from‐to) : 2014/04 -2017/03 

  Author : Takao Hidekuni

   

  In this study, a multifunctional discharging jet array device and its related technologies have been realized by integration of micromachined fluidic channels and electrodes. The basic technologies and bases of concept have been established in this project successfully. In addition, control technique of the individual discharging jet is newly developed since the jet array can control its overall shape and relative position, and gas components flexibly. In the research period, various test devices have been fabricated to validate the effectiveness of the new device. Packaging of jet array device was explored and finally established to evaluate the essential performances.
• A Novel Tactile Sensor Focusing on Time Correlation of Multi-Dimensional Tactile Information

  Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research

  Date (from‐to) : 2013/04 -2016/03 

  Author : Takao Hidekuni

   

  In this study, a novel integrated tactile sensing device with integrated electronics and movable microstructures have been developed for quantitative detection of delicate tactile sense. Semiconductor based tactile sensor devices are realized by advanced integration technology of silicon MEMS, and they can detect various tactile information at the same time and the same point. Using their time correlation and the features, quantitative detection of delicate tactile sense is effectively performed using paper samples. The applications of the sensing technology are such as condition monitoring of human skin or hair, texture measurement of luxury material, and advanced medical devices with tactile sense, etc.
• Micro scale sap flow sensor based on Granier sensor for measuring biological information of plant branches

  Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research

  Date (from‐to) : 2012/04 -2015/03 

  Author : SHIMOKAWA Fusao; TAKAO Hidekuni; KOBAYASHI Tsuyoshi

   

  We developed a micro sap flow sensor using the measuring principle of the Granier's method by applying MEMS technology. By using the micro fabrication techniques, we fabricated an integrated micro sap flow sensor consisting of micro probes, temperature sensor and thin-film micro heater on a Si substrate. The fabricated micro sensor was reduced to 1/10 the size of a conventional Granier sensor (diameter:φ2mm, length:20 mm). To investigate the use of the proposed sensor in measuring the actual sap flow amount of plants, an experimental system (to control the flow inside a tube) imitating a plant's stem was fabricated. As the result, we demonstrated the use of the sensor in obtaining sap flow amount data (0～150 μm/s), similar to the use of a conventional sensor. By using a fabricated micro sensor, a normal diurnal sap flow pattern was observed in model plant. Therefore, we successfully demonstrated the applicability of the proposed sensor to an actual plant.
• A challenge to realize multi-functional integrated microfluidic array device for real haptic information display

  Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research

  Date (from‐to) : 2012/04 -2014/03 

  Author : TAKAO Hidekuni

   

  In this study, a new technology to display haptic information including "contact force distribution" and "surface texture" has been developed, and integrated device with various tactile display elements such as air-flow jet array and sense of cool display based on a new principle have been fabricated. The detailed topics of the study are as following, 1) Development of sense of cool display based on multi-jet venturi, 2) Microvalve development for pressure circuit for tactile display, 3) Design and fabrication of pressure vibration circuit, 4) Realization of Multi-functional tactile display, 5) Systematic research of tactile sense reproduction. During the project period, various kinds of new technology and devices have been realized. They will be a basic of the new technology to display haptic information including "contact force distribution" and "surface texture".
• Development of Crystalline Anisotropic Plasma Etching for Single Crystal Silicon

  Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research

  Date (from‐to) : 2011 -2012 

  Author : SUZUKI Takaaki; OOHIRA Fumikazu; SHIMOKAWA Fusao; TAKAO Hidekuni

   

  In this study, we propose a novel fabrication process for complicated three-dimensional silicon microstructures using the crystalline anisotropic plasma etching of the single crystal silicon with an ordinary RIE process under the normal temperature. The proposed process combined of the conventional isotropic, the conventional vertical anisotropic, and the crystalline anisotropic silicon plasma etchings achieves the complicated microstructures under all dry process with single RIE machine with single mask. To confirm the validity of the proposed process, we demonstrated to fabricate a cantilever and a micro needle for bio-application. In the case of the cantilever, the cantilever released from a substrate was fabricated at 1/5 processing time of the conventional process. It is possible that the complicated three-dimensional silicon microstructures are fabricated in single dry etching equipment.
• High-Resolution Local Tactile Imaging with Integrated MEMS Technology

  Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research

  Date (from‐to) : 2009 -2012 

  Author : TAKAO Hidekuni

   

  In this study, a multi-functional integrated tactile imager device has been developed for high-resolution and local area tactile imaging applications. The device has realized sensing functions and sensitivities similar to human’s fingertip skin. Using the developed tactile imager device, 2-dimensional detection of tri-axis force distribution, detection of surface texture with roughness and softness of object surface have been realized as real-time tactile imaging system with PC software.
• An implantable chip with integrated microprobe/tube arrays for electrical neural recording, stimulation, and drug delivery applications

  Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research

  Date (from‐to) : 2008 -2012 

  Author : ISHIDA Makoto; SAWADA Kazuaki; KAWASHIMA Takahiro; KAWANO Takeshi

   

  The goal of this project is to developtechnologies for integration of very fine out-of-plane silicon microprobe, silicon-dioxide microtubearrays with microelectronics using a “selective vapor-liquid-solid (VLS)growth”techniqueand three-dimensional microfabrication processes. Major achievements of the researchduring the project period includei) integration of microscalediameter probe electrode and tube arrays for simultaneous electrical recording, stimulation, and drug delivery system with a high spatialresolution, ii) realization of the microprobes with various lengths for three-dimensional recording/stimulationof neurons in a neuronal tissue, and iii) on-chip CMOS interface circuitry for high performanceelectronics includingamplifications and filtering of recorded neural signals, and data/power wireless transmission system. From these achievements,theproposed devicecould become apowerful technique to assist inunderstanding nervous systems and offerneural recording/stimulation and drug delivery in medical applications.
• Development and Applications of Multifunctional Integrated Microsensors for Advanced Medical Applications

  Date (from‐to) : 2012
• Development of filterless spectral image sensors for bio-chip applications

  Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research

  Date (from‐to) : 2006 -2008 

  Author : KAZUAKI Sawada

   

  光学的フィルタを必要とせず, CMOSプロセスにより製作できるフィルタレススペクトルイメージセンサを製作し, バイオチップへの応用をおこなった. フィルタレススペクトルの分解能を向上させるためにデバイス構造の最適化を行った結果, バイオチップで広く用いられているFITCを63nMまで検出でき, さらにDNAのハイブリダイゼーションを16nMまで検出できることを確かめた.
• 柔軟性と高分解能を両立する多機能集積型シリコン触覚イメージセンサ

  日本学術振興会：科学研究費助成事業

  Date (from‐to) : 2005 -2007 

  Author : 高尾 英邦

   

  1.シリコン触覚センサにおける素子実装技術の開発 実際の使用環境下においては,触覚センサの検出表面が対象物表面に最初に接触する必要があり,チップから取り出すリード配線も邪魔になってはならない。本年度においては,接触面となるLSI裏面が最前面となる新しい触覚センサのパッケージ構造を設計し,それをPCB作製装置によって製作した。新規のパッケージ構造により,ロボットフィンガへの実装を想定した測定実験を行うことができるようになった。その結果,高い空間分解能と検出感度を有しながらも,実際の触動作実験に耐えるロバスト性を両立することのできる新しいシリコン触覚センサの基本構造を完成することができた。 2.能動知覚(アクティブセンシング)特性の評価 触覚情報は空間内で局在的なものであり,三次元物体の表面形状を知覚するには,ロボットハンドやフィンガの移動と組み合わせた能動知覚が重要となる。本年度に開発した新しい素子実装方法を用いることで,能動触動作による物体表面の三次元計測を行なうことが可能となった。実際に,開発した触覚センサを用いて,アルミニウム板上の点字を直接接触しながら,正確にその三次元表面形状を読み取る実験に初めて成功することができた。従来からある点字凹凸の時間波形検知ではなく,本センサにおいては,二次元センサアレイによる点字表面形状の3次元画像化ができたことで,ヒ卜の指先機能を目指した触覚センサの機能・性能を大幅に向上させることに成功したといえる。
• Three-dimensional epitaxial silicon microprobe array integrated on highly functional smart sensing chip

  Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research

  Date (from‐to) : 2005 -2007 

  Author : ISHIDA Makoto; SAWADA Kazuaki; TAKAO Hidekuni; KAWASHIMA Takahiro

   

  Three-dimensional silicon microprobes are integrated with MOSFET circuits for use in electrical neural interface applications with microelectronics. We have proposed a vapor-liquid-solid(VLS) method to realize microprobes after the fabrication of on-chip MOSFETs using Si(111) substrate. We investigated the characteristics of the on-chip MOSFETs fabricated on Si(111) substrate. Even though the increased interface state density in the Si(111) MOS system causes low-performance of the MOFET, we have improved the electrical characteristics of the MOSFETs on Si(111) using subsequent processes of fluorine implantation and long-time Hydrogen annealing, that exhibits comparable electrical characteristics of MOSFETs to that on Si (100)substrate. In-situ doping method during the VLS growth is one possibility to realize doped-silicon probes by low-temperature process with less than 700℃. We used PH_3 or B_2H_6 mixed with silicon gas source of Si_2H_6, in order to realize n- or p-type of silicon probes, respectively. Both n- and p-types of silicon probe grown by the in-situ doping process showed low electrical resistance characteristics. Although the above VLS growth method provides probe arrays with a same probe length due to same parameters of the VLS growth, individually controlled length of probe in a same array was still problematic. To realize the different lengths of probes, we also demonstrated a repeated selective VLS growth of silicon microprobes using the catalysis of gold remaining at the tip of a preliminary VLS-grown microprobe, resulting in different probe lengths. Additionally, we have realized the integration of silicon dioxide microtube arrays and the silicon micoroprobe arrays with MOSFETs, for use in simultaneous electrical neural recordings and drug delivery into local neuronal tissue, and this proposed device could be an efficient electrical/chemical neural interface for use in numerous neuroscience applications.
• Super Highly Sensitive Non visible Imaging Devices Using Vacuum Nano Technology

  Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research

  Date (from‐to) : 2003 -2005 

  Author : SAWADA Kazuaki; ISHIDA Makoto; TAKAO Hidekuni

   

  The porous of this project was realization of a visible photocathode with high sensitivity, and infrared photocathode which can detect above 2 micron wavelength. A new type photodetector called "photosensitive floating field emitter, PFFE" has been proposed. The PFFE was combined the n-type cone-shaped triode field emitter with Si p-n photodiode area. The device was fabricated on a thinned silicon substrate to irradiate from the backside. A p-n photodiode was constructed in a field emitter, and the n+ region was separated by p+ regions to detect two- dimensional light distributions. The quantum efficiency reached to 70%. The efficiency will increase to provide non refractive film on the surface. An infrared light sensor based on principle of a field emission from Pb(Zr,Ti)O3 (PZT) thin plate has been studied. The sensitivity is able to be improved to perform a surface polish, and the emission efficiency of polished emission plane increased to twice than that of the unpolished emission plane. On a low infrared light irradiation condition, a noise level of emission current was very large. To use a Micro-Channel-Plate (MCP) device, the amplification of the emission electrons was carried out. The emission electrons could be multiplied 40 times, the emission electron was clearly observed under low irradiation conditions. The electron emission type infrared light sensor is also useful to detect an infrared light on low irradiation condition.
• 600℃の高温と強いγ線照射に耐える流体式情報処理集積回路の研究

  日本学術振興会：科学研究費助成事業

  Date (from‐to) : 2002 -2004 

  Author : 高尾 英邦

   

  人類が近づくことのできない過酷な宇宙空間や原子炉内外における作業機械を将来開発するならば、500℃以上の超高温や強烈なγ線など、非常に厳しい環境下で動作する情報処理回路が必要である。本研究は、電子の代わりに流体を信号伝達媒体とし、電気-流体間の相似性を利用した集積回路をマイクロマシン技術で形成して、極限環境おける情報処理を可能とするものである。最終年度となるH16年度は、流体式集積回路の大規模化設計に向けた適用技術と、耐環境応用に重点を置いて研究を実施した。 1.流体式集積回路の大規模化適用設計技術 これまで、要素的な流体式集積回路の実現と動作特性の解明を行うべく、マイクロバルブ単体における小信号等価回路モデルの構築、動作特性の解明を行ってきた。多数のマイクロバルブを集積化する大規模流体集積回路の形成にあたっては、マイクロバルブのみならず、それらを相互に接続するマイクロ流路に関係する寄生パラメータのモデル化が重要となる。本研究では、回路配線にあたる微小流路を抵抗と容量でモデル化し、寄生素子の影響を踏まえた回路レベルの動作解析を行なった。RC遅延モデルで解析した回路特性は実測結果と良い一致を示し、大規模回路の設計で重要な信号伝搬遅延に関する基本的な解析手法を見いだすことに成功した。 2.流体式集積回路の耐環境応用 流体式集積回路は、過酷な環境下において高い特性安定性が期待される。耐環境用途において代表的技術であるSOI-CMOSとの放射線耐性を比較し、流体式集積回路の可能性を検証した。ドーズ量10^<15>cm^<-2>の放射線を照射したSOI-MOSFETにおいては、OFFリーク電流が2桁以上増加し、スイッチング特性が大幅に劣化した。一方で、シリコンの機械特性を利用するマイクロバルブはその影響を殆ど受けず、これまでに確立した技術を用いて高い耐環境性を有する情報処理回路を実現できる可能性が見いだされた。 以上の結果より、大規模化を可能とする流体回路の実現に関する基本技術の実証実験を行うことができた。また、本技術を用いた耐環境情報処理集積回路の実現にむけて、従来技術であるSOI-CMOSとの比較を行うことができた。従来にない高い耐環境性を有する画期的集積回路技術の実現可能性を見いだした。
• SMART MICRO CHIP BY SELECTIVE GROWN Si-MICROPROBE ELECTRODE ARRAY ON INTEGRATED CIRCUIT

  Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research

  Date (from‐to) : 2002 -2004 

  Author : ISHIDA Makoto; SAWADA Kazuaki; TAKAO Hidekuni

   

  Study of nervous system by highly complex structures is a key problem in modern neuroscience. Understanding of nervous systems involves analysis of the great number of neurons in the tissue. Here we proposed a new electrode device, which is a high-density penetrating silicon (Si) microprobe electrode array, each with diameter similar to neuron, by selective Si growth using catalytic-gold (Au) and disilane (Si_2H_6) gas source. Diameter, position, and length of the Si probes were controlled. The diameter and density were reduced by 1/10, respectively, compared with previous microelectrodes. Low conductance of the probes was realized, and the mechanical strength of the probe was enough to withstand the neural penetration. In addition, the Si microprobes were fabricated on integrated circuits (IC), improving the performance of the electrode device. We also show the first neural recording demonstrated with a retina of carp (Cyrpinus carpio). Consequently, the Si probes recorded neural signals in the retina. In neuroscience, the Si microprobe array chip becomes an effective technique to provide accurate information from the neurons and allow understanding the mechanism of nervous system.
• CMOS/MEMS技術による機能集積型スマート触覚イメージセンサ

  科学研究費補助金

  Date (from‐to) : 2002
• 単結晶シリコン選択成長による生体電位計測用スマート極微細多電極チップ形成の研究

  日本学術振興会：科学研究費助成事業

  Date (from‐to) : 2000 -2001 

  Author : 石田 誠; 高尾 英邦

   

  本研究では、選択VLS(Vapor-Liquid-Solid)成長技術を用いた挿入型Siプローブ電極と制御回路を集積化したスマート神経電位測定チップを提案し、その実現に必要な基礎技術を確立した。 平成12年度 脳の皮質から神経細胞までの距離は数ミリメートル程度あり、十分に長いSiプローブの成長が課題であった。実験開始当初、2時間で10μm程度の長さのプローブが成長したが、より高い成長圧力に対応した装置構成に変更することで、従来の約10倍の成長速度を得られた。また、成長温度の低温化に関して、最低500℃でのプローブ成長を確認した。よって、集積回路との一体化をより低温・短時間で行うことで、回路へのダメージが少ない成長技術を確立できたと言える。また、VLS成長時には成長の核としてAuドットを用いるが、デバイス特性変動などの悪影響を引き起こす懸念があった。そこでVLS成長時のAu拡散によるMOSFET特性への影響を調査した結果、デバイスへの悪影響は全く無視できる程度と確認された。よってプローブの最適形成条件、一体化に適したMOSFET製作工程を確立することができたといえる。 平成13年度 シリコン電極の基礎的電気的特性(絶縁性、抵抗)と成長条件、不純物ドーピング条件との関係を把握し、設計、試作条件を完成させるべく、リンの拡散炉で不純物拡散を行った。1150℃における液体拡散源を用いたリン拡散工程によって、プローブの抵抗率を4桁以上低減できることを確認することができた。抵抗値としては100Ω以下のものが得られており、生体信号を検出するプローブとしては十分低抵抗のものが実現できる見通しを得た。VLS成長によるCMOSの信頼性テストとして、試作したMOSスイッチ回路とワイヤーを、繰り返しパルス信号印加・計測装置を用いて信号測定を行い、トランジスタとワイヤーの劣化を評価した。その結果、繰り返しパルス印加によるワイヤー特性の劣化は見られず、金ドーピングされたシリコンワイヤーの電気的な不安定性については問題ないとの結論を得た。
• 微小流体デバイスと新機能集積回路の実現

  科学研究費補助金
• 耐環境型インテリジェントシリコンセンサに関する研究

  科学研究費補助金
• Integration/Design Technologies on CMOS/MEMS Microsystems
• Silicon MEMS Integrated Tactile Image Sensors
• Micromachines and Systems with Integrated CMOS LSI.
• Integrated Micro Fluidic Devices and Systems
• Study on Integrated Three-Axis Accelerometers
• 集積化微細構造デバイス技術による医用マイクロマシンの研究開発
• Research and Development of Medical Microsystem Devices with Integrated Micro-Nano Structures

Committee Membership

• 2024/06 - Today   The Institute of Electrical Engineers of Japan   President / Shikoku Branch Chairman
• 2024/04 - Today   The Japan Society of Applied Physics   The Study Group of the Integrated MEMS Chairman
• 2009   - JSAP Integrated MEMS Technology Committee
• 2009   - JSME IIP Division Publicity Committee Vice-Chairman
• 2008   - JSME IIP Division Steering Committee
• 2004   - IEICE Committee on ICD
• The Institute of Electrical Engineers of Japan   Member   The Institute of Electrical Engineers of Japan
• THe Japan Society of Mechanical Engineers   正員   THe Japan Society of Mechanical Engineers
• etc.

Other link

researchmap

https://researchmap.jp/read0057664